Patent application number | Description | Published |
20080236629 | CLEANING METHOD FOR TURBO MOLECULAR PUMP - A cleaning method for a turbo molecular pump, which enables the exhausting ability of the turbo molecular pump to be restored without bringing about a decrease in the productivity of a substrate processing apparatus. A vaporizing gas that vaporizes foreign matter attached to an internal surface of the turbo molecular pump is supplied toward the foreign matter. | 10-02-2008 |
20080240905 | EXHAUST PUMP, COMMUNICATING PIPE, AND EXHAUST SYSTEM - An exhaust pump that prevents particles from entering a processing chamber of a substrate processing apparatus. The exhaust pump connected to the processing chamber has rotary blades and an air intake portion disposed on the processing chamber side of the rotary blades. A shielding unit is disposed inside the air intake portion and shields the rotary blades when the air intake portion is viewed from the processing chamber side. | 10-02-2008 |
20100043894 | VALVE ELEMENT, PARTICLE ENTRY PREVENTIVE MECHANISM, EXHAUST CONTROL APPARATUS, AND SUBSTRATE PROCESSING APPARATUS - A valve element that can prevent particles rebounding from an exhausting pump from entering a chamber and also prevent a decrease in exhaust efficiency. The valve element has a through hole that penetrates the valve element along an exhaust flow in an exhaust flow passage between the chamber in which a substrate is subjected to predetermined processing and the exhausting pump having rotary blades rotating at high speed, and a particle trap that covers the through hole. The particle trap has a plurality of preventive members that are arranged such as to obstruct particles rebounding from the exhausting pump. The ratio of openings of the particle trap to the exhaust flow in the exhaust flow passage is not less than a predetermined value. | 02-25-2010 |
20110162678 | REFLECTING DEVICE, COMMUNICATING PIPE, EXHAUSTING PUMP, EXHAUST SYSTEM, METHOD FOR CLEANING THE SYSTEM, STORAGE MEDIUM STORING PROGRAM FOR IMPLEMENTING THE METHOD, SUBSTRATE PROCESSING APPARATUS, AND PARTICLE CAPTURING COMPONENT - A reflecting device that enables to prevent infiltration of particles into a processing chamber. The reflecting device is disposed in a communicating pipe. The communicating pipe allows the processing chamber of a substrate processing apparatus and an exhaust pump to communicate with each other. The exhaust pump has at least one rotary blade. The reflecting device comprises at least one reflecting surface. The at least one reflecting surface is oriented to the exhausting pump. | 07-07-2011 |
Patent application number | Description | Published |
20100300211 | ELECTROMAGNETIC FLOW METER - There is provided an electromagnetic flow meter that applies magnetic fields with a first frequency and a second frequency, to a fluid to be measured, calculates a first flow rate, calculates a second flow rate, performs low-pass filtering on the first flow rate to calculate a first low-pass filtered flow rate, and performs low-pass filtering on the second flow rate to calculate a second low-pass filtered flow rate, the electromagnetic flow meter including: an abnormality detecting unit that detects an abnormal state in which, the fluid is at non-full level on the basis of at least one of the first flow rate and the second flow rate; and an abnormality removing unit that removes the abnormal state on the basis of the first low-pass filtered flow rate and the second low-pass filtered flow rate, when the abnormality detecting unit does not determine that the fluid is in the abnormal state. | 12-02-2010 |
20110032236 | MEASUREMENT APPARATUS - A measurement apparatus includes a display unit, a current detection unit configured to output a detection signal if an increase in a consumption current of the display unit is detected, a plurality of setting units each of which is configured to output an output signal, each of the plurality of setting units changing the output signal if the detection signal is received, and a diagnosis unit configured to receive the output signal, the diagnosis unit diagnosing the increase in the consumption current. | 02-10-2011 |
Patent application number | Description | Published |
20100239902 | LAMINATE CELL, ASSEMBLED BATTERY, BATTERY MODULE AND ELECTRIC VEHICLE - A laminate cell comprises a power generating element formed by sequentially stacking positive electrode plates and negative electrode plates while interposing separators therebetween; a positive tab connected to the positive electrode plates through a plurality of positive leads; a negative tab connected to the negative electrode plates through a plurality of negative leads; and a cell package formed of a metal composite film, the cell package hermetically sealing the power generating element and an electrolyte. According to the laminate cell, the heat capacity of a portion of the positive tab, onto which a plurality of the positive leads are joined, and the heat capacity of a portion of the negative tab, onto which a plurality of the negative leads are joined, are made larger than that of other portions of the positive tab and the negative tab. | 09-23-2010 |
20100263201 | LAMINATE CELL, ASSEMBLED BATTERY, BATTERY MODULE AND ELECTRIC VEHICLE - A laminate cell comprises a power generating element formed by sequentially stacking positive electrode plates and negative electrode plates while interposing separators therebetween; a positive tab connected to the positive electrode plates through a plurality of positive leads; a negative tab connected to the negative electrode plates through a plurality of negative leads; and a cell package formed of a metal composite film, the cell package hermetically sealing the power generating element and an electrolyte. According to the laminate cell, the heat capacity of a portion of the positive tab, onto which a plurality of the positive leads are joined, and the heat capacity of a portion of the negative tab, onto which a plurality of the negative leads are joined, are made larger than that of other portions of the positive tab and the negative tab. | 10-21-2010 |
20140113178 | AUTOMOBILE CELL AND RELATED METHOD - An automobile cell is provided with an electric power generating element composed of a positive electrode having a positive electrode active substance layer, a negative electrode having a negative electrode active substance layer and a separator interposed between the electrodes, a cell outer sheath made of a laminate film compositely composed of polymer and metal, a positive electrode terminal lead electrically conductive with the positive electrode and extending to an outside of the cell outer sheath, and a negative electrode terminal lead electrically conductive with the negative electrode and extending to the outside of the cell outer sheath. The positive electrode and the negative electrode associated therewith via the separator defines a unit electrode, and the relationship between a thickness of the automobile cell and a sum of a thickness of the positive electrode active substance layer and a thickness of the negative electrode active substance layer of the unit electrodes, is defined such that a value obtained by dividing the former by the latter is equal to or less than 80. | 04-24-2014 |
Patent application number | Description | Published |
20100055365 | POLYIMIDE TUBE, METHOD FOR PRODUCTION THEREOF, METHOD FOR PRODUCTION OF POLYIMIDE VARNISH, AND FIXING BELT - A polyimide tube composed of a polyimide resin composition in which 5 to 23.5 volume percent of boron nitride and 1 to 15 volume percent of an acicular substance are dispersed as a filler in a polyimide resin on the basis of the total volume of the composition, a method of producing the tube, a method of producing a polyimide varnish used for producing the tube, and a fixing belt including the tube as a base member are provided. | 03-04-2010 |
