Patent application number | Description | Published |
20100108641 | LAVACOAT PRE-CLEAN AND PRE-HEAT - Embodiments described herein provide methods of surface preparation using an electromagnetic beam prior to modification of the surface of a component which advantageously improve the quality of the final texture in those places and correspondingly reduces particle contamination. In one embodiment a method of providing a texture to a surface of a component for use in a semiconductor processing chamber is provided. The method comprises defining a plurality of regions on the surface of a component, moving an electromagnetic beam to a first region of the plurality of regions, scanning the electromagnetic beam across a surface of the first region to heat the surface of the first region, and scanning the electromagnetic beam across the heated surface of the first region to form a feature. | 05-06-2010 |
20120216833 | REAL TIME LIQUID PARTICLE COUNTER (LPC) END POINT DETECTION SYSTEM - Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner. | 08-30-2012 |
20150070814 | ELECTROSTATIC CHUCK WITH VARIABLE PIXILATED HEATING - Electrostatic chucks with variable pixelated heating are described. For example, an electrostatic chuck (ESC) includes a ceramic plate having a front surface and a back surface, the front surface for supporting a wafer or substrate. A base is coupled to the back surface of the ceramic plate. A light carrying medium is disposed in the base, the light carrying medium configured to provide pixelated light-based heating capability for the ESC. | 03-12-2015 |
20150129165 | PIXILATED COOLING, TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY - Implementations described herein provide a pixelated substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a cooling base comprising the substrate support assembly, which in turn, allows both lateral and azimuthal tuning of a substrate processed on the substrate support assembly. A processing chamber having a pixelated substrate support assembly and method for processing a substrate using a pixelated substrate support assembly are also provided. | 05-14-2015 |
20150138687 | CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FORCES APPLIED BY ELECTROSTATIC CHUCKS, AND RELATED METHODS - A control system that includes deflection sensors which can control clamping forces applied by electrostatic chucks, and related methods are disclosed. By using a sensor to determine a deflection of a workpiece supported by an electrostatic chuck, a control system may use the deflection measured to control a clamping force applied to the workpiece by the electrostatic chuck. The control system applies a clamping voltage to the electrostatic chuck so that the clamping force reaches and maintains a target clamping force. In this manner, the clamping force may secure the workpiece to the electrostatic chuck to enable manufacturing operations to be performed while preventing workpiece damage resulting from unnecessary higher values of the clamping force. | 05-21-2015 |
20150187625 | ELECTROSTATIC CHUCK WITH EXTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEMPERATURE DISTRIBUTION - An electrostatic chuck is described with external flow adjustments for improved temperature distribution. In one example, an apparatus has a dielectric puck to electrostatically grip a silicon wafer. A cooling plate is fastened to and thermally coupled to the ceramic puck. A supply plenum receives coolant from an external source and a plurality of coolant chambers are thermally coupled to the cooling plate and receive coolant from the supply plenum. A return plenum is coupled to the cooling zones to exhaust coolant from the cooling zones and a plurality of flow control valves are positioned between the supply plenum and a respective one of the cooling zones to control the flow rate of coolant from the supply plenum to the cooling zones. | 07-02-2015 |
20150187626 | ELECTROSTATIC CHUCK WITH INTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEMPERATURE DISTRIBUTION - An electrostatic chuck is described with external flow adjustments for improved temperature distribution. In one example, an apparatus has a dielectric puck to electrostatically grip a silicon wafer. A cooling plate is fastened to and thermally coupled to the ceramic puck. A supply plenum receives coolant from an external source and a plurality of coolant chambers are thermally coupled to the cooling plate and receive coolant from the supply plenum. A return plenum is coupled to the cooling zones to exhaust coolant from the cooling zones. A plurality of adjustable orifices are positioned between the supply plenum and a respective one of the cooling zones to control the flow rate of coolant from the supply plenum to the cooling zones. | 07-02-2015 |
20150357228 | SUBSTRATE TEMPERATURE CONTROL APPARATUS INCLUDING OPTICAL FIBER HEATING, SUBSTRATE TEMPERATURE CONTROL SYSTEMS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND METHODS - Substrate temperature control apparatus including optical fiber temperature control are described. Substrate temperature control apparatus includes a base, a thermal contact member proximate to the base, and a plurality of optical fibers adapted to provide light-based heating extending laterally between the base and thermal contact member. Substrate temperature control systems and electronic device processing systems and methods including optical fiber temperature control are described, as are numerous other aspects. | 12-10-2015 |
20160007411 | TEMPERATURE CONTROL APPARATUS INCLUDING GROOVE-ROUTED OPTICAL FIBER HEATING, SUBSTRATE TEMPERATURE CONTROL SYSTEMS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND PROCESSING METHODS - Substrate temperature control apparatus including groove-routed optical fibers. Substrate temperature control apparatus includes upper and lower members including grooves in one or both, and a plurality of optical fibers routed in the grooves. In one embodiment, the optical fibers are adapted to provide light-based pixelated heating. In another embodiment, embedded optical temperature sensors are adapted to provide temperature measurement. Substrate temperature control systems, electronic device processing systems, and methods including groove-routed optical fiber temperature control and measurement are described, as are numerous other aspects. | 01-07-2016 |
