Patent application number | Description | Published |
20120260745 | SENSOR DEVICE, FORCE DETECTION DEVICE, AND ROBOT - A sensor device includes a sensor element which is formed by laminating a piezoelectric substance and an electrode, a first case and a second case which house the sensor element therein, and a pressing portion which presses the sensor element in the lamination direction of the piezoelectric substance and the electrode via the first and second cases. | 10-18-2012 |
20130112010 | SENSOR ELEMENT, FORCE DETECTING DEVICE, AND ROBOT - A sensor element is formed by, when an α axis, a β axis orthogonal to the α axis, and a γ axis orthogonal to the α axis and the β axis are set, laminating piezoelectric substrates and electrodes in the γ axis direction. The sensor element includes connecting sections arranged such that a part of external sections of the electrodes aligns with a part of external sections of the piezoelectric substrates. The connecting sections are arranged not to align with one another in a direction of the γ axis. Conductors that electrically connect the connecting sections and external connecting sections are formed along outer peripheral sections of the piezoelectric substrates. | 05-09-2013 |
20130152700 | SENSOR DEVICE, SENSOR MODULE, ROBOT AND METHOD OF MANUFACTURING SENSOR DEVICE - A sensor device includes a package, a sensor element that is disposed in the package, and a lid that seals the package, in which the sensor element includes a contacting surface that comes in contact with the lid, the package includes a joint surface which is joined to the lid, and the contacting surface and the joint surface are not on the same flat surface. | 06-20-2013 |
20130152701 | SENSOR DEVICE, SENSOR MODULE, FORCE SENSING APPARATUS, AND ROBOT - A sensor device includes a package, a sensor element that is disposed in the package, and a lid that seals the package. The lid includes a flexible portion that surrounds the vicinity of the sensor element in a plan view. | 06-20-2013 |
20130233089 | SENSOR MODULE, FORCE DETECTING DEVICE, AND ROBOT - A sensor module includes a first member including a first recess in which a piezoelectric element including an electrode is arranged, a second member joined to the first member, a first plate in contact with the second member, a second plate in contact with the first member, and a fastening section configured to fasten the first plate and the second plate. A first projection projecting toward the second member is provided on the first plate. The internal height of the first recess of the first member is larger than the height of the piezoelectric element. The piezoelectric element is in contact with the second member. | 09-12-2013 |
20140053660 | SENSOR DEVICE, SENSOR MODULE, FORCE DETECTION DEVICE, AND ROBOT - A package having a recessed section, a sensor element arranged in the recessed section and having a piezoelectric material, a lid joined to the package and sealing the recessed section of the package are provided. The package has a first hollow portion which a part of the sensor element fits with, on an inner bottom surface of the recessed section. The lid has a second hollow portion which a part of the sensor element fits with. | 02-27-2014 |
20150120051 | SENSOR DEVICE, FORCE DETECTING DEVICE, ROBOT, ELECTRONIC COMPONENT CONVEYING APPARATUS, ELECTRONIC COMPONENT INSPECTING APPARATUS, AND COMPONENT MACHINING APPARATUS - A sensor device includes a charge output element including a plurality of piezoelectric bodies and an internal electrode formed between the piezoelectric bodies, a package that houses the charge output element, first conductive paste electrically connected to a plurality of the internal electrodes, and second conductive paste that electrically connects the first conductive paste and an output terminal and has a modulus of elasticity lower than a modulus of elasticity of the first conductive paste. A Young's modulus of the first conductive paste is equal to or higher than 3.4 GPa and equal to or lower than 5.0 GPa and a Young's modulus of the second conductive paste is equal to or higher than 0.1 GPa and equal to or lower than 0.2 GPa. | 04-30-2015 |
20150120052 | SENSOR ELEMENT, FORCE DETECTION DEVICE, ROBOT, ELECTRONIC COMPONENT TRANSPORT DEVICE, ELECTRONIC COMPONENT INSPECTION DEVICE, AND COMPONENT PROCESSING DEVICE - A sensor element includes, when three axes orthogonal to one another are set to be an A-axis, a B-axis, and a C-axis, first piezoelectric plate that is configured to have an X cut quartz crystal plate and outputs a charge in response to an external force along the A-axis direction, second piezoelectric plate that is configured to have a Y cut quartz crystal plate, is stacked in the A-axis direction with the first piezoelectric plate, and outputs a charge in response to the external force in the B-axis direction, and third piezoelectric plate that is configured to have a Y cut quartz crystal plate, is stacked in the A-axis direction so as to interpose the second piezoelectric plate between the first piezoelectric plate and the third piezoelectric plate and be arranged to turn around the A-axis, and outputs a charge in response to the external force in the C-axis direction. | 04-30-2015 |