Patent application number | Description | Published |
20080263023 | INDEXING AND SEARCH QUERY PROCESSING - A method for processing a search query according to one embodiment includes receiving a search query containing terms; looking up at least some of the terms in a search index for identifying sections of documents containing the at least some of the terms; generating a content score for each of the documents based at least in part on a number of keywords found in the sections of each document; looking up at least some of the terms in the search index for attempting to match one or more of the terms to context information in the search index, the context information being associated with at least one of the documents; generating a context score based at least in part on the matching of terms to the context information; generating a document score for each of the documents based at least in part on the content score and the context score; and outputting an indicator of at least one of the documents, or portion thereof, for the at least one of the documents having a higher document score relative to other of the documents. | 10-23-2008 |
20080263032 | UNSTRUCTURED AND SEMISTRUCTURED DOCUMENT PROCESSING AND SEARCHING - A method for analyzing and indexing an unstructured or semistructured document according to one embodiment includes receiving an unstructured or semistructured document; converting the document to one or more text streams; analyzing the one or more text streams for identifying textual contents of the document; analyzing the one or more text streams for identifying logical sections of the document; associating the textual contents with the logical sections; indexing the textual contents and their association with the logical sections; and saving a result of the indexing in a data storage device. | 10-23-2008 |
20080263033 | INDEXING AND SEARCHING PRODUCT IDENTIFIERS - A method for indexing a product identifier and logical parts thereof according to one embodiment of the present invention includes receiving a product identifier; splitting the product identifier into logical parts; indexing the product identifier and the individual logical parts in association with a particular document or portion thereof in an index; and storing the index. A method for processing a search query according to another embodiment of the present invention includes receiving a search query containing one or more terms; searching a search index containing complete product identifiers and variations thereof for attempting to match the one or more terms to the product identifiers or the variations thereof; and if one or more of the terms matches a complete product identifier or variation thereof, selecting and outputting an indicator of a document, or portion thereof, associated with the matching product identifier. | 10-23-2008 |
20100088154 | SYSTEMS, METHODS AND COMPUTER PROGRAM PRODUCTS FOR COMPUTING AND OUTPUTTING A TIMELINE VALUE, INDICATION OF POPULARITY, AND RECOMMENDATION - A computer-implemented method is provided for computing and outputting a timeline value. In use, model data about a product is received. Additionally, thresholds relevant to the model data are received or computed. Further, a timeline value is computed based on comparing the thresholds to the model data, where the timeline value is indicative of a current stage in a lifecycle of the product. Further still, the timeline value is output. Additional systems, methods and computer program products are also implemented. For example, methods are presented for computing and outputting an indication of product buzz and/or popularity. Other methods include using one or more of timeline, popularity, sentiment, value, discount ratings, etc. to compute a recommendation and output the same. | 04-08-2010 |
20110145229 | INDEXING AND SEARCHING PRODUCT IDENTIFIERS - A system, method and computer program product for processing a search query is presented. The method according to one embodiment includes receiving a search query containing one or more terms; processing the query to add one or more bi-words as terms to the query; searching a search index having product identifiers and individual logical parts of the product identifiers in association with particular documents or portions thereof indexed into different fields in context and content parts of the index; generating a context score based on at least some of the terms matching the product identifiers and the individual logical parts in the context part of the index; generating a content score based on at least some of the terms matching content terms in the content part of the index; and generating a document score by combining the context score and content score. | 06-16-2011 |
20110276564 | INDEXING AND SEARCHING PRODUCT IDENTIFIERS - A system, method and computer program product for indexing a product identifier and logical parts thereof includes receiving a product identifier; splitting the product identifier into logical parts; indexing the product identifier and the individual logical parts in an index; and storing the index, wherein the index is created by encoding the product identifier and the individual logical parts of the product identifier into separate fields of a document, wherein different weights are assigned to separate fields based on the field types such as product identifier or logical parts of the product identifier field, wherein different weights are assigned to words based on the word types including bi-words, wherein the fields and weights are encoded to word positions in the document, wherein the weights affect a score generated upon performing a query using the index. A system, method and computer program product for processing a search query is also presented. | 11-10-2011 |
