Patent application number | Description | Published |
20080315188 | Apparatus and method for depositing thin film - In a thin film depositing apparatus, a first reaction gas, a second reaction gas, and a non-volatile gas are supplied to a reaction chamber in order to form a protective layer, in which an organic layer and an inorganic layer are alternately stacked, on a process substrate. The first reaction gas is supplied to the reaction chamber only while the inorganic layer is formed on the process substrate, and the second reaction gas and the non-volatile gas are supplied to the reaction chamber through while the inorganic and organic layers are formed on the process substrate. Thus, the discontinuous surfaces may be prevented from being formed between the organic layer and the inorganic layer, thereby preventing the peeling of the organic and inorganic layers and increasing light transmittance. | 12-25-2008 |
20090133840 | INDUCTIVELY COUPLED PLASMA APPARATUS - A inductively coupled plasma apparatus includes reaction chamber in which a substrate is loaded, and a double comb type antenna structure including first linear antennas and second linear antennas respectively arranged horizontally to pass through the reaction chamber inside the reaction chamber. The first and second linear antenna are alternately aligned each other. First ends the first linear antennas are protruded out of the reaction chamber and coupled to each other so as to be coupled to a first induced RF power, and first ends of the second linear antennas are protruded out of the reaction chamber in opposition to the first ends of the first linear antennas and coupled to each other so as to be coupled to a second induced RF power. Plasma uniformity is improved and superior plasma uniformity is maintained by adjusting a distance between antennas according to a size of the substrate. | 05-28-2009 |
20090173445 | INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS HAVING INTERNAL LINEAR ANTENNA FOR LARGE ARE PROCESSING - An inductively coupled plasma processing apparatus for a large area processing includes a reaction chamber and a bending type antenna structure. The bending type antenna structure includes bending type linear antennas. Each of the bending type linear antennas has a first end, a second end and a bended portion. The bending type linear antennas are arranged horizontally in parallel with the substrate to pass through the reaction chamber inside the reaction chamber. The bending type linear antennas are spaced apart from each other. A bended portion of a bending type linear antenna is protruded out of the reaction chamber, a first end of each of the bending type linear antennas is protruded out of the reaction chamber and is coupled to an RF power, and a second end of each of the bending type linear antennas is protruded out of the reaction chamber and is coupled to a ground. | 07-09-2009 |
20090203221 | APPARATUS AND METHOD FOR INCORPORATING COMPOSITION INTO SUBSTRATE USING NEUTRAL BEAMS - An apparatus and method for incorporating a composition into a substrate using neutral beams are provided to repeatedly process an oxide layer using the neutral beams having low energy to minimize electrical damage to the oxide layer and improve characteristics of the oxide layer. The apparatus is mounted in a plasma generating chamber, and includes: an ion beam generating gas inlet, which injects a gas for generating ion beams; an ion source, which generates the ion beams having a polarity from the gas introduced through the ion beam generating gas inlet; a grid assembly, which is installed on one end of the ion source; a reflector, which is aligned with the grid assembly and converts the ion beams to the neutral beams; and a stage, on which the substrate is placed on a traveling path of the neutral beams. Formation of the oxide layer and application of the neutral beams are repeatedly performed on the substrate so as to improve the characteristics of the oxide layer. | 08-13-2009 |
20090203226 | NEUTRAL BEAM-ASSISTED ATOMIC LAYER CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF PROCESSING SUBSTRATE USING THE SAME - A neutral beam-assisted atomic layer chemical vapor deposition (ALCVD) apparatus is provided for uniformly depositing an oxide layer filling a planarization layer or a trench to increase uniformity and density of the oxide layer using neutral beams generated by a neutral beam generator without a seam or void occurring in an atomic layer deposition (ALD) or ALD-like chemical vapor deposition (CVD) process, thereby solving problems on the void or seam and low density occurring when a high-density planarization layer or a shallow trench having a width of 65 nm or less is formed, and improving a next generation oxide layer isolation process. The neutral beam-assisted ALCVD apparatus includes: an ALCVD apparatus, which deposits an oxide layer in order to form a pattern in a semiconductor substrate; and a neutral beam generator, which converts ion beams to neutral beams in order to remove a seam or void in the oxide layer deposited between the patterns, and applies the neutral beams to the oxide layer deposited to form the pattern. | 08-13-2009 |