20100279045 | POLYIMIDE TUBE, PROCESS FOR PRODUCING THE SAME AND FIXING BELT - Provided are a polyimide tube including a polyimide resin composition, wherein the polyimide resin composition contains a polyimide resin in which an acicular highly thermally conductive filler such as carbon nanotubes is dispersed in 15 volume percent or more relative to the total volume of the composition; the acicular highly thermally conductive filler has an orientation of 1.3 or more, the orientation being represented by the modulus of elasticity of the polyimide resin composition in the circumferential direction/the modulus of elasticity of the polyimide resin composition in the axial direction; and the polyimide tube has high thermal conductivity, is excellent in terms of mechanical strength and indentation strength, and provides a high fixing property and an excellent offsetting property; a process for producing such a tube; and a fixing belt including such a tube serving as a base member. | 11-04-2010 |
20110142509 | HEATING FIXING ROLLER AND PROCESS FOR PRODUCING THE HEATING FIXING ROLLER - Provided is a heating fixing roller which includes a tubular base member and a fluororesin layer provided on an outer circumferential surface of the base member directly or through an adhesive layer, the heating fixing roller being characterized in that the fluororesin layer contains phosphorus-doped tin oxide. The heating fixing roller has a surface resistance capable of stably and effectively preventing the occurrence of electrostatic offsets, and also has an excellent releasing property. Also provided is a process for producing the heating fixing roller, characterized by including the steps of applying a fluororesin dispersion containing an aqueous dispersion of phosphorus-doped tin oxide onto a tubular base member or an adhesive layer disposed on an outer circumferential surface of the tubular base member, and then sintering the fluororesin. | 06-16-2011 |
20110303439 | ADHESIVE RESIN COMPOSITIONS, AND LAMINATES AND FLEXIBLE PRINTED WIRING BOARDS USING SAME - Provided are an adhesive composition that is halogen-free and that can satisfy flame retardancy without impairing adhesiveness or solder heat resistance, and a laminate and a flexible printed wiring board using the same. The adhesive resin composition contains an epoxy resin; a thermoplastic resin; a benzoxazine compound; a halogen-free flame retardant; and a curing agent, in which at least one of the epoxy resin and the thermoplastic resin contains a phosphorus-containing resin, and the phosphorus content in the solid portion of the adhesive resin composition is 2.5% by mass or more. Preferably, a phosphorus-containing epoxy resin is used as the epoxy resin, a thermoplastic resin containing 10% to 70% by mass of a phosphorus-containing polyester is used as the thermoplastic resin, and the amount of benzoxazine is 5 to 25 parts by mass and the amount of halogen-free flame retardant is 1 to 30 parts by mass per 100 parts of the resins. | 12-15-2011 |
20110305883 | ADHESIVE RESIN COMPOSITIONS, AND LAMINATES AND FLEXIBLE PRINTED WIRING BOARDS USING SAME - Provided are an adhesive resin composition that is halogen-free, has good adhesiveness, solder heat resistance, and flame retardancy, and has good flow characteristics, and a laminate and a flexible printed wiring board using the same. The adhesive resin composition contains a phosphorus-containing epoxy resin and/or a phosphorus-containing phenoxy resin, a phosphorus-containing polyester resin having a weight-average molecular weight of more than 20,000 and 150,000 or less, another thermoplastic resin, and a curing agent. The adhesive resin composition preferably further contains a benzoxazine compound. Preferably, substantially no inorganic filler is mixed in the adhesive resin composition. | 12-15-2011 |
20130225380 | ROLLER FOR IMAGE-FORMING APPARATUS AND PROCESS FOR PRODUCING THE SAME - Provided is a roller for an image-forming apparatus which includes a base member and a fluororesin layer provided on an outer circumferential surface of the base member directly or through an adhesive layer, the roller for an image-forming apparatus being characterized in that the fluororesin layer contains phosphorus-doped tin oxide. The roller for an image-forming apparatus has a surface resistance capable of stably and effectively preventing the occurrence of electrostatic offsets, and also has an excellent releasing property. Also provided is a process for producing the roller for an image-forming apparatus, characterized by including the steps of applying a fluororesin dispersion containing an aqueous dispersion of phosphorus-doped tin oxide onto a base member or an adhesive layer disposed on an outer circumferential surface of the base member, and then sintering the fluororesin. | 08-29-2013 |
Patent application number | Description | Published |
20090182811 | DATA SHARING SYSTEM, DATA SHARING METHOD, INFORMATION PROCESSING APPARATUS,AND COMPUTER-READABLE STORAGE MEDIUM - A data sharing system which is capable of preventing duplicated data which does not match original data stored in an original node from being spread across the network. An original node stores original data. A first duplicating node acquires duplicated data of the original data from the original node, and sends the duplicated data to a second duplicating node. The original node receives a request for confirmation of the duplicated data received from the first duplicating node, from the second duplicating node, compares the duplicated data received by the second duplicating node and the original data with each other, in response to the request, and transmits a request for deletion of the duplicated data, to the second duplicating node, depending on a result of the comparison. | 07-16-2009 |
20140339909 | POWER TRANSMISSION DEVICE, POWER TRANSMISSION METHOD, AND STORAGE MEDIUM - A power transmission device for wirelessly transmitting power to a power reception device includes a power transmission target determination unit configured to determine a power transmission target power reception device, a power transmission time determination unit configured to determine, if a power reception device to which power has already been transmitted is determined as the power transmission target power reception device, a time that is longer than a previously required power transmission time for transmitting power to the power transmission target power reception device as power transmission time therefor, and a power transmission unit configured to transmit power to the power transmission target power reception device for the power transmission time determined by the power transmission time determination unit. | 11-20-2014 |
Patent application number | Description | Published |
20100197934 | PROCESS FOR PRODUCING OPTICALLY ACTIVE ALPHA-METHYLCYSTEINE DERIVATIVE - The present invention provides a simple industrial process for producing an L- or D-optically active α-methylcysteine derivative or its salt, which is a useful pharmaceutical intermediate, from readily available, inexpensive raw materials. In a process for producing an L- or D-optically active α-methylcysteine derivative or its salt, a racemic N-carbamoyl-α-methylcysteine derivative or its salt is D-selectively cyclized with hydantoinase to produce a D-5-methyl-5-thiomethylhydantoin derivative or its salt and an N-carbamoyl-α-methyl-L-cysteine derivative or its salt, which are then subjected to deprotection of the amino group and the sulfur atom, and hydrolysis. | 08-05-2010 |
20130261331 | PROCESS FOR PRODUCING OPTICALLY ACTIVE ALPHA-METHYLCYSTEINE DERIVATIVE - The present invention provides a simple industrial process for producing an L- or D-optically active α-methylcysteine derivative or its salt, which is a useful pharmaceutical intermediate, from readily available, inexpensive raw materials. In a process for producing an L- or D-optically active α-methylcysteine derivative or its salt, a racemic N-carbamoyl-α-methylcysteine derivative or its salt is D-selectively cyclized with hydantoinase to produce a D-5-methyl-5-thiomethylhydantoin derivative or its salt and an N-carbamoyl-α-methyl-L-cysteine derivative or its salt, which are then subjected to deprotection of the amino group and the sulfur atom, and hydrolysis. | 10-03-2013 |
