Patent application number | Description | Published |
20140264059 | LIGHT IRRADIANCE AND THERMAL MEASUREMENT IN UV AND CVD CHAMBERS - Embodiments of a semiconductor processing chamber described herein include a substrate support, a source of radiant energy opposite the substrate support, a window between the source of radiant energy and the substrate support, a detector sensitive to the radiant energy positioned to detect the radiant energy transmitted by the window, and a detector sensitive to radiation emitted by the substrate positioned to detect radiation emitted by the substrate. The chamber may also include a showerhead. The substrate support may be between the detectors and the window. A second radiant energy source may be included to project energy through the window to a detector. The second radiant energy source may also be located proximate the first radiant energy source and the detectors. | 09-18-2014 |
20150371881 | TEMPERATURE MEASUREMENT IN MULTI-ZONE HEATER - Embodiments of the present disclosure generally provide apparatus and methods for monitoring one or more process parameters, such as temperature of substrate support, at various locations. One embodiment of the present disclosure provides a sensor column for measuring one or more parameters in a processing chamber. The sensor column includes a tip for contacting a chamber component being measured, a protective tube having an inner volume extending from a first end and second end, wherein the tip is attached to the first end of the protective tube and seals the protective tube at the first end, and a sensor disposed near the tip. The inner volume of the protective tube houses connectors of the sensor, and the tip is positioned in the processing chamber through an opening of the processing chamber during operation. | 12-24-2015 |
20160002779 | MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING - A method and apparatus for a heated pedestal is provided. In one embodiment, the heated pedestal includes a body comprising a ceramic material, a plurality of heating elements encapsulated within the body, and one or more grooves formed in a surface of the body adjacent each of the plurality of heating elements, at least one side of the grooves being bounded by a ceramic plate. | 01-07-2016 |
Patent application number | Description | Published |
20120223227 | APPARATUS AND METHODS FOR REAL-TIME THREE-DIMENSIONAL SEM IMAGING AND VIEWING OF SEMICONDUCTOR WAFERS - One embodiment relates to a method of real-time three-dimensional electron beam imaging of a substrate surface. A primary electron beam is scanned over the substrate surface causing electrons to be emitted therefrom. The emitted electrons are simultaneously detection using a plurality of at least two off-axis sensors so as to generate a plurality of image data frames, each image data frame being due to electrons emitted from the substrate surface at a different view angle. The plurality of image data frames are automatically processed to generate a three-dimensional representation of the substrate surface. Multiple views of the three-dimensional representation are then displayed. Other embodiments, aspects and features are also disclosed. | 09-06-2012 |
20120298862 | CONTOUR-BASED DEFECT DETECTION USING AN INSPECTION APPARATUS - One embodiment relates to a method of inspecting a site location on a target substrate. Contours are obtained, the contours having been generated from a reference image using a design clip. A target image of the site location is acquired. The contours are aligned to the target image, and contrast values are computed for pixels on the contours. A threshold is applied to the contrast values to determine contour-based defect blobs. Another embodiment relates to a method of generating contours for use in inspecting a site location for defects. Other embodiments, aspects and features are also disclosed. | 11-29-2012 |
20130082174 | METHODS AND APPARATUS FOR CLASSIFICATION OF DEFECTS USING SURFACE HEIGHT ATTRIBUTES - One embodiment relates to a method of classifying a defect on a substrate surface. The method includes scanning a primary electron beam over a target region of the substrate surface causing secondary electrons to be emitted therefrom, wherein the target region includes the defect. The secondary electrons are detected from the target region using a plurality of at least two off-axis sensors so as to generate a plurality of image frames of the target region, each image frame of the target region including data from a different off-axis sensor. The plurality of image data frames are processed to generate a surface height map of the target region, and surface height attributes are determined for the defect. The surface height attributes for the defect are input into a defect classifier. Other embodiments, aspects and features are also disclosed. | 04-04-2013 |
