Patent application number | Description | Published |
20090025830 | FLAT SOFT MAGNETIC METAL POWDER AND COMPOSITE MAGNETIC MATERIAL INCLUDING THE SOFT MAGNETIC METAL POWDER - A flat soft magnetic metal powder is provided that includes: Ni in the range of 60 to 90 mass %, one or more kinds of Nb, V, and Ta in the range of 0.05 to 20 mass % in total (0.05 to 19.95 mass % when Mo is added thereto), Mo in the range of 0.05 to 10 mass % if necessary, one or two kinds of Al and Mn in the range of 0.01 to 1 mass % in total if necessary, and the balance including Fe; an average grain size of 30 to 150 μm and an aspect ratio (average grain size/average thickness) of 5 to 500; and a flat face. Here, with a peak intensity of a face index ( | 01-29-2009 |
20090174512 | IRON POWDER COATED WITH Mg-CONTAINING OXIDE FILM - Oxide-coated Fe powder for producing various electromagnetic circuit components requiring high resistivity is provided. The oxide-coated Fe powder is a Mg-containing oxide film-coated iron powder coated with an Mg—Fe—O ternary-based deposition film at least containing (Mg, Fe)O. The (Mg,Fe)O is a crystalline MgO-dissolving wustite. The Mg—Fe—O ternary-based oxide deposition film has a sulfur-enriched layer containing a higher concentration of sulfur than that of central portion of the iron powder, fine crystalline texture having a grain size of 200 nm or less, and the outermost surface is substantially composed of MgO. A composite soft magnetic material using the Mg-containing oxide film-coated iron powder is also provided. | 07-09-2009 |
20120070567 | METHOD FOR PRODUCING SOFT MAGNETIC METAL POWDER COATED WITH MG-CONTAINING OXIDE FILM AND METHOD FOR PRODUCING COMPOSITE SOFT MAGNETIC MATERIAL USING SAID POWDER - A method for producing a soft magnetic metal powder coated with a Mg-containing oxide film, comprising the steps of adding and mixing a Mg powder with a soft magnetic metal powder which has been subjected to heating treatment in an oxidizing atmosphere at a temperature of 40 to 500° C. to obtain a mixed powder, and heating the mixed powder at a temperature of 150 to 1,100° C. in an inert gas or vacuum atmosphere under a pressure of 1×10 | 03-22-2012 |
20120138844 | IRON POWDER COATED WITH Mg-CONTAINING OXIDE FILM - Oxide-coated Fe powder for producing various electromagnetic circuit components requiring high resistivity is provided. The oxide-coated Fe powder is a Mg-containing oxide film-coated iron powder coated with an Mg—Fe—O ternary-based deposition film at least containing (Mg, Fe)O. The (Mg,Fe)O is a crystalline MgO-dissolving wustite. The Mg—Fe—O ternary-based oxide deposition film has a sulfur-enriched layer containing a higher concentration of sulfur than that of central portion of the iron powder, fine crystalline texture having a grain size of 200 nm or less, and the outermost surface is substantially composed of MgO. A composite soft magnetic material using the Mg-containing oxide film-coated iron powder is also provided. | 06-07-2012 |
Patent application number | Description | Published |
20100209276 | INTERNAL GEAR PUMP ROTOR, AND INTERNAL GEAR PUMP USING THE ROTOR - Flexibility is given in setting the tooth depth and the number of teeth of a pump rotor including a combination of an inner rotor and an outer rotor whose numbers of teeth are different by one, and the discharge amount of the pump is increased by the increase of the tooth depth. At least one of an addendum curve and a dedendum curve of an inner rotor ( | 08-19-2010 |
20120177525 | PUMP ROTOR AND INTERNAL GEAR PUMP USING THE SAME - An object is to meet the demands for increasing the number of teeth of a rotor in an internal gear pump while maintaining a theoretical discharge amount by using an equivalent body configuration so as to enhance the pump performance relating to discharge pulsation due to the increased number of teeth. In a pump rotor | 07-12-2012 |
20130038420 | GREEN COMPACT, METHOD OF MANUFACTURING THE SAME, AND CORE FOR REACTOR - Provided are a green compact from which a low-loss core can be formed, a method of manufacturing the green compact, and a core for a reactor using the green compact. Parts of outer circumferential surfaces of green compacts | 02-14-2013 |
20130127574 | OUTER CORE MANUFACTURING METHOD, OUTER CORE, AND REACTOR - When an outer core that is to be mounted on a reactor is seen in plan, the outer core is a compact that has a plan-view shape in which a side of the outer core that is opposite to a facing side of the outer core, which faces the inner cores, has a smaller dimension in a width direction, which is parallel to a facing surface, than the facing side of the outer core. A method of manufacturing such an outer core includes a preparing step and a compacting step. In the preparing step, coated soft magnetic powder including multiple coated soft magnetic particles formed by coating soft magnetic particles with insulating coated films is prepared as raw-material powder of the outer core. In the compacting step, a compacting space | 05-23-2013 |
