Patent application number | Description | Published |
20080196501 | Semiconductor sensor and manufacturing method therefor - A semiconductor sensor is disclosed that includes a semiconductor substrate, a sensing portion provided on the semiconductor substrate, and a pad in electrical communication with the sensing portion and provided on the semiconductor substrate. The semiconductor sensor also includes a bonding wire in electrical communication with the pad. Furthermore, the semiconductor sensor includes a cover member with a covering portion disposed over the semiconductor substrate for covering the sensing portion such that the covering portion is separated at a distance from the sensing portion. The cover member further includes a coupling portion provided on the semiconductor substrate at an area including the pad and for enabling electrical connection of the pad with the bonding wire therethrough. | 08-21-2008 |
20100307242 | DYNAMIC QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME - A dynamic quantity sensor includes a sensor chip, a base member, and bumps. The sensor chip includes a semiconductor substrate, a sensor part, and sensor pads electrically coupled with the sensor part. The base member includes a base substrate and base pads disposed on the base substrate. The bumps mechanically and electrically couple the sensor pads and the base pads, respectively, in a state where the sensor chip is curved with respect to the base member. The sensor pads include input pads and output pads. The first surface of the semiconductor substrate includes a first portion and a second portion. The first portion is closer to the base substrate than the second portion is. At least one of the input pads is disposed on the first portion and at least one of the output pads is disposed on the second portion. | 12-09-2010 |
20110056292 | Oscillation angular velocity sensor - Each of first and second oscillators includes a detector portion and a driver portion. The detector portion includes a stationary detector electrode and a detector weight, which includes a movable detector electrode opposed to the stationary detector electrode. The driver portion includes a driver weight having a movable driver electrode, which oscillates the detector portion, and a stationary driver electrode opposed to the movable driver electrode. The driver weights of the first and second oscillators are directly connected through a driver joint beam. The detector weights of the first and second oscillators are directly connected through a detector joint beam. | 03-10-2011 |
20110248363 | PHYSICAL QUANTITY DETECTION DEVICE AND METHOD FOR MANUFACTURING THE SAME - A physical quantity detection device includes: an insulating layer; a semiconductor layer on the insulating layer; and first and second electrodes in the semiconductor layer. Each electrode has a wall part, one of which includes two diaphragms and a cover part. The diaphragms facing each other provide a hollow cylinder having an opening covered by the cover part. One diaphragm faces the other wall part or one diaphragm in the other wall part. A distance between the one diaphragm and the other wall part or the one diaphragm in the other wall part is changed with pressure difference between reference pressure in the hollow cylinder and pressure of an outside when a physical quantity is applied to the diaphragms. The physical quantity is detected by a capacitance between the first and second electrodes. | 10-13-2011 |
20110271758 | ANGULAR VELOCITY SENSOR - In an angular velocity sensor, a beam portion couples a pair of vibrators with each other and couples each of the vibrators to a substrate to enable the pair of vibrators to be movable in a first direction and a second direction that are perpendicular to each other. The driving portion vibrates the pair of vibrators in opposite phases in the first direction. The detecting portion detects displacement of the pair of vibrators in the second direction as a change in capacitance. The detecting portion includes first and second detecting electrodes. The restricting portion restricts displacement of the pair of vibrators in the second direction based on the change in capacitance. The restricting portion includes first and second restricting electrodes, and an electrode interval between the restricting electrodes is twice a width of the detecting electrodes in the second direction. | 11-10-2011 |
20110271759 | ANGULAR VELOCITY SENSOR - In an angular velocity sensor, a vibrator is coupled with a substrate through a beam part, and is movable in a first direction and a second direction that is perpendicular to the first direction. A driving part is configured to vibrate the vibrator in the first direction. A detecting part is configured to detect displacement of the vibrator in the second direction as a change in capacitance, the displacement being caused by Coriolis force generated in the vibrator due to vibration of the vibrator and an angular velocity around a third direction that is perpendicular to the first direction and the second direction. A restricting part is configured to restrict displacement of the vibrator in the second direction based on the change in capacitance. The angular velocity sensor is configured to satisfy a condition where β sin θ is equal to or less than 1. | 11-10-2011 |
