Patent application number | Description | Published |
20130200443 | Interface Engineering to Optimize Metal-III-V Contacts - Techniques for fabricating self-aligned contacts in III-V FET devices are provided. In one aspect, a method for fabricating a self-aligned contact to III-V materials includes the following steps. At least one metal is deposited on a surface of the III-V material. The at least one metal is reacted with an upper portion of the III-V material to form a metal-III-V alloy layer which is the self-aligned contact. An etch is used to remove any unreacted portions of the at least one metal. At least one impurity is implanted into the metal-III-V alloy layer. The at least one impurity implanted into the metal-III-V alloy layer is diffused to an interface between the metal-III-V alloy layer and the III-V material thereunder to reduce a contact resistance of the self-aligned contact. | 08-08-2013 |
20140264446 | III-V FINFETS ON SILICON SUBSTRATE - A method for forming fin field effect transistors includes forming a dielectric layer on a silicon substrate, forming high aspect ratio trenches in the dielectric layer down to the substrate, the high aspect ratio including a height to width ratio of greater than about 1:1 and epitaxially growing a non-silicon containing semiconductor material in the trenches using an aspect ratio trapping process to form fins. The one or more dielectric layers are etched to expose a portion of the fins. A barrier layer is epitaxially grown on the portion of the fins, and a gate stack is formed over the fins. A spacer is formed around the portion of the fins and the gate stack. Dopants are implanted into the portion of the fins. Source and drain regions are grown over the fins using a non-silicon containing semiconductor material. | 09-18-2014 |
20140264607 | III-V FINFETS ON SILICON SUBSTRATE - A method for forming fin field effect transistors includes forming a dielectric layer on a silicon substrate, forming high aspect ratio trenches in the dielectric layer down to the substrate, the high aspect ratio including a height to width ratio of greater than about 1:1 and epitaxially growing a non-silicon containing semiconductor material in the trenches using an aspect ratio trapping process to form fins. The one or more dielectric layers are etched to expose a portion of the fins. A barrier layer is epitaxially grown on the portion of the fins, and a gate stack is formed over the fins. A spacer is formed around the portion of the fins and the gate stack. Dopants are implanted into the portion of the fins. Source and drain regions are grown over the fins using a non-silicon containing semiconductor material. | 09-18-2014 |
20150030047 | III-V LASERS WITH INTEGRATED SILICON PHOTONIC CIRCUITS - III-V lasers integrated with silicon photonic circuits and methods for making the same include a three-layer semiconductor stack formed from III-V semiconductors on a substrate, where a middle layer has a lower bandgap than a top layer and a bottom layer; a mirror region monolithically formed at a first end of the stack, configured to reflect emitted light in the direction of the stack; and a waveguide region monolithically formed at a second end of the stack, configured to transmit emitted light. | 01-29-2015 |
20150048422 | A METHOD FOR FORMING A CRYSTALLINE COMPOUND III-V MATERIAL ON A SINGLE ELEMENT SUBSTRATE - A method for forming a crystalline compound material on a single element substrate includes etching a high aspect ratio trench in a single element crystalline substrate and forming a dielectric layer over the substrate and on sidewalls and a bottom of the trench. The dielectric is removed from the bottom of the trench to expose the substrate at the bottom of the trench. A crystalline compound material is selectively grown on the substrate at the bottom of the trench. | 02-19-2015 |
20150048423 | SEMICONDUCTOR DEVICE HAVING A III-V CRYSTALLINE COMPOUND MATERIAL SELECTIVELY GROWN ON THE BOTTOM OF A SPACE FORMED IN A SINGLE ELEMENT SUBSTRATE. - A method for forming a crystalline compound material on a single element substrate includes etching a high aspect ratio trench in a single element crystalline substrate and forming a dielectric layer over the substrate and on sidewalls and a bottom of the trench. The dielectric is removed from the bottom of the trench to expose the substrate at the bottom of the trench. A crystalline compound material is selectively grown on the substrate at the bottom of the trench. | 02-19-2015 |
20150255281 | SILICON SUBSTRATE PREPARATION FOR SELECTIVE III-V EPITAXY - A method for forming a crystalline compound material on a single element substrate includes etching a high aspect ratio trench in a single element crystalline substrate and forming a dielectric layer over the substrate and on sidewalls and a bottom of the trench. The dielectric is removed from the bottom of the trench to expose the substrate at the bottom of the trench. A crystalline compound material is selectively grown on the substrate at the bottom of the trench. | 09-10-2015 |
20150262818 | PLANAR III-V FIELD EFFECT TRANSISTOR (FET) ON DIELECTRIC LAYER - A method of forming a semiconductor substrate including a type III-V semiconductor material directly on a dielectric material that includes forming a trench in a dielectric layer, and forming a via within the trench extending from a base of the trench to an exposed upper surface of an underlying semiconductor including substrate. A III-V semiconductor material is formed extending from the exposed upper surface of the semiconductor substrate filling at least a portion of the trench. | 09-17-2015 |