20160007412 | APPARATUS, SYSTEMS, AND METHODS FOR TEMPERATURE CONTROL OF SUBSTRATES USING EMBEDDED FIBER OPTICS AND EPOXY OPTICAL DIFFUSERS - Substrate temperature control apparatus and electronic device manufacturing systems provide pixelated light-based heating to a substrate in a process chamber. A substrate holder in the process chamber may include a baseplate. The baseplate has a top surface that may have a plurality of cavities and a plurality of grooves connected to the cavities. Optical fibers may be received in the grooves such that each cavity has a respective optical fiber terminating therein to transfer light thereto. Some or all of the cavities may have an epoxy optical diffuser disposed therein to diffuse light provided by the optical fiber. A ceramic plate upon which a substrate may be placed may be bonded to the baseplate. A thermal spreader plate may optionally be provided between the baseplate and the ceramic plate. Methods of controlling temperature across a substrate holder in an electronic device manufacturing system are also provided, as are other aspects. | 01-07-2016 |
20160056061 | REAL TIME LIQUID PARTICLE COUNTER (LPC) END POINT DETECTION SYSTEM - Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner. | 02-25-2016 |
Patent application number | Description | Published |
20110258532 | MEMOIZING WEB-BROWSING COMPUTATION WITH DOM-BASED ISOMORPHISM - Methods and devices for accelerating webpage rendering by a browser store document object model (DOM) tree structures and computations of rendered pages, and compare portions of a DOM tree of pages being render to determining if portions of the DOM tree structures match. If a DOM tree of a webpage to be rendered matches a DOM tree stored in memory, the computations associated with the match DOM tree may be recalled from memory, obviating the need to perform the calculations to render the page. A tree isomorphism algorithm may be used to recognize DOM trees stored in memory that match the DOM tree of the webpage to be rendered. Reusing rendering computations may significantly reducing the time and resources required for rendering web pages. Identifying reusable portions of calculation results based on DOM tree isomorphism enables the browser to reuse stored webpage rendering calculations even when URLs do not match. | 10-20-2011 |
20130203440 | SELECTIVELY PERFORMING A POSITIONING PROCEDURE AT AN ACCESS TERMINAL BASED ON A BEHAVIOR MODEL - In an embodiment, an access terminal (AT) measures and reports location information when positioned at a user-defined place associated with a geofence to a server, and the server updates a place fingerprint configured to identify the user-defined place based on the reported location information. In another embodiment, the AT or the server obtains location information associated with a set of user-defined places that are identifiable by a set of place fingerprints, determines whether a location event has occurred and updates a behavior model for the access terminal based on the determination. In another embodiment, the AT receives a request for its location and evaluates a set of factors (e.g., the behavior model, etc.) to determine whether to acquire the AT's location with a high power-consumption positioning procedure (e.g., GPS). | 08-08-2013 |
20130326137 | Methods and Systems for Retrieving and Caching Geofence Data - Mobile device systems and methods for monitoring geofences cache a subset of geofences within a likely travel perimeter determined based on speed and direction of travel, available roads, current traffic, etc. A server may download to mobile devices subsets of geofences within a likely travel perimeter determined based on a threshold travel time possible from a current location given current travel speed, direction and roads. Mobile device may receive a list of local geofences from a server, which may maintain or have access to a database containing all geofences. The mobile device may use the cashed geofences in the normal manner, by comparing its location to the cached list of local geofences to detect matches. In an embodiment, the mobile device may calculate or receive from the server an update perimeter, which when crossed may prompt the mobile device to request an update to the geofences stored in cache. | 12-05-2013 |
Patent application number | Description | Published |
20090082051 | MOBILE GROUP DATA DISTRIBUTION - A mobile collaborative community system provides distribution of shared data (e.g., media, preference, calendar, contacts, tasks, etc.) for a group of individuals (e.g., families, business organization, team, project, etc.) to the mobile devices of the group members. The system maintains a central repository or database of shared data for groups, as well as information defining the groups, user membership in the groups, and the mobile devices associated with the users. The system distributes the shared data for a group to the mobile devices of the user who are members of the group. The users can make changes to shared group data on their mobile devices, which changes are returned to the central repository and re-distributed to update the shared data on the mobile devices of all group members. | 03-26-2009 |
20100262780 | APPARATUS AND METHODS FOR RENDERING A PAGE - Aspects relate to apparatus and methods for rending a page on a computing device, such as a web page. The apparatus and methods include receiving a request for a requested instance of a page and determining if the requested instance of the page corresponds to a document object model (DOM) for the page stored in a memory. Further, the apparatus and methods include retrieving a dynamic portion of the DOM corresponding to the requested instance if the requested instance of the page corresponds to the DOM stored in the memory. The dynamic portion may be unique to the requested instance of the page. Moreover, the apparatus and methods include storing the dynamic portion of the DOM corresponding to the requested instance of the page in a relationship with the static portion of the DOM. | 10-14-2010 |