Patent application number | Description | Published |
20090011218 | Extruded Propylene Resin Foam and Process For Production Thereof - Extruded propylene-based resin foam according to the present invention is formed by extrusion-foaming a propylene-based resin, and the extruded propylene-based resin foam has a closed cell content of less than 40% and an expansion ratio of 10 or more. Since the extruded propylene-based resin foam has an open-cell structure in which a cell-broken state is formed at a desired level and has a high expansion ratio, each cell in the foam has a sound absorption performance, such that the extruded foam is excellent in sound absorption performance. | 01-08-2009 |
20090026010 | PROCESS FOR PRODUCING SOUND ABSORBER AND PRODUCED BY THE PROCESS, SOUND ABSORBER AND SOUND ABSORBING STRUCTURE - A process for producing a sound absorber having skin layers constituting front and back surfaces and, interposed between the skin layers, a void layer having a number of voids, and having a plurality of formed holes each having a depth which is enough to penetrate one of the skin layers and is not enough to reach the other skin layer; comprising: providing a mold having a fixed part, a movable part, and at least one pin disposed in a manner that it can be projected into and retracted from a cavity; and having a step to cause the pin to project into the cavity during the course of charging the cavity with a resin material and molding the sound absorber and form the holes communicating with the void layer simultaneously with molding of the sound absorber. | 01-29-2009 |
20090076179 | EXTRUDED PROPYLENE-RESIN COMPOSITE FOAM - The extruded propylene-based resin composite foam ( | 03-19-2009 |
20090155567 | EXTRUDED PROPYLENE RESIN FOAM AND PROCESS FOR PRODUCING EXTRUDED PROPYLENE RESIN FOAM - The extruded propylene-based resin foam according to the present invention is extruded propylene-based resin foam that is formed by extrusion-foaming a propylene-based resin, and the extruded propylene-based resin foam has the expansion ratio of 10 or more and the average cell diameter of less than 400 μm. In addition, the extruded foam contains a 60 or less wt % fibrous filler in relation to the whole molding material. With this configuration, the extruded foam can have a plurality of foam cell walls therein. Thus, the extruded foam can efficiently block external radiant heat, thereby realizing excellent insulation efficiency. Furthermore, because the fibrous filler is oriented along the thickness direction, even when the extruded foam is slightly strained in the thickness direction, a high stress arises, thereby improving energy-absorbing capability. | 06-18-2009 |
Patent application number | Description | Published |
20100097130 | DEVICE HAVING CIRCUIT CAPABLE OF INTERMITTENT OPERATION - A circuit unit is provided. The circuit unit has an intermittent operation circuit. The intermittent operation circuit is set in an operation state and in a stand-by state periodically. An operation mode control unit generates a test mode control signal to designate either an operation test mode or an intermittent operation test mode of the intermittent operation circuit. The operation test mode corresponds to one of a continuous operation or a predetermined time period operation of the intermittent operation circuit. An operation timing generation unit receives the test mode control signal. The operation timing generation unit produces an operation control signal based on the test mode control signal. The operation control signal is outputted to the intermittent operation circuit to operate or wait the intermittent operation circuit. | 04-22-2010 |
20100237842 | SWITCHING CIRCUIT - A switching circuit includes: a switching section including at least one first terminal, a plurality of second terminals, and a switching element configured to connect the first terminal to one of the second terminals; a driver driving the switching element in accordance with an external terminal switching control signal; a DC-to-DC converter, which supplies electric power to the driver, having a first state with a response to a load transient and a second state with the response to a load transient being slower than the first state; and a power controller controlling the DC-to-DC converter to operate with the first state during a first time period corresponding to change in the external terminal switching control signal, and to operate with the second state during a second time period other than the first time period. | 09-23-2010 |
20110009171 | POWER SUPPLY CIRCUIT AND ELECTRONIC DEVICE - According to one embodiment, a power supply circuit includes a power switch section, an error amplifier, a wiring and a reset switch section. The error amplifier has one input portion connected to the output terminal, the other input portion and an output portion. The error amplifier outputs the control potential via the output portion to make the resistance of the power switch section high so that potential applied to the one input portion is high to potential applied to the other input portion. The wiring connects a reference terminal to the other input potion. In addition, the reset switch section is configured to isolate the wiring from a baseline potential when the input terminal is supplied with a potential, and to connect the wiring to the baseline potential when the input terminal is not supplied with the potential. | 01-13-2011 |
20110159822 | SEMICONDUCTOR SWITCH AND WIRELESS DEVICE - According to one embodiment, a semiconductor switch includes a voltage generator, a voltage controller, a driver, and a switch unit. The voltage generator generates a negative first potential. The voltage controller controls the first potential according to a terminal switch signal input from an outside. The driver is input the terminal switch signal, and outputs at least one selected from the first potential and the second potential based on the terminal switch signal. The second potential is a power supply voltage or is higher than the power supply voltage. The switch unit is provided on an SOT substrate, switches a connection between an anntena terminal and any one of high frequency terminals based on the output of the driver. | 06-30-2011 |
20120062222 | MAGNETIC DETECTION DEVICE - An aspect of the present disclosure, there is provided a magnetic detection device including a magnetic detection unit including a magnetic sensor unit and a comparison unit, the magnetic sensor unit detecting a magnetic flux density, amplifying the detection signal and outputting an output signal to the comparison unit as a mode selected from one of a first mode and a second mode of which power consumption is lower than that of the first mode, the comparison unit comparing the output signal and a reference voltage as a threshold level which determines magnetic field being formed or not, and outputting a comparison result, a conversion gain control unit outputting a mode signal based on the comparison result to the magnetic sensor unit as the second mode when the mode signal is larger than the threshold level or as the first mode when the mode signal is smaller than the threshold level so as to control the magnetic sensor unit. | 03-15-2012 |
20120068757 | SEMICONDUCTOR SWITCH - According to one embodiment, a semiconductor switch includes a power supply circuit, a control circuit and a switch circuit. The power supply circuit includes an internal potential generator connected to a power supply, and a first transistor connected between an input and an output of the internal potential generator. The internal potential generator generates a first potential higher than an input potential. The first transistor is turned on when the first potential becomes lower than the input potential and has a threshold voltage being set so as to keep the first potential not lower than the input potential. The control circuit is configured to receive the first potential to output a high-level or low-level control signal. The switch circuit is configured to receive an input of the control signal to switch connection between terminals. | 03-22-2012 |
