Patent application number | Description | Published |
20100157060 | Image-Processing Camera System and Image-Processing Camera Control Method - An image pickup device that acquires images is controlled by an image pickup device controller that accepts image acquisition requests from multiple application programs, and an application scheduler selects application programs to be executed. Information indicative of the image data volumes and image data acquisition rates required for each of the multiple application programs is stored and used to select multiple concurrently executable application programs on the basis of the image data volumes and image data acquisition rates. An image acquisition scheduler determines the timing and intervals at which the multiple executable application programs repeat receiving image data from the image pickup device, without overlapping in terms of time. In addition, an operations section, which explicitly presents concurrently executable application programs to a user and commands the startup of these programs, is displayed on a navigation screen menu. | 06-24-2010 |
20110273565 | Image-Processing Camera System and Image-Processing Camera Control Method - An image pickup device that acquires images is controlled by an image pickup device controller that accepts image acquisition requests from multiple application programs, and an application scheduler selects application programs to be executed. Information indicative of the image data volumes and image data acquisition rates required for each of the multiple application programs is stored and used to select multiple concurrently executable application programs on the basis of the image data volumes and image data acquisition rates. An image acquisition scheduler determines the timing and intervals at which the multiple executable application programs repeat receiving image data from the image pickup device, without overlapping in terms of time. In addition, an operations section, which explicitly presents concurrently executable application programs to a user and commands the startup of these programs, is displayed on a navigation screen menu. | 11-10-2011 |
20120133767 | Image-Processing Camera System and Image-Processing Camera Control Method - An image pickup device that acquires images is controlled by an image pickup device controller that accepts image acquisition requests from multiple application programs, and an application scheduler selects application programs to be executed. Information indicative of the image data volumes and image data acquisition rates required for each of the multiple application programs is stored and used to select multiple concurrently executable application programs on the basis of the image data volumes and image data acquisition rates. An image acquisition scheduler determines the timing and intervals at which the multiple executable application programs repeat receiving image data from the image pickup device, without overlapping in terms of time. In addition, an operations section, which explicitly presents concurrently executable application programs to a user and commands the startup of these programs, is displayed on a navigation screen menu. | 05-31-2012 |
20140078305 | Image-Processing Camera System and Image-Processing Camera Control Method - An image pickup device that acquires images is controlled by an image pickup device controller that accepts image acquisition requests from multiple application programs, and an application scheduler selects application programs to be executed. Information indicative of the image data volumes and image data acquisition rates required for each of the multiple application programs is stored and used to select multiple concurrently executable application programs on the basis of the image data volumes and image data acquisition rates. An image acquisition scheduler determines the timing and intervals at which the multiple executable application programs repeat receiving image data from the image pickup device, without overlapping in terms of time. In addition, an operations section, which explicitly presents concurrently executable application programs to a user and commands the startup of these programs, is displayed on a navigation screen menu. | 03-20-2014 |
Patent application number | Description | Published |
20120262928 | LAMP APPARATUS AND LUMINAIRE - According to one embodiment, a lamp apparatus includes a light-emitting module, housing, and a lighting circuit. The light-emitting module includes a light-emitting element. The housing opens in the direction of irradiation of a light beam and having a cap on a side opposite from the direction of irradiation of the light beam. The cap is provided with a light-emitting module mounting portion projecting in the direction of irradiation of the light beam and the light-emitting module is mounted on the light-emitting module mounting portion. The lighting circuit is accommodated in the housing. | 10-18-2012 |