20140212024 | CONTOUR-BASED ARRAY INSPECTION OF PATTERNED DEFECTS - One embodiment relates to a method of inspecting an array of cells on a substrate. A reference image is generated using a cell image that was previously determined to be defect free. A reference contour image which includes contours of the reference image is also generated. The reference contour image is used to detect defects in the array of cells on the substrate. Another embodiment relates to a system for detecting defects in an array on a substrate. Other embodiments, aspects and features are also disclosed. | 07-31-2014 |
Patent application number | Description | Published |
20150123649 | SAMPLING CONTROL FOR MAXIMUM POWER POINT TRACKING - Apparatus and techniques for controlling measurement of an electrical parameter of an energy source can be used to obtain information for use in enhancing a power transfer efficiency between the energy source and a load. For example, during a first measurement cycle, information indicative of the electrical parameter of the energy source can be obtained using a measurement circuit during a first sampling duration in which the load is decoupled from the energy source. The information indicative of the obtained electrical parameter can be compared to a threshold. In response to the comparing, a different second sampling duration can be determined for use in obtaining information indicative of the electrical parameter during a subsequent measurement cycle. The information indicative of the electrical parameter of the energy source includes information for use in enhancing the power transfer efficiency between the energy source and the load. | 05-07-2015 |
20150219721 | VOLTAGE-BASED FUEL GAUGE ON BATTERY CAPACITY - A device to determine a state of a battery is disclosed. One or more transistors provide a resistance between first and second nodes. The one or more transistors are configured to conduct a supply current from a battery between the first node and the second node. A measurement circuit measures the voltage generated between the first node and the second node. The measurement circuit further measures the supply voltage. A calculation circuit generates an estimate of the supply current based on the voltage measured between the first node and the second node and the resistance of the one or more transistors. The calculation circuit generates an estimate of the state of charge of the battery based on the measured supply voltage and the estimate of the supply current. | 08-06-2015 |
20150280554 | MULTIPLE POWER PATH MANAGEMENT WITH MICRO-ENERGY HARVESTING - An apparatus comprises an output port for a circuit load, a first input port for an energy harvest source, an input/output port a second energy source, a first circuit path from the energy harvest source to the second energy source at the input/output port and to the variable load at the output port, a second circuit path from the second energy source to the output port, a cold start circuit that produces a first voltage level at the output port by charging a capacitor at the output port using energy of the energy harvest source, and a main converter circuit that produces a second regulated voltage level at the input/output port using energy of the energy harvest source when the voltage at the output port capacitor is above a specified voltage value and uses the energy of the capacitor at the output port during startup of the main converter circuit. | 10-01-2015 |
Patent application number | Description | Published |
20090162979 | THYRISTOR DEVICE WITH CARBON LIFETIME ADJUSTMENT IMPLANT AND ITS METHOD OF FABRICATION - In a method of fabricating a semiconductor memory device, a thyristor may be formed in a layer of semiconductor material. Carbon may be implanted and annealed in a base-emitter junction region for the thyristor to affect leakage characteristics. The density of the carbon and/or a bombardment energy and/or an anneal therefore may be selected to establish a low-voltage, leakage characteristic for the junction substantially greater than its leakage absent the carbon. In one embodiment, an anneal of the implanted carbon may be performed in common with an activation for other implant regions the semiconductor device. | 06-25-2009 |
20120159419 | MODEL LIBRARY IMPLEMENTATION AND METHODOLOGY FOR WORST CASE PERFORMANCE MODELING FOR SRAM CELLS - Worst case performance of an SRAM cell may be simulated more accurately with less intensive computations. An embodiment includes determining, by a processor, a process corner G of an SRAM cell, having pull-down, pass-gate, and pull-up devices, process corner G being defined as the worst performance of the cell when only global variations of parameters of the SRAM cell are included, setting each of the pull-down, pass-gate, and pull-up devices at process corner G, performing, on the processor, a number of Monte Carlo simulations of the SRAM cell devices around process corner G with only local variations of the parameters, generating a normal probability distribution for I | 06-21-2012 |