20120139570 | SEMICONDUCTOR DEVICE AND METHOD FOR TESTING SAME - According to an embodiment, a semiconductor device includes a switch circuit selecting a signal pathway between a common terminal and one of a plurality of terminals using a plurality of FETs provided in series between the common terminal and each of the terminals. The semiconductor device also includes a test switch including a plurality of FETs connected to the common terminal, an oscillation circuit connected to the common terminal via the test switch, and a detection circuit receiving an output of the oscillation circuit. | 06-07-2012 |
Patent application number | Description | Published |
20110138081 | NETWORK-CONNECTED APPARATUS AND NETWORK CONNECTION METHOD - A network-connected apparatus, which performs communication using an IP address via a network connected thereto and has a fixed first IP address having been set as an own IP address used for communication performed thereby, includes a detection section configured to detect that the network-connected apparatus has been connected to a network, an IP address acquisition section configured to, when it has been detected that the network-connected apparatus has been connected to a network, not perform communication using the first IP address, but acquire a second IP address, which is not used by any one of the other apparatuses existing on the network, by using an own MAC address thereof, and an IP address setting section configured to set the second IP address as the own IP address used for communication performed by the network-connected apparatus. | 06-09-2011 |
20110158409 | WIRELESS COMMUNICATION APPARATUS, WIRELESS COMMUNICATION METHOD, AND WIRELESS COMMUNICATION PROGRAM - A wireless communication apparatus that establishes connection with an access point wirelessly to perform wireless communication is provided. The apparatus includes: a beacon receiving section that receives a beacon that includes identification information of the access point; a key input accepting section that accepts an input of a security key that is to be used for encryption of wireless communication between the wireless communication apparatus and the access point that is a connection target; a communication method determining section that determines, on the basis of the security key, a communication method that is to be used for communication with the access point by selection out of a plurality of communication methods using encryption available for connection with the access point; and a communication controlling section that carries out control for communicating with the access point by using the received identification information of the access point and the determined communication method. | 06-30-2011 |
Patent application number | Description | Published |
20100048322 | Golf club head, face of the golf club head, and method of manufacturing the golf club head - A golf club head that may increase the degree of freedom in design, a face of the golf club head, and a method of manufacturing the golf club head are provided. At least part of the golf club head includes an alloy, and the alloy includes Co and Fe in a total amount of 33 mass % to 65 mass %, Ni in an amount of 15 mass % to 35 mass %, Cr in an amount of 10 mass % to 25 mass %, Mo in an amount of 3 mass % to 12 mass %, at least one of Nb in an amount of 2 mass % or less and W in an amount of 5 mass % or less, and at least one of Mn in an amount of 2 mass % or less and Ti in an amount of 1 mass % or less. | 02-25-2010 |
20110079944 | ALLOY FOR SPRING, PLATE MATERIAL FOR SPRING, AND SPRING MEMBER - Provided are an alloy for spring, a plate material for spring, and a spring member, all of which are high in mechanical strength, also high in fatigue strength, and excellent in corrosion resistance. An alloy for spring of the present invention includes, as composition in terms of weight ratio, 28 to 42% Co, 10 to 27% Cr, 3 to 12% Mo, 15 to 40% Ni, 0.1 to 1.0% Ti, 1.5% or less Mn, 0.1 to 26.0% Fe, 0.1% or less C, and inevitable impurities, and at least one kind selected from 3.0% or less Nb, 5.0% or less W, 0.5% or less Al, 0.1% or less Zr, and 0.01% or less B. | 04-07-2011 |
20120067464 | CO-NI-BASED ALLOY, METHOD OF CONTROLLING CRYSTAL OF CO-NI-BASED ALLOY, METHOD OF PRODUCING CO-NI-BASED ALLOY, AND CO-NI-BASED ALLOY HAVING CONTROLLED CRYSTALLINITY - Provided is a Co—Ni-based alloy in which a crystal is easily controlled, a method of controlling a crystal of a Co—Ni-based alloy, a method of producing a Co—Ni-based alloy, and a Co—Ni-based alloy having controlled crystallinity. The Co—Ni-based alloy includes Co, Ni, Cr, and Mo, in which the Co—Ni-based alloy has a crystal texture in which a Goss orientation is a main orientation. The Co—Ni-based alloy preferably has a composition including, in terms of mass ratio: 28 to 42% of Co, 10 to 27% of Cr, 3 to 12% of Mo, 15 to 40% of Ni, 0.1 to 1% of Ti, 1.5% or less of Mn, 0.1 to 26% of Fe, 0.1% or less of C, and an inevitable impurity; and at least one kind selected from the group consisting of 3% or less of Nb, 5% or less of W, 0.5% or less of Al, 0.1% or less of Zr, and 0.01% or less of B. | 03-22-2012 |
20130226281 | Co-BASED ALLOY FOR LIVING BODY AND STENT - Provided is a Co-based alloy for a living body based on Co—Cr—W—Fe, including a composition of Cr: 5% by mass to 30% by mass, W: 5% by mass to 20% by mass, Fe: 1% by mass to 15% by mass, Co as the remainder, and unavoidable impurities. In this alloy, when the content of W is 5% by mass to 10% by mass, the content of Fe can be set to be in a range of 1% by mass to 5% by mass, and when the content of W is 11% by mass to 20% by mass, the content of Fe can be set to be in a range of 3% by mass to 15% by mass. | 08-29-2013 |
20140209220 | TWO-PHASE STAINLESS STEEL, METHOD OF MANUFACTURING THE SAME, AND DIAPHRAGM, PRESSURE SENSOR, AND DIAPHRAGM VALVE USING TWO-PHASE STAINLESS STEEL - It is an object of the present invention to provide a metal diaphragm capable of achieving a higher strength, excellent corrosion resistance, and a smooth surface condition, and a pressure sensor including the diaphragm. The diaphragm according to the present invention includes a two-phase stainless steel having a composition of 24 to 26 mass % Cr, 2.5 to 3.5 mass % Mo, 5.5 to 7.5 mass % Ni, 0.03 mass % or less C, 0.08 to 0.3 mass % N, and the balance Fe and inevitable impurities, and having a 0.2% proof stress of 1300 MPa or higher. | 07-31-2014 |
Patent application number | Description | Published |
20100121502 | Operation control system and method - An operation control system includes a transmitter circuit, a transmitter interface, an engine start button switch, a receiver unit and an engine ECU. The transmitter circuit generates a transmission signal and the transmitter interface inputs a communication signal to an operator by converting the transmission signal. The receiver unit receives the communication signal through the operator, when the operator touches the engine start button switch. The engine start button switch detects in-blood alcohol concentration of the operator. The receiver unit generates and applies an engine start control signal in response to output signals of the receiver unit indicative of the operator's engine start operation and alcohol detection result. | 05-13-2010 |
