Patent application number | Description | Published |
20080220592 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PLANARIZATION METHOD - A substrate processing apparatus has a processing space provided with a holding stand for holding a substrate to be processed. A hydrogen catalyzing member is arranged in the processing space to face the substrate and for decomposing hydrogen molecules into hydrogen radicals H*. A gas feeding port is arranged in the processing space on an opposite side of the hydrogen catalyzing member to the substrate for feeding a processing gas including at least hydrogen gas. An interval between the hydrogen catalyzing member and the substrate on the holding stand is set less than the distance that the hydrogen radicals H* can reach. | 09-11-2008 |
20090229755 | Plasma processing apparatus - A plasma processing apparatus comprises a processing vessel defined by an outer wall and provided with a stage that holds a substrate to be processed thereon, an evacuation system coupled to the processing vessel, a microwave window provided on the processing vessel as a part of the outer wall so as to face the substrate to be processed on the stage, a plasma gas supplying part supplying a plasma gas to the processing vessel, and a microwave antenna provided on the processing vessel in correspondence to the microwave. The plasma gas supplying part includes a porous medium and the plasma gas supplying part supplies the plasma gas through the porous medium. | 09-17-2009 |
20100178775 | SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND METHOD FOR MANUFACTURING THE SAME - A shower plate is disposed in a processing chamber in a plasma processing apparatus, and plasma excitation gas is released into the processing chamber so as to generate plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 μm to 70 μm, and/or a porous gas-communicating body having pores having a maximum diameter of not more than 75 μm communicating in the gas-communicating direction are sintered and bonded integrally with the inside of each of a plurality of vertical holes which act as release paths for the plasma excitation gas. | 07-15-2010 |
20100275981 | APPARATUS AND METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENTS, AND PHOTOELECTRIC CONVERSION ELEMENT - An apparatus and method for manufacturing photoelectric conversion elements, and a photoelectric conversion element, the apparatus and method being capable of highly efficiently forming a film at a high speed with microwave plasma, preventing oxygen from mixing, and reducing the number of defects. The invention provides a photoelectric conversion element manufacturing apparatus | 11-04-2010 |
20120125376 | WET PROCESSING APPARATUS AND WET PROCESSING METHOD - A wet processing apparatus holds on a stage a substrate to be processed and carries out a wet treatment by rotating the stage. The substrate is held by the stage, with the center of the substrate being offset from the rotation center of the stage, using a Bernoulli chuck which causes an inert gas to flow to a back surface of the substrate, so that the substrate is eccentrically rotated along with the rotation of the stage. A first gas supply passage which is used for the Bernoulli chuck is provided at a rotation shaft portion in the stage and the stage is also provided with second gas supply passages which communicate with the first gas supply passage to thereby introduce the inert gas to the back surface of the substrate. The second gas supply passages are axisymmetric with respect to a central axis of the substrate. | 05-24-2012 |
20120125765 | PLASMA PROCESSING APPARATUS AND PRINTED WIRING BOARD MANUFACTURING METHOD - It is an object of the present invention to provide a wiring board plasma processing apparatus capable of improving throughput and achieving reduction in running cost while a sputtering process is employed in manufacturing a wiring board. The wiring board plasma processing apparatus of the present invention has, in a same plasma processing chamber, a surface processing portion provided with a plasma source and performing a pretreatment of a board to be processed, and a plurality of sputtering film forming portions forming a seed layer formed of a plurality of films. | 05-24-2012 |
20130154059 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE - A semiconductor device manufacturing method includes exciting plasma, applying RF power onto a target substrate to generate substrate bias and performing an ion implantation plural times by applying the RF power in the form of pulses. | 06-20-2013 |
20130235545 | MULTILAYER WIRING BOARD - In a multilayer wiring board | 09-12-2013 |