20110162581 | ATOMIC LAYER DEPOSITION APPARATUS USING NEUTRAL BEAM AND METHOD OF DEPOSITING ATOMIC LAYER USING THE SAME - Disclosed are an atomic layer deposition apparatus using a neutral beam and a method of depositing an atomic layer using the apparatus, capable of converting an ion beam into a neutral beam and radiating it onto a substrate to be treated. The method uses an apparatus for supplying a first reaction gas containing a material that cannot be chemisorbed onto a substrate to be treated into a reaction chamber in which the substrate is loaded, and forming a first reactant adsorption layer containing a material that cannot be chemisorbed onto the substrate; and radiating a neutral beam generated by the second reaction gas onto the substrate on which the first reactant adsorption layer is formed, and removing a material not chemisorbed onto the substrate from the first reactant adsorption layer to form a second reactant adsorption layer. It is possible to perform a process without damage due to charging with the apparatus for depositing an atomic layer using a neutral beam and the method of depositing an atomic layer using the apparatus. | 07-07-2011 |
20110192820 | ATOMIC LAYER ETCHING APPARATUS AND ETCHING METHOD USING THE SAME - An atomic layer etching apparatus using reactive radicals and neutral beams and an etching method using the same are provided. The atomic layer etching apparatus includes a reaction chamber including a stage on which a substrate to be etched is seated, a plasma generator including a plasma chamber configured to supply reactive radicals and neutral beams into the reaction chamber and receive a source gas to generate plasma, an inductive coil configured to surround the exterior of the plasma chamber to generate an electric field, a grid assembly disposed at a lower part of the plasma chamber and including first, second and third grids for extracting ion beams, and a reflective body disposed under the grid assembly and configured to supply electrons to the ion beams to convert the ion beams into neutral beams, a shutter installed between the plasma generator and the reactive chamber and configured to adjust supply of the neutral beams into the reaction chamber, a purge gas supply part configured to supply a purge gas into the reaction chamber, and a controller configured to control supply of the source gas, an etching gas and the purge gas, and opening/closing of the shutter. | 08-11-2011 |
20120129347 | Apparatus and Method For Incorporating Composition Into Substrate Using Neutral Beams - An apparatus and method for processing a surface of a substrate using neutral beams are provided to repeatedly process an oxide layer using the neutral beams having low energy to minimize electrical damage to the oxide layer and improve characteristics of the oxide layer. The apparatus is mounted in a plasma generating chamber, and includes: an ion beam generating gas inlet, which injects a gas for generating ion beams; an ion source, which generates the ion beams having a polarity from the gas introduced through the ion beam generating gas inlet; a grid assembly, which is installed on one end of the ion source; a reflector, which is aligned with the grid assembly and converts the ion beams to the neutral beams; and a stage, on which the substrate is placed on a traveling path of the neutral beams. | 05-24-2012 |
20140206192 | METHOD FOR ETCHING ATOMIC LAYER OF GRAPHINE - This present disclosure relates to an atomic layer etching method for graphene, including adsorbing reactive radicals onto a surface of the graphene and irradiating an energy source to the graphene on which the reactive radicals are adsorbed. | 07-24-2014 |
Patent application number | Description | Published |
20100328290 | LIQUID CRYSTAL DISPLAY AND METHOD OF MANUFACTURING THE SAME - A liquid crystal display includes a first substrate including pixels, each having a transmissive area and a reflective area, a second substrate, and a liquid crystal layer disposed between the first and second substrates. Each of the pixels includes first and second thin film transistors which output a data signal in response to a first gate signal, a transmissive pixel electrode disposed in the transmissive area and electrically connected to the first thin film transistor to charge a first pixel voltage based on the data signal, a reflective pixel electrode disposed in the reflective area and electrically connected to the second thin film transistor to charge a second pixel voltage based on the data signal, and a voltage controller which controls the first pixel voltage and the second pixel voltage in response to a second gate signal, which is generated after the first gate signal. | 12-30-2010 |
20110069267 | DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME - Disclosed are a display apparatus and a method of manufacturing the same. The liquid crystal display includes a first substrate and a pixel electrode formed on the first substrate and having a plurality of branches. A plurality of alignment sections are interposed among the branches. An auxiliary liquid crystal layer having discotic liquid crystals is formed on the pixel electrode and the alignment sections. A main liquid crystal layer having a vertical alignment mode is formed on the auxiliary liquid crystal layer. A common electrode is formed on the main liquid crystal layer to apply an electric field to the main liquid crystal layer together with the pixel electrode. A second substrate is formed on the common electrode. | 03-24-2011 |
