Patent application number | Description | Published |
20140015020 | METHOD FOR FORMING N-SHAPED BOTTOM STRESS LINER - Semiconductor devices with n-shaped bottom stress liners are formed. Embodiments include forming a protuberance on a substrate, conformally forming a sacrificial material layer over the protuberance, forming a gate stack above the sacrificial material layer on a silicon layer, removing the sacrificial material layer to form a tunnel, and forming a stress liner in the tunnel conforming to the shape of the protuberance. Embodiments further include forming a silicon layer over the sacrificial material layer and lining the tunnel with a passivation layer prior to forming the stress liner. | 01-16-2014 |
20150021702 | SHALLOW TRENCH ISOLATION - A semiconductor structure with an improved shallow trench isolation (STI) region and method of fabrication is disclosed. The STI region comprises a lower portion filled with oxide and an upper portion comprising a high Young's modulus (HYM) liner disposed on the lower portion and trench sidewalls and filled with oxide. The HYM liner is disposed adjacent to source-drain regions, and serves to reduce stress relaxation within the shallow trench isolation (STI) oxide, which has a relatively low Young's modulus and is soft. Hence, the HYM liner serves to increase the desired stress imparted by the embedded stressor source-drain regions, which enhances carrier mobility, thus increasing semiconductor performance. | 01-22-2015 |
20150037945 | EPITAXIALLY FORMING A SET OF FINS IN A SEMICONDUCTOR DEVICE - Approaches for enabling epitaxial growth of silicon fins in a device (e.g., a fin field effect transistor device (FinFET)) are provided. Specifically, approaches are provided for forming a set of silicon fins for a FinFET device, the FinFET device comprising: a set of gate structures formed over a substrate, each of the set of gate structures including a capping layer and a set of spacers; an oxide fill formed over the set of gate structures; a set of openings formed in the device by removing the capping layer and the set of spacers from one or more of the set of gate structures; a silicon material epitaxially grown within the set of openings in the device and then planarized; and wherein the oxide fill is etched to expose the silicon material and form the set of fins. | 02-05-2015 |
20150062996 | EMBEDDED SELECTOR-LESS ONE-TIME PROGRAMMABLE NON-VOLATILE MEMORY - An OTP anti-fuse memory array without additional selectors and a manufacturing method are provided. Embodiments include forming wells of a first polarity in a substrate, forming a bitline of the first polarity in each well, and forming plural metal gates across each bitline, wherein no source/drain regions are formed between the metal gates. | 03-05-2015 |
20150137235 | FINFET SEMICONDUCTOR DEVICE HAVING LOCAL BURIED OXIDE - There is set forth herein in one embodiment a FinFET semiconductor device having a fin extending from a bulk silicon substrate, wherein there is formed wrapped around a portion of the fin a gate, and wherein proximate a channel area of the fin aligned to the gate there is formed a local buried oxide region aligned to the gate. In one embodiment, the local buried oxide region is formed below a channel area of the fin. | 05-21-2015 |
20150137236 | SILICON-ON-INSULATOR FINFET WITH BULK SOURCE AND DRAIN - Embodiments of the invention provide a semiconductor structure including a finFET having an epitaxial semiconductor region in direct physical contact with a plurality of fins, wherein the epitaxial semiconductor region traverses an insulator layer and is in direct physical contact with the semiconductor substrate. The gate of the finFET is disposed over an insulator layer, such as a buried oxide layer. Methods of forming the semiconductor structure are also included. | 05-21-2015 |
20150200251 | MOS TRANSISTOR OPERATED AS OTP CELL WITH GATE DIELECTRIC OPERATING AS AN E-FUSE ELEMENT - A process and device are provided for a high-k gate-dielectric operating as a built-in e-fuse. Embodiments include: providing first and second active regions of a transistor, separated by a gate region of the transistor, on a substrate; forming an interfacial layer on the gate region; minimizing the interfacial layer; forming a high-k gate dielectric layer on the interfacial layer to operate as an e-fuse element, the high-k gate dielectric layer and interfacial layer having a combined breakdown voltage less than three times a circuit operating voltage associated with the transistor; and forming a metal gate on the high-k gate dielectric layer. | 07-16-2015 |