20130295709 | METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENTS - “The invention provides a photoelectric conversion element manufacturing apparatus that forms a semiconductor stack film on a substrate by using microwave plasma CVD. The apparatus includes a chamber which is a enclosed space containing a base, on which the a subject substrate for thin-film formation is mounted, a first gas supply unit which supplies plasma excitation gas to a plasma excitation region in the chamber, a pressure regulation unit which regulates pressure in the chamber, a second gas supply unit which supplies raw gas to a plasma diffusion region in the chamber, a microwave application unit which applies microwaves into the chamber, and a bias voltage application unit which selects and applies a substrate bias voltage to the substrate according to the type of gas.” | 11-07-2013 |
20140151853 | Ion Implantation Apparatus, Ion Implantation Method, and Semiconductor Device - In the plasma-based ion implantation for accelerating positive ions of a plasma and implanting the positive ions into a substrate to be processed on a holding stage in a processing chamber where the plasma has been excited, ion implantation is achieved in the following manner: an RF power having a frequency of 4 MHz or greater is applied to the holding stage to cause a self-bias voltage to generate on the surface of the substrate. The RF power is applied a plurality of times in the form of pulses. | 06-05-2014 |
20150069674 | SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND METHOD FOR MANUFACTURING THE SAME - A shower plate is disposed in a processing chamber in a plasma processing apparatus, and plasma excitation gas is released into the processing chamber so as to generate plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 μm to 70 μm, and/or a porous gas-communicating body having pores having a maximum diameter of not more than 75 μm communicating in the gas-communicating direction are sintered and bonded integrally with the inside of each of a plurality of vertical holes which act as release paths for the plasma excitation gas. | 03-12-2015 |
20150235817 | MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD - A magnetron sputtering apparatus including a first magnet array arranged helically, a second magnet array arranged side by side with the first magnet array, a stationary magnet disposed in the circumference of the first and second magnet arrays, a magnet rotation mechanism causing the first and second magnet arrays to rotate around a rotation axis, and a plurality of magnetic induction members which is disposed between the outer perimeter of the first and second magnet arrays and the stationary magnet in a direction crossing the rotation axis direction and arranged in the rotation axis direction when viewed from the side of a target, and attracts magnetic force lines coming out from the first magnet array to guide the magnetic force lines to the side of the target or attracts magnetic force lines coming in from the side of the target to guide the magnetic force lines to the second magnet array. | 08-20-2015 |
Patent application number | Description | Published |
20120305072 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND BACK-CONTACT SOLAR CELL - A method is provided for manufacturing a semiconductor device, wherein a p-type region and/or n-type pattern is formed on a surface of a semiconductor substrate, including ejecting at least one of etching paste, masking paste, doping paste, and electrode paste from an ejecting orifice of a nozzle toward the surface of the semiconductor substrate to form beads formed of the paste between the semiconductor substrate and the ejecting orifice and moving the semiconductor substrate relative to the nozzle thereby the paste is applied to the surface of the semiconductor substrate in a stripe shape. | 12-06-2012 |
20130125365 | PHOSPHOR-CONTAINING CURED SILICONE, PROCESS FOR PRODUCTION OF SAME, PHOSPHOR-CONTAINING SILICONE COMPOSITION, PRECURSOR OF THE COMPOSITION, SHEET-SHAPED MOLDINGS, LED PACKAGE, LIGHT-EMITTING DEVICE, AND PROCESS FOR PRODUCTION OF LED-MOUNTED SUBSTRATE - A phosphor-containing cured silicone that is a cured silicone which has a structure represented by general formulae ( | 05-23-2013 |
20140210338 | PHOSPHOR-CONTAINING SHEET, LED LIGHT EMITTING DEVICE USING THE SAME, AND METHOD FOR MANUFACTURING LED - A phosphor-containing sheet having a storage modulus of 0.1 MPa or more at 25° C. and a storage modulus of less than 0.1 MPa at 100° C., wherein a resin main component of the phosphor-containing sheet is a crosslinked product formed by subjecting a crosslinkable silicone composition containing a specific composition to a hydrosilylation reaction. This phosphor-containing sheet provides a phosphor sheet having good shapability and high adhesive power as a phosphor sheet bonded to an LED chip as a wavelength conversion layer. | 07-31-2014 |
Patent application number | Description | Published |
20140014804 | APPARATUS FOR SUPPORTING BODY PART OF WORKER - An apparatus for supporting a worker's body part, for example a surgeon's arm, is provided. The body part is supported by a base movably supported by a support. The apparatus has a free mode and a limitation mode, which are switchable. When it is determined that the body part is attempting to move the base or a fastening member, the operating mode is switched to the free mode. When it is determined that the body part is not attempting to move the base or the fastening member, the operating mode is switched to the limitation mode. The free mode allows the fastening member to fasten the body part on the base and allows a brake to release limitations to the motions of the base. The limitation mode allows the fastening member to release the body part from being fastened and allows the brake to limit the motions of the base. | 01-16-2014 |