20130010509 | POWER SUPPLY DEVICE - According to one embodiment, a power supply device includes a rectifying circuit configured to rectify an alternating-current power supply, a first capacitor configured to smooth a voltage after rectification, and a falling voltage chopper circuit configured to supply electric power to a load. The first capacitor is set to a capacity in which a section where a voltage after smoothing drops to an output voltage to the load is provided in a rectified half period of the alternating-current power supply. The falling voltage chopper circuit includes at least one switching element configured to receive an input of the voltage after smoothing, operate in a section where the voltage after smoothing exceeds the output voltage, and pause in a section of the output voltage and a second capacitor provided on an output side and having a capacity larger than the capacity of the first capacitor. | 01-10-2013 |
20140153249 | Bulb-Type LED Lamp - An LED lamp according to an embodiment includes an LED module, a base body, a first globe, a second globe and a light guide body. In the LED module, a plurality of LEDs are mounted on a substrate. The base body holds the LED module. The first globe is arranged to surround the outer circumference of the substrate. A bore diameter (D | 06-05-2014 |
20150241033 | Lamp Apparatus and Luminaire - According to one embodiment, a lamp apparatus includes a housing, a light-emitting module, a lens and a cover. The housing includes a concave part and a support part protruding into the concave part from an inner peripheral surface of the concave part. The light-emitting module includes a light-emitting element and a board on which the light-emitting element is mounted, and is disposed in the concave part. The lens includes a flange part located at a peripheral part and arranged on the support part, and is arranged in the concave part. The cover holds the flange part of the lens between itself and the support part and is attached to the housing. | 08-27-2015 |
Patent application number | Description | Published |
20080247721 | PHOTONIC BAND GAP FIBER AND METHOD OF PRODUCING THE SAME - A photonic band gap fiber is provided having multiple air holes in a silica portion extending in the longitudinal direction of the fiber. The fiber includes a cladding containing an air hole periodic structure in an extended triangular lattice configuration, wherein first rows each having a number of air holes at a first pitch are arranged alternately in the cross section of the fiber with multiple second rows of air holes each with multiple air holes at a second pitch which is twice the first pitch. The fiber further includes an air hole core. | 10-09-2008 |
20090208176 | EXTENDED TRIANGULAR LATTICE TYPE PHOTONIC BANDGAP FIBER - An extended triangular lattice type photonic bandgap fiber, includes a cladding and a capillary core, the cladding having a plurality of holes disposed within a silica glass portion in a longitudinal direction of the fiber and arranged in an extended triangular lattice shape, the capillary core having a plurality of holes arranged in a triangular lattice shape, wherein the cross-sectional area of the respective holes in the capillary core is smaller than that of the respective holes in the cladding. | 08-20-2009 |
20100177792 | FIBER FUSE TERMINATOR, FIBER LASER, AND OPTICAL TRANSMISSION LINE - A fiber fuse terminator which is used to terminate a fiber fuse, comprising: an optical fiber which includes a core and a cladding having holes extending in a longitudinal direction thereof, in which: a refractive index of the core of the optical fiber is higher than a refractive index of a portion of the cladding excepting portions of the holes; when it is assumed that a mode field diameter at a used wavelength of the optical fiber is MFD, and a distance in a cross section perpendicular to the longitudinal direction of the optical fiber between a center of the core and a position, closest to the center of the core, of the hole that is closest to the core is Rmin, a value expressed by 2×Rmin/MFD is no less than 1.2 and no more than 2.1; when it is assumed that a width, in a diameter direction, of a region where the holes present in the cladding is W, a value expressed by W/MFD is no less than 0.3; and when it is assumed that a diameter of the cladding of the optical fiber is D | 07-15-2010 |
20100254669 | PHOTONIC BANDGAP FIBER - A photonic bandgap fiber of the present invention functions as a polarization maintaining fiber, and includes: a core made from a solid material; a cladding provided around the core; a periodic structure region which is provided in a part of the cladding in a vicinity of the core and in which a plurality of high refractive index parts with a refractive index higher than that of the cladding are arranged in a periodic structure; a low refractive index region which is provided in another part of the cladding in a vicinity of the core and has an average refractive index lower than that of the core; and stress applying parts which are provided in a part of the low refractive index region close to the periodic structure region and have a thermal expansion coefficient different from that of another part of the low refractive index region. | 10-07-2010 |
20110286474 | FIBER LASER DEVICE - Provided is a fiber laser device capable of preventing laser light from damaging a laser oscillator even if the laser light is reflected by an object to be irradiated or at an output end. | 11-24-2011 |
20110305251 | MULTI-CLADDING OPTICAL FIBER, OPTICAL FIBER MODULE, FIBER LASER, AND FIBER AMPLIFIER - Provided is a multi-cladding optical fiber which includes: a core with an average refractive index n | 12-15-2011 |