20150200298 | MODIFIED TUNNELING FIELD EFFECT TRANSISTORS AND FABRICATION METHODS - Tunneling field effect transistors and fabrication methods thereof are provided, which include: obtaining a gate structure disposed over a substrate structure; and providing a source region and a drain region within the substrate structure separated by a channel region, the channel region underlying, at least partially, the gate structure, and the providing including: modifying the source region to attain a narrowed source region bandgap; and modifying the drain region to attain a narrowed drain region bandgap, the narrowed source region bandgap and the narrowed drain region bandgap facilitating quantum tunneling of charge carriers from the source region or the drain region to the channel region. Devices including digital modulation circuits with one or more tunneling field effect transistor(s) are also provided. | 07-16-2015 |
20150221770 | EPITAXIALLY FORMING A SET OF FINS IN A SEMICONDUCTOR DEVICE - Approaches for enabling epitaxial growth of silicon fins in a device (e.g., a fin field effect transistor device (FinFET)) are provided. Specifically, approaches are provided for forming a set of silicon fins for a FinFET device, the FinFET device comprising: a set of gate structures formed over a substrate, each of the set of gate structures including a capping layer and a set of spacers; an oxide fill formed over the set of gate structures; a set of openings formed in the device by removing the capping layer and the set of spacers from one or more of the set of gate structures; a silicon material epitaxially grown within the set of openings in the device and then planarized; and wherein the oxide fill is etched to expose the silicon material and form the set of fins. | 08-06-2015 |
20150287727 | SILICON-ON-INSULATOR FINFET WITH BULK SOURCE AND DRAIN - Embodiments of the invention provide a semiconductor structure including a finFET having an epitaxial semiconductor region in direct physical contact with a plurality of fins, wherein the epitaxial semiconductor region traverses an insulator layer and is in direct physical contact with the semiconductor substrate. The gate of the finFET is disposed over an insulator layer, such as a buried oxide layer. Methods of forming the semiconductor structure are also included. | 10-08-2015 |
20150348830 | SHALLOW TRENCH ISOLATION - A semiconductor structure with an improved shallow trench isolation (STI) region and method of fabrication is disclosed. The STI region comprises a lower portion filled with oxide and an upper portion comprising a high Young's modulus (HYM) liner disposed on the lower portion and trench sidewalls and filled with oxide. The HYM liner is disposed adjacent to source-drain regions, and serves to reduce stress relaxation within the shallow trench isolation (STI) oxide, which has a relatively low Young's modulus and is soft. Hence, the HYM liner serves to increase the desired stress imparted by the embedded stressor source-drain regions, which enhances carrier mobility, thus increasing semiconductor performance. | 12-03-2015 |
20160035723 | MACRO DESIGN OF DEVICE CHARACTERIZATION FOR 14NM AND BEYOND TECHNOLOGIES - The disclosure provides methods and devices for separately determining the channel resistance and the extension resistance of a FinFET. An exemplary embodiment includes forming first and second fins parallel to each other, forming at least one fin portion, connecting the first and second fins, forming a gate perpendicular to the first and second fins, over the at least one fin portion, forming a first source and a first drain over the first fin at opposite sides of the gate, and forming a second source and a second drain over the second fin, separate from the first source and drain, at opposite sides of the gate, wherein each of the first and second sources and first and second drains includes an extension region. | 02-04-2016 |
20160104774 | NON-PLANAR VERTICAL DUAL SOURCE DRIFT METAL-OXIDE SEMICONDUCTOR (VDSMOS) - A non-planar lateral drift MOS device eliminates the need for a field plate extension, which reduces gate width. In one example, two sources and two comparatively small gates in a raised structure allow for two channels and a dual current with mirrored flows, each traveling into and downward through a center region of a connecting well that connects the substrate with the drain areas and shallow wells containing the source areas, the current then traveling in opposite directions within the substrate region of the connecting well toward the two drains. The source and drain areas may be separate raised structures or isolated areas of a continuous raised structure. | 04-14-2016 |
20160111322 | FINFET SEMICONDUCTOR DEVICE HAVING LOCAL BURIED OXIDE - There is set forth herein in one embodiment a FinFET semiconductor device having a fin extending from a bulk silicon substrate, wherein there is formed wrapped around a portion of the fin a gate, and wherein proximate a channel area of the fin aligned to the gate there is formed a local buried oxide region aligned to the gate. In one embodiment, the local buried oxide region is formed below a channel area of the fin. | 04-21-2016 |
Patent application number | Description | Published |