20120209834 | INDEXING AND SEARCHING PRODUCT IDENTIFIERS - A system, method and computer program product for processing a search query includes receiving a search query containing one or more terms; processing the query to add one or more bi-words as terms to the query; searching a search index embodied on a non-transitory computer-readable storage medium having product identifiers and logical parts of the product identifiers indexed into different fields in the index; generating a score based on at least some of the terms matching the product identifiers and the individual logical parts of the product identifiers in the different fields in the index, wherein bi-words are weighted higher than the terms having only one word and individual terms are weighted higher when matching in the product identifier fields of the index; and selecting and outputting an indicator of product identifiers ranked by their scores. | 08-16-2012 |
20120330944 | INDEXING AND SEARCH QUERY PROCESSING - A method for processing a search query according to one embodiment includes receiving a search query containing terms; combining at least some consecutive terms in the search query to create biwords; looking up at least some of the terms and biwords in a search index for identifying sections of documents containing the at least some of the terms and/or biwords; generating a content score for each of the identified sections based at least in part on a number of the terms and biwords found in the sections of each document, wherein the biwords are given a higher priority than matched terms, wherein the priority affects the content score; and selecting and outputting an indicator of at least one of the sections, or portion thereof, based at least in part on the content score. | 12-27-2012 |
20140136533 | INDEXING AND SEARCH QUERY PROCESSING - A method for processing a search query according to one embodiment includes receiving a search query containing terms; combining at least some consecutive terms in the search query to create biwords; looking up at least some of the terms and biwords in a search index for identifying sections of documents containing the at least some of the terms and/or biwords; generating a content score for each of the identified sections based at least in part on a number of the terms and biwords found in the sections of each document, wherein the biwords are given a higher priority than matched terms, wherein the priority affects the content score; and selecting and outputting an indicator of at least one of the sections, or portion thereof, based at least in part on the content score. | 05-15-2014 |
Patent application number | Description | Published |
20090281377 | DEVICES, TOOLS AND METHODS FOR PERFORMING MINIMALLY INVASIVE ABDOMINAL SURGICAL PROCEDURES - Methods, systems, devices and assemblies are provided for treating a patient by: making an incision or puncture though the patient's skin over the abdominal cavity; establishing an initial tract through an opening formed by the incision or puncture; advancing an instrument through the tract; contacting a distal end portion of the instrument against an inner surface of the abdominal cavity; driving at least one stitching needle through the inner surface of the abdominal cavity; continuing the driving until the at least one stitching needle exits the inner surface of the abdominal cavity; anchoring a suture carried by each of the at least one stitching needle to a suture anchor at an exit location, respectively; and applying tension to each of the sutures. | 11-12-2009 |
20090281556 | DEVICES, TOOLS AND METHODS FOR PERFORMING MINIMALLY INVASIVE ABDOMINAL SURGICAL PROCEDURES - Methods, systems, devices and assemblies are provided for treating a patient by: making an incision or puncture though the patient's skin over the abdominal cavity; establishing an initial tract through an opening formed by the incision or puncture; advancing an instrument through the tract; contacting a distal end portion of the instrument against an inner surface of the abdominal cavity; driving at least one stitching needle through the inner surface of the abdominal cavity, continuing the driving until the at least one stitching needle exits the inner surface of the abdominal cavity, anchoring a suture carried by each of the at least one stitching needle to a suture anchor at an exit location, respectively; and applying tension to each of the sutures. | 11-12-2009 |
20090281563 | DEVICES, TOOLS AND METHODS FOR PERFORMING MINIMALLY INVASIVE ABDOMINAL SURGICAL PROCEDURES - Methods, systems, devices and assemblies are provided for treating a patient by: making an incision or puncture though the patient's skin over the abdominal cavity; establishing an initial tract through an opening formed by the incision or puncture; advancing an instrument through the tract; contacting a distal end portion of the instrument against an inner surface of the abdominal cavity; driving at least one stitching needle through the inner surface of the abdominal cavity; continuing the driving until the at least one stitching needle exits the inner surface of the abdominal cavity; anchoring a suture carried by each of the at least one stitching needle to a suture anchor at an exit location, respectively; and applying tension to each of the sutures. | 11-12-2009 |
