Patent application number | Description | Published |
20090112352 | EQUIVALENT GATE COUNT YIELD ESTIMATION FOR INTEGRATED CIRCUIT DEVICES - A storage medium including a method of modeling yield for semiconductor products includes determining expected faults for each of a plurality of library elements by running a critical area analysis on each of the library elements, and assessing, from the critical area analysis, an expected number of faults per unit area, and comparing the same to actual observed faults on previously manufactured semiconductor products. Thereafter, the expected number of faults for each library element is updated in response to observed yield. A database is established, which includes the die size and expected faults for each of the library elements. Integrated circuit product die size is estimated, and library elements to be used to create the integrated circuit die are selected. Fault and size data for each of the selected library elements are obtained, the adjusted estimated faults for each of the library elements are summed, and estimated yield is calculated. | 04-30-2009 |
20150035073 | ENABLING ENHANCED RELIABILITY AND MOBILITY FOR REPLACEMENT GATE PLANAR AND FINFET STRUCTURES - A method for semiconductor fabrication includes forming at least one of a diffusion barrier layer and a metal containing layer over a dielectric layer in a gate cavity. A first anneal is performed to diffuse elements from the at least one of the diffusion barrier layer and the metal containing layer into the dielectric layer. The metal containing layer and the diffusion barrier layer are removed. A second anneal is performed to adjust diffusion of the elements in the dielectric layer to provide a gate dielectric region. | 02-05-2015 |
20150206876 | FIN FIELD EFFECT TRANSISTORS HAVING HETEROEPITAXIAL CHANNELS - Disposable gate structures are formed over semiconductor material portions, and source and drain regions can be formed in the semiconductor material portions. After formation of a planarization dielectric layer, one type of disposable gate structure can be removed selective to at least another type of disposable gate structure employing a patterned hard dielectric mask layer. After recessing a surface portion of a body portion, a heteroepitaxial channel portion is formed on the remaining physically exposed portion of the body portion by selective epitaxy of a semiconductor material different from the semiconductor material of the remaining body portion. A plurality of types of heteroepitaxial channel portions can be formed in different types of semiconductor devices. Replacement gate structures can be formed in the gate cavities to provide field effect transistors having different threshold voltages. | 07-23-2015 |
20150228747 | MULTIPLE THICKNESS GATE DIELECTRICS FOR REPLACEMENT GATE FIELD EFFECT TRANSISTORS - After removal of the disposable gate structures to form gate cavities in a planarization dielectric layer, a silicon oxide layer is conformally deposited on silicon-oxide-based gate dielectric portions in the gate cavities. A portion of the silicon oxide layer can be nitridated to form a silicon oxynitride layer. A patterned masking material layer can be employed to physically expose a semiconductor surface from a first-type gate cavity. The silicon oxide layer can be removed while preserving an underlying silicon-oxide-based gate dielectric portion in a second-type gate cavity. A stack of a silicon oxynitride layer and an underlying silicon-oxide-based gate dielectric can be protected by a patterned masking material layer in a third-type gate cavity during removal of the silicon oxide layer in the second-type gate cavity. A high dielectric constant gate dielectric layer can be formed in the gate cavities to provide gate dielectrics of different types. | 08-13-2015 |
20150228748 | MULTI-COMPOSITION GATE DIELECTRIC FIELD EFFECT TRANSISTORS - A first gate structure and a second gate structure are formed over a semiconductor material layer. The first gate structure includes a planar silicon-based gate dielectric, a planar high-k gate dielectric, a metallic nitride portion, and a first semiconductor material portion, and the second gate structure includes a silicon-based dielectric material portion and a second semiconductor material portion. After formation of gate spacers and a planarization dielectric layer, the second gate structure is replaced with a transient gate structure including a chemical oxide portion and a second high-k gate dielectric. A work-function metal layer and a conductive material portion can be formed in each gate electrode by replacement of semiconductor material portions. A gate electrode includes the planar silicon-based gate dielectric, the planar high-k gate dielectric, and a U-shaped high-k gate dielectric, and another gate electrode includes the chemical oxide portion and another U-shaped high-k gate dielectric. | 08-13-2015 |
20150228749 | ENABLING ENHANCED RELIABILITY AND MOBILITY FOR REPLACEMENT GATE PLANAR AND FINFET STRUCTURES - A method for semiconductor fabrication includes forming at least one of a diffusion barrier layer and a metal containing layer over a dielectric layer in a gate cavity. A first anneal is performed to diffuse elements from the at least one of the diffusion barrier layer and the metal containing layer into the dielectric layer. The metal containing layer and the diffusion barrier layer are removed. A second anneal is performed to adjust diffusion of the elements in the dielectric layer to provide a gate dielectric region. | 08-13-2015 |
20150249015 | ENABLING ENHANCED RELIABILITY AND MOBILITY FOR REPLACEMENT GATE PLANAR AND FINFET STRUCTURES - A method for semiconductor fabrication includes forming at least one of a diffusion barrier layer and a metal containing layer over a dielectric layer in a gate cavity. A first anneal is performed to diffuse elements from the at least one of the diffusion barrier layer and the metal containing layer into the dielectric layer. The metal containing layer and the diffusion barrier layer are removed. A second anneal is performed to adjust diffusion of the elements in the dielectric layer to provide a gate dielectric region. | 09-03-2015 |