Patent application number | Description | Published |
20090165646 | EFFLUENT GAS RECOVERY PROCESS FOR SILICON PRODUCTION - Effluent gas from a polysilicon reactor is directed to a gas separation membrane with a permeate gas being recycled to the reactor and the retentate being chilled with a cryogenic condenser using liquid cryogen. Liquid cryogen vaporized by the hot effluent gas may be stored or used to seal and/or chill the reactor or blanket a Si feed to a SiHCl3 reactor. | 07-02-2009 |
20090165647 | EFFLUENT GAS RECOVERY PROCESS FOR SILICON PRODUCTION - Purified SiHCl3 is used as a sweep gas across a permeate side of a gas separation membrane receiving effluent gas from a polysilicon reactor. The combined sweep gas and permeate is recycled to the reactor. | 07-02-2009 |
20090166173 | Effluent gas recovery process for silicon production - Purified SiHCl3 is used as a sweep gas across a permeate side of a gas separation membrane receiving effluent gas from a polysilicon reactor. The combined sweep gas and permeate is recycled to the reactor. | 07-02-2009 |
20090320519 | Recovery of Hydrofluoroalkanes - A mixture of air and one or more halogenated alkanes is directed to a gas separation membrane where it is separated into an oxygen, nitrogen, and moisture-enriched and halogenated alkane-depleted permeate and a halogenated alkane-enriched and oxygen, nitrogen, and moisture-depleted retentate. The retentate is directed to a cryogenic condenser where an amount of halogenated alkane is condensed therein. | 12-31-2009 |
20100077796 | Hybrid Membrane/Distillation Method and System for Removing Nitrogen from Methane - A hybrid gas separation membrane/cryogenic distillation method and system produces high purity gaseous methane from a gas mixture containing a majority of methane and a minority of nitrogen. | 04-01-2010 |
20100313750 | Method and System for Membrane-Based Gas Recovery - A fast gas is recovered from a feed gas containing a fast gas and at least one slow gas using a gas separation membrane. A controller may control a control valve associated with a partial recycle of a permeate gas from the membrane for combining with the feed gas. A controller may control a control valve associated with the backpressure of a residue gas from the membrane. | 12-16-2010 |
20110000257 | Effluent Gas Recovery System in Polysilicon and Silane Plants - Purified SiHCl | 01-06-2011 |
20130247761 | Method and System for Membrane-Based Gas Recovery - A fast gas is recovered from a feed gas containing a fast gas and at least one slow gas using a gas separation membrane. A controller may control a control valve associated with a partial recycle of a permeate gas from the membrane for combining with the feed gas. A controller may control a control valve associated with the backpressure of a residue gas from the membrane. | 09-26-2013 |
20130255483 | Method and System for Membrane-Based Gas Recovery - A fast gas is recovered from a feed gas containing a fast gas and at least one slow gas using a gas separation membrane. A controller may control a control valve associated with a partial recycle of a permeate gas from the membrane for combining with the feed gas. A controller may control a control valve associated with the backpressure of a residue gas from the membrane. | 10-03-2013 |