Patent application number | Description | Published |
20090144691 | Enhanced Process Yield Using a Hot-Spot Library - The invention provides apparatus and methods for processing substrates using a hot-spot library. | 06-04-2009 |
20110205505 | LINE PATTERN COLLAPSE MITIGATION THROUGH GAP-FILL MATERIAL APPLICATION - Disclosed is a method and apparatus for mitigation of photoresist line pattern collapse in a photolithography process by applying a gap-fill material treatment after the post-development line pattern rinse step. The gap-fill material dries into a solid layer filling the inter-line spaces of the line pattern, thereby preventing line pattern collapse due to capillary forces during the post-rinse line pattern drying step. Once dried, the gap-fill material is depolymerized, volatilized, and removed from the line pattern by heating, illumination with ultraviolet light, by application of a catalyst chemistry, or by plasma etching. | 08-25-2011 |
20120244645 | ELECTROSTATIC POST EXPOSURE BAKE APPARATUS AND METHOD - An Electrostatic Post Exposure Bake (EPEB) subsystem comprising an Electrostatic Bake Plate (EBP) configured in a processing chamber in an EPEB subsystem, wherein the EPEB wafer comprises an exposed masking layer having unexposed regions and exposed regions therein and the EPEB wafer is developed using the EBP. | 09-27-2012 |
20130107237 | METHOD OF SLIMMING RADIATION-SENSITIVE MATERIAL LINES IN LITHOGRAPHIC APPLICATIONS | 05-02-2013 |
20130309457 | METHOD OF FORMING PATTERNS USING BLOCK COPOLYMERS AND ARTICLES THEREOF - A method for patterning a layered structure is provided that includes performing photolithography to provide a developed prepattern layer on a horizontal surface of an underlying substrate, modifying the prepattern layer to form spaced apart inorganic material guides, casting and annealing a layer of a self-assembling block copolymer to form laterally-spaced cylindrical features, forming a pattern by selectively removing at least a portion of one block of the self-assembling block copolymer, and transferring the pattern to the underlying substrate. The method is suitable for making sub-50 nm patterned layered structures. | 11-21-2013 |
20140144463 | CONTROLLING CLEANING OF A LAYER ON A SUBSTRATE USING NOZZLES - Provided is a method for cleaning an on implanted resist layer or a substrate after an ashing process. A duty cycle for turning on and turning off flows of a treatment liquid using two or more nozzles is generated. The substrate is exposed to the treatment liquid comprising a first treatment chemical, the first treatment chemical with a first film thickness, temperature, total flow rate, and first composition. A portion of a surface of the substrate is concurrently irradiated with UV light while controlling the selected plurality of cleaning operating variables in order to achieve the two or more cleaning objectives. The cleaning operating variables comprise two or more of the first temperature, first composition, first film thickness, UV wavelength, UV power, first process time, first rotation speed, duty cycle, and percentage of residue removal are optimized to achieve the two or more cleaning objectives, | 05-29-2014 |
20140273514 | TOPOGRAPHY MINIMIZATION OF NEUTRAL LAYER OVERCOATS IN DIRECTED SELF-ASSEMBLY APPLICATIONS - A method is provided for patterning a layered substrate that includes loading a substrate into a coater-developer processing system; coating the substrate with a photoresist material layer; patterning the photoresist material layer to form a photoresist pattern; transferring the substrate to a deposition processing system; and depositing a neutral layer over the photoresist pattern and exposed portions of the substrate. The neutral layer can deposited using a gas cluster ion beam (GCIB) process, or an atomic layer deposition (ALD) process, which has minimal topography. The method may further include lifting off a portion of the neutral layer deposited over the photoresist pattern to expose a neutral layer template for subsequent directed self-assembly (DSA) patterning; depositing a DSA material layer over the neutral layer template; baking the DSA material layer to form a DSA pattern; and developing the DSA material layer to expose the final DSA pattern for subsequent feature etching. | 09-18-2014 |
20140273522 | MULTI-STEP BAKE APPARATUS AND METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY CONTROL - A method of forming a patterned substrate includes casting a layer of a block copolymer having an intrinsic glass transition temperature T | 09-18-2014 |
20140273523 | MULTI-STEP BAKE APPARATUS AND METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY CONTROL - A method of forming a patterned substrate includes casting a layer of a block copolymer having an intrinsic glass transition temperature T | 09-18-2014 |