20130322135 | COMPACT, METHOD FOR PRODUCING COMPACT, REACTOR, CONVERTER, AND POWER CONVERSION DEVICE - A low-loss compact and a method for producing the compact are provided. | 12-05-2013 |
20140112816 | INTERNAL GEAR PUMP - In an internal gear pump | 04-24-2014 |
20140191839 | COMPACT | 07-10-2014 |
20140199198 | INTERNAL GEAR PUMP - An internal gear pump includes an inner rotor having n teeth and an outer rotor having (n+1) teeth. A tooth profile of the inner rotor is an envelope of a group of locus circles ( | 07-17-2014 |
20140232034 | METHOD FOR MOLDING POWDER MOLD PRODUCT - The present invention relates to a method for molding a powder mold product according to which a powder mold product of uniform quality can be molded with excellent productivity. The present invention includes the steps of: preparing raw material powder | 08-21-2014 |
20140271298 | INTERNAL GEAR PUMP - An internal gear pump includes a pump rotor ( | 09-18-2014 |
20150279532 | COMPACT, METHOD FOR PRODUCING COMPACT - A low-loss compact and a method for producing the compact are provided. A method for producing a compact by using coated soft magnetic powder that includes coated soft magnetic particles constituted by soft magnetic particles and insulating coatings coating outer peripheries of the soft magnetic particles includes a raw material preparation step and an irradiation step. In the raw material preparation step, a raw compact is prepared by press-forming coated soft magnetic powder. In the irradiation step, part of a surface of the raw compact is irradiated with a laser. Irradiating a part of a surface of a raw compact with laser increases the number of disrupted portions of conductive portions where constituent materials of the soft magnetic particles at the surface of the raw compact have become conductive to each other, and the loss of the compact can be decreased. | 10-01-2015 |
Patent application number | Description | Published |
20080212850 | EYELID DETECTION APPARATUS AND PROGRAMS THEREFOR - An eyelid detection apparatus includes a face image storing means storing a plurality of face images of a subject captured at different timings, a change detecting means detecting changes in each face image caused by blinking after processing the plurality of face images stored by the face image storing means, and an eyelid detecting means detecting a position of an eyelid of the subject based on the changes detected by the change detecting means. | 09-04-2008 |
20080226139 | EYELID DETECTION APPARATUS, EYELID DETECTION METHOD AND PROGRAM THEREFOR - An eyelid detection apparatus includes a face-image storing apparatus for storing an image of a face of a subject, an eyelid-candidate extracting apparatus for processing the image stored in the face-image storing apparatus to extract a pair of lines, which becomes a candidate of a combination of a line corresponding to an upper eyelid and a line corresponding to a lower eyelid, a parameter calculating apparatus for calculating a parameter, which indicates a possibility that a pan of the image stored in The face-image storing apparatus, the part corresponding to the pair of lines extracted by the eyelid-candidate extracting apparatus, includes at least one of outer and inner corners of an eye, and an eyelid detecting apparatus for detecting a position of an eyelid of the subject on the basis of the parameter calculated by the parameter calculating apparatus. | 09-18-2008 |
20080226175 | APPARATUS, METHOD, AND PROGRAM FOR FACE FEATURE POINT DETECTION - A face feature point detection apparatus includes an image capturing device, an edge calculating unit calculating edge values indicating a luminance change in a direction, and a detection target determining unit scanning an edge image, which is created by arranging the edge values for corresponding pixels based on pixel arrangement of the face images, with an image window being an aggregation of selected pixels formed in a predetermined shape, the detection target determining unit determining a position of the image window having a largest weighted sum of weighted sums to be a detection position where a detection target is present, providing that the weighted sum is calculated by multiplying the edge value which corresponds to each pixel in the image window by a predetermined value defined on a per-pixel basis and adding up all products of the edge value and the predetermined value. | 09-18-2008 |