20130344669 | METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH DRIFT REGIONS AND REPLACEMENT GATES - Methods for fabricating integrated circuits are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a semiconductor substrate including a first region of a first doping type, a second region of the first doping type spaced from the first region, a drift region of the first doping type positioned between the first region and the second region, and regions of the opposite doping type. A mask covering both the drift region and the regions of the opposite doping type is formed. Then, a source/drain ion implantation is performed into the first region and the second region. The mask prevents the drift region and the regions of the opposite doping type from receiving the source/drain ion implantation. | 12-26-2013 |
Patent application number | Description | Published |
20100146265 | Method, apparatus and system for employing a secure content protection system - A method, apparatus and system for employing a secure content protection system is disclosed. In one embodiment, a certificate having a unique device identification associated with a first device is received, and, at a second device, a revocation list having unauthorized device identifications is received. The unique device identification is incrementally compared with the unauthorized device identifications of the revocation list, and media content is transmitted from the second device to the first device, if the unique device identification is not matched with the unauthorized device identifications of the revocation list. | 06-10-2010 |
20100177892 | METHOD, APPARATUS, AND SYSTEM FOR PRE-AUTHENTICATION AND KEEP-AUTHENTICATION OF CONTENT PROTECTED PORTS - A method, apparatus and system for providing pre-authentication and keep-authentication of content protected ports system employing a ratio of one decipher processing engine (e.g., HDCP engine) associated with multiple ports is disclosed is disclosed. In one embodiment, a receiving device is pre-authenticated by a transmitting device, wherein the receiving device to receive a data stream from the transmitting device via a first data path. Further, a first High-Definition Content Protection (HDCP) engine is associated with a first port in the first data path, the first HDCP engine coupled with a second HDCP engine. The second HDCP engine is associated with a plurality of ports in a second data path, each of the plurality of ports associated with a memory pipe having state information relating to each of the plurality of ports, the state information being used to pre-authenticate the receiving device. | 07-15-2010 |
20110149032 | TRANSMISSION AND HANDLING OF THREE-DIMENSIONAL VIDEO CONTENT - Embodiments of the invention are generally directed to transmission and handling of three-dimensional video content. An embodiment of a method includes receiving a multimedia data stream including video data utilizing an interface protocol and determining that the received video data includes three-dimensional (3D) video data, where each frame of the video data includes a first vertical synchronization (Vsync) signal prior to an active data region, the active data region including a first data region and a second data region. The method further includes converting the 3D video data from a 3D data format to a two-dimensional (2D) video format, where converting the 3D video data includes identifying a region between the first data region and the second data region, inserting a second Vsync signal between the first data region and the second data region, and providing an identifier to distinguish between the first data region and the second data region. | 06-23-2011 |
20110157473 | METHOD, APPARATUS, AND SYSTEM FOR SIMULTANEOUSLY PREVIEWING CONTENTS FROM MULTIPLE PROTECTED SOURCES - A method, apparatus and system for simultaneously previewing contents from multiple protected sources. A primary data stream associated with a primary port is generated, the primary data stream having a primary image to be displayed on a display screen. A secondary data stream is generated associated with a plurality of secondary ports coupled with the primary port, the secondary data stream having a plurality of secondary images received from the plurality of secondary ports. The secondary data stream and the primary data stream are merged into a display data stream, the display data stream having the primary image and further having the plurality of secondary images as a plurality of preview images. The primary image and the plurality of preview images are displayed on the display screen, wherein each of the plurality of preview images is displayed through an inset screen on the display screen. | 06-30-2011 |
20110170011 | TRANSMISSION AND DETECTION OF MULTI-CHANNEL SIGNALS IN REDUCED CHANNEL FORMAT - Embodiments of the invention are generally directed to transmission and detection of multi-channel signals in reduced channel format. An embodiment of a method for transmitting data includes determining whether a first type or a second type of content data is to be transmitted, where the first type of content data is to be transmitted at a first multiple of a base frequency and the second type of data is to be transmitted at a second multiple of the base frequency. The method further includes selecting one or more channels from a plurality of channels based on the type of content data, clocking a frequency on the first or second multiple of the base frequency according to the type of content data in the selected channels, modifying the content data to fit within a single output channel, and transmitting the modified data via a single output channel at the chosen multiple of the base frequency. | 07-14-2011 |