20140273534 | INTEGRATION OF ABSORPTION BASED HEATING BAKE METHODS INTO A PHOTOLITHOGRAPHY TRACK SYSTEM - A method of patterning a layered substrate is provided that includes forming a layer of a block copolymer on a substrate; and annealing the layer of the block copolymer to affect microphase segregation such that self-assembled domains are formed by application of an absorption based heating method. Exemplary absorption based heating methods include electromagnetic radiation sources such as broadband flash lamps, light emitting diodes, lasers, or DUV flash lamps. The method may also include a metrology review and an application of the absorption based heating to at least a portion of the layered substrate to refine or modify the microphase segregation. | 09-18-2014 |
20150044785 | SUBSTRATE BACKSIDE TEXTURING - Embodiments described relate to a method and apparatus for reducing lithographic distortion. A backside of a semiconductor substrate may be texturized. Then a lithographic process may be performed on the semiconductor substrate having the texturized backside. | 02-12-2015 |
Patent application number | Description | Published |
20100062843 | APPARATUS AND METHODS FOR AN ACCOUNT BASED GAMING SYSTEM - Apparatus, systems, architectures, and methods provide instrumentality to assign a game instance as an account owner in a gaming system and to convey owner functions in the gaming system to the game instance. | 03-11-2010 |
20100081499 | SYSTEM FOR VALIDATING WAGERING GAME DATA - Systems for validating wagering game data are described herein. In one embodiment, an apparatus includes an application program configured to transmit a request for wagering game data. The apparatus can also include a wagering game data security controller configured to detect the request. The wagering game data security controller can include a wagering game data processor configured to fetch the wagering game data and a reference value from a data store. The wagering game data security controller can also include a wagering game data validator configured to compute a comparison value based on the wagering game data, and to determine whether the comparison value is equal to the reference value. The wagering game data security controller can also include a notifier unit configured to present a notification if the comparison value is not equal to the reference value. | 04-01-2010 |
20100190554 | WAGERING GAME HISTORY FEATURES - This description describes techniques for storing and utilizing wagering game histories. In one embodiment, a method for recording progress of a wagering game can include detecting a first event indicating a first activity of the wagering game. The method can also include storing the first event according to a first data format and detecting a second event indicating a second activity of the wagering game, wherein the second event includes random number information indicating a result of the wagering game. The method can also include encrypting the second event and storing the second event according to the first data format. | 07-29-2010 |
20100261525 | DYNAMIC JACKPOT ENROLLMENT - Information communicated about progressive wagering games to backend systems in response to game play can be utilized to dynamically enroll gaming machines being used to play the progressive wagering games into an instance of a progressive jackpot. When a wager is submitted for a progressive wagering game, information that at least identifies the wager amount, gaming machine, and progressive wagering game is transmitted from the gaming machine to one or more backend systems (e.g., accounting and routing systems). A backend system, or a component of a backend system, tracks ongoing progressive jackpots. The backend system or system component at least records data that tracks funding of the progressive jackpot instances from gaming machines. | 10-14-2010 |
20100291998 | GAMING SYSTEM HAVING TOOLS FOR PAIRING WAGERING GAMES WITH AVAILABLE PROGRESSIVE GAMES - A method of operating a wagering game comprises activating a progressive game having a first set of configuration parameters and providing a primary wagering game having a second set of configuration parameters. The method further comprises comparing the first set of configuration parameters with the second set of configuration parameters to determine, in accordance with at least a first rule set, if the primary wagering game can be activated and paired with the progressive game. The method further displays results from the comparing step. | 11-18-2010 |
20110077073 | MANAGING LIMITATION RULES FOR WAGERING ACCOUNTS - A wagering game account management system and its operations are described herein. In embodiments, the operations include presenting a graphical user interface that includes a graphical control associated with a credit account belonging to a wagering game player; detecting a selection of the graphical control that initiates a financial transaction to transfer money from the credit account to a wagering game session account; determining access information stored in a player profile, the access information to access the credit account; determining an amount to transfer from the credit account to the wagering game session account balance; determining one or more rules limiting use of the credit account; and enforcing the one or more limitation rules on the use of the credit account. | 03-31-2011 |