20120033923 | HOLEY SINGLE-MODE OPTICAL FIBER AND OPTICAL TRANSMISSION SYSTEM USING SAME - Provided is a holey single-mode optical fiber including a core not having holes, and a clad having holes extending in a longitudinal direction, in which a refraction index of the core is larger than that of a portion of the clad other than the holes, a radius r | 02-09-2012 |
20120151968 | METHOD OF MANUFACTURING PHOTONIC BAND GAP FIBER BASE MATERIAL AND METHOD OF MANUFACTURING PHOTONIC BAND GAP FIBER - A method of manufacturing a photonic band gap fiber base material includes: a forming step of continuously forming a columnar core glass body | 06-21-2012 |
20120163801 | OPTICAL FIBER COMMUNICATION SYSTEM - There is provided an optical fiber communication system restricting enlargement of the diameter of an optical fiber as well as enabling achievement of a large-capacity optical communication with a small number of optical fibers. | 06-28-2012 |
20120195563 | MULTICORE FIBER - The multicore fiber comprises 7 or more cores, wherein diameters of the adjacent cores differ from one another, wherein each of the cores performs single-mode propagation, wherein a relative refractive index difference of each of the cores is less than 1.4%, wherein a distance between the adjacent cores is less than 50 μm, wherein, in a case where a transmission wavelength of each of the cores is λ, the distance between the adjacent cores is | 08-02-2012 |
20120288247 | OPTICAL FIBER - Each of a first clad region ( | 11-15-2012 |
20130010817 | FIBER FUSE TERMINATOR - A fiber fuse terminator which is used to terminate a fiber fuse, comprising: an optical fiber which includes a core and a cladding having holes extending in a longitudinal direction thereof, in which: a refractive index of the core of the optical fiber is higher than a refractive index of a portion of the cladding excepting portions of the holes; when it is assumed that a mode field diameter at a used wavelength of the optical fiber is MFD, and a distance in a cross section perpendicular to the longitudinal direction of the optical fiber between a center of the core and a position, closest to the center of the core, of the hole that is closest to the core is Rmin, a value expressed by 2×Rmin/MFD is no less than 1.2 and no more than 2.1; when it is assumed that a width, in a diameter direction, of a region where the holes present in the cladding is W, a value expressed by W/MFD is no less than 0.3; and when it is assumed that a diameter of the cladding of the optical fiber is D | 01-10-2013 |
20130044988 | COUPLED MULTICORE FIBER - A coupled multi-core fiber | 02-21-2013 |
20130044989 | METHOD OF PRODUCING PREFORM FOR COUPLED MULTI-CORE FIBER, METHOD OF PRODUCING COUPLED MULTI-CORE FIBER, AND COUPLED MULTI-CORE FIBER - Provided is a method of producing a preform | 02-21-2013 |
20130209046 | SOLD PHOTONIC BAND GAP FIBER, FIBER MODULE USING SOLD PHOTONIC BAND GAP FIBER, FIBER AMPLIFIER, AND FIBER LASER - A solid photonic band gap fiber includes: a core area located at a central portion of a cross-section with respect to a longitudinal direction of the fiber, the core area being formed of a solid substance having a low refractive index; cladding areas having base portions formed of a solid substance having a low refractive index, the cladding areas surrounding the core area; and a plurality of fine high refractive index scatterers provided in the cladding areas, and disposed in a dispersed manner so as to surround the core area, the number of fine high refractive index scatterers being formed of a solid substance having a high refractive index, wherein in a state that the solid photonic band gap fiber is held at a predetermined bending radius, propagation in a high-order mode is suppressed by using a difference in a bending loss between a fundamental mode and the high-order mode, and only the fundamental mode is substantially propagated, the fundamental mode and the high-order mode being caused by bending. | 08-15-2013 |
20130243384 | MULTICORE FIBER - A multicore fiber includes a plurality of core elements; and a clad surrounding an outer periphery surface of each of the core elements, and each of the core elements includes a core, a first clad surrounding the outer periphery surface of the core and a second clad surrounding an outer periphery surface of the first clad, and when a refractive index of the core is n | 09-19-2013 |
20130308913 | MULTICORE FIBER - A multicore fiber has a plurality of cores; and a clad which surrounds an outer peripheral surface of each of the cores, and at least one of the cores is spirally arranged such that the core rotates around a center axis of the clad. By arranging the cores in this way, it is possible to prevent crosstalk between specific cores from escalating even when the multicore fiber is disposed in a bent state. | 11-21-2013 |
20130312899 | METHOD OF CONNECTING MULTI-CORE FIBERS - A butting step S | 11-28-2013 |
20140003779 | MULTI-CORE FIBER, AND MULTI-CORE FIBER CONNECTION METHOD USING THE SAME | 01-02-2014 |