20100237988 | Communications apparatus - An electrode group is provided in a portable terminal carried by a human body for transmitting a transmission signal to the human body functioning as a transmission medium. The electrode group contains three electrodes arranged respectively at three vertices of an equilateral triangle. Three types of driving electrode pairs are defined as respectively having different combination of optional two electrodes. While changing the driving electrode pairs for use in order one pair by one pair, the transmission signal based on the same transmission data is repeatedly transmitted as many times as the number of driving electrode pairs. | 09-23-2010 |
20100290028 | LIGHT DETECTING DEVICE AND METHOD OF CONTROLLING LIGHT DETECTING DEVICE - A light detecting device includes a well region, a first holding region disposed in a surface portion of the well region, a second holding region and a third holding region disposed in a surface portion of the first holding region, an insulating layer disposed on the second holding region and the third holding region, a first electrode disposed on the second holding region through the insulating layer, and the second electrode disposed on the third holding region through the insulating layer. The first holding region is configured to hold a first carrier generated in the well region. Each of the second holding region and the third holding region is configured to hold a second carrier generated in the well region. The first carrier is one of an electron and a hole, and the second carrier is the other one of the electron and the hole. | 11-18-2010 |
20140104425 | IMAGE CAPTURING APPARATUS - An image capturing apparatus includes an optical system and an image sensor to capture images of a close object and distant object. The optical system includes a convex lens as a first optical member and a glass plate as a second optical member with a refractive index higher than that of air. The second optical member is located in between the first optical member and a first image point at which a real image of the close object is formed, to absorb a positional difference between the first image point and a second image point at which a real image of the distant object is formed. The image sensor includes multiple light reception elements to generate a single picture frame that contains simultaneously a real image of the close object and a real image of the distant object. | 04-17-2014 |
Patent application number | Description | Published |
20090058932 | LIQUID EJECTING HEAD AND METHOD OF MANUFACTURING THE SAME - A first film adhesive between actuator units and a supply port plate, a second film adhesive between a reservoir plate and the supply port plate, and a third film adhesive between the reservoir plate and a nozzle plate are each provided with round holes having an equal size and formed in correspondence to the locations of nozzle communication ports. Thanks to the round holes having the equal size one another, irregularity in capacities of spaces formed by layers of the first film adhesive, the second adhesive, and the third film adhesive are reduced, thereby reducing a difference of passage resistance caused in the nozzle communication ports. Accordingly, it is possible to realize a printing head | 03-05-2009 |
20110168316 | METHOD OF MANUFACTURING LIQUID EJECTING APPARATUS - A first film adhesive between actuator units and a supply port plate, a second film adhesive between a reservoir plate and the supply port plate, and a third film adhesive between the reservoir plate and a nozzle plate are each provided with round holes having an equal size and formed in correspondence to the locations of nozzle communication ports. Thanks to the round holes having the equal size one another, irregularity in capacities of spaces formed by layers of the first film adhesive, the second adhesive, and the third film adhesive are reduced, thereby reducing a difference of passage resistance caused in the nozzle communication ports. Accordingly, it is possible to realize a printing head capable of reducing irregularity in an amount of ejected ink and a speed of ink drops between nozzles. | 07-14-2011 |
Patent application number | Description | Published |
20080274370 | Method for Forming Insulation Film - In a process involving the formation of an insulating film on a substrate for an electronic device, the insulating film is formed on the substrate surface by carrying out two or more steps for regulating the characteristic of the insulating film involved in the process under the same operation principle. The formation of an insulating film having a high level of cleanness can be realized by carrying out treatment such as cleaning, oxidation, nitriding, and a film thickness reduction while avoiding exposure to the air. Further, carrying out various steps regarding the formation of an insulating film under the same operation principle can realize simplification of the form of an apparatus and can form an insulating film having excellent property with a high efficiency. | 11-06-2008 |
20090035950 | NITRIDING METHOD OF GATE OXIDE FILM - A substrate processing method comprises the step of forming an oxide film on a silicon substrate surface, and introducing nitrogen atoms into the oxide film by exposing the oxide film to nitrogen radicals excited in plasma formed by a microwave introduced via a planar antenna. | 02-05-2009 |
20090163036 | Substrate Treating Method - A substrate processing method includes the step of forming an oxide film by oxidizing a silicon substrate surface and the step of nitriding the oxide film to form an oxynitride film, wherein there is provided a step of purging oxygen after the oxidizing step but before said nitriding step from an ambient in which said nitriding processing is conducted. | 06-25-2009 |
20100096707 | Method for Forming Insulation Film - In a process involving the formation of an insulating film on a substrate for an electronic device, the insulating film is formed on the substrate surface by carrying out two or more steps for regulating the characteristic of the insulating film involved in the process under the same operation principle. The formation of an insulating film having a high level of cleanness can be realized by carrying out treatment such as cleaning, oxidation, nitriding, and a film thickness reduction while avoiding exposure to the air. Further, carrying out various steps regarding the formation of an insulating film under the same operation principle can realize simplification of the form of an apparatus and can form an insulating film having excellent property with a high efficiency. | 04-22-2010 |
Patent application number | Description | Published |
20100035439 | FILM FORMING METHOD AND FILM FORMING APPARATUS - The invention includes inserting an object to be processed into a processing vessel, which can be maintained vacuum, and making the processing vessel vacuum; performing a sequence of forming a ZrO | 02-11-2010 |
20100068896 | METHOD OF PROCESSING SUBSTRATE - A method of processing a substrate to form a thin film into which an impurity is introduced, the method including forming a thin film on the substrate; and introducing the impurity to the thin film by irradiating a gas cluster ion beam, which is generated by ionizing and accelerating a gas cluster of the impurity, onto the thin film. | 03-18-2010 |
20110197813 | FILM FORMING APPARATUS - The invention includes inserting an object to be processed into a processing vessel, which can be maintained vacuum, and making the processing vessel vacuum; performing a sequence of forming a ZrO | 08-18-2011 |
20120244721 | FILM FORMING METHOD, FILM FORMING APPARATUS, AND STORAGE MEDIUM - A method of forming a dielectric film including a zirconium oxide film includes: forming a zirconium oxide film on a substrate to be processed by supplying a zirconium material and an oxidant, the zirconium material including a Zr compound which includes a cyclopentadienyl ring in a structure, and forming a titanium oxide film on the zirconium oxide film by supplying a titanium material and an oxidant, the titanium material including a Ti compound which includes a cyclopentadienyl ring in a structure. | 09-27-2012 |