20110310301 | MECHANISM FOR MEMORY REDUCTION IN PICTURE-IN-PICTURE VIDEO GENERATION - A mechanism for memory reduction in picture-in-picture video generation is disclosed. A method of embodiments of the invention includes receiving, from a transmitting device, a plurality of video streams at a receiving device coupled to the transmitting device, wherein a first video stream of the plurality of video streams is designated to be displayed as a main video and one or more other video streams of the plurality of video streams are designated to be displayed as one or more sub videos to the main video. The method further includes transforming the one or more other video streams into the one or more sub videos, temporarily holding the one or more sub videos in a compressed frame buffer, and merging, via pixel replacement, the main video and the one or more sub videos into a final video image capable of being displayed on a single screen utilizing a display device, wherein pixel replacement is performed such that the one or more sub videos occupy one or more sections of pixels of screen space pixels occupied by the main video. | 12-22-2011 |
20120092450 | COMBINING VIDEO DATA STREAMS OF DIFFERING DIMENSIONALITY FOR CONCURRENT DISPLAY - Embodiments of the invention are generally directed to combining video data streams of differing dimensionality for concurrent display. An embodiment of an apparatus includes an interface to receive multiple video data streams, a dimensionality of each video stream being either two-dimensional (2D) or three-dimensional (3D). The apparatus further includes a processing module to process a first video data stream as a main video image and one or more video data streams as video sub-images, the processing module including a video combiner to combine the main video data stream and the sub-video data streams to generate a combined video output. The processing module is configured to modify a dimensionality of each of the video sub-images to match a dimensionality of the main video image. | 04-19-2012 |
20120188444 | CONVERSION AND PROCESSING OF DEEP COLOR VIDEO IN A SINGLE CLOCK DOMAIN - Embodiments of the invention are generally directed to conversion and processing of deep color video in a single clock domain. An embodiment of a method includes receiving one or more video data streams, the one or more video data streams including a first video data stream, the first video data stream being clocked at a frequency of a link clock signal. The method further includes converting the first video data stream into a converted video data stream having a modified data format, wherein the modified data format includes transfer of a single pixel of data in one cycle of the link clock signal and the insertion of null data to fill empty cycles of the converted video data stream, and generation of a valid data signal to distinguish between valid video data and the null data in the converted video data stream. The method further includes processing the converted video data stream according to the frequency of the link clock signal to generate a processed data stream from the converted video data stream, wherein processing includes using the valid data signal to identify valid video data. | 07-26-2012 |
20120287344 | AUDIO AND VIDEO DATA MULTIPLEXING FOR MULTIMEDIA STREAM SWITCH - Embodiments of the invention describe a multimedia stream switch capable of multiplexing the audio and the video data of a multimedia stream separately. The multiplexing features of embodiments of the invention enable a multimedia stream switch to control each multimedia data type separately instead of multiplexing the whole streams (i.e., multiplexing sets of audio/video data together). Furthermore, prior art multimedia stream switches need to regenerate audio clocks by using phase locked loop (PLL) circuitry which incurs manufacturing and development costs. Embodiments of the invention provide the mixing of audio and video data from different sources without the need for PLL circuitry. | 11-15-2012 |
20140111691 | MECHANISM FOR MEMORY REDUCTION IN PICTURE-IN-PICTURE VIDEO GENERATION - A mechanism for memory reduction in picture-in-picture video generation is disclosed. A method of embodiments of the invention includes receiving, from a transmitting device, a plurality of video streams at a receiving device coupled to the transmitting device, wherein a first video stream of the plurality of video streams is designated to be displayed as a main video and one or more other video streams of the plurality of video streams are designated to be displayed as one or more sub videos to the main video. The method further includes transforming the one or more other video streams into the one or more sub videos, temporarily holding the one or more sub videos in a compressed frame buffer, and merging, via pixel replacement, the main video and the one or more sub videos into a final video image capable of being displayed on a single screen utilizing a display device, wherein pixel replacement is performed such that the one or more sub videos occupy one or more sections of pixels of screen space pixels occupied by the main video. | 04-24-2014 |