20090287227 | MINIMALLY INVASIVE ,METHODS FOR IMPLANTING OBESITY TREATMENT DEVICES - Methods, systems, devices and assemblies are provided for treating a patient by: making an incision or puncture though the patient's skin over the abdominal cavity; establishing an initial tract through an opening formed by the incision or puncture; advancing an instrument through the tract; contacting a distal end portion of the instrument against an inner surface of the abdominal cavity; driving at least one stitching needle through the inner surface of the abdominal cavity; continuing the driving until the at least one stitching needle exits the inner surface of the abdominal cavity; anchoring a suture carried by each of the at least one stitching needle to a suture anchor at an exit location, respectively; and applying tension to each of the sutures. | 11-19-2009 |
20130261380 | Devices and Methods for the Treatment of Obesity - A device includes a body having at least first and second edges and a plurality of laces configured and dimensioned to be threaded across the stomach. Multiple devices can be positioned about a stomach. Methods for implanting the device and for treating a patient are provided. | 10-03-2013 |
20140222070 | Surgical Incision and Closure Apparatus - An apparatus for closing a surgical incision comprises left and right base panels, a plurality of closure components, and a plurality of left and right axial supports coupled to the respective base panels. The closure components couple the left and right base panels to each other laterally and have left and right ends coupled to the respective base panels. The closure components are positioned laterally across the left and right panels, the left axial supports are disposed between pairs of left closure component ends, the right axial supports are disposed between pairs of right closure component ends, and the left and right axial supports are offset from one another such that a serpentine arrangement of consecutive closure components and axial supports is formed. The apparatus can be made of antimicrobial materials or materials impregnated with antimicrobial agents. A flexible adhesive cover can be provided over the apparatus when in use. | 08-07-2014 |
Patent application number | Description | Published |
20110167176 | CONNECTING MULTIPLE ACCESSORIES TO A PORTABLE COMPUTING DEVICE - A portable computing device (PCD) can be connected to multiple accessories concurrently in a daisy chain topology. with the PCD at a “front” end of the chain. At least one intermediary accessory (or relay) provides one port for connection to the PCD and another port for connection to another accessory, which can also be a relay. Each connected accessory can interact with the PCD to invoke functionality, receive or deliver content, etc. Concurrently, each relay accessory can also act as a relay for other accessories in the chain, directing signals from a downstream accessory toward the PCD and directing signals received from upstream toward a downstream accessory, thereby allowing downstream accessories to interact with the PCD. The presence of upstream intermediaries can be transparent to a downstream accessory. | 07-07-2011 |
20110167281 | ACCESSORY POWER MANAGEMENT - Methods, apparatus, and circuits for managing power among portable computing devices and one or more accessories. One example provides commands to improve power management between a portable computing device and one or more accessories. Other examples provide commands that may allow a portable computing device to charge at a maximum available current level while providing an accessory with sufficient current for its proper operation. Another may help prevent a portable computing device from drawing a high level of current that could be detrimental to an accessory, while others provide commands that may allow a battery pack to instruct a portable computing device to not charge its internal battery. Another example may allow a portable computing device to determine which power supply among multiple power supplies should be used to power an accessory, while others may allow an accessory to retrieve charging current parameters from a portable computing device. | 07-07-2011 |
20120221869 | Accessory Power Management - Methods, apparatus, and circuits for managing power among portable computing devices and one or more accessories. One example provides commands to improve power management between a portable computing device and one or more accessories. Other examples provide commands that may allow a portable computing device to charge at a maximum available current level while providing an accessory with sufficient current for its proper operation. Another may help prevent a portable computing device from drawing a high level of current that could be detrimental to an accessory, while others provide commands that may allow a battery pack to instruct a portable computing device to not charge its internal battery. Another example may allow a portable computing device to determine which power supply among multiple power supplies should be used to power an accessory, while others may allow an accessory to retrieve charging current parameters from a portable computing device. | 08-30-2012 |