Patent application number | Description | Published |
20100116570 | Battery Module, Battery Device, Electric Motor Drive System and Vehicle - A battery module includes: a plurality of battery cells; a casing in which the plurality of battery cells are housed; a plurality of conductive members used to electrically connect the plurality of battery cells; a first chamber, formed in the casing, in which the plurality of battery cells are disposed; and a second chamber, formed in the casing and isolated from the first chamber, into which emitted matter from the battery cells is released, wherein: the conductive members and the battery cells are connected together within the second chamber. | 05-13-2010 |
20100248008 | Battery Module and Battery Device - A battery module includes: a plurality of battery cells; a casing in which the plurality of battery cells are housed; a plurality of conductive members that electrically connect the plurality of battery cells; and a voltage detection conductor that detects voltages at each of the plurality of battery cells. The casing includes at least a pair of resin side plates that sandwich and support the plurality of battery cells from both sides. The voltage detection conductor is formed in a predetermined shape and integrated with the side plates. | 09-30-2010 |
20110244282 | Electric Storage Module and Electric Storage Device - An electric storage module includes: a plurality of electric storage units; a casing that houses the plurality of electric storage units, and includes a pair of resin side plates that hold and support at least the plurality of electric storage units from opposite sides; a plurality of conductive members for electrically connecting the plurality of electric storage units; a metal cover member that covers the casing on an outside of each of the side plates; and a peripheral wall protruding from each of the side plates so as to surround each of the plurality of conductive members, wherein: a height of the peripheral wall from each of the side plates is higher than a height of the conductive members from each of the side plates, and smaller than a distance from each of the side plates to the cover member. | 10-06-2011 |
Patent application number | Description | Published |
20090026835 | Hydraulic Braking Device - The first control is to displace the primary piston by the amount obtained by multiplying the input rod displacement quantity by a proportional gain. The second control is to propel the primary piston by a prescribed offset thereby executing the first control. The third control is to displace the primary piston by the amount obtained by multiplying the input rod displacement quantity by a proportional gain specifically at a pressure decrease request. The brake force control device properly selects a control method from the first to third control methods to control the primary piston based on the automatic braking release conditions and a driver's brake request when a driver executes a brake operation during the automatic braking. | 01-29-2009 |
20090088925 | Drive Assist System - A drive assist system includes an assist starting part starting assist, a detection part detecting relative distances and speeds between a vehicles, a calculation part calculating collision risks when changing a lane by the basis of the relative distances and speeds, a first judgment part judging whether the lane can be changed by the relative distances, speeds and the collision risks, a decision part deciding a target space for lane change by the relative distances and speeds when the lane cannot be changed, a second judgment part judging whether a lane changeable space is in the target space, a setting part setting a target speed for the vehicle go to a lane change waiting position when no space and to setting a target speed the vehicle enters a lane changeable position when there is the space, and a control part controlling a speed of the vehicle reaches the target speed. | 04-02-2009 |
20110187515 | Vehicle Control Apparatus - According to conventional art, if there is an obstacle on the left of a vehicle, a control threshold value is set so as to avoid the obstacle. If the control threshold value is exceeded, the vehicle is controlled in accordance with a deviation quantity so as to return to a position where the control threshold avoids being exceeded. However, even if a risky oncoming vehicle is approaching the vehicle on the right, the vehicle is controllably moved toward the oncoming vehicle. Thus, disadvantageously, a driver has a sense of fear or discomfort. A vehicle control apparatus according to the present invention includes a calculation section configured to calculate a first risk level present on the left of the vehicle and a second risk level present on the right of the vehicle, a setting section configured to set a first control threshold for the left of the vehicle based on the first risk level and to set a second control threshold for the right of the vehicle based on the second risk level, a change section configured to change at least one of the first and second control thresholds based on the first and second risk levels, and a control section configured to control the vehicle based on the changed control threshold. | 08-04-2011 |
20110276227 | Driving Support Device - A conventional brake control can generate only a small yaw moment compared with a steering control, so that reliable avoidance of obstacles cannot be obtained. With a steering control, the driver gets behind the wheel every time when crossing a lane and has an uncomfortable feeling. To solve these problems, a traveling aid device comprises: a detection unit for detecting the traveling state of a vehicle, the position of a lane marker, and the positions and types of obstacles around the vehicle; a calculation unit for calculating, based on the traveling state of the vehicle, the position of the lane marker, and the positions and types of the surrounding obstacles, a target yaw moment so as to prevent a departure from the lane marker and a collision with the surrounding obstacles; and a distribution unit for distributing, based on at least one of the traveling state of the vehicle, the position of the lane marker, and the positions and types of the surrounding obstacles, the target moment to a first actuator for controlling the driving/braking force and a second actuator for controlling the steering. | 11-10-2011 |
20120239255 | Lane Departure Prevention Device and Vehicle Provided with Same - A lane departure prevention device includes departure prevention control means that performs control to prevent deviation from a lane based on a result of detection means such as sensors and a camera, driver's intention determination means that determines driver's steering intention and actuator activation limiting means that limits activation of an actuator based on the driver's steering intention from the driver's intention determination means. The driver's intention determination means calculates a variation ΔTh in the steering torque detected and a variation ΔTs in the control command value to a steering actuator, and determines that, when |ΔTh|−|ΔTs| is a threshold or more, driver's operational intention is present and limits the activation of the departure prevention control. This can avoid the interruption of departure prevention control in response to activation of an actuator for lane departure avoidance that a driver does not intend because of erroneous detection that a driver intends as such. | 09-20-2012 |
Patent application number | Description | Published |