Patent application number | Description | Published |
20120129275 | DUAL-BULB LAMPHEAD CONTROL METHODOLOGY - The present invention generally relates to methods of controlling UV lamp output to increase irradiance uniformity. The methods generally include determining a baseline irradiance within a chamber, determining the relative irradiance on a substrate corresponding to a first lamp and a second lamp, and determining correction or compensation factors based on the relative irradiances and the baseline irradiance. The lamps are then adjusted via closed loop control using the correction or compensation factors to individually adjust the lamps to the desired output. The lamps may optionally be adjusted to equal irradiances prior to adjusting the lamps to the desired output. The closed loop control ensures process uniformity from substrate to substrate. The irradiance measurement and the correction or compensation factors allow for adjustment of lamp set points due to chamber component degradation, chamber component replacement, or chamber cleaning. | 05-24-2012 |
20130101241 | SUBSTRATE SUPPORT BUSHING - A bushing assembly for supporting a substrate within a processing chamber is generally provided. In one aspect, the bushing assembly comprises a tubular body having an outer perimeter and an aperture extending therethrough, a first ring having a first inner edge, the first ring disposed in the aperture in an upper portion of the tubular body, and a second ring having a second inner edge, the second ring disposed in the aperture in a lower portion of the tubular body. In another aspect, the first inner edge has a first radius of curvature, and the second inner edge has a second radius of curvature. In another aspect, a first inner edge diameter, a second inner edge diameter, the first radius of curvature, and the second radius of curvature are selected such that a support pin extending through the aperture contacts the bushing assembly on at most two points. | 04-25-2013 |
20130122611 | DUAL-BULB LAMPHEAD CONTROL METHODOLOGY - The present invention generally relates to methods of controlling UV lamp output to increase irradiance uniformity. The methods generally include determining a baseline irradiance within a chamber, determining the relative irradiance on a substrate corresponding to a first lamp and a second lamp, and determining correction or compensation factors based on the relative irradiances and the baseline irradiance. The lamps are then adjusted via closed loop control using the correction or compensation factors to individually adjust the lamps to the desired output. The lamps may optionally be adjusted to equal irradiances prior to adjusting the lamps to the desired output. The closed loop control ensures process uniformity from substrate to substrate. The irradiance measurement and the correction or compensation factors allow for adjustment of lamp set points due to chamber component degradation, chamber component replacement, or chamber cleaning. | 05-16-2013 |
20130284721 | METHOD AND APPARATUS FOR SUBSTRATE SUPPORT WITH MULTI-ZONE HEATING - Methods and substrate processing systems are provided for controlling substrate heating efficiency and generating a desired temperature profile on the surface of a substrate when the substrate is disposed on a substrate support surface of a substrate support assembly. The substrate support assembly is provided with minimum software control and hardware requirement and includes a heating element comprised of multiple heating elements sections. The heating element is connected to a power source for adjusting the temperature outputs of the multiple heating element sections and providing adjustable multi-heating zones and desired temperature distribution over the substrate support surface of the substrate support assembly within a process chamber. | 10-31-2013 |
20130287529 | METHOD AND APPARATUS FOR INDEPENDENT WAFER HANDLING - A substrate processing system with independent substrate placement capability to two or more substrate support assemblies is provided. Two different sets of fixed-length lift pins are disposed on two or more substrate support lift pin assemblies of two or more process chambers, where the length of each lift pin in one process chamber is different from the length of each lift pin in another process chamber. The substrate processing system includes simplified mechanical substrate support lift pin mechanisms and minimum accessory parts cooperating with a substrate transfer mechanism (e.g., a transfer robot) for efficient and independent loading, unloading, and transfer of one or more substrates between two or more processing regions in a twin chamber or between two or more process chambers. A method for positioning one or more substrates to be loaded, unloaded, or processed independently or simultaneously in two or more processing regions or process chambers is provided. | 10-31-2013 |