20120301983 | METHOD OF FORMING ALIGNMENT LAYER AND FABRICATION METHOD OF LIQUID CRYSTAL DISPLAY USING THE SAME - An alignment layer is formed by forming an alignment solution on a base substrate, baking the alignment solution to form an alignment layer, and irradiating light having a wavelength of about 280 nanometers to about 340 nanometers to the alignment layer, thereby aligning the alignment layer. A liquid crystal display is manufactured using the method of forming the alignment layer. | 11-29-2012 |
20130065475 | DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME - A method of manufacturing a display apparatus. The liquid crystal display includes a first substrate and a pixel electrode formed on the first substrate and having a plurality of branches. A plurality of alignment sections are interposed among the branches. An auxiliary liquid crystal layer having discotic liquid crystals is formed on the pixel electrode and the alignment sections. A main liquid crystal layer having a vertical alignment mode is formed on the auxiliary liquid crystal layer. A common electrode is formed on the main liquid crystal layer to apply an electric field to the main liquid crystal layer together with the pixel electrode. A second substrate is formed on the common electrode. | 03-14-2013 |
20140036193 | LIQUID CRYSTAL DISPLAY AND METHOD OF MANUFACTURING THE SAME - A liquid crystal display includes a first substrate including pixels, each having a transmissive area and a reflective area, a second substrate, and a liquid crystal layer disposed between the first and second substrates. Each of the pixels includes first and second thin film transistors which output a data signal in response to a first gate signal, a transmissive pixel electrode disposed in the transmissive area and electrically connected to the first thin film transistor to charge a first pixel voltage based on the data signal, a reflective pixel electrode disposed in the reflective area and electrically connected to the second thin film transistor to charge a second pixel voltage based on the data signal, and a voltage controller which controls the first pixel voltage and the second pixel voltage in response to a second gate signal, which is generated after the first gate signal. | 02-06-2014 |
Patent application number | Description | Published |
20120105785 | LIQUID CRYSTAL DISPLAY - A liquid crystal display includes: a first substrate, a second substrate facing the first substrate, a liquid crystal layer interposed between the first substrate and the second substrate and including liquid crystal molecules, a gate line positioned on the first substrate, a data line positioned on the first substrate and crossing the gate line, a first thin film transistor and a second thin film transistor connected to the gate line and the data line, a third thin film transistor connected to the gate line and the second thin film transistor, a reference voltage line connected to the third thin film transistor, and a pixel electrode including a first subpixel electrode connected to the first thin film transistor and a second subpixel electrode connected to the second thin film transistor. | 05-03-2012 |
20120120334 | LIQUID CRYSTAL DISPLAY AND MANUFACTURING METHOD THEREOF - A liquid crystal display may include a first substrate, a second substrate facing the first substrate, a liquid crystal layer comprising liquid crystal molecules that are interposed between the first substrate and the second substrate, a first electrode disposed on the first substrate, an insulating layer disposed on the first electrode, a second electrode disposed on the insulating layer, a third electrode disposed on the second substrate, and an alignment layer disposed on any one of the second electrode and the third electrode. The second electrode comprises a fine slit structure, and at least one of the liquid crystal layer and the alignment layer comprises a sub-alignment substance. | 05-17-2012 |
20120162559 | LIQUID CRYSTAL DISPLAY AND METHOD OF MANUFACTURING THE SAME - A liquid crystal display includes a first substrate including a pixel area, a second substrate facing the first substrate, a liquid crystal layer interposed between the first substrate and the second substrate, and including liquid crystal molecules, a first electrode, a second electrode including a minute slit pattern, disposed on the first substrate and an insulating layer disposed between the first electrode and the second electrode, and a third electrode disposed on the second substrate. The pixel area includes a first region having a double-electrode structure wherein the first electrode and the second electrode overlap, and a second region having a single electrode structure including the second electrode. | 06-28-2012 |
20120169985 | LIQUID CRYSTAL DISPLAY AND MANUFACTURING METHOD THEREOF - A liquid crystal display, including: a first substrate and a second substrate; a liquid crystal layer; a first data line disposed on the first substrate; a pixel electrode disposed on the first substrate; and a common electrode disposed on the first substrate and overlapping at least a portion of the pixel electrode and the first data line. One of the pixel electrode and the common electrode includes a plurality of branch electrodes spaced apart from each other and the other of has an at least approximately planar shape that is substantially parallel to a surface of at least one of the first substrate and the second substrate. The display can also include a passivation layer having a dielectric constant of about 3.5 or less, and including a first portion disposed between the common electrode and the first data line. | 07-05-2012 |
