Tetsuo Yamamoto
Tetsuo Yamamoto, Toyama - Shi JP
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20090241835 | Substrate processing apparatus - A substrate processing apparatus includes a processing chamber in which a substrate is mounted, a gas supply unit that supplies processing gas into the processing chamber, a gas exhaust unit that exhausts atmospheric gas in the processing chamber, first and second electrodes to which high-frequency power is applied to set the processing gas to an active state. Each of the first and second electrodes includes a core wire formed of a metal and plural pipe bodies that are joined to one another through the core wire so as to be bendable, and less thermally deformed than the core wire. | 10-01-2009 |
20100300357 | SUBSTRATE PROCESSING APPARATUS - Provided is a substrate processing apparatus, which comprises a process chamber configured to process a substrate, a first plasma generation chamber in the process chamber, a first reactive gas supply unit configured to supply first reactive gas into the first plasma generation chamber, a pair of first discharge electrodes configured to generate plasma and to excite the first reactive gas, a first gas ejection port installed in a side wall of the first plasma generation chamber to eject an active species toward the substrate, a second plasma generation chamber in the process chamber, a second reactive gas supply unit configured to supply second reactive gas into the second plasma generation chamber, a pair of second discharge electrodes configured to generate plasma and to excite the second reactive gas, and a second gas ejection port installed in a side wall of the second plasma generation chamber to eject an active species. | 12-02-2010 |
Tetsuo Yamamoto, Toyama JP
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20090255468 | Substrate Processing Apparatus - Disclosed is a substrate processing apparatus, including: a processing chamber to accommodate a plurality of substrates therein in such a way that the substrate are vertically stacked; a gas supply system to supply processing gas into the processing chamber; an exhaust system to exhaust an atmosphere from the processing chamber; at least a pair of electrodes made of flexible member extending in a stacking direction of the substrates to activate the processing gas; and protecting tubes to accommodate the electrodes therein, wherein each of the protecting tubes is provided with a bent portion at a higher position than an uppermost substrate, and a tip end of each of the electrodes is located on a tip end side of each of the protecting tubes over the bent portion. | 10-15-2009 |
20130137279 | Exhaust Unit, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device - Provided is a substrate processing apparatus capable of increasing a conductance of an exhaust system while preventing or suppressing an increase in footprint of an apparatus, thereby reducing a pressure thereof. The substrate processing apparatus includes a process container ( | 05-30-2013 |
Tetsuo Yamamoto, Nishinomiya-Shi JP
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20120023779 | Upper Structure for a Shoe - An upper structure for a shoe includes an upper body and an outside upper member that overlaps the lateral side of the upper body to cover the foot's talus and that has a bottom edge portion fixedly attached to a bottom surface of the upper body. A rear end portion of the bottom edge portion is located rearwardly of the calcaneus load centerline. A rear edge portion of the outside upper member is separate from the upper body rearwardly of the talus. An instep edge portion of the outside upper member is connected to the shoelace. The upper structure includes a region that is expandable and contractible in a longitudinal direction. A top end of the region extends to the opening of the upper body, and a bottom end of the region is disposed in front of the calcaneus load centerline and below 55% of the foot's lateral ankle height. | 02-02-2012 |
Tetsuo Yamamoto, Kanagawa JP
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20120216925 | HOT-PRESSED STEEL SHEET MEMBER, STEEL SHEET FOR HOT-PRESS, AND METHOD FOR MANUFACTURING HOT-PRESSED STEEL SHEET MEMBER - A hot-pressed steel sheet member has a composition containing, by mass, C: 0.09% to 0.38%, Si: 0.05% to 2.0%, Mn: 0.5% to 3.0%, P: 0.05% or less, S: 0.05% or less, Al: 0.005% to 0.1%, N: 0.01% or less, Sb: 0.002% to 0.03%, and the balance being Fe and inevitable impurities, and having a tensile strength TS of 980 to 2,130 MPa. | 08-30-2012 |
Tetsuo Yamamoto, Tokyo JP
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20140238555 | HIGH STRENGTH HOT ROLLED STEEL SHEET AND METHOD FOR MANUFACTURING THE SAME - A high strength hot rolled steel sheet having a tensile strength of 780 MPa or more is produced by specifying the composition to contain C: more than 0.035% and 0.07% or less, Si: 0.3% or less, Mn: more than 0.35% and 0.7% or less, P: 0.03% or less, S: 0.03% or less, Al: 0.1% or less, N: 0.01% or less, Ti: 0.135% or more and 0.235% or less, and the remainder composed of Fe and incidental impurities, on a percent by mass basis, in such a way that C, S, N, and Ti satisfy ((Ti−(48/14)N−(48/32)S)/48)/(C/12)<1.0 (C, S, N, and Ti: content of the respective elements (percent by mass)) and specifying the microstructure in such a way that a matrix includes more than 95% of ferritic phase on an area fraction basis and fine Ti carbides having an average grain size of less than 10 nm are precipitated in the grains of the above-described ferritic phase. | 08-28-2014 |
Tetsuo Yamamoto, Bangkok TH
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20140363696 | HIGH-STRENGTH HOT ROLLED STEEL SHEET AND METHOD FOR MANUFACTURING THE SAME - A high-strength hot rolled steel sheets with excellent stretch flangeability has small variations in mechanical properties in individual coils. Variations in strength from place to place in a coil are decreased by minimally reducing the Si and Mn contents to suppress the occurrence of problems such as segregation. Further, the microstructure of the steel sheets is configured such that a ferrite phase represents an area ratio of not less than 95%, the ferrite crystal grains have an average grain size of not less than 1 μm, and the ferrite crystal grains contain TiC with an average particle size of not more than 7 nm dispersed in the crystal grains. | 12-11-2014 |