20080232650 | FACE REGION DETECTING DEVICE, METHOD, AND COMPUTER READABLE RECORDING MEDIUM - An image capturing section captures a face of an observed person. A position detecting section detects, from a face image expressing the face captured by the image capturing section, one of a position expressing a characteristic of a nose and a position expressing a characteristic of a region between eyebrows. A computing section computes a past relative position of a predetermined region of the face that is based on the position detected in the past by the position detecting section. A region position detecting section detects a position of the predetermined region on the basis of the past relative position computed by the computing section and the current position detected by the position detecting section. | 09-25-2008 |
20090279786 | FACE CENTER POSITION DETECTING DEVICE, FACE CENTER POSITION DETECTING METHOD, AND COMPUTER-READABLE MEDIUM - It is possible to accurately detect a face center position based on an image of a person when the person is wearing glasses even when the person is facing sideways. Face images obtained as a result of photographing a face of a driver using a camera ( | 11-12-2009 |
20100007480 | On-board warning apparatus and warning method - An on-board warning apparatus of the invention includes an inattentive time measuring device that measures a duration of an inattentive state of a driver; a dozing time measuring device that measures a duration of a dozing state of the driver; a first warning output device that warns the driver when the measured inattentive time exceeds a first predetermined period of time Ta; and a second warning output device that warns the driver when the measured dozing time exceeds a second predetermined period of time Tb. The first predetermined time Ta is shorter than the second predetermined period of time Tb. | 01-14-2010 |
Patent application number | Description | Published |
20090241532 | Drain structure of torque converter - A drain structure where oil sucked from the oil pan by the oil pump is supplied to the torque converter and circulates therein, and the oil is drained into the transmission case through a drain oil passage; and the drain oil passage passes through a gap between the torque converter and the oil pump, is guided to an upper part facing a fitting surface between the oil pump and the transmission case, and is further guided from the upper part to a part under the oil pump and opens above an oil level in the transmission case, and drain oil from the drain oil passage is discharged toward the oil pan. | 10-01-2009 |
20090241727 | Transmission case - A transmission case includes a housing that accommodates a starting device, the housing having rib portions on an inner surface; and a speed change mechanism case connected to the housing, the speed change mechanism case accommodating a speed change mechanism, wherein a thin wall portion is provided in the housing by a groove formed in the housing, and the transmission case is structured such that stress is concentrated on the thin wall portion by at least one of the rib portions when an impact load is applied to the transmission case. | 10-01-2009 |
20100151993 | Vehicle drive device - A vehicle drive device includes a case with a case main body portion accommodating the speed change mechanism, and a connection case portion connecting the engine and the case main body portion and having a diameter increased toward the engine; a hydraulic pressure control device that is provided under the speed change mechanism, and controls a hydraulic pressure to be supplied to the speed change mechanism; and an electric pump that generates the hydraulic pressure to be supplied to the speed change mechanism through the hydraulic pressure control device. | 06-17-2010 |
20110212809 | VEHICLE DRIVING APPARATUS - A vehicle driving apparatus configured with a drive power source, a fluid coupling, a transmission apparatus; and a control apparatus. A rotation of a drive input member driven by the drive power source is transmitted to a shift input member via the fluid coupling and a rotation of the shift input member is shifted by the transmission apparatus and then transmitted to an output member. When a state shift command for shifting from a non-transmission state to a transmission state is input into a control apparatus in a state in which the drive power source does not generate a driving force, the control apparatus performs a shift input rotation operation before engaging a frictional engagement element and shifting to the transmission state by causing the drive power source to generate the driving force and rotating the shift input member via the fluid coupling while maintaining the non-transmission state. | 09-01-2011 |