20110183745 | MANAGING CASHLESS WAGERING GAME SYSTEMS - This document discusses, among other things, systems and methods for managing of cashless wagering game systems. An apparatus comprises a first cashless wagering game media input device, operable to access a first cashless wagering game medium associated with a first cashless wagering system; a second cashless wagering game media input device, operable to access a second cashless wagering game medium associated with a second cashless wagering system; and a control module operable to: receive a transfer amount, the transfer amount associated with the first cashless wagering game medium and to be debited from the first cashless wagering system; and credit at least a portion of the transfer amount to the second cashless wagering system. | 07-28-2011 |
20110201408 | WAGERING GAME ACCOUNT MANAGEMENT SYSTEM - A wagering game account management system and its operations are described herein. In embodiments, the operations include determining that a trigger condition for an account rule has occurred, wherein the account rule specifies an account action to be performed upon satisfaction of the trigger condition, and wherein the account action is associated with a wagering game account and other financial accounts. In some embodiments, the operations also include initiating the account actions and indicating a result of the account actions. | 08-18-2011 |
20120094744 | SYSTEM ARCHITECTURE FOR WIDE-AREA WAGERING GAME AND METHODS FOR CONDUCTING WIDE-AREA WAGERING GAMES - A wagering game system wide-area central gaming controller (WAGC) determines a threshold trigger (TT) for awarding a wide-area award, divides a condition prerequisite for the TT into a set of discrete threshold units (TU), one of which is associated with the TT, and distributes to each local central gaming controller (LCGC) a block of the TU for evaluation against an outcome or wager from each eligible wagering game machine. The WAGC also subtracts the distributed block of the TU from the set of TU, continues distributing to each LCGC a block of the TU selected from the set of TU for evaluation against an outcome or wager from each eligible wagering game machine and subtracting the distributed block of the TU from the set of TU until one LCGC confirms to the WAGC that a wagering game machine satisfied the TT associated with a TU allocated to the relevant LCGC. | 04-19-2012 |
20120252567 | MANAGING CASHLESS WAGERING GAME SYSTEMS - This document discusses, among other things, systems and methods for managing of cashless wagering game systems. An apparatus comprises a control module to debit, via a first system access technique, a debit amount from a first cashless wagering system in a financial transaction and credit, via a second system access technique different from the first system access technique, a credit amount to a second cashless wagering system in the same financial transaction, the first and second cashless wagering game systems being different from one another coupled over a network, | 10-04-2012 |
20120309508 | GAMING SYSTEM HAVING TOOLS FOR PAIRING WAGERING GAMES WITH AVAILABLE PROGRESSIVE GAMES - Gaming devices, gaming systems, methods of conducting wagering games, and computer programs for conducting wagering games are disclosed. A gaming system for playing a wagering game is disclosed which includes a processor(s) and a memory device(s) storing instructions that, when executed by at least one of the processors, cause the gaming system to: store, on at least one memory device, a progressive game having a first set of configuration parameters; store, on at least one memory device, a primary wagering game having a second set of configuration parameters; and compare, via at least one processor, the first set of configuration parameters with the second set of configuration parameters to determine, in accordance with at least a first rule set, if the primary wagering game can be activated and paired with the progressive game. | 12-06-2012 |
20130130788 | PLAYER TRACKING MECHANISM FOR SECONDARY WAGERING GAMES - A wagering game system and its operations are described herein. In some embodiments, the operations can include monitoring, at a wagering game machine, base wagering game activity associated with one or more base wagering games that are presented during a wagering game session. The operations can also include generating and transmitting one or more activity notification messages comprising at least an indication of the base wagering game activity to a player tracking server to cause the player tracking server to reward the base wagering game activity. The operations can further include generating and transmitting login and logout notification messages to a secondary game server to cause the secondary game server to determine secondary wagering game activity associated with one or more secondary wagering games presented during the wagering game session. The secondary wagering game activity can be used by the player tracking server to reward the secondary wagering game activity. | 05-23-2013 |