20120289265 | REMOTE MESSAGING FOR MOBILE COMMUNICATION DEVICE AND ACCESSORY - Message notifications to an accessory from a mobile communication device are provided according to some embodiments of the invention. When a message such as a text message, email, and/or voicemail is received at a mobile communication device, the mobile communication device can notify an attached accessory that a message has been received. In response, the accessory can request the full message, media associated with the message, an attachment to the message, and/or an audio/video stream of the message for presentation to a user. | 11-15-2012 |
20120309289 | TECHNIQUES FOR FACILITATING INTEROPERATION BETWEEN AN ACCESSORY AND MULTIPLE DEVICES - Techniques that facilitate interoperation between an accessory and multiple devices. In one set of embodiments, a device can receive, over a first communication channel of a first type, information from an accessory identifying communication channels of a second type supported by the accessory. The device can further establish a connection with the accessory on a second communication channel of the second type. Upon establishment of the connection, the device can transmit over the first communication channel a notification identifying the connection on the second communication channel. Based on the notification, the accessory can determine that it is connected to the same device on the first and second communication channels and can operate accordingly. | 12-06-2012 |
20130145057 | COMMUNICATION BETWEEN A HOST DEVICE AND AN ACCESSORY USING MULTIPLE-ENDPOINT IDENTIFICATION - Techniques for facilitating communication between a portable media device (PMD) and an accessory via multiple communication paths. The accessory has a unique accessory identifier that it can send to the PMD upon establishing a connection via each communication path. The PMD can determine whether the same accessory is connected via multiple communication paths based on the accessory identifier received via each communication path. The PMD can route information to the accessory and control routing of information from the accessory based on the set of communication paths that are currently connected and can dynamically change the routing as communication paths are connected and disconnected. | 06-06-2013 |
20130332172 | TRANSMITTING DATA FROM AN AUTOMATED ASSISTANT TO AN ACCESSORY - An accessory is configured to receive a request. The accessory transmits information associated with the request to a portable device. An automated assistant application executed by the portable device can interpret the request and provide a report. The portable device can transmit the report to the accessory. The report may include one or more results determined by the automated assistant. | 12-12-2013 |
20130332542 | MESSAGE-BASED IDENTIFICATION OF AN ELECTRONIC DEVICE - A message-based identification process can facilitate reliable interoperation between accessories and host devices. During an identification process, the devices can negotiate an operating agreement that specifies particular communications (e.g., messages) that each device is permitted to send to or receive from the other, for example by having one device send a list of specific messages that it intends to send to and/or receive from the other. The other device can review the proposal and either accept or reject it. If a proposal is accepted, the devices can begin interoperating using messages that were included in the agreed-upon proposal while ignoring any received messages that were not included in the agreed-upon proposal. | 12-12-2013 |
20130332632 | HOLISTIC IDENTIFICATION OF AN ELECTRONIC DEVICE - A holistic identification process can facilitate reliable interoperation between accessories and host devices, particularly where the accessory includes multiple components and/or multiple communication interfaces. During an identification process, the accessory can provide information about every communication interface it is capable of using to communicate with the host as well as information about various components that the accessory has available for use in interacting with the host device. During subsequent interoperation, the host device can use the identification information to determine a response to an input received from the accessory and/or to determine an interface to use to deliver information to the accessory. | 12-12-2013 |
20140031015 | REMOTE MESSAGING FOR MOBILE COMMUNICATION DEVICE AND ACCESSORY - Message notifications to an accessory from a mobile communication device are provided according to some embodiments of the invention. When a message such as a text message, email, and/or voicemail is received at a mobile communication device, the mobile communication device can notify an attached accessory that a message has been received. In response, the accessory can request the full message, media associated with the message, an attachment to the message, and/or an audio/video stream of the message for presentation to a user. | 01-30-2014 |
20140077972 | IDENTIFYING AND PRESENTING INFORMATION BASED ON UNIQUE VEHICLE IDENTIFIER - A portable electronic device can be used to present vehicle-specific information to a user. The portable electronic device can receive a message transmitted from a vehicle, the message including a unique vehicle identifier such as vehicle identification number (VIN). The portable electronic device can identify content based at least in part on the unique vehicle identifier, and present the content to the user. In some instances, the content may be presented to the user as audio output and/or visually on a display screen. Input can also be received from the user, and the portable electronic device can identify the content based in part on the received input and in part on the unique vehicle identifier. | 03-20-2014 |