Patent application number | Description | Published |
20120220169 | ELECTRONIC COMPONENT SOCKET - An electronic component socket includes a housing having a housing portion surrounded with a side wall and a bottom wall; multiple terminals to be disposed so as to pass through the bottom wall of the housing; and a metal plate configured to form at least a portion of the bottom wall of the housing, having multiple through-holes containable with the multiple terminals; with the plurality of terminals including a contact portion contactable with an electrode of an electronic component containable with the housing, and a connection portion connectable with a round of a substrate allocatable on the opposite side of the housing of the bottom wall; and with the metal plate being embedded in the housing so that a portion thereof is exposed. | 08-30-2012 |
20120295489 | ELECTRONIC COMPONENT SOCKET - A plurality of intermediate terminal portions are evenly arranged and held in an insulating housing. Each intermediate terminal portion has a structure in which a first metal piece and a second metal piece overlap each other. In the first metal piece, a curved portion and a flat portion form a first elastic piece. In the second metal piece, a curved portion and a flat portion form a second elastic piece. When an external force is not exerted, the first elastic piece of the first metal piece and the second elastic piece of the second metal piece are separated from each other. When the intermediate terminal portion is pressed against the component electrode portion of the electronic component, first only the first metal piece is deformed, and then the first metal piece and the second metal piece are deformed together. | 11-22-2012 |
20130303005 | SOCKET FOR ELECTRONIC COMPONENTS - A socket for electronic components configured to connect each electrode terminal of an electronic component to a wiring of a wiring board with a shield member having electrical conductivity and multiple openings being disposed on the wiring board, with a contact unit configured to electrically conduct the electrode terminal of the electronic component and the wiring of the wiring board PB being disposed in the openings, and with the contact unit including a ground contacting portion configured to electrically conduct with the shield member, and when the contact unit is for grounding, grounding is performed by the ground contacting portion and the shield member being brought into contact and electrically conducting. | 11-14-2013 |
20130323969 | SOCKET FOR ELECTRONIC COMPONENTS - A socket for electronic components includes a shield plate assembly that is formed by combining first shield plates with second shield plates in the form of a lattice and has conductivity, and contact units electrically connected to electrode terminals of electronic components are disposed in openings of the lattice of the shield plate assembly so that the electrode terminals are electrically connected to the wiring of a wiring board. The shield plate assembly is formed in a shape where lines where openings of the lattice are lined up in a first direction are arranged side by side in a second direction orthogonal to the first direction, and the openings of the adjacent lines are formed so as to be shifted relative to the openings of the next lines in the first direction by a half of the length of the side of the opening that extends in the first direction. | 12-05-2013 |
Patent application number | Description | Published |
20110007859 | PHASE-LOCKED LOOP CIRCUIT AND COMMUNICATION APPARATUS - A PLL circuit of which low power consumption and miniaturization are satisfied at the same time is provided. A phase comparator of the PLL circuit includes a counter and a time-to-digital converter. The counter receives a reference clock signal and a low frequency clock signal obtained by dividing an output of a digital controlled oscillator, and a high frequency clock signal. The counter detects a phase difference between the reference clock signal and the low frequency clock signal by counting the clock number of the high frequency clock signal. The time-to-digital converter receives the reference clock signal and the low frequency clock signal. The time-to-digital converter detects the phase difference between the reference clock signal and the low frequency clock signal to the accuracy of a time period shorter than a cycle of the high frequency clock signal, after the output of counter reaches a predetermined range. | 01-13-2011 |
