Patent application number | Description | Published |
20100230767 | MEMS SENSOR, MEMS SENSOR MANUFACTURING METHOD, AND ELECTRONIC DEVICE - An MEMS sensor includes: a movable weight which is connected with a fixed frame via an elastic deformation portion and has a cavity portion around the movable weight, wherein the movable weight has a laminated layer structure including a plurality of conductive layers, a plurality of between-layers insulation layers each of which is disposed between the adjoining conductive layers of the plural conductive layers, and plugs which are inserted into predetermined embedding groove patterns penetrating through the respective layers of the plural between-layers insulation layers and have specific gravity larger than that of the between-layers insulation layers, and the plugs formed on the respective layers have wall portions in wall shapes extending in one or plural longitudinal directions. | 09-16-2010 |
20100270596 | MEMS SENSOR, METHOD OF MANUFACTURING MEMS SENSOR, AND ELECTRONIC APPARATUS - A MEMS sensor includes: a substrate; a fixed electrode portion formed in the substrate; a movable weight portion formed above the fixed electrode portion via a gap; a movable electrode portion formed in the movable weight portion and disposed so as to face the fixed electrode portion; a supporting portion; and a connecting portion that couples the supporting portion with the movable weight portion and is elastically deformable, wherein the movable weight portion is a stacked structure having conductive layers and an insulating layer, and plugs having a larger specific gravity than the insulating layer are embedded in the insulating layer. | 10-28-2010 |
20100288047 | MEMS SENSOR AND ELECTRONIC APPARATUS - A MEMS sensor includes: a supporting portion; a movable weight portion; a connecting portion that couples the supporting portion with the movable weight portion and is elastically deformable; a first fixed electrode portion protruding from the supporting portion; and a first movable electrode portion protruding from the movable weight portion and disposed so as to face the first fixed electrode portion, wherein the movable weight portion is formed by stacking a conductive layer and an insulating layer in a first direction, plugs having a larger specific gravity than the insulating layer are embedded in the insulating layer, the conductive layer is connected to the first movable electrode portion, and one of the first fixed electrode portion and the first movable electrode portion has a first electrode portion and a second electrode portion in the first direction. | 11-18-2010 |
20100320907 | LIGHT SOURCE DEVICE AND PROJECTOR INCLUDING LIGHT SOURCE DEVICE - An optical source device includes a solid high frequency oscillating unit that outputs a high frequency signal, a waveguide that receives the high frequency signal output from the solid high frequency oscillating unit and radiates the received high frequency signal as a microwave, and a light emitting unit that emits light by the microwave radiated from the waveguide unit. A container of the waveguide unit has a space surrounded by reflective surfaces that reflect the microwave radiated from the antenna unit so as to collect the microwave. A projector includes this optical source device, an optical modulating unit that modulates a light beam emitted from the light emitting unit of the optical source device according to image information to form an optical image, and a projecting unit that projects the optical image formed by the optical modulating unit. | 12-23-2010 |
20110290023 | ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE - The manufacturing of an element structure including two or more sensor element is to be facilitated. An element structure includes a first substrate including a first support layer and a first sensor element disposed on the first support layer and a second substrate including a second support layer and a second sensor element disposed on the second support layer, wherein the second substrate is disposed on the first substrate via a spacer member in a state in which the first sensor element and the second sensor element are disposed to face each other. | 12-01-2011 |
20110291208 | ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE - Manufacturing of an element structure including a capacitor is to be facilitated. An element structure includes a first substrate that has a first support layer and a first movable beam having one end supported side the first support layer and the other end having a void part provided therearound and a second substrate that has a second support layer and a first fixing electrode formed side the second support layer wherein the second substrate is disposed to face above the first substrate, the first movable beam is provided with a first movable electrode and the first fixing electrode and the first movable electrode are disposed to face each other, with a gap therebetween. | 12-01-2011 |
20120111615 | FUNCTIONAL DEVICE, METHOD OF MANUFACTURING THE FUNCTIONAL DEVICE, PHYSICAL QUANTITY SENSOR, AND ELECTRONIC APPARATUS - A functional device according to an embodiment of the invention includes: an insulating substrate; a movable section; movable electrode fingers provided in the movable section; and fixed electrode fingers provided on the insulating substrate and arranged to be opposed to the movable electrode fingers. The fixed electrode fingers include: first fixed electrode fingers arranged on one side of the movable electrode fingers; and second fixed electrode fingers arranged on the other side of the movable electrode fingers. The first fixed electrode fingers and the second fixed electrode fingers are arranged to be spaced apart from each other. | 05-10-2012 |
20120267150 | FUNCTIONAL ELEMENT, SENSOR ELEMENT, ELECTRONIC APPARATUS, AND METHOD FOR PRODUCING A FUNCTIONAL ELEMENT - A functional element including a substrate having a principal surface, a groove portion (a first groove portion, a second groove portion) disposed on the principal surface, and a fixed electrode section (a first fixed electrode finger, a second fixed electrode finger) laid across the groove portion on the substrate, wherein, in the groove portion, a raised portion formed by using at least one of the substrate and the fixed electrode section is provided in a position overlapping with the fixed electrode section in a plan view, the raised portion has a bonded surface (an end face), a wiring line (a first wiring line, a second wiring line) is disposed on the bonded surface, and the substrate and the fixed electrode section are connected with the wiring line sandwiched between the substrate and the fixed electrode section. | 10-25-2012 |