20140354838 | SYSTEMS AND METHODS FOR REMOTE CAMERA CONTROL - A camera capable of capturing still images and video and included in a portable media device can be controlled remotely using an accessory. The accessory can register with the PMD to automatically receive notifications whenever there is a change in the camera state. The camera states can include mode, operation status, and configuration settings. The accessory can send instructions to a camera application that interfaces with the camera to control the camera. The accessory can remotely activate the camera, change camera mode, and send instructions to operate the camera. The accessory and the PMD can concurrently control the camera. The PMD can send the captured still images and recorded video to the accessory for preview and receive instructions from the accessory on disposition of the still images and the video. | 12-04-2014 |
20150031340 | REMOTE MESSAGING FOR MOBILE COMMUNICATION DEVICE AND ACCESSORY - Message notifications to an accessory from a mobile communication device are provided according to some embodiments of the invention. When a message such as a text message, email, and/or voicemail is received at a mobile communication device, the mobile communication device can notify an attached accessory that a message has been received. In response, the accessory can request the full message, media associated with the message, an attachment to the message, and/or an audio/video stream of the message for presentation to a user. | 01-29-2015 |
Patent application number | Description | Published |
20100227631 | REMOTE MESSAGING FOR MOBILE COMMUNICATION DEVICE AND ACCESSORY - Message notifications to an accessory from a mobile communication device are provided according to some embodiments of the invention. When a message such as a text message, email, and/or voicemail is received at a mobile communication device, the mobile communication device can notify an attached accessory that a message has been received. In response, the accessory can request the full message, media associated with the message, an attachment to the message, and/or an audio/video stream of the message for presentation to a user. | 09-09-2010 |
20100235550 | MOBILE COMPUTING DEVICE CAPABILITIES FOR ACCESSORIES - Embodiments disclosed herein provide for capability identification for accessories coupled with a mobile computing device. During capability identification an accessory can request capability information from a mobile computing device. In some embodiments, the accessory can specifically request capability information associated with a specific lingo. In response, the mobile computing device can respond with a message that indicates the capabilities of the mobile computing device that are supported. In some embodiments, the capabilities can be those capabilities associated with the specified lingo. In some embodiments, if the mobile computing device does not support a lingo, then the mobile computing device can respond to the request from the accessory with a negative acknowledgement. | 09-16-2010 |
20100235739 | REMOTE ACCESS TO ADVANCED PLAYLIST FEATURES OF A MEDIA PLAYER - A media player can have advanced-playlist creation capabilities such as the ability to automatically generate a playlist around a “seed” song selected by a user. In some embodiments, the accessory can determine whether the media player can use a particular song as a seed song for an advanced playlist and can so inform the user. The user can then operate the accessory's user interface to create an advanced playlist based on a particular song, rather than having to interact directly with the media player. | 09-16-2010 |
20110053491 | TAGGING OF BROADCAST CONTENT USING A PORTABLE MEDIA DEVICE CONTROLLED BY AN ACCESSORY - Track-identifying information can be collected from a broadcast using a portable media device capable of receiving broadcast content in combination with an accessory capable of communicating user input to the portable media player. In some embodiments, the portable media player can detect the presence of track-identifying metadata (a “tag”) within a received broadcast and can alert the accessory when a tag is available for a currently-playing track. If the accessory instructs the portable media player to store the tag, the portable media player can do so and can alert the accessory when a tag for a track has been stored. In some embodiments, the accessory can also remotely control other broadcast-receiving functions of the portable media device, such as entering or exiting a broadcast-receiving mode of operation. | 03-03-2011 |
20110058052 | SYSTEMS AND METHODS FOR REMOTE CAMERA CONTROL - A camera capable of capturing still images and video and included in a portable media device can be controlled remotely using an accessory. The accessory can register with the PMD to automatically receive notifications whenever there is a change in the camera state. The camera states can include mode, operation status, and configuration settings. The accessory can send instructions to a camera application that interfaces with the camera to control the camera. The accessory can remotely activate the camera, change camera mode, and send instructions to operate the camera. The accessory and the PMD can concurrently control the camera. The PMD can send the captured still images and recorded video to the accessory for preview and receive instructions from the accessory on disposition of the still images and the video. | 03-10-2011 |
