Patent application number | Description | Published |
20110079580 | LOWER CHAMBER HEATERS FOR IMPROVED ETCH PROCESSES - A method of improving a plasma etch chamber by installing heaters on outer surfaces. A method of improving STI etch. A method of improving STI etch in a Hitachi M700 series etcher. | 04-07-2011 |
20130149866 | BAFFLE PLATE FOR SEMICONDUCTOR PROCESSING APPARATUS - A baffle plate for redirecting a reactive gas flow within a process chamber of a semiconductor plasma processing apparatus includes a topside surface having a plurality of topside apertures for receiving the reactive gas flow and a bottomside surface having a plurality of bottomside apertures for emitting the reactive gas flow toward a semiconductor substrate. An outer portion of the baffle plate includes both topside apertures and bottomside apertures, while within an inner portion of the baffle plate for at least one of the topside surface and bottomside surface is a solid region throughout exclusive of any apertures. The inner portion has an outer dimension that is at least ten (10) percent of an outer dimension of the outer portion. | 06-13-2013 |
20140024142 | SPECTRAL REFLECTOMETRY WINDOW HEATER - A plasma processing tool for fabricating a semiconductor device on a semiconductor wafer includes an optical window disposed on a plasma chamber, remotely from a plasma region. The window is thermally connected to an electrical heater element capable of maintaining the window at a temperature of at least 30° C. A heater controller provides electrical power to the heater element. During operation of the plasma processing tool, the heater controller provides power to the heater element so as to maintain the window at a temperature of at least 30° C. during at least a portion of a plasma process step in which by-products are produced in the plasma chamber. | 01-23-2014 |
20150024517 | PLASMA ETCHER CHUCK BAND - A plasma etch tool includes a wafer chuck with a chuck base and at least one functional component layer attached to the chuck base. A perimeter of the functional component layer has a polymer material permanently attached to it that extends to within 2 millimeters of a top surface of the chuck. The top surface of the wafer chuck contacts a bottom surface of a semiconductor wafer during an etch process for forming an integrated circuit. The polymer material is protected from an etch ambient by a plasma etcher chuck band installed around the perimeter of the functional component layer, extending over a portion of the chuck base. An integrated circuit may be formed by installing the plasma etcher chuck band on the chuck of the plasma etch tool, and subsequently performing an etch process in the plasma etch tool on a semiconductor wafer containing the partially formed integrated circuit. | 01-22-2015 |
20150072443 | Method of Etching Ferroelectric Capacitor Stack - A method of etching a ferroelectric capacitor stack structure including conductive upper and lower plates with a ferroelectric material, such as lead-zirconium-titanate (PZT), therebetween, with each of these layers defined by the same hard mask element. The stack etch process involves a plasma etch with a fluorine-bearing species as an active species in the etch of the conductive plates, and a non-fluorine-bearing chemistry for etching the PZT ferroelectric material. An example of the fluorine-bearing species is CF | 03-12-2015 |
Patent application number | Description | Published |
20100265048 | Imaging System for Vehicle - An imaging system for a vehicle includes an imaging sensor ( | 10-21-2010 |
20120265416 | VEHICULAR CAMERA WITH ON-BOARD MICROCONTROLLER - In one aspect of the invention, a vehicular camera is provided, comprising a lens, a housing, an imager and a microcontroller that is capable of handling certain functions, such as applying overlays to images received by the imager, dewarping the image and/or providing different viewing modes. | 10-18-2012 |
20130222595 | VEHICULAR CAMERA SYSTEM WITH REDUCED NUMBER OF PINS AND CONDUITS - A camera assembly for a vehicle includes an end connector with a first connection point that carries a video+ signal, a second connection point that carries power, and a third connection point that receives a video− signal, video shield current and ground current. The camera assembly may connect to a conduit assembly of the vehicle that includes a first conduit that carries the video+ signal from the end connector to a display in the vehicle, a second conduit that carries power from a power source (such as a battery) to the camera assembly, and a third conduit that connects between the third connection point and a ground point for the display in the vehicle. The camera may include a radio frequency identification element operable to wirelessly communicate between a remote device and the camera to identify the camera module and/or to program the camera. | 08-29-2013 |
20140036064 | IMAGING SYSTEM FOR VEHICLE - An imaging system for a vehicle includes an imaging sensor and a video display device. The imaging system generates an overlay that is electronically superimposed on the displayed images to assist a driver of the vehicle when executing a backup maneuver. The overlay has first, second and third overlay zones, with the overlay zones indicative of respective distance ranges from the rear of the vehicle to respective distances. As indicated to the driver viewing the video display screen when executing a backup maneuver, the first distance is closer to the rear of the vehicle than the second distance and the second distance is closer to the rear of the vehicle than the third distance. The first overlay zone may be a first color and the second overlay zone may be a second color and the third overlay zone may be a third color. | 02-06-2014 |
20140176605 | DRIVER ASSISTANCE SYSTEM FOR VEHICLE - A vehicular camera includes a housing, a lens, an image sensor positioned for receiving images from the lens, a processor, and a memory. The memory contains a plurality of overlays. The processor is programmed to (a) receive first input data from a vehicle in which the camera is to be mounted, wherein the first input data correspond to the configuration of the vehicle, and (b) select a particular overlay to display based at least in part on the input received. | 06-26-2014 |
20140320636 | REAR VISION SYSTEM FOR VEHICLE WITH DUAL PURPOSE SIGNAL LINES - A vision system of a vehicle includes a camera disposed at a vehicle and having a field of view exterior of the vehicle. The camera is operable to capture image data. The camera includes a circuit board and an imager disposed at the circuit board. An image processor is disposed at the circuit board, which has circuitry disposed thereat. The image processor is operable to process image data captured by the camera. Signals to and from the image processor are provided on at least one shared line connected between an electrical connector of the camera and a vehicle control of the vehicle. The at least one shared line includes at least one combined camera control and camera programming line. Signals carried on the combined camera control and camera programming line (i) control operation of the camera and (ii) program the camera. | 10-30-2014 |
20140327774 | VEHICULAR MULTI-CAMERA VISION SYSTEM - A vision system of a vehicle includes a plurality of cameras disposed at the vehicle and having respective fields of view exterior of the vehicle. An image processing system is operable to process image data captured by the cameras. Responsive to processing of captured image data, the vision system is operable to generate a composite image derived from image data captured by at least two cameras of the plurality of cameras. One of the plurality of cameras functions as a master camera and the vision system, responsive to processing image data captured by the master camera, determines operating parameters for the master camera. The determined operating parameters for the master camera are used by the other cameras of the plurality of cameras. | 11-06-2014 |