20120019328 | HIGH FREQUENCY SIGNAL PROCESSING DEVICE - A high frequency signal processing device is capable of carrying out high-accuracy modulation by a PLL circuit. A digital loop is configured in addition to an analog loop having, for example, a phase frequency detector, a charge pump circuit, and a loop filter. A digital calibration circuit is provided which searches for the optimal code set to a capacitor bank upon frequency modulation. Upon the search for the optimal code, a calibration controller first sets a division ratio based on a center frequency to a divider and determines the value of a voltage control signal using the analog loop. Then, the loop filter holds the value of the voltage control signal therein, and a division ratio corresponding to a “center frequency+modulated portion” is set to the divider, thereby operating the digital loop. The optimal code is obtained by a convergent value of the digital loop. | 01-26-2012 |
20130257547 | SEMICONDUCTOR DEVICE AND VARIATION INFORMATION OBTAINING PROGRAM - A conventional semiconductor device has a problem that acquisition of variation information of circuit elements constructing the semiconductor device is not easy. According to an embodiment, a semiconductor device has a control circuit which makes an oscillation circuit operate by at least two operation current values, obtains first frequency information related to frequency of an output signal corresponding to a first operation current value and second frequency information related to frequency of an output signal corresponding to a second operation current value, and obtains manufacture variation information of a circuit element on the basis of the difference between the first and second frequency information. | 10-03-2013 |
20140266342 | HIGH-FREQUENCY SIGNAL PROCESSING DEVICE - A high-frequency signal processing device having a frequency synthesizer (PLL: Phase Locked Loop) is provided. A control circuit measures oscillation frequencies obtained upon setting a bias current of an oscillation circuit to first and second bias setting values and acquires a frequency difference amount of the oscillation frequencies. The frequency difference amount may be acquired as difference amount of setting values of a coarse adjustment capacitance setting signal (CTRM) using, for example, an automatic frequency selector unit. The control circuit retains a relationship of a difference amount of bias setting values and a difference value of setting values of the CTRM and approximating the relationship to a linear function. Thereafter, the control circuit defines, upon switching the bias current during locking of the PLL, the CTRM based on the linear function and switches the CTRM together with the bias current. | 09-18-2014 |
20150078503 | HIGH-FREQUENCY SIGNAL PROCESSING DEVICE AND WIRELESS COMMUNICATION SYSTEM - To reduce the influence of a spurious in a high-frequency signal processing device and a wireless communication system each provided with a digital type PLL circuit. In a digital type PLL circuit including a digital phase comparator unit, a digital low-pass filter, a digital control oscillator unit, and a multi-module driver unit (frequency divider unit), the clock frequency of a clock signal in the digital phase comparator unit is configured selectably among a plurality of options. The clock frequency is selected among frequencies which are integer multiples of a reference frequency, in accordance with which frequency band of a standard is to be set for an oscillation output signal of the digital control oscillator unit. | 03-19-2015 |
Patent application number | Description | Published |
20140135205 | SOLID CATALYST COMPONENT FOR OLEFIN POLYMERIZATION, AND CATALYST - A solid catalyst component for olefin polymerization and a catalyst are disclosed that exhibit high catalytic activity when used for gas-phase polymerization, suppress rapid reactions in the initial stage of polymerization relative to the polymerization activity, and can produce a propylene polymer in high yield while maintaining high stereoregularity. The solid catalyst component for olefin polymerization includes magnesium, titanium, a halogen, and an internal electron donor, the solid catalyst component including an asymmetrical phthalic diester represented by the following general formula (1) in a molar ratio of 0.2 to 0.8 relative to the total content of the internal electron donor. | 05-15-2014 |
20140206827 | METHOD FOR PRODUCING SOLID CATALYST COMPONENT FOR OLEFIN POLYMERIZATION, CATALYST FOR OLEFIN POLYMERIZATION, AND METHOD FOR PRODUCING OLEFIN POLYMER - A method for producing a solid catalyst component for olefin polymerization includes bringing a magnesium compound, a tetravalent titanium halide compound, and an electron donor compound represented by a general formula (1) into contact with each other, reacting the mixture, washing the resulting reaction product to obtain a solid component, bringing the solid component, a tetravalent titanium halide compound, and an electron donor compound represented by a general formula (2) into contact with each other, reacting the mixture, and washing the resulting reaction product. | 07-24-2014 |