Patent application number | Description | Published |
20090044753 | METHODS TO IMPROVE THE IN-FILM DEFECTIVITY OF PECVD AMORPHOUS CARBON FILMS - An article having a protective coating for use in semiconductor applications and methods for making the same are provided. In certain embodiments, a method of coating an aluminum surface of an article utilized in a semiconductor processing chamber is provided. The method comprises providing a processing chamber; placing the article into the processing chamber; flowing a first gas comprising a carbon source into the processing chamber; flowing a second gas comprising a nitrogen source into the processing chamber; forming a plasma in the chamber; and depositing a coating material on the aluminum surface. In certain embodiments, the coating material comprises an amorphous carbon nitrogen containing layer. In certain embodiments, the article comprises a showerhead configured to deliver a gas to the processing chamber. | 02-19-2009 |
20090050902 | SEMICONDUCTOR DEVICE HAVING SILICON CARBIDE AND CONDUCTIVE PATHWAY INTERFACE - The present invention provides semiconductor device formed by an in situ plasma reducing process to reduce oxides or other contaminants, using a compound of nitrogen and hydrogen, typically ammonia, at relatively low temperatures prior to depositing a subsequent layer thereon. The adhesion characteristics of the layers are improved and oxygen presence is reduced compared to the typical physical sputter cleaning process of an oxide layer. This process may be particularly useful for the complex requirements of a dual damascene structure, especially with copper applications. | 02-26-2009 |
20090197086 | ELIMINATION OF PHOTORESIST MATERIAL COLLAPSE AND POISONING IN 45-NM FEATURE SIZE USING DRY OR IMMERSION LITHOGRAPHY - A method and structure for the fabrication of semiconductor devices having feature sizes in the range of 90 nm and smaller is provided. In one embodiment of the invention, a method is provided for processing a substrate including depositing an anti-reflective coating layer on a surface of the substrate, depositing an adhesion promotion layer on the anti-reflective coating layer, and depositing a resist material on the adhesion promotion layer. In another embodiment of the invention, a semiconductor substrate structure is provided including a dielectric substrate, an amorphous carbon layer deposited on the dielectric layer, an anti-reflective coating layer deposited on the amorphous carbon layer, an adhesion promotion layer deposited on the anti-reflective coating layer, and a resist material deposited on the adhesion promotion layer. | 08-06-2009 |
20100093187 | Method for Depositing Conformal Amorphous Carbon Film by Plasma-Enhanced Chemical Vapor Deposition (PECVD) - Methods and apparatus for depositing an amorphous carbon layer on a substrate are provided. In one embodiment, a deposition process includes positioning a substrate in a substrate processing chamber, introducing a hydrocarbon source having a carbon to hydrogen atom ratio of greater than 1:2 into the processing chamber, introducing a plasma initiating gas selected from the group consisting of hydrogen, helium, argon, nitrogen, and combinations thereof into the processing chamber, with the hydrocarbon source having a volumetric flow rate to plasma initiating gas volumetric flow rate ratio of 1:2 or greater, generating a plasma in the processing chamber, and forming a conformal amorphous carbon layer on the substrate. | 04-15-2010 |
20100239979 | GRADED ARC FOR HIGH NA AND IMMERSION LITHOGRAPHY - A method of forming a device using a graded anti-reflective coating is provided. One or more amorphous carbon layers are formed on a substrate. An anti-reflective coating (ARC) is formed on the one or more amorphous carbon layers wherein the ARC layer has an absorption coefficient that varies across the thickness of the ARC layer. An energy sensitive resist material is formed on the ARC layer. An image of a pattern is introduced into the layer of energy sensitive resist material by exposing the energy sensitive resist material to patterned radiation. The image of the pattern introduced into the layer of energy sensitive resist material is developed. | 09-23-2010 |
20110090613 | APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER - The present invention generally provides methods and apparatus for monitoring and maintaining flatness of a substrate in a plasma reactor. Certain embodiments of the present invention provide a method for processing a substrate comprising positioning the substrate on an electrostatic chuck, applying an RF power between the an electrode in the electrostatic chuck and a counter electrode positioned parallel to the electrostatic chuck, applying a DC bias to the electrode in the electrostatic chuck to clamp the substrate on the electrostatic chuck, and measuring an imaginary impedance of the electrostatic chuck. | 04-21-2011 |
