Patent application number | Description | Published |
20080218716 | METHOD FOR SETTING AN OPTICAL IMAGING PROPERTY IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS, AND PROJECTION EXPOSURE APPARATUS OF THIS TYPE - In some embodiments, the disclosure provides a method for setting an optical imaging property in a microlithographic projection exposure apparatus via which a mask can be imaged onto a substrate having a light-sensitive surface, wherein the substrate can be moved stepwise in a direction transversely with respect to an optical axis relative to a projection objective. The method can include introducing an immersion medium under a predetermined pressure and/or with a predetermined flow rate into at least one first interspace, wherein the at least one first interspace—as seen along the optical axis—is arranged within an illumination system and/or the projection objective and/or between the illumination system and the mask and/or the mask and the projection objective and/or the projection objective and the substrate. The method can also include monitoring an actual pressure and/or an actual flow rate of the immersion medium for deviation from the predetermined pressure and/or the predetermined flow rate. | 09-11-2008 |
20120105958 | LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT - Disclosed is a lens module, especially a projection lens for semiconductor lithography, comprising at least one replaceable optical element that is disposed in a lens housing. At least one gas exchange device is positioned in an area of the replaceable optical element in such a way that a receiving zone for the replaceable optical element can be flushed when the optical element is replaced. | 05-03-2012 |
20130155509 | LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT - An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. Alternatively or in addition, the optical system has a gas lock that receives the optical element. The opening interconnects the gas lock and the receiving region of the housing, and accommodates passage of the optical element between the gas lock and the receiving region. | 06-20-2013 |
20140060926 | Contact element and method for manufacturing same - A contact element for contacting a contact point formed on a body includes: an element section on the contact point side for a force-locking connection to the contact point, an element section on the connection side for connection to an electrical connection conductor, and an intermediate section which connects the two element sections to one another for compensating for thermal expansions. At least the element sections on the contact point side and on the connection side are made of different integrally bonded materials having material properties which are adapted to the functionality of the corresponding element section. | 03-06-2014 |
20140326069 | SENSOR HAVING A HOUSING SEAL MADE OF SYNTHETIC RUBBERS HAVING DIFFERING ELASTICITY - A sensor for determining at least one property of a measuring gas in a measuring gas space is provided. The sensor has a housing which includes a housing opening. At least one connection cable is led from the housing through the housing opening. The sensor further includes at least one sealing body, in particular a grommet, the sealing body at least partially enclosing the connection cable. The sealing body has at least one first section and at least one second section, the first section having a higher deformability than the second section. | 11-06-2014 |
20150014163 | stop for sealing a housing of an exhaust gas sensor, exhaust gas sensor, and exhaust gas sensor production - A stopper for sealing a housing of an exhaust gas sensor has: at least one axial through-channel for guiding through a connecting cable; a basic body that has a fluoroelastomer; and at least one outer seal situated radially externally on the stopper and having at least one thermoplastically processable fluoropolymer-containing material having a melting point or melting range between 170° C. and 320° C. | 01-15-2015 |
20150027888 | EXHAUST GAS SENSOR - A stopper is described for sealing a housing of an exhaust gas sensor, in which the stopper has a base body which contains a fluoroelastomer, and in which the stopper has at least one through channel for leading through a connecting cable. A seal is situated, at least in places, between the base body of the stopper and the through channel. The seal contains at least one thermoplastically processable fluoropolymer-containing material having a melting point or melting range between 170° C. and 320° C. | 01-29-2015 |