20130005103 | METHODS FOR FABRICATING A FINFET INTEGRATED CIRCUIT ON A BULK SILICON SUBSTRATE - Methods are provided for fabricating a FINFET integrated circuit that includes epitaxially growing a first silicon germanium layer and a second silicon layer overlying a silicon substrate. The second silicon layer is etched to form a silicon fin using the first silicon germanium layer as an etch stop. The first silicon germanium layer underlying the fin is removed to form a void underlying the fin and the void is filled with an insulating material. A gate structure is then formed overlying the fin. | 01-03-2013 |
20130032890 | SELF-ADJUSTING LATCH-UP RESISTANCE FOR CMOS DEVICES - CMOS devices ( | 02-07-2013 |
20130049142 | TRANSISTOR WITH REDUCED PARASITIC CAPACITANCE - Scaled transistors with reduced parasitic capacitance are formed by replacing a high-k dielectric sidewall spacer with a SiO | 02-28-2013 |
20130181260 | METHOD FOR FORMING N-SHAPED BOTTOM STRESS LINER - Semiconductor devices with n-shaped bottom stress liners are formed. Embodiments include forming a protuberance on a substrate, conformally forming a sacrificial material layer over the protuberance, forming a gate stack above the sacrificial material layer on a silicon layer, removing the sacrificial material layer to form a tunnel, and forming a stress liner in the tunnel conforming to the shape of the protuberance. Embodiments further include forming a silicon layer over the sacrificial material layer and lining the tunnel with a passivation layer prior to forming the stress liner. | 07-18-2013 |
20130292745 | FINFET COMPATIBLE PC-BOUNDED ESD DIODE - A semiconductor device is formed having compatibility with FINFET process flow, while having a large enough junction area of to reduce the discharge ESD current density. Embodiments include forming a removable gate over an N− doped fin on a substrate, forming P+ doped SiGe or Si on an anode side of the fin, and forming N+ doped Si on a cathode side of the fin. The area efficiency of the semiconductor device layout is greatly improved, and, thereby, discharge of ESD current density is mitigated. | 11-07-2013 |
20140120708 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES INCLUDING REPLACEMENT METAL GATE PROCESS INCORPORATING A CONDUCTIVE DUMMY GATE LAYER - A method of manufacturing a semiconductor device including a replacement metal gate process incorporating a conductive dummy gate layer (e.g., silicon germanium (SiGe), titanium nitride, etc.) and a related are disclosed. The method includes forming an oxide layer on a substrate; removing a gate portion of the oxide layer from the substrate in a first region of the semiconductor device; forming a conductive dummy gate layer on the semiconductor device in the first region; and forming a gate on the semiconductor device, the gate including a gate conductor disposed in the first region and directly connected to the substrate. | 05-01-2014 |
20140264613 | INTEGRATED CIRCUITS AND METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH ACTIVE AREA PROTECTION - Integrated circuits and methods for fabricating integrated circuits are provided. In an embodiment, a semiconductor substrate includes a shallow trench isolation structure disposed therein. A gate electrode structure overlies semiconductor material of the semiconductor substrate. A first sidewall spacer is formed adjacent to the gate electrode structure, with a first surface of the shallow trench isolation structure exposed and spaced from the first sidewall spacer by a region of the semiconductor material. The first surface of the shallow trench isolation structure is masked with an isolation structure mask. The region of the semiconductor material is free from the isolation structure mask. A recess is etched in the region of the semiconductor material, with the isolation structure mask in place. A semiconductor material is epitaxially grown within the recess to form an epitaxially-grown semiconductor region adjacent to the gate electrode structure. | 09-18-2014 |
20140264633 | FINFET DEVICES HAVING A BODY CONTACT AND METHODS OF FORMING THE SAME - Fin field-effect transistor devices and methods of forming the fin field-effect transistor devices are provided herein. In an embodiment, a fin field-effect transistor device includes a semiconductor substrate that has a fin. A gate electrode structure overlies the fin. Source and drain halo and/or extension regions and epitaxially-grown source regions and drain regions are formed in the fin and are disposed adjacent to the gate electrode structure. A body contact is disposed on a contact surface of the fin, and the body contact is spaced separately from the halo and/or extension regions and the epitaxially-grown source regions and drain regions. | 09-18-2014 |