20110104400 | METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSITY AND STEP COVERAGE - A method for depositing an amorphous carbon layer on a substrate includes the steps of positioning a substrate in a chamber, introducing a hydrocarbon source into the processing chamber, introducing a heavy noble gas into the processing chamber, and generating a plasma in the processing chamber. The heavy noble gas is selected from the group consisting of argon, krypton, xenon, and combinations thereof and the molar flow rate of the noble gas is greater than the molar flow rate of the hydrocarbon source. A post-deposition termination step may be included, wherein the flow of the hydrocarbon source and the noble gas is stopped and a plasma is maintained in the chamber for a period of time to remove particles therefrom. | 05-05-2011 |
20110151142 | PECVD MULTI-STEP PROCESSING WITH CONTINUOUS PLASMA - Embodiments of the present invention provide methods for reducing defects during multi-layer deposition. In one embodiment, the method includes exposing the substrate to a first gas mixture and an inert gas in the presence of a plasma to deposit a first material layer on the substrate, terminating the first gas mixture when a desired thickness of the first material is achieved while still maintaining the plasma and flowing the inert gas, and exposing the substrate to the inert gas and a second gas mixture that are compatible with the first gas mixture in the presence of the plasma to deposit a second material layer over the first material layer in the same processing chamber, wherein the first material layer and the second material layer are different from each other. | 06-23-2011 |
20110287633 | ULTRA HIGH SELECTIVITY ASHABLE HARD MASK FILM - A method of forming an amorphous carbon layer on a substrate in a substrate processing chamber, includes introducing a hydrocarbon source into the processing chamber, introducing argon, alone or in combination with helium, hydrogen, nitrogen, and combinations thereof, into the processing chamber, wherein the argon has a volumetric flow rate to hydrocarbon source volumetric flow rate ratio of about 10:1 to about 20:1, generating a plasma in the processing chamber at a substantially lower pressure of about 2 Torr to 10 Torr, and forming a conformal amorphous carbon layer on the substrate. | 11-24-2011 |
20110291243 | PLANARIZING ETCH HARDMASK TO INCREASE PATTERN DENSITY AND ASPECT RATIO - Methods for manufacturing a semiconductor device in a processing chamber are provided. In one embodiment, a method includes depositing over a substrate a first base material having a first set of interconnect features, filling an upper portion of the first set of interconnect features with an ashable material to an extent capable of protecting the first set of interconnect features from subsequent processes while being easily removable when desired, planarizing an upper surface of the first base material such that an upper surface of the ashable material filled in the first set of interconnect features is at the same level with the upper surface of the first base material, providing a substantial planar outer surface of the first base material, depositing a first film stack comprising a second base material on the substantial planar outer surface of the first base material, forming a second set of interconnect features in the second base material, wherein the second set of interconnect features are aligned with the first set of interconnect features, and removing the ashable material from the first base material, thereby extending a feature depth of the semiconductor device by connecting the second set of interconnect features to the first set of interconnect features. In another embodiment, a method includes providing a base material having a first film stack deposited thereon, wherein the base material is formed over the substrate and having a first set of interconnect features filled with an amorphous carbon material, the first film stack comprising a first amorphous carbon layer deposited on a surface of the base material, a first anti-reflective coating layer deposited on the first amorphous carbon layer, and a first photoresist layer deposited on the first anti-reflective coating layer, and patterning a portion of the first photoresist layer by shifting laterally a projection of a mask on the first photoresist layer relative to the substrate a desired distance, thereby introducing into the first photoresist layer a first feature pattern to be transferred to the underlying base material, wherein the first feature pattern is not aligned with the first set of interconnect features. | 12-01-2011 |
20120080779 | ULTRA HIGH SELECTIVITY DOPED AMORPHOUS CARBON STRIPPABLE HARDMASK DEVELOPMENT AND INTEGRATION - Embodiments of the present invention generally relate to the fabrication of integrated circuits and particularly to the deposition of a boron containing amorphous carbon layer on a semiconductor substrate. In one embodiment, a method of processing a substrate in a processing chamber is provided. The method comprises providing a substrate in a processing volume, flowing a hydrocarbon containing gas mixture into the processing volume, generating a plasma of the hydrocarbon containing gas mixture by applying power from an RF source, flowing a boron containing gas mixture into the processing volume, and depositing a boron containing amorphous carbon film on the substrate in the presence of the plasma, wherein the boron containing amorphous carbon film contains from about 30 to about 60 atomic percentage of boron. | 04-05-2012 |