20140221583 | SOLID CATALYST COMPONENT FOR OLEFIN POLYMERIZATION, CATALYST FOR OLEFIN POLYMERIZATION, AND METHOD FOR PRODUCING OLEFIN POLYMER - An olefin polymer that is obtained using an olefin polymerization catalyst that includes a solid catalyst component for olefin polymerization that includes titanium, magnesium, a halogen, and an ester compound (A) represented by the following formula (1): R | 08-07-2014 |
20140343237 | SOLID CATALYST COMPONENT FOR POLYMERIZATION OF OLEFIN, CATALYST FOR POLYMERIZATION OF OLEFIN, AND METHOD FOR PRODUCING OLEFIN POLYMER - A solid catalyst component for olefin polymerization includes titanium, magnesium, a halogen, and a compound represented by the following formula (1): R | 11-20-2014 |
Patent application number | Description | Published |
20090267664 | PLL CIRCUIT - In an ADPLL composed of a digital circuit, a technique improving phase difference detection in a vicinity of a phase difference of 0 (zero) is provided. A feedback loop comprises a PFD comparing phases and frequencies of a reference signal and a feedback signal, a TDC converting an output of the PFD into a digital value, a DLF removing a high frequency noise component from an output of the TDC, a DCO controlled based on an output of the DLF and a DIV frequency-dividing an output the DCO and outputting the feedback signal. An offset value is added at any portion of the feedback loop, a phase of the feedback signal is controlled and a value other than 0 is inputted to the TDC even when the ADPLL is locked. | 10-29-2009 |
20100097150 | PLL CIRCUIT - A technique for suppressing quantization noise generated due to digitizing an analog circuit in a PLL circuit is provided. The PLL circuit comprises: a digital phase frequency detector which detects (compares) phases and frequencies of a reference signal and a frequency-divided signal and converts the same to a digital value; a digital loop filter which eliminates high-frequency noise components from an output of the digital phase frequency comparator; a digital-analog converter which converts a digital value of an output of the digital loop filter to an analog value; an analog filter which eliminates a high-frequency noise component from an output of the digital-analog converter; a voltage controlled oscillator whose frequency is controlled based on an output of the analog filter; and a frequency divider which divides the frequency of the voltage controlled oscillator and outputs the frequency-divided signal. | 04-22-2010 |
20110064150 | PLL CIRCUIT WITH IMPROVED PHASE DIFFERENCE DETECTION - In an ADPLL composed of a digital circuit, a technique improving phase difference detection in a vicinity of a phase difference of 0 (zero) is provided. A feedback loop comprises a PFD comparing phases and frequencies of a reference signal and a feedback signal, a TDC converting an output of the PFD into a digital value, a DLF removing a high frequency noise component from an output of the TDC, a DCO controlled based on an output of the DLF and a DIV frequency-dividing an output the DCO and outputting the feedback signal. An offset value is added at any portion of the feedback loop, a phase of the feedback signal is controlled and a value other than 0 is inputted to the TDC even when the ADPLL is locked. | 03-17-2011 |
Patent application number | Description | Published |
20090286391 | SEMICONDUCTOR DEVICE FABRICATION METHOD - According to one aspect of the invention, there is provided a qsemiconductor device fabrication method having: | 11-19-2009 |
20100059180 | Method of manufacturing semiconductor device and cleaning apparatus - The disclosure concerns a manufacturing method of a semiconductor device includes dry-etching a semiconductor substrate or a structure formed on the semiconductor substrate; supplying a solution onto the semiconductor substrate; measuring a specific resistance or a conductivity of the supplied solution; and supplying a removal solution for removing the etching residual material onto the semiconductor substrate for a predetermined period of time based on the specific resistance or the conductivity of the solution, when an etching residual material adhering to the semiconductor substrate or the structure is removed. | 03-11-2010 |