20140077824 | HUMIDITY SENSOR AND METHOD OF MANUFACTURING THE SAME - A humidity sensor includes a humidity detention section, a pad section, and a dam section. The humidity detention section includes a pair of detection electrodes facing each other on a predetermined surface of a substrate and a humidity-sensitive film covering the detection electrodes. The pad section is spaced from the humidity detection section on the surface and covered with a protection gel section. The dam section is located between the humidity detection section and the pad section on the surface. The dam section includes a dam wire that is made from the same material as the detection electrodes and a dam humidity-sensitive film that is made from the same material as the humidity-sensitive film and covers at least part of the dam wire. | 03-20-2014 |
20140139241 | CAPACITIVE HUMIDITY SENSOR - A humidity sensor includes a detection device with a capacitance changing with humidity at a first ratio and a reference device with a capacitance changing with humidity at a second ratio smaller than the first ratio. The detection device has detection electrodes facing each other with a first gap and a detection humidity-sensitive film covering the detection electrodes. The reference device has reference electrodes facing each other with a second gap and a reference humidity-sensitive film covering the reference electrodes. The detection humidity-sensitive film and the reference humidity-sensitive film are made from the same material and have the same thickness. The detection electrodes and the reference electrodes are made from the same material and have the same width and thickness. The second ratio peaks when the second gap is equal to a predetermined value. The second gap is smaller than the first gap and the predetermined value. | 05-22-2014 |
20140216156 | ACCELERATION SENSOR - An acceleration sensor includes a first and second anchors above a substrate, a first weight portion supported by the first anchor, a first electrode extended from the first weight portion, a second electrode supported by the second anchor, and a first beam connecting the first weight portion with the first anchor. The first weight portion includes a first left portion and a first right portion with different weights. The first beam includes a first connection beam connecting the first left portion with the first anchor, and a first support beam connecting the first connection beam with the first anchor. When acceleration is applied to the acceleration sensor, the first left portion and the first right portion are movable in opposite directions in a seesaw manner, in which the first anchor-provides a support point. | 08-07-2014 |
20150075285 | SENSOR DEVICE - A sensor device includes a semiconductor substrate and multiple sensing portions that are placed on one side of the semiconductor substrate and convert a physical quantity into an electrical signal. The one side is parallel to a reference plane defined by an X-direction and a Y-direction perpendicular to each other. The semiconductor substrate has a center point that is both a geometric center and a center of mass. The semiconductor substrate is axisymmetric with respect to each of a first reference line passing through the center point and parallel to the X-direction and a second reference line passing through the center point and parallel to the Y-direction. Each of the sensing portions is axisymmetric with respect to each of the first reference line and the second reference line. | 03-19-2015 |
Patent application number | Description | Published |
20090189439 | BRAKE HYDRAULIC PRESSURE CONTROL DEVICE - In a brake hydraulic pressure control device for a vehicle, a plurality of electromagnetic valves are mounted on a first surface of a housing, while an electric motor for driving pumps built in the housing are mounted on a second surface of the housing opposite to the first surface. A cover member for covering the electromagnetic valves is attached to the first surface, and a main ECU for controlling the electromagnetic valves and the electric motor is arranged in a space defined by the cover member and the first surface. One or more spaces are formed between the electric motor and the second surface to receive a plurality of pressure sensors for detecting hydraulic pressures at various parts in a hydraulic brake device of the vehicle. | 07-30-2009 |
20090189440 | BRAKE HYDRAULIC PRESSURE CONTROL DEVICE - In a brake hydraulic pressure control device, a main ECU is provided with a first converter for converting serial signals or parallel signals inputted thereto into parallel signals or serial signals to output the converted signals, while a motor ECU arranged away from the main ECU is provided with a second converter for converting serial signals or parallel signals inputted thereto into parallel signals or serial signals to output the converted signals. The first and second converters are electrically connected with each other through at least one conductive member capable of serial communication. | 07-30-2009 |
20110233993 | VEHICULAR BRAKE CONTROL DEVICE FOR CONTROLLING BRAKE FLUID PRESSURE - A vehicular brake control device is installed in a vehicle and includes an actuator and a control unit. The actuator controls brake fluid pressures applied respectively to a first wheel cylinder for a front wheel and a second wheel cylinder for a rear wheel. The actuator includes a first pump for the front wheel, a second pump for the rear wheel, and a motor for driving the first pump and the second pump. The first pump sucks brake fluid and discharges the brake fluid to the first wheel cylinder. The second pump sucks brake fluid and discharges the brake fluid to the second wheel cylinder. In addition, a discharge volume of the first pump is larger than a discharge volume of the second pump. | 09-29-2011 |