20140302660 | LOCAL INTERCONNECT TO A PROTECTION DIODE - Embodiments disclosed describe approaches for providing a local interconnection between a protection diode and a gate transistor in an integrated circuit (IC) device. Specifically, described is an IC device comprising: a protection diode formed in a substrate, a replacement metal gate (RMG) transistor formed over the substrate, a first contact formed over the protection diode (and optional trench silicide layer), a second contact formed over the RMG transistor, wherein the first contact extends to connect directly with the second contact, and a top metal layer (M1) formed over the first contact and the second contact. By extending the first contact from the protection diode directly to the gate transistor as a supplemental interconnect, any charges accumulated during formation of the second contact and the set of vias will be discharged by the protection diode. | 10-09-2014 |
20150016174 | INTEGRATED CIRCUITS WITH PROGRAMMABLE ELECTRICAL CONNECTIONS AND METHODS FOR FABRICATING THE SAME - Methods and apparatus are provided for an integrated circuit with a programmable electrical connection. The apparatus includes an inactive area with a memory line passing over the inactive area. The memory line includes a programmable layer. An interlayer dielectric is positioned over the memory line and the inactive area, and an extending member extends through the interlayer dielectric. The extending member is electrically connected to the programmable layer of the memory line at a point above the inactive area. | 01-15-2015 |
20150024557 | SEMICONDUCTOR DEVICE HAVING LOCAL BURIED OXIDE - There is set forth herein a semiconductor device fabricated on a bulk wafer having a local buried oxide region underneath a channel region of a MOSFET. In one embodiment the local buried oxide region can be self-aligned to a gate, and a source/drain region can be formed in a bulk substrate. A local buried oxide region can be formed in a semiconductor device by implantation of oxygen into a bulk region of the semiconductor device followed by annealing. | 01-22-2015 |
20150034941 | INTEGRATED CIRCUITS HAVING FINFET SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME TO RESIST SUB-FIN CURRENT LEAKAGE - Integrated circuits that have a FinFET and methods of fabricating the integrated circuits are provided herein. In an embodiment, a method of fabricating an integrated circuit having a FinFET includes providing a substrate comprising fins. The fins include semiconductor material. A first metal oxide layer is formed over sidewall surfaces of the fins. The first metal oxide layer includes a first metal oxide. The first metal oxide layer is recessed to a depth below a top surface of the fins to form a recessed first metal oxide layer. The top surface and sidewall surfaces of the fins at a top portion of the fins are free from the first metal oxide layer. A gate electrode structure is formed over the top surface and sidewall surfaces of the fins at the top portion of the fins. The recessed first metal oxide layer is recessed beneath the gate electrode structure. | 02-05-2015 |
20160056265 | METHODS OF MAKING A SELF-ALIGNED CHANNEL DRIFT DEVICE - An isolation region is formed in a semiconductor substrate to laterally define and electrically isolate a device region and first and second laterally adjacent well regions are formed in the device region. A gate structure is formed above the device region such that the first well region extends below an entirety of the gate structure and a well region interface formed between the first and second well regions is laterally offset from a drain-side edge of the gate structure. Source and drain regions are formed in the device region such that the source region extends laterally from a source-side edge of the gate structure and across a first portion of the first well region to a first inner edge of the isolation region and the drain region extends laterally from the drain-side edge and across a second portion of the first well region. | 02-25-2016 |
Patent application number | Description | Published |
20130175617 | Semiconductor Device With an Oversized Local Contact as a Faraday Shield - This application is directed to a semiconductor device with an oversized local contact as a Faraday shield, and methods of making such a semiconductor device. One illustrative device disclosed herein includes a transistor comprising a gate electrode and a source region, a source region conductor that is conductively coupled to the source region, a Faraday shield positioned above the source region conductor and the gate electrode and a first portion of a first primary metallization layer for an integrated circuit device positioned above and electrically coupled to the Faraday shield. | 07-11-2013 |