20130172075 | WAGERING GAME ACCOUNT MANAGEMENT SYSTEM - A wagering game account management system and its operations are described herein. In embodiments, the operations include detecting an account rule, wherein the account rule includes an activation event, wherein upon occurrence of the activation event a transfer of funds is initiates between a wagering game session and account and one or more other financial accounts. In some embodiments, the operations also include detecting the occurrence of the activation event. In some embodiments, the operations also include initiating the transfer of funds between the wagering game session account and one or more other financial accounts. | 07-04-2013 |
20130225273 | MANAGING LIMITATION RULES FOR WAGERING ACCOUNTS - A wagering game account management system and its operations are described herein. In some embodiments, the operations include assigning one or more money values to a graphical user interface control and linking the graphical user interface control to a credit account. The credit account is a third-party financial account from which a player account is authorized to borrow funds up to a credit limit. In some embodiments, the operations further include providing the graphical user interface control for presentation during a wagering game session associated with the player account. | 08-29-2013 |
20130252714 | ACCOUNT-BASED-WAGERING MOBILE CONTROLLER - A wagering game system and its operations are described herein. In some embodiments, the operations can include detecting, wirelessly, an identifier associated with a portable wireless device. In some embodiments, the identifier is assigned to a wagering game player account. The operations can further include initiating a wagering game session for the wagering game player account, via a wagering game machine, in response to detecting the identifier. The operations can further include detecting, wirelessly, a use of the portable wireless device in response to player input via the portable wireless device and, based on the use of the portable wireless device, authorizing initiation of the wagering game session and/or performing one or more activities via a wagering game application during the wagering game session. | 09-26-2013 |
20130296027 | WAGERING GAME ACCOUNT MANAGEMENT SYSTEM - A wagering game account management system and its operations are described herein. In embodiments, the operations include initiating a wagering game session and determining that an amount of winnings for the wagering game session are above a specific value. In some embodiments, the operations further include in response to the determining that the amount of winnings for the wagering game session are above the specific value, transferring a first portion of monetary value from a session balance, for the wagering game session, to a financial account separate from the session balance, wherein a second portion of the session balance remains for use in the wagering game session. In some embodiments, the financial account does not support wagering-game-related withdrawals. | 11-07-2013 |
20140248945 | WAGERING GAME HISTORY FEATURES - This description describes techniques for storing and utilizing wagering game histories. In one embodiment, a method for recording progress of a wagering game can include detecting a first event indicating a first activity of the wagering game. The method can also include storing the first event according to a first data format and detecting a second event indicating a second activity of the wagering game, wherein the second event includes random number information indicating a result of the wagering game. The method can also include encrypting the second event and storing the second event according to the first data format. | 09-04-2014 |
20140295951 | MANAGING LIMITATION RULES FOR WAGERING ACCOUNTS - A wagering game account management system and its operations are described herein. In some embodiments, the operations include assigning one or more money values to a graphical user interface control and linking the graphical user interface control to a credit account. The credit account is a third-party financial account from which a player account is authorized to borrow funds up to a credit limit. In some embodiments, the operations further include providing the graphical user interface control for presentation during a wagering game session associated with the player account. | 10-02-2014 |