20140010507 | MULTICORE FIBER - A multicore fiber includes a cladding and a plurality of core elements which is provided in the cladding and includes a core, an inner cladding layer that surrounds the core, and a low-refractive index layer that surrounds the inner cladding layer and has a lower average refractive index than the cladding and the inner cladding layer. The plurality of core elements is arranged such that a specific core element is surrounded by three or more core elements, and a low-refractive index layer of a partial core element of the plurality of core elements is configured to have larger light confinement loss in the core than low-refractive index layers of the other partial core elements. | 01-09-2014 |
20140010508 | OPTICAL FAN-IN/FAN-OUT DEVICE - A radius of a first core | 01-09-2014 |
20140178024 | MULTICORE FIBER FOR COMMUNICATION - A multicore fiber for communication | 06-26-2014 |
20140369659 | FAN-IN/FAN-OUT DEVICE FOR MULTICORE FIBER - A fan-in/fan-out device includes a plurality of single-core fibers which are connected to a plurality of first cores of a multicore fiber and which include an elongated portion extending in a longitudinal direction so as to reduce a diameter and being connected to a first end portion of the multicore fiber at a second end portion in an extending direction of the elongated portion, where a refractive index distribution of each of the single-core fibers has a single peak, a relative refractive index difference of a second core with respect to a second cladding in each of the single-core fibers is 0.8% or more; and a second mode field diameter of the second end portion of the elongated portion is greater than a first mode field diameter of the first end portion of the multicore fiber. | 12-18-2014 |
20150139600 | METHOD OF PRODUCING PREFORM FOR COUPLED MULTI-CORE FIBER, METHOD OF PRODUCING COUPLED MULTI-CORE FIBER, AND COUPLED MULTI-CORE FIBER - Provided is a method of producing a preform | 05-21-2015 |
20150234120 | OPTICAL DEVICE - An optical device includes: multiple cores each including an inner core and an outer core surrounding an outer circumferential surface of the inner core without any gap therebetween; and cladding surrounding an outer circumferential surface of the cores without any gap therebetween and having a refractive index lower than that of the outer core, wherein each of the cores has a tapered portion that is tapered from one side toward the other side thereof in a longitudinal direction, each of the inner cores includes a low-refractive-index portion, and a high-refractive-index portion surrounding an outer circumferential surface of the low-refractive-index portion without any gap therebetween and having a refractive index higher than that of the low-refractive-index portion, and the outer core has a refractive index lower than that of the high-refractive-index portion. | 08-20-2015 |
20150318659 | AMPLIFYING OPTICAL FIBER AND OPTICAL AMPLIFIER - A plurality of cores | 11-05-2015 |
20160004009 | MULTI-CORE FIBER - A multi-core fiber ( | 01-07-2016 |
Patent application number | Description | Published |
20130256293 | HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM - In accordance with some embodiments of the present disclosure, a heat treatment system, a heat treatment method, and a program are provided. The heat treatment system includes a heating unit configured to heat an inside of a processing chamber receiving a plurality of objects to be processed, a heat treatment condition storing unit configured to store a heat treatment condition, a power change model storing unit configured to store a model showing a relationship between a temperature change inside the processing chamber and a power change of the heating unit, a changed temperature receiving unit configured to receive information on a change of the temperature inside the processing chamber, a power calculation unit configured to calculate power of the heating unit required at a changed temperature, and a determining unit configured to determine whether the power of the heating unit calculated by the power calculation unit is saturated. | 10-03-2013 |
20130260039 | HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM - According to an embodiment of the present invention, a heat treatment system is provided. The heat treatment system includes a heating unit, a heat treatment condition memory unit, a power change model memory unit, a heat treatment change model memory unit, a heat treatment result reception unit, and an optimal temperature calculation unit. In the heat treatment system, the optimal temperature calculation unit calculates the power of the heating unit at a corresponding temperature based on the model stored in the power change model memory unit and the calculated temperature, and an optimal temperature is a temperature at which a heat treatment result is closest to the targeted heat treatment result within a range in which the calculated power of the heating unit is not saturated. | 10-03-2013 |
20130260328 | HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM - A controller of a heat treatment apparatus forms a phosphorous-doped polysilicon film (D-poly film) on a semiconductor wafer, and determines whether the D-poly film satisfies a target heat treatment characteristic. When it is determined that the target heat treatment characteristic is not satisfied, the controller calculates a temperature in a reaction tube and flow rates of process gas supply pipes, which satisfy the target heat treatment characteristic, based on a heat treatment characteristic of the D-poly film and a model indicating relationships between changes in the temperature in the reaction tube and the flow rates of the process gas supply pipes, and a change in a heat treatment characteristic. The controller forms the D-poly film on the semiconductor wafer according to heat treatment conditions including the calculated temperature and the calculated flow rates, so as to satisfy the target heat treatment characteristic. | 10-03-2013 |