20140306086 | APPARATUS FOR SUPPORTING AND FOLLOWING MOVEMENT OF A PART OF PERSON'S BODY - An apparatus includes a brace being mounted on a person's body part and having a hard fitting surface. The apparatus also includes a load device, a support, a securing member, a brake, a switch device, and a soft film. The load device has a hard receiving surface receiving the fitting surface of the brace. The support movably supports the load device. The securing member secures the fitting surface to the receiving surface and enables the load device to move and follow movement of the person's body part and the brace against resistance applied from the support. The brake limits movement of the load device. The switch device switches operation modes of the apparatus, at least, between a free mode and a limiting mode. The soft film is arranged between the receiving and fitting surfaces for smooth movement of the person's body part on the load device in the limiting mode. | 10-16-2014 |
20140343369 | OPERATION-MODE INDICATING SYSTEM FOR BODY SUPPORT APPARATUS, AND BODY SUPPORT APPARATUS - In an operation-mode indicating system, a first light emitting device is located within a peripheral visual field of an operator and is controllably connected to a controller. The peripheral visual field is defined around a center visual field of the operator while the operator is looking at a predetermined site. A body support apparatus is capable of performing an operation to the predetermined site. The controller controls the first light emitting device to emit first light in a first operation mode of the body support apparatus and second light in a second operation mode of the body support apparatus. The first light and the second light are visually distinguishable from each other. | 11-20-2014 |
20150129741 | ARM SUPPORT APPARATUS - In an arm support apparatus, a grippable member is connected to a longitudinal mount and is located such that a part of the grippable member is grippable by a hand of an arm when a part of the arm is mounted on the longitudinal mount. The hand is located to be closer to the first end of the longitudinal mount than to the second end of the longitudinal mount. A second limiter limits movement of the part of the arm mounted on the longitudinal mount in both a first direction and a second direction. The first direction is away from the second end of the longitudinal mount in the longitudinal direction. The second direction is parallel to the lateral width of the longitudinal mount and perpendicular to the longitudinal direction. | 05-14-2015 |
20150202017 | ARM SUPPORT APPARATUS - In arm support apparatus, a longitudinal mount has opposing first and second ends. An elbow locator is provided on the first end of the mount. The elbow locator locates an operator's elbow when the operator's forearm is mounted on the mount. A rotary joint of a multijoint arm has a rotary axis having a vertical component. The mount is rotatably joined to the rotary joint. While the forearm is mounted on the mount so that the elbow of the operator's arm is located by the elbow locator, the rotary axis is located with a distance with respect to the elbow to enable both the first and second ends of the mount to swing about the rotary axis. The distance is set to be equal to or longer than | 07-23-2015 |
20150257843 | ARM SUPPORT APPARATUS - In an arm support apparatus, an weight attachment is provided for at least one specified link in links of a support member supporting a mount to be movable based on rotation of at least one of the links around a corresponding at least one of the joints. The at least one specified link is associated with at least one specified degree of freedom. The weight attachment is configured such that one or more weight members are attachable thereto. When the one or more weight members are attached to the weight attachment, the weight attachment is configured to substantially balance in weight with the mount on which the part of the arm is mounted while applying supporting force to the part of the arm mounted on the mount. | 09-17-2015 |
Patent application number | Description | Published |
20140331662 | HYDRAULIC CONTROL DEVICE FOR FORKLIFT - A hydraulic control device for a forklift includes a hydraulic pump, a single electric motor for driving the hydraulic pump, an outflow control mechanism provided between a lift cylinder and the hydraulic pump, a flow control valve provided between the outflow control mechanism and a draining portion, and a controller. When a lowering operation of a fork and either forward or rearward mast tilting operations of a mast are performed at the same time, the controller controls the electric motor based on a target speed of the hydraulic pump. The flow control valve controls the flow rate of hydraulic fluid from the lift cylinder to the hydraulic pump and the flow rate from the lift cylinder to the draining portion in accordance with the difference between the actual rotation speed of the hydraulic pump and the target rotation speed of the hydraulic pump. | 11-13-2014 |
