Patent application number | Description | Published |
20080265903 | Plasma Diagnostic Apparatus And Method - Provided is a plasma diagnostic apparatus includes a probe unit, which is inserted into a plasma or disposed at boundary of a plasma, the apparatus includes: a signal supplying unit having a signal supplying source; a current detecting/voltage converting unit for applying a periodic voltage signal applied from the signal supplying unit to the probe unit, detecting the magnitude of the current flowing through the probe unit, and converting the detected current into a voltage; and a by-frequency measurement unit for computing the magnitude and phase of individual frequency components of the current flowing through the probe unit by receiving the voltage output from the current detecting/voltage converting unit as an input. | 10-30-2008 |
20090166869 | SEMICONDUCTOR DEVICE AND METHOD OF FORMING METAL INTERCONNECTION LAYER THEREOF - Technologies related to forming metal lines of a semiconductor device are disclosed. A method of forming metal lines of a semiconductor device may include forming at least one interlayer insulating layer on a semiconductor substrate, forming via holes and trenches in the at least one interlayer insulating layer, forming an anti-diffusion film on the via holes and the trenches, depositing a seed Cu layer on the anti-diffusion film, after the seed Cu layer is deposited, depositing rhodium (Rh), and forming Cu line on the deposited Rh. The Rh improves an adhesive force between Cu layers and prevents oxide materials or a corrosion phenomenon from occurring on the seed Cu layer. Accordingly, occurrence of delamination in subsequent processes (for example, annealing and CMP) can be prevented or reduced. | 07-02-2009 |
20100282711 | PROCESS MONITORING APPARATUS AND METHOD - Provided are a process monitoring apparatus and method. The process monitoring apparatus includes a process chamber in which a process is performed, a probe assembly disposed on the process chamber, and comprising a probe electrode, a plasma generator generating plasma around the probe assembly, and a drive processor applying an alternating current (AC) voltage having at least 2 fundamental frequencies to the probe assembly, and extracting process monitoring parameters. | 11-11-2010 |
20140189109 | SYSTEM AND METHOD FOR DYNAMICALLY EXPANDING VIRTUAL CLUSTER AND RECORDING MEDIUM ON WHICH PROGRAM FOR EXECUTING THE METHOD IS RECORDED - Provided are a system and method for dynamically expanding a virtual cluster having one or more virtual machines (VMs), based on the resource availability of the virtual cluster and the type of the virtual cluster. The system for dynamically expanding a virtual cluster having one or more virtual machines (VMs), the system comprising a monitor unit which measures resource availability of a target virtual cluster and provides the resource availability to an expansion control unit, the expansion control unit which determines whether to expand the target virtual cluster based on the resource availability and determines a type and number of VM instances to be additionally allocated to the target virtual cluster by reflecting the resource availability and a type of the target virtual cluster and a virtual cluster configuration unit which modifies profile information of the target virtual cluster such that the determined number of VM instances of the determined type by the expansion control unit can be additionally allocated to the target virtual cluster. | 07-03-2014 |
20140246724 | MEMORY DEVICES - Memory devices include a substrate including first to third regions, a memory element on the first region, a first transistor on the second region closer to the first region than to the third region and including a spacer filled with an insulating material, and a second transistor on the third region and including a spacer filled with air. | 09-04-2014 |
20140246729 | SEMICONDUCTOR DEVICE - A semiconductor device including a substrate including an NMOS region and a PMOS region; first and second gate dielectrics on the NMOS and PMOS regions of the substrate and including a high-k dielectric material; a first gate structure on the first gate dielectric and including a sequentially stacked first n-type metal layer pattern and first electrode layer pattern; a second gate structure on the second gate dielectric and including a sequentially stacked p-type metal layer pattern, second n-type metal layer pattern, and second electrode layer pattern; first and second spacers on sidewalls of the first and second gate structures; a first offset pattern between the first gate structure and the first spacer; and a second offset pattern between the second gate structure and the second spacer, the second offset pattern being on the sidewalls of the second gate structure excluding sidewalls of the p-type metal layer pattern. | 09-04-2014 |
20150066778 | DIGITAL CARD-BASED PAYMENT SYSTEM AND METHOD - Disclosed is a digital card-based payment system and method. A digital card-based payment system includes a seller terminal configured to acquire a token from a purchaser terminal desiring to purchase a product and a card management server configured to store and manage one or more pieces of card information and one or more pieces of token information corresponding to the card information and, upon receipt of the token information and payment information for the product from the seller terminal, make payment for the product using card information corresponding to the received token. | 03-05-2015 |
20150120478 | APPARATUS AND METHOD FOR ELECTRONIC RECEIPT - There are provided an electronic receipt management device and a method thereof. The electronic receipt management system according to an embodiment of the present disclosure includes a data collecting device configured to detect a control event transmitted from a payment device to a printer output unit, collect data transmitted from the payment device to the printer output unit, and convert the collected data into a predefined format, and an electronic receipt management device configured to receive the data converted into a standardized format from the data collecting device, compare the received data and a user database for matching a receipt user, and issue an electronic receipt to the matching user. | 04-30-2015 |