Patent application number | Description | Published |
20110051111 | POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD - The present invention provides a position detection apparatus including a sensor in which a plurality of regions where light from a mark formed on a substrate held by a stage is detected are arrayed in a first direction, a driving unit configured to drive the stage, a control unit configured to control the driving unit so as to drive the stage in a second direction perpendicular to a height direction of the substrate, so that the light guided from the mark to the sensor enters the plurality of regions while moving in the first direction, and to drive the stage in the height direction of the substrate, and a processing unit configured to process the signals from the sensor, wherein the processing unit determines a position of the substrate in the height direction, which exhibits a peak in a light intensity distribution in the first direction generated by the signals. | 03-03-2011 |
20150022797 | LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURING METHOD - Provided is a lithography apparatus which forms a pattern on a substrate that includes a detector configured to detect a mark formed on the substrate; a controller configured to obtain a displacement amount of a position of the mark from a reference position thereof based on an output of the detector; wherein the controller is configured to obtain a representative value of, with respect to each of a plurality of marks associated with each sample shot region on the substrate, a plurality of the displacement amount respectively obtained based on outputs of the detector with respect to a plurality of the sample shot region, and obtain information relating to a form of a shot region on the substrate based on a plurality of the representative value respectively obtained with respect to the plurality of marks. | 01-22-2015 |
20150070679 | MEASURING APPARATUS, MEASURING METHOD, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - The present invention provides a measuring apparatus for measuring a position of an alignment mark formed on a substrate and including a first mark having position information in a first direction and a second mark having position information in a second direction different from the first direction, the apparatus including a detector configured to detect an image of the alignment mark, a controller configured to control movement of a stage for holding the substrate and detection by the detector, and a processor configured to obtain a position of the alignment mark whose image is detected by the detector, wherein the controller is configured to cause the detector to detect the image of the alignment mark with the stage moving in the first direction, and cause the detector to detect the image of the alignment mark with the stage moving in the second direction. | 03-12-2015 |
Patent application number | Description | Published |
20130044563 | OBJECT INFORMATION ACQUISITION APPARATUS, OBJECT INFORMATION ACQUISITION SYSTEM, DISPLAY CONTROL METHOD, DISPLAY METHOD, AND PROGRAM - An object information acquisition apparatus, configured to receive an acoustic wave from an object and acquire characteristic information of the object, includes a receiver configured to receive the acoustic wave and convert the received acoustic wave into an electric signal, a scan control unit configured to scan the receiver at least in one direction, and a display control unit configured to produce guide information for displaying a guide on a display unit, wherein the guide is in terms of the number of times the receiver is scanned in a first direction and wherein the guide information is produced using information associated with a specified region defined by a user as a region in which characteristic information is to be acquired. | 02-21-2013 |
20130267856 | OBJECT INFORMATION ACQUIRING APPARATUS - Provided is an object information acquiring apparatus including: an irradiating unit that irradiates an object with light; a probe that receives an acoustic wave generated from the object irradiated with the light; a generating unit that generates an image of the object interior on the basis of the acoustic wave; an imaging region input unit that receives an input of a designation of an imaging region, which is a region of the object in which the acoustic wave is received by the probe; a display region input unit that receives an input of a designation of a display region, which is a region of the object in which the image generated by the generating unit is displayed; and a display unit that displays the generated image in the display region. | 10-10-2013 |
20140130600 | OBJECT INFORMATION ACQUIRING APPARATUS AND CONTROL METHOD FOR THE OBJECT INFORMATION ACQUIRING APPARATUS - An object information acquiring apparatus comprises a receiver receiving an acoustic wave propagating inside an object and convert the acoustic wave into an electric signal; a scanning unit configured to causing the receiver to scan the object; a control unit configured to controlling operation of the scanning unit; a detection unit configured to detecting a status of the acoustic wave reception; and a processing unit for acquiring characteristic information on the inside of the object on the basis of the electric signal, wherein the control unit decides whether or not the operation of the scanning unit is changed, on the basis of a result of detection by the detection unit. | 05-15-2014 |
20140182384 | Object Information Acquisition Apparatus, Display Method, and Non-Transitory Computer-Readable Storage Medium - An object information acquisition apparatus disclosed in the present specification includes a light source, an acoustic wave detection unit, and a processing unit. The light source is configured to emit light. The acoustic wave detection unit is configured to detect a photoacoustic wave generated by irradiation of an object with the light and to output a detection signal. The processing unit is configured to be able to acquire two or more types of object information on the basis of the detection signal and configured to cause a display unit to display at least one type of object information selected by a user from among the two or more types of object information. | 07-03-2014 |
20140303498 | OBJECT INFORMATION ACQUISITION APPARATUS, OBJECT INFORMATION ACQUISITION SYSTEM, DISPLAY CONTROL METHOD, DISPLAY METHOD, AND PROGRAM - In a known apparatus, when a user defines a specified region in which characteristic information is to be acquired, it may be difficult for the user to easily recognize a corresponding scanning region that is to be actually scanned with a receiver. An embodiment of the invention provides an object information acquisition apparatus including a receiver configured to receive an acoustic wave and convert it into an electric signal, a scan control unit configured to scan the receiver at least in one direction, and a display control unit. Upon receiving information associated with a region specified to be scanned to acquire characteristic information, the display control unit outputs information for displaying an adjusted region obtained by adjusting the specified region such that a length of the specified region in a first direction corresponds to an integral multiple of a scanning width of the receiver in the first direction. | 10-09-2014 |