20120196054 | LIQUID CRYSTAL DISPLAY AND MANUFACTURING METHOD THEREOF - A liquid crystal display including: a first substrate and a second substrate facing each other; an alignment layer disposed on one of the first substrate and the second substrate and including a vertical photo-alignment material which includes a first vertical functional group and a photo-reactive group, and a major alignment material which does not include the photo-reactive group; and a liquid crystal layer disposed between the first substrate and the second substrate, wherein a ratio of a molar concentration of the vertical photo-alignment material to the molar concentration of the major alignment material increases in a direction towards a surface of the alignment layer adjacent to the liquid crystal layer. | 08-02-2012 |
20120308936 | EXPOSURE APPARATUS FOR PHOTOALIGNMENT PROCESS AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY - An exposure apparatus for a photoalignment process includes; a first photomask including a plurality of transmission parts; and a second photomask including a plurality of transmission parts, where the first photomask and the second photomask partially overlap each other such that each of the first photomask and the second photomask includes an overlapping region and a non-overlapping region, the overlapping region of at least one of the first photomask and the overlapping region of the second photomask includes at least two subregions, and shapes or arrangements of the transmission parts in the at least two subregions are different from each other. | 12-06-2012 |
20130003033 | EXPOSURE DEVICE, PHOTO-MASK, AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY - The present invention is directed to an exposure apparatus and photo-mask, and method for manufacturing liquid crystal display using the same. An exposure apparatus according to an exemplary embodiment of the present invention provides an exposure apparatus which includes: a first photo-mask comprising a plurality of transmission parts; and a second photo-mask comprising a plurality of transmission parts, the first photo-mask and the second photo-mask comprising an overlapping region where the first photo-mask and the second photo-mask are partially overlapped, wherein at least one transmission part included in at least one of the first photo-mask and the second photo-mask in the overlapping region comprises a semi-transmission section, and a transmittance of the semi-transmission section is greater than or equal to 0% and less than 100%. | 01-03-2013 |
20130037813 | CRYSTALLIZATION METHOD OF THIN FILM TRANSISTOR, THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD FOR THIN FILM TRANSISTOR ARRAY PANEL - Exemplary embodiments of the invention disclose a method of manufacturing a thin film transistor array panel having reduced overall processing time and providing a uniform crystallization. Exemplary embodiments of the invention also disclose a crystallization method of a thin film transistor, including forming on a substrate a semiconductor layer including a first pixel area, a second pixel area, and a third pixel area. The crystallization method includes crystallizing a portion of the semiconductor layer corresponding to a channel region of a thin film transistor using a micro lens array. | 02-14-2013 |
20130038621 | DISPLAY DEVICE AND DRIVING METHOD THEREOF - The present invention provides a display device with reduced power consumption and that reduces changes in luminance, and perceptibility of flicker, and a driving method thereof. A display device according to an exemplary embodiment comprises: a display panel configured to display a still image and a motion picture; a signal controller configured to control signals for driving the display panel; and a graphics processing unit configured to transmit input image data to the signal controller, wherein the signal controller comprises a frame memory configured to store the input image data, and the display panel is driven at a first frequency when the motion picture is displayed and the display panel is driven at a second frequency that is lower than the first frequency when the still image is displayed. | 02-14-2013 |
20130050630 | DISPLAY PANEL AND METHOD OF MANUFACTURING THE SAME - Air is sprayed on the first polymer film along a first negative direction in the sub pixel areas of an n-th row of a unit pixel area, and air is sprayed on the first polymer film along a first positive direction in the sub pixel areas of an (n+1)-th row of the unit pixel area to form a first alignment layer. Air is sprayed on the second polymer film along a second negative direction crossing the first negative direction in the sub pixel areas of an n-th column of the unit pixel area, and air is sprayed on the second polymer film along a second positive direction crossing the first positive direction in the sub pixel areas of an (n+1)-th column of the unit pixel area to form a second alignment layer. | 02-28-2013 |