20130260572 | CONTINUOUS PROCESSING SYSTEM, CONTINUOUS PROCESSING METHOD, AND PROGRAM - In a continuous processing system, a controller of a heat treatment apparatus calculates a weight of each layer from input target film thicknesses of a phosphorous-doped polysilicon film (D-poly film) and an amorphous silicon film (a-Si film), and calculates activation energy of stacked films based on the calculated weight and activation energy. The controller prepares a stacked film model based on the calculated activation energy and a relationship of a temperature of each zone and film thicknesses of the D-poly film and the a-Si film, and calculates an optimum temperature of each zone by using the prepared stacked film model. The controller controls power controllers of heaters to set a temperature in a reaction tube to be the calculated temperature of each zone and forms stacked films on a semiconductor wafer by controlling a pressure adjusting unit, flow rate adjusting units, etc. | 10-03-2013 |
Patent application number | Description | Published |
20130012039 | CONNECTOR - Provided is a connector mountable on a board. The connector comprises a plurality of contacts, a housing holding the contacts, and a monitored member attached to the housing. The monitored member comprises a marker portion and an abutment portion brought into abutment with the board when the connector is mounted on the board in a vertical direction. The abutment portion is apart from the marker portion by a predetermined distance in the vertical direction. The height of the housing is indirectly measured by investigating a position of the marker portion. | 01-10-2013 |
20130017729 | FLOATING CONNECTOR SMALL IN SIZE AND IMPROVED IN STRENGTHAANM KIMURA; MasakiAACI TokyoAACO JPAAGP KIMURA; Masaki Tokyo JPAANM TAKENAGA; YuichiAACI TokyoAACO JPAAGP TAKENAGA; Yuichi Tokyo JP - A floating connector has a stationary housing, a movable housing, and a reinforcing member. The reinforcing member is made of a metal plate and is provided with a first plate portion and a second plate portion. The first plate portion is embedded in a guide portion of the stationary housing so as to extend in a depth direction. The second plate portion is embedded in the guide portion so as to extend inward in a width direction from one end in the depth direction of the first plate portion. | 01-17-2013 |
20140273587 | CONNECTOR - A plug includes a plurality of plug contacts arranged in a row and a plug housing. The plurality of plug contacts each include first bending portion and the like. The first bending portions and the like are aligned in a direction where the plurality of plug contacts are arranged. The receptacle includes second metal parts and a receptacle housing. When the plug and the receptacle are mated, the plurality of plug contacts of the plug are brought into contact with the plurality of respective second metal parts of the receptacle. When the plug contacts are brought into contact with the respective second metal parts, each of the second metal parts exerts a resistance force against pull-out of the plug from the receptacle. An auxiliary metal fitting exerts a resistance force with different magnitude from the magnitude of the receptacle contact. | 09-18-2014 |
20150207248 | CONNECTOR - A connector includes a housing, contacts arranged and held in the housing, and a shell attached around the housing. The shell is made from a plate and includes an elongated part extending along a sidewall of the housing and a spring piece adapted to contact a ground contact of a mating connector. The spring piece includes a base part protruded from the elongated part in the direction perpendicular to the direction in which the elongated part extends and bent so that its front end is positioned inward from the sidewall, an intermediate part extended from the front end of the base part in the direction in which the elongated part extends, and a contact tip extended from a front end of the intermediate part in the direction perpendicular to the direction in which the elongated part extends. The intermediate part is spaced away from an inner surface of the sidewall and the contact tip is positioned further inward from the inner surface than the intermediate part and a front end of the contact tip is directed to the side from which the mating connector is inserted. The spring piece of the shell can be made pliant even though the profile of the connector is low. Thus, connector profile reduction can be achieved. | 07-23-2015 |