20130224945 | METHODS OF FORMING BULK FINFET DEVICES WITH REPLACEMENT GATES SO AS TO REDUCE PUNCH THROUGH LEAKAGE CURRENTS - One illustrative method disclosed herein includes forming a plurality of spaced-apart trenches in a semiconducting substrate to thereby define a fin structure for the device, forming a local isolation region within each of the trenches, forming a sacrificial gate structure on the fin structure, wherein the sacrificial gate structure comprises at least a sacrificial gate electrode, and forming a layer of insulating material above the fin structure and within the trench above the local isolation region. In this example, the method further includes performing at least one etching process to remove the sacrificial gate structure to thereby define a gate cavity, after removing the sacrificial gate structure, performing at least one etching process to form a recess in the local isolation region, and forming a replacement gate structure that is positioned in the recess in the local isolation region and in the gate cavity. | 08-29-2013 |
20140103420 | ADVANCED FARADAY SHIELD FOR A SEMICONDUCTOR DEVICE - One illustrative device disclosed herein includes a transistor comprising a gate electrode and a drain region formed in a semiconducting substrate, an isolation structure formed in the substrate, wherein the isolation structure is laterally positioned between the gate electrode and the drain region, and a Faraday shield that is positioned laterally between the gate electrode and the drain region and above the isolation structure, wherein the Faraday shield has a long axis that is oriented substantially vertically relative to an upper surface of the substrate. | 04-17-2014 |
20140361365 | SELF-ALIGNED CHANNEL DRIFT DEVICE AND METHODS OF MAKING SUCH A DEVICE - One illustrative device includes a source region and a drain region formed in a substrate, wherein the source/drain regions are doped with a first type of dopant material, a gate structure positioned above the substrate that is laterally positioned between the source region and the drain region and a drain-side well region positioned in the substrate under a portion, but not all, of the entire lateral width of the drain region, wherein the drain-side well region is also doped with the first type of dopant material. The device also includes a source-side well region positioned in the substrate under an entire width of the source region and under a portion, but not all, of the drain region and a part of the extension portion of the drain region is positioned under a portion of the gate structure. | 12-11-2014 |
Patent application number | Description | Published |
20130333574 | QUICK LOADING AND UNLOADING DEVICE OF EXTRACTION MATERIAL BAG - A quick loading and unloading device of extraction material bag has a base, a rotating frame and a cover. The top of the base has a container to accommodate the extraction material bag. The rotating frame is cooperated to the upper of the base by a horizontal shaft and has a clipping joint to clip the material bag; a slideway is disposed besides the clipping joint; and the cover is mounted on the rotating frame, the cover is movably cooperated with the horizontal shaft; the cover has a handle to lift the cover and a lock mechanism to lock the cover to the base; the lock mechanism has a lock bolt to release the lock of the cover to the base when the lock mechanism is lifted by the handle. The cover has a draw bar to lift the rotating frame up when the cover is lifted up. | 12-19-2013 |
20140026760 | AUTOMATIC CARTRIDGE EJECTING UNIT FOR A COFFEE MACHINE - An automatic cartridge ejecting unit for a coffee machine has a housing, a top cover, a bottom cover, a cartridge ejecting member and a return unit. The top cover is rotationally assembled on the housing. The bottom cover, which is slidably assembled on the housing and in transmission connection with the top cover, is disposed with an infusion chamber and a cavity. The cartridge ejecting unit is rotationally assembled on the bottom cover and rotates between the initial position and the open position with the action of the top cover. When the cartridge ejecting unit is in the open position, the coffee cartridge is unloaded and falls into the cavity. | 01-30-2014 |
20140041529 | SELF-CLEANING MILK FROTHING DEVICE - A self-cleaning milk frothing device has a frothing mechanism, a milk-suction conduit and a milk-discharge conduit to discharge the rest milk. The frothing mechanism has a steam conduit to generate negative pressure inside. The milk-suction conduit includes a first flexible tube inserted into the milk, a second flexible tube connected to the frothing mechanism and a three-way pipe connected to the first flexible tube and the second flexible tube. An electromagnetic valve to control one end of the three-way pipe to connect to or separate from the air, and a controller to control the on-off of the electromagnetic valve is further disposed. After frothing the milk, the controller controls the electromagnetic valve, connecting the three-way pipe to the air, the suction air is passing through the second flexible tube and the frothing mechanism and then going out of the milk-discharge conduit. | 02-13-2014 |