20090039702 | BRAKE CONTROL APPARATUS - A brake control apparatus for a vehicle includes: a master cylinder for raising a wheel cylinder pressure according to operation of a brake pedal; a booster for raising the wheel cylinder pressure by operating the master cylinder independently of operation of the brake pedal; a pressure regulator provided with a hydraulic pump for raising the wheel cylinder pressure independently of operation of the master cylinder; and a control section including: a first controller for controlling the booster; and a second controller for controlling the pressure regulator. The control section detects that at least one of the booster and the first controller is in a state of malfunction; selects one of backup modes according to the state of malfunction, wherein the backup modes restrict operation of at least one of the booster and the pressure regulator in different manners; and controls the wheel cylinder pressure in the selected backup mode. | 02-12-2009 |
20090045672 | BRAKE CONTROL APPARATUS AND METHOD - A brake control system includes a master cylinder to produce a master cylinder pressure, a brake booster to assist the master cylinder, a first control unit to control the booster, a hydraulic modulator to supply a wheel cylinder pressure to a wheel cylinder, and a second control unit to control the hydraulic modulator. The hydraulic modulator includes a pressure source, such as a pump, to increase the wheel cylinder pressure. The first and second control units are connected together by a communication line. The brake control system may further include a boost condition transmitting section to transmit, through the communicating line, a condition of a boost system formed by the brake booster and the first control unit. | 02-19-2009 |
20090179627 | ON-VEHICLE ELECTRIC POWER SOURCE SYSTEM - In an on-vehicle electric power source system, a power source control device is configured to supply an electric power from an electric power supply source to an actuator by means of a dual-circuit power supply line. The dual-circuit power supply line includes a bypass line and a charge-up line arranged in parallel with the bypass line. A first shut-off circuit is disposed in the bypass line. A booster circuit, an electricity storage device, and a second shut-off circuit are disposed in the charge-up line. The storage device is provided for storing an electric power boosted up by the booster circuit. Also provided is a control unit, which is configured to perform switching between an electric power supply through the bypass line and an electric power supply through the charge-up line by a changeover of a shutoff-circuit established/blocked state between the first and second shut-off circuits. | 07-16-2009 |
20120091787 | BRAKE CONTROL APPARATUS - A brake control apparatus for a vehicle includes: a master cylinder for raising a wheel cylinder pressure according to operation of a brake pedal; a booster for raising the wheel cylinder pressure by operating the master cylinder independently of operation of the brake pedal; a pressure regulator provided with a hydraulic pump for raising the wheel cylinder pressure independently of operation of the master cylinder; and a control section including: a first controller for controlling the booster; and a second controller for controlling the pressure regulator. The control section detects that at least one of the booster and the first controller is in a state of malfunction; selects one of backup modes according to the state of malfunction, wherein the backup modes restrict operation of at least one of the booster and the pressure regulator in different manners; and controls the wheel cylinder pressure in the selected backup mode. | 04-19-2012 |
Patent application number | Description | Published |
20090219753 | MAGNETIC MEMORY DEVICE - A magnetic memory device including a plurality of word lines, a plurality of bit lines which intersect the word lines and are put into groups, a plurality of memory cells which are arranged at intersections between the bit lines and the word lines, each memory cell including a magnetic element and a transistor which are connected in series, a first decoder which sequentially selects the word lines, a second decoder which sequentially drives the bit lines of each group, a weighting adder which performs weighting addition of currents flowing on bit lines in a selected group to generate an added current signal, a current/voltage converter which converts the added current signal into a voltage signal, and an analog-to-digital converter which digitizes the voltage signal. | 09-03-2009 |
20090219757 | MAGNETIC STORAGE DEVICE - A magnetic storage device includes a plurality of MRAM memory cells connected to a data transfer line, a clamp transistor connected between the data transfer line and a reading signal line and configured to fixedly hold the potential of the data transfer line, and a reading circuit which is connected to the reading signal line and which reads the storage information of the memory cell. The reading circuit includes a hold switch connected between the reading signal line and a reading node N and configured to hold the potential of the node N, a capacitor connected between the node N and a ground end, a precharging switch connected between the node N and a power source and configured to charge the capacitor, and an inverter to which the potential of the node N is input to generate a digital signal. | 09-03-2009 |
20090237988 | MAGNETIC MEMORY DEVICE - A magnetic memory device includes a plurality of word lines, a plurality of bit lines arranged to intersect with the word lines, an MRAM cell array including a plurality of magnetic random access memory (MRAM) cells arranged at intersection portions between the word lines and the bit lines, a read current source which supplies a read current to the MRAM cells in a read mode, a sense amplifier which detects terminal voltages of the MRAM cells generated by the read current to generate a detection output signal, a latch circuit which latches the detection output signal to output read data, and a data write circuit which supplies a write current to the MRAM cells depending on write data in a write mode to perform writing and which supplies the write current to the MRAM cells depending on the read data in the read mode to perform rewriting. | 09-24-2009 |
20110149640 | MAGNETIC STORAGE DEVICE - A magnetic storage device includes a plurality of MRAM memory cells connected to a data transfer line, a clamp transistor connected between the data transfer line and a reading signal line and configured to fixedly hold the potential of the data transfer line, and a reading circuit which is connected to the reading signal line and which reads the storage information of the memory cell. The reading circuit includes a hold switch connected between the reading signal line and a reading node N and configured to hold the potential of the node N, a capacitor connected between the node N and a ground end, a precharging switch connected between the node N and a power source and configured to charge the capacitor, and an inverter to which the potential of the node N is input to generate a digital signal. | 06-23-2011 |
Patent application number | Description | Published |
20100195636 | RADIO COMMUNICATION SYSTEM, BASE STATION DEVICE, MOBILE STATION DEVICE, AND RANDOM ACCESS METHOD - A radio communication system includes a base station device and a plurality of mobile station devices which radio-communicate with the base station device. The base station device allocates random access signal identifiers for identifying random access signals to the mobile station devices and decides an allocation period for each of the random access signal identifiers used by the mobile base stations. During the allocation period, each of the mobile station devices transmits a random access signal corresponding to the allocated random access signal identifier. Thus, it is possible to suppress a delay until the random access procedure using a dedicated preamble is complete. | 08-05-2010 |
20100309836 | COMMUNICATION APPARATUS, COMMUNICATION METHOD - In an MBMS service desired to be received, if a condition for performing an MBMS request (an MBMS request trigger criterion) is satisfied (S | 12-09-2010 |