20160093967 | CONNECTOR - Disclosed is a connector mateable with a mating connector along a first direction. The connector comprises a housing and a plurality of terminals, wherein the housing includes a plurality of held portions, and the terminals correspond to the held portions, respectively. Each of the terminals includes a base portion, a first portion, a second portion and a third portion. The first portion extends directly from the base portion and is provided with a first contact portion which projects towards the second portion in a second direction perpendicular to the first direction. The second portion extends directly from the base portion and is provided with a second contact portion and a press-fitting projection. The second contact portion projects towards the first portion in the second direction and faces the first contact portion. The press-fitting projection projects towards the third portion in the second direction. The third portion extends directly from the base portion. Each of the held portions is held by the second portion and the third portion of the terminal corresponding thereto. | 03-31-2016 |
Patent application number | Description | Published |
20090078197 | Substrate processing system, control method for substrate processing apparatus and program - The present invention provides a substrate processing system, a control method for a substrate processing apparatus, and a program for the system and/or method, each of which is intended to achieve effective control for a film-forming amount on processed substrates. The substrate processing system includes a substrate processing unit adapted for forming a film on each of the plurality of substrates; a pattern obtaining unit adapted for obtaining information about an arrangement pattern concerning arrangement of unprocessed substrates and processed substrates among the plurality of substrates; and a memory unit adapted for storing therein an arrangement/film-forming-amount model indicative of influence exerted on the film-forming amount on the substrates by the arrangement of the unprocessed substrates and processed substrates among the plurality of substrates. A calculation unit calculates an estimated film-forming amount on the substrates, in the case of the arrangement pattern, based on the arrangement/film-forming-amount model. Then, a determination unit determines whether or not the estimated film-forming amount calculated by the calculation unit is within a predetermined range. If the estimated film-forming amount calculated by the calculation unit is determined to be within the predetermined range, a control unit will control and drive the substrate processing unit to process the substrates. | 03-26-2009 |
20090110824 | Substrate processing apparatus and method of controlling substrate processing apparatus - In accordance with a set temperature profile including: a first step in which a temperature is varied from a first temperature to a second temperature during a first time period; a second step in which the temperature is maintained at the second temperature during a second time period; and a third step in which the temperature is varied from the second temperature to a third temperature; a substrate is subjected to a film deposition process. The first temperature, the second temperature, and the third temperature are determined based on the first relationship between temperature and film thickness, the measured film thicknesses at the plurality of positions, and a predetermined target film thickness. There are calculated expected film thicknesses at a plurality of positions on a substrate to be actually processed in accordance with the set temperature profile corresponding to the determined first temperature, the determined second temperature, and the determined third temperature. When the expected film thicknesses at the plurality of positions are not within a predetermined allowable range with respect to the predetermined target film thickness, at least one of the first time period, the second time period, and the third time period is varied. | 04-30-2009 |
20090232967 | THERMAL PROCESSING APPARATUS, METHOD FOR REGULATING TEMPERATURE OF THERMAL PROCESSING APPARATUS, AND PROGRAM - There are provided a thermal processing apparatus, a method for regulating a temperature of a thermal processing apparatus, and a program, by which a temperature can be easily regulated. A control part | 09-17-2009 |
20100198386 | METHOD OF OPTIMIZING PROCESS RECIPE OF SUBSTRATE PROCESSING SYSTEM - The present invention is a method of optimizing a process recipe of a substrate processing system including: a substrate processing apparatus that performs a film deposition process of a substrate to be processed according to a process recipe; a data processing unit that executes a calculation for optimizing the process recipe; and a host computer; the substrate processing apparatus, the data processing unit, and the host computer being connected to each other through a network. The present invention includes the steps of: measuring a film thickness of a substrate to be processed that has been subjected to a film deposition process by the substrate processing apparatus; sending a command for conducting a process-recipe optimizing process from the host computer to the substrate processing apparatus, when the measured film thickness is deviated from a target film thickness and the deviation is beyond an allowable range; and in response to the command for conducing a process-recipe optimizing process from the host computer, sending required data from the substrate processing apparatus to the data processing unit, causing the data processing unit to execute a process-recipe optimizing calculation to calculate an optimum process recipe for achievement of the target film thickness, and updating the process recipe in the substrate processing apparatus based on the calculated result. | 08-05-2010 |