20150013324 | FORKLIFT HYDRAULIC CONTROL APPARATUS - An outlet port of a hydraulic pump/motor and a bottom chamber of a lift cylinder are connected to each other by a hydraulic fluid passage. A hydraulic fluid passage that is connected to a hydraulic fluid tank is formed to branch off the hydraulic fluid passage. A flow control valve controls the hydraulic fluid delivered from the lift cylinder when the fork is lowered, thereby regulating the flow rate of hydraulic fluid supplied to the hydraulic pump/motor and the flow rate of hydraulic fluid supplied to the hydraulic fluid tank. If regenerative operation can be performed, the flow control valve is closed and hydraulic fluid is delivered to the hydraulic pump/motor. If regenerative operation cannot be performed, the flow control valve is opened and hydraulic fluid is delivered to the hydraulic fluid tank. In either case, the fork can be lowered at an instructed speed. | 01-15-2015 |
20150275936 | INDUSTRIAL VEHICLE - A hydraulic mechanism is mounted on a forklift. The hydraulic mechanism has a control valve and a pressure compensation circuit for compensating pressure within the hydraulic mechanism. The pressure compensation circuit has a relief pressure valve and an unloading valve for releasing pressure within the pressure compensation circuit to a discharge oil passage. Upon instructed to perform cargo handling operation, the unloading valve is switched to an open state, and the relief pressure valve is thereby actuated, so that rapid increase of pressure within the circuit is avoided. Further, the unloading valve is switched to an open state, and the pressure within the hydraulic mechanism is thereby released to the discharge oil passage, so that the cargo handling operation by the tilt cylinder and the lift cylinder is restricted. | 10-01-2015 |
Patent application number | Description | Published |
20150020313 | COUCH WITH PATIENT-INCLINING DEVICE - A couch with a patient-inclining device ( | 01-22-2015 |
20150203937 | METHOD FOR REDUCING ALUMINA OR MAGNESIA BY UTILIZING SUPERSONIC GAS FLOW - An alumina- or magnesia-reducing process in which a greenhouse gas or substance harmful to the human body is not emitted, which can achieve improved energy efficiency in comparison with the Hall-Heroult or Pidgeon methods. The process includes: introducing an alumina or magnesia powder with a carrier gas to the upstream side of a throat provided on a reducing unit; pressure-transferring the powder and carrier gas to the throat by an operative gas introduced to the upstream side of the throat; irradiating the throat with a laser beam to convert the alumina or magnesia into a plasma state and dissociate the alumina or magnesia thermally; jetting the thermally dissociated product through a nozzle provided on the downstream side of the throat at a supersonic speed to form a frozen flow; and isolating aluminum or magnesium. Hydrogen may be added to the operative gas to accelerate the reduction of alumina or magnesia. | 07-23-2015 |
20150203958 | METHOD FOR SUPPLYING DEPOSITION MATERIAL, METHOD FOR PRODUCING SUBSTRATE, CONTROL DEVICE AND DEPOSITION DEVICE - Provided is a method for supplying a deposition material including a heating step of heating and evaporating a deposition material accommodated in a material accommodating section in which the deposition material is accommodated, a supply step of supplying the deposition material into the material accommodating section by feeding and melting a deposition material in a solid phase toward the melted deposition material in the material accommodating section, and a melted state detection step of detecting a melted state of the deposition material in the solid phase after supply in the supply step. | 07-23-2015 |
20150226425 | Method for Utilizing Aluminum as Fuel - A method to provide renewable energy by utilizing aluminum, which is easy to store and stably suppliable, as a fuel without harming the environment or human body. Aluminum powder and oxygen are introduced into a combustion chamber and subjected to stationary combustion. The stationary combustion of aluminum is conducted by controlling either or both amounts of aluminum powder and oxygen introduced into the chamber. The amount of the aluminum powder is controlled by the amount of aluminum powder sucked into a jet stream of a carrier gas that introduces the powder into the combustion chamber, or by the amount of an impurity to be mixed with the powder. The amount of oxygen is controlled by the mixing ratio of oxygen to a diluent gas introduced simultaneously. The alumina from the combustion is recovered, reduced to aluminum, and recycled as a fuel. | 08-13-2015 |