20130077008 | LIQUID CRYSTAL DISPLAY - A liquid crystal display in which the common voltage line is disposed directly on or directly under the common electrode directly contacts the common electrode such that a signal delay of the common voltage line may be reduced and simultaneously a reduction in the aperture ratio of the liquid crystal display may be prevented. | 03-28-2013 |
20140104531 | LIQUID CRYSTAL DISPLAY AND MANUFACTURING METHOD THEREOF - A liquid crystal display, including: a first substrate and a second substrate; a liquid crystal layer; a first data line disposed on the first substrate; a pixel electrode disposed on the first substrate; and a common electrode disposed on the first substrate and overlapping at least a portion of the pixel electrode and the first data line. One of the pixel electrode and the common electrode includes a plurality of branch electrodes spaced apart from each other and the other of has an at least approximately planar shape that is substantially parallel to a surface of at least one of the first substrate and the second substrate. The display can also include a passivation layer having a dielectric constant of about 3.5 or less, and including a first portion disposed between the common electrode and the first data line. | 04-17-2014 |
20140264350 | CRYSTALLIZATION METHOD OF THIN FILM TRANSISTOR, THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD FOR THIN FILM TRANSISTOR ARRAY PANEL - Exemplary embodiments of the invention disclose a method of manufacturing a thin film transistor array panel having reduced overall processing time and providing a uniform crystallization. Exemplary embodiments of the invention also disclose a crystallization method of a thin film transistor, including forming on a substrate a semiconductor layer including a first pixel area, a second pixel area, and a third pixel area. The crystallization method includes crystallizing a portion of the semiconductor layer corresponding to a channel region of a thin film transistor using a micro lens array. | 09-18-2014 |
20150118806 | LIQUID CRYSTAL DISPLAY AND MANUFACTURING METHOD THEREOF - A liquid crystal display may include a first substrate, a second substrate facing the first substrate, a liquid crystal layer comprising liquid crystal molecules that are interposed between the first substrate and the second substrate, a first electrode disposed on the first substrate, an insulating layer disposed on the first electrode, a second electrode disposed on the insulating layer, a third electrode disposed on the second substrate, and an alignment layer disposed on any one of the second electrode and the third electrode. The second electrode comprises a fine slit structure, and at least one of the liquid crystal layer and the alignment layer comprises a sub-alignment substance. | 04-30-2015 |
Patent application number | Description | Published |
20140182287 | TURBO-CHARGER SYSTEM - A turbocharger system includes a compressor that is connected with a turbine operated by an exhaust gas by a rotary shaft and compresses and supplies external gas to a combustion chamber of an engine, an intercooler and a throttle valve disposed in an intake line connecting the compressor with the combustion chamber of the engine, a branch line connecting an intake line between the compressor and the intercooler with an intake line between the intercooler and the throttle valve, a shutoff valve disposed in the branch line to selectively open/close the branch line, and an engine control unit controlling the operation of the shutoff valve | 07-03-2014 |
20140184006 | ROTOR ASSEMBLING METHOD FOR ELECTRIC TURBO-CHARGER AND ROTOR ASSEMBLED BY THE SAME - A rotor assembling method for a turbo-charger may include washing and preparing components of a rotor having a connector, a permanent magnet, end caps, a retention ring, and a center pipe, inserting the connector into the permanent magnet, thermally inserting one or more end caps into the connector by cooling the connector and heating the one or more end caps under a first high-temperature condition for a first predetermined time to form a permanent magnet assembly, thermally inserting the permanent magnet assembly into the retention ring by cooling the permanent magnet assembly and heating the retention ring under a second high-temperature condition for a second predetermined time to form a rotor assembly, thermally inserting the center pipe into the rotor assembly by heating the rotor assembly under a third high-temperature condition for a third predetermined time to form a rotor assembling body, and post processing the rotor assembling body. | 07-03-2014 |
20140186159 | BEARING UNIT OF TURBO-CHARGER - A bearing unit of a turbocharger may be disposed on an inner side of a space in a center housing and carry axial load of a rotary shaft connecting a turbine wheel, a compressor wheel, and an electric motor. The bearing unit may include a bearing body fastened to a side of the center housing and has a through-hole substantially at a center of the bearing body for fitting the rotary shaft fitted, and a coupling disposed on the through-hole and the rotary shaft, having a stepped portion in which the bearing body is inserted, and forming an oil chamber with the bearing body. | 07-03-2014 |