20110014793 | Post-dry etching cleaning liquid composition and process for fabricating semiconductor device - A post-dry etching cleaning liquid composition for cleaning a substrate after dry etching is provided, the cleaning liquid composition containing at least one type of fluorine compound, glyoxylic acid, at least one type of organic acid salt, and water. With regard to the fluorine compound, ammonium fluoride may be used. With regard to the organic acid salt, at least one of ammonium oxalate, ammonium tartarate, ammonium citrate, and ammonium acetate may be used. | 01-20-2011 |
Patent application number | Description | Published |
20130008868 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS - According to one embodiment, a substrate processing method is disclosed. The method can include treating a substrate with a first liquid. The substrate has a structural body formed on a major surface of the substrate. The method can include forming a support member supporting the structural body by bringing a second liquid into contact with the substrate wetted by the first liquid, and changing at least a portion of the second liquid into a solid by carrying out at least one of causing the second liquid to react, reducing a quantity of a solvent included in the second liquid, and causing at least a portion of a substance dissolved in the second liquid to be separated. The method can include removing the support member by changing at least a part of the support member from a solid phase to a gaseous phase, without passing through a liquid phase. | 01-10-2013 |
20130196512 | METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE - According to one embodiment, a method is disclosed for manufacturing a semiconductor device. The method can rinse a substrate with water, a plurality of protruding patterns being formed on the substrate. The method can dry the substrate by removing water from a recess between the protruding patterns by irradiating microwaves. | 08-01-2013 |
20140061752 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - According to one embodiment, a method for manufacturing a semiconductor device includes forming a stacked body on a substrate. The stacked body includes a plurality of first conductive layers including a metallic element as a main component and a plurality of second conductive layers including a metallic element as a main component provided respectively between the first conductive layers. The method includes making a hole to pierce the stacked body. The method includes making a slit to divide the stacked body. The method includes making a gap between the first conductive layers by removing the second conductive layers by etching via the slit or the hole. The method includes forming a memory film including a charge storage film at a side wall of the hole. The method includes forming a channel body on an inner side of the memory film inside the hole. | 03-06-2014 |
20140284691 | METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE AND SEMICONDUCTOR MEMORY DEVICE - According to one embodiment, a method is disclosed for manufacturing a semiconductor memory device. The method includes forming a first stopper film forming a lower gate layer, making a recess in the lower gate layer, filling a sacrificial film into the recess, forming a second stopper film, making an opening in the second stopper film, forming a stacked body. The stacked body includes electrode films and insulating films. The method includes, making a slit in the stacked body, making a hole in the stacked body, removing the sacrificial film via the hole, forming a memory film including a charge storage film. The method includes forming a channel body on a side wall of the memory film. An etching rate of the first stopper film and the second stopper film is lower than an etching rate of the electrode films and the insulating films. | 09-25-2014 |
Patent application number | Description | Published |
20100314357 | RESIN-MOLDED VACUUM VALVE - A resin-molded vacuum valve has an internally hermetically sealed vacuum vessel, a fixed axis having a fixed electrode at one end thereof, and a movable axis having a movable electrode at one end thereof and facing the fixed axis in the vacuum vessel. The fixed and movable electrodes are fixedly and movably attached, respectively, to respective ends of the vacuum vessel with a contact therebetween. Further, a conductor connected to the fixed axis extends from a pull-out opening. First, second, and third electric field concentration alleviating shields are disposed near the fixed axis, near the movable axis, and near the pull-out opening, respectively. Buffer layers cover the outer peripheries of the vacuum valve and the conductor, and a resin insulator allows the movable axis to be movable, and buries and fixes the fixed axis, the vacuum vessel, the conductor, the buffer layers, and the electric field concentration alleviating shields. | 12-16-2010 |