20110038299 | COMMUNICATION APPARATUS, COMMUNICATION METHOD - Efficient use of an identification information group (MAC ID) region which is assigned to a mobile station apparatus by a base station apparatus, and reduction in an uplink resource for making a request from the mobile station apparatus to the base station apparatus to start transmission of an MBMS service, are realized. In a mobile communication system which provides a Multimedia Broadcast Multicast Service (MBMS), a mobile station apparatus communicates with a base station apparatus. A control unit | 02-17-2011 |
20110237265 | MOBILE STATION DEVICE, BASE STATION DEVICE, COMMUNICATION SYSTEM, COMMUNICATION METHOD, AND PROGRAM - Provided is a mobile station device which can increase the success ratio and reduce a communication delay when transmitting a dedicated preamble from the mobile station device to a base station device by using a random access channel (RACH). The mobile station device performs random access to the base station device by using a dedicated preamble. The mobile station device transmits a first message by using the dedicated preamble and again transmits the first message using the dedicated preamble during a period (a random access response reception-uncertain period) when the base station device may transmit a second message as a response to the first message. | 09-29-2011 |
20130142146 | RADIO COMMUNICATION SYSTEM, BASE STATION DEVICE, MOBILE STATION DEVICE, AND RANDOM ACCESS METHOD - A radio communication system includes a base station device and a plurality of mobile station devices which radio-communicate with the base station device. The base station device allocates random access signal identifiers for identifying random access signals to the mobile station devices and decides an allocation period for each of the random access signal identifiers used by the mobile base stations. During the allocation period, each of the mobile station devices transmits a random access signal corresponding to the allocated random access signal identifier. Thus, it is possible to suppress a delay until the random access procedure using a dedicated preamble is complete. | 06-06-2013 |
20140233492 | RADIO COMMUNICATION SYSTEM, BASE STATION DEVICE, MOBILE STATION DEVICE, AND RANDOM ACCESS METHOD - A mobile station (MS) performs a first random access procedure using a dedicated preamble for non-contention based random access on a first available random access channel (RACH) of a plurality of RACHs in time domain within a period that the dedicated preamble is valid. In addition, the MS performs a second random access procedure using the dedicated preamble for non-contention based random access on the first available RACH after the predetermined time window has expired in a case that a random access response to the transmitted preamble is not received within a predetermined time window monitoring for the random access response. The MS also transmits the dedicated preamble on a RACH allowed to transmit by the BS, where any one of the RACHs in frequency domain is allowed to be transmitted by the BS over a period of time that the plurality of RACHs are allocated to a single carrier. | 08-21-2014 |
Patent application number | Description | Published |
20090143876 | Method for limiting expansion of earthquake damage and system for limiting expansion of earthquake damage for use in semiconductor manufacturing apparatus - To predict occurrence of an earthquake so as to minimize damage by preventing an object to be processed from flying out of an opened container. A semiconductor manufacturing apparatus | 06-04-2009 |
20120018649 | ION SUPPLY DEVICE AND WORKPIECE PROCESSING SYSTEM PROVIDED WITH THE SAME - An ion supply device includes an ion generator for generating ions for removing static electricity, a carrier gas supply unit for supplying to the ion generator a carrier gas for carrying the ions generated in the ion generator, and an ion supply nozzle for blowing the ions and the carrier gas from the ion generator through a blow-off opening toward an electricity removal target from which static electricity is to be removed. A slit is provided at the blow-off opening and has an increased width as the slit gets distant from the electricity removal target. The ion supply nozzle includes an internal flow path and a plurality of internal fins provided at a portion of the internal flow path near the blow-off opening so that the ions and the carrier gas blown from the slit is uniformly distributed along a lengthwise direction of the slit. | 01-26-2012 |
20120237323 | LID OPENING AND CLOSING DEVICE - A lid opening and closing device for a semiconductor manufacturing apparatus having a partition wall configured to divide a carrier conveying region and a substrate conveying region, the partition wall having a conveying gateway with an edge portion, includes an exhaust port configured to discharge therethrough an atmospheric gas from a closed space formed between a carrier making contact with the edge portion of the conveying gateway and an opening/closing door, and a purge gas injecting part provided in the opening/closing door. The purge gas injecting part is configured to enter the internal space of a carrier lid through an opening formed on the front surface of the carrier lid, to inject a purge gas into the internal space of the carrier lid and to discharge an atmospheric gas existing in the internal space of the carrier lid into the closed space through another opening of the carrier lid. | 09-20-2012 |
20120241032 | LID OPENING AND CLOSING DEVICE - A lid opening and closing device includes a table configured to mount a carrier thereon with a front surface of a carrier lid configured to face toward a conveying gateway, a gas injecting hole provided in an opposing surface portion and configured to supply a purge gas used in removing particles adhering to the carrier lid, an advancing/retreating mechanism configured to move the carrier placed on the table toward and away from the opposing surface portion, and a control unit configured to output a control signal such that a purge gas is supplied from the gas injecting hole to the carrier lid, wherein the carrier is positioned such that the distance between the opposing surface portion and the carrier lid is 5 mm or less and the carrier lid and the opposing surface portion are spaced apart from each other, and the carrier lid is subsequently removed from the carrier. | 09-27-2012 |
20130042808 | FILM CRACK DETECTION APPARATUS AND FILM FORMING APPARATUS - A film crack detection apparatus for performing a film crack detection operation, which is mounted to a film forming apparatus having a processing vessel for receiving an object to be processed and forming a thin film on a surface of the object to be processed, includes an elastic wave detection unit mounted to the film forming apparatus to detect an elastic wave, and a determination unit to determine whether performing a cleaning process of the processing vessel is necessary based on a detection result of the elastic wave detection unit. | 02-21-2013 |
20130234035 | ION SUPPLY DEVICE AND WORKPIECE PROCESSING SYSTEM PROVIDED WITH THE SAME - An ion supply device includes an ion generator for generating ions for removing static electricity, a carrier gas supply unit for supplying to the ion generator a carrier gas for carrying the ions generated in the ion generator, and an ion supply nozzle for blowing the ions and the carrier gas from the ion generator through a blow-off opening toward an electricity removal target from which static electricity is to be removed. A slit is provided at the blow-off opening and has an increased width as the slit gets distant from the electricity removal target. The ion supply nozzle includes an internal flow path and a plurality of internal fins provided at a portion of the internal flow path near the blow-off opening so that the ions and the carrier gas blown from the slit is uniformly distributed along a lengthwise direction of the slit. | 09-12-2013 |