20120204795 | METHODS TO IMPROVE THE IN-FILM DEFECTIVITY OF PECVD AMORPHOUS CARBON FILMS - An article having a protective coating for use in semiconductor applications and methods for making the same are provided. In certain embodiments, a method of coating an aluminum surface of an article utilized in a semiconductor processing chamber is provided. The method comprises providing a processing chamber; placing the article into the processing chamber; flowing a first gas comprising a carbon source into the processing chamber; flowing a second gas comprising a nitrogen source into the processing chamber; forming a plasma in the chamber; and depositing a coating material on the aluminum surface. In certain embodiments, the coating material comprises an amorphous carbon nitrogen containing layer. In certain embodiments, the article comprises a showerhead configured to deliver a gas to the processing chamber. | 08-16-2012 |
20120208373 | METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSITY AND STEP COVERAGE - A method for depositing an amorphous carbon layer on a substrate includes the steps of positioning a substrate in a chamber, introducing a hydrocarbon source into the processing chamber, introducing a heavy noble gas into the processing chamber, and generating a plasma in the processing chamber. The heavy noble gas is selected from the group consisting of argon, krypton, xenon, and combinations thereof and the molar flow rate of the noble gas is greater than the molar flow rate of the hydrocarbon source. A post-deposition termination step may be included, wherein the flow of the hydrocarbon source and the noble gas is stopped and a plasma is maintained in the chamber for a period of time to remove particles therefrom. | 08-16-2012 |
20120285481 | METHODS OF REMOVING A MATERIAL LAYER FROM A SUBSTRATE USING WATER VAPOR TREATMENT - Embodiments of the invention generally relate to methods of removing and/or cleaning a substrate surface having different material layers disposed thereon using water vapor plasma treatment. In one embodiment, a method for cleaning a surface of a substrate includes positioning a substrate into a processing chamber, the substrate having a dielectric layer disposed thereon forming openings on the substrate, exposing the dielectric layer disposed on the substrate to water vapor supplied into the chamber to form a plasma in the water vapor, maintaining a process pressure in the chamber at between about 1 Torr and about 120 Torr, and cleaning the contact structure formed on the substrate. | 11-15-2012 |
20120285492 | METHODS OF DRY STRIPPING BORON-CARBON FILMS - Embodiments of the invention generally relate to methods of dry stripping boron-carbon films. In one embodiment, alternating plasmas of hydrogen and oxygen are used to remove a boron-carbon film. In another embodiment, co-flowed oxygen and hydrogen plasma is used to remove a boron-carbon containing film. A nitrous oxide plasma may be used in addition to or as an alternative to either of the above oxygen plasmas. In another embodiment, a plasma generated from water vapor is used to remove a boron-carbon film. The boron-carbon removal processes may also include an optional polymer removal process prior to removal of the boron-carbon films. The polymer removal process includes exposing the boron-carbon film to NF | 11-15-2012 |
20130284090 | COMPENSATING CONCENTRATION UNCERTAINITY - Methods and apparatus for depositing uniform boron-containing films are disclosed. A first precursor is delivered to a chamber through a first pathway having a first flow controller and a composition sensor. A second precursor is delivered by a second pathway, including a second flow controller, to a mixing point fluidly coupling the first and second pathways. A controller is coupled to the vibration sensor and the first and second flow controllers. The first precursor may be a mixture of diborane and a diluent gas, and the second precursor is typically a diluent gas. The flow rate of the first precursor may be set by determining a concentration of diborane in the first precursor from the composition sensor reading, and setting the flow rate to maintain a desired flow rate of diborane. The flow rate of the second precursor may be set to maintain a desired flow to the chamber. | 10-31-2013 |
20140017897 | ULTRA HIGH SELECTIVITY DOPED AMORPHOUS CARBON STRIPPABLE HARDMASK DEVELOPMENT AND INTEGRATION - Embodiments of the present invention generally relate to the fabrication of integrated circuits and particularly to the deposition of a boron containing amorphous carbon layer on a semiconductor substrate. In one embodiment, a boron-containing amorphous carbon film is disclosed. The boron-containing amorphous carbon film comprises from about 10 to 60 atomic percentage of boron, from about 20 to about 50 atomic percentage of carbon, and from about 10 to about 30 atomic percentage of hydrogen. | 01-16-2014 |
20140216498 | METHODS OF DRY STRIPPING BORON-CARBON FILMS - Embodiments of the invention generally relate to methods of dry stripping boron-carbon films. In one embodiment, alternating plasmas of hydrogen and oxygen are used to remove a boron-carbon film. In another embodiment, co-flowed oxygen and hydrogen plasma is used to remove a boron-carbon containing film. A nitrous oxide plasma may be used in addition to or as an alternative to either of the above oxygen plasmas. In another embodiment, a plasma generated from water vapor is used to remove a boron-carbon film. The boron-carbon removal processes may also include an optional polymer removal process prior to removal of the boron-carbon films. The polymer removal process includes exposing the boron-carbon film to NF | 08-07-2014 |