Patent application number | Description | Published |
20110169499 | HIGH SPEED MEASUREMENT OF RANDOM VARIATION/YIELD IN INTEGRATED CIRCUIT DEVICE TESTING - A test structure is provided that utilizes a time division sampling technique along with a statistical modeling technique that uses metal-oxide-semiconductor field effect transistor (MOSFET) saturation and linear characteristics to measure the mean (average) and sigma (statistical characterization of the variation) of a large population of electrical characteristics of electrical devices (e.g., integrated circuits) at high speed. Such electrical characteristics or sampling parameters include drive currents, leakage, resistances, etc. | 07-14-2011 |
20110227160 | Semiconductor Device and Method of Manufacturing the Same - A semiconductor device and a method of manufacturing the same are provided. The semiconductor device has a metal sidewall spacer on the sidewall of a gate electrode on the drain region side. The metal sidewall spacer is made of such metals as Ta, which has an oxygen scavenging effect and can effectively reduce EOT on the drain region side, and thus the ability to control the short channel is effectively increased. In addition, since EOT on the source region side is larger, the carrier mobility of the device will not be degraded. Moreover, such asymmetric device may have a better driving performance. | 09-22-2011 |
20110227170 | MOSFET STRUCTURE AND METHOD OF FABRICATING THE SAME - There is provided a MOSFET structure and a method of fabricating the same. The method comprises: providing a semiconductor substrate; forming a dummy s gate on the semiconductor substrate; forming source/drain regions; selectively etching the dummy gate to a position where a channel is to be formed; and epitaxially growing a channel layer at the position where the channel is to be formed and forming a gate on the channel layer, wherein the channel layer comprises a material of high mobility. Thereby, the channel of the device is replaced with the material of high mobility after the source/drain region is formed, and thus it is possible to suppress the short channel effect and also to improve the device performance. | 09-22-2011 |
20110233722 | CAPACITOR STRUCTURE AND METHOD OF MANUFACTURE - The presented application discloses a capacitor structure and a method for manufacturing the same. The capacitor structure comprises a plurality of sub-capacitors formed on a substrate, each of which comprises a top capacitor plate, a bottom capacitor plate and a dielectric layer sandwiched therebetween; and a first capacitor electrode and a second capacitor electrode connecting the plurality of sub-capacitors in parallel, wherein the plurality of sub-capacitors includes a plurality of first sub-capacitors and a plurality of second sub-capacitors stacked in an alternate manner, each of the first sub-capacitors has a bottom capacitor plate overlapping with a top capacitor plate of an underlying second sub-capacitor, with the overlapping plate being a first electrode layer; and each of the second sub-capacitors has a bottom capacitor plate overlapping with a top capacitor plate of an underlying first sub-capacitor, with the overlapping plate being a second electrode layer, the capacitor structure is characterized in that the first electrode layer and the second electrode layers are made of different conductive materials. The capacitor structure has a small footprint on the chip and a large capacitance value, and can be used as an integrated capacitor in an analogous circuit, an RF circuit, an embedded memory, and the like. | 09-29-2011 |
20110260214 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - The present invention discloses a semiconductor device and a method for manufacturing the same, and relates to the field of semiconductor manufacturing. According to the present invention, the semiconductor device comprises: a semiconductor substrate; a gate region located above the semiconductor substrate; S/D regions located at both sides of the gate region and made of a stress material; wherein a concentrated stress region is formed between the gate region and the semiconductor substrate, and the concentrated stress region comprises an upper SOI layer adjacent to the gate region above, and a lower stress release layer adjacent to the semiconductor substrate below. The present invention applies to the manufacturing of a MOSFET. | 10-27-2011 |
20110260231 | MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME - The present application discloses a memory device and a method for manufacturing the same. The memory device comprising an MOSFET formed in a semiconductor layer and a capacitor structure below the MOSFET, wherein the capacitor structure comprises two capacitor electrodes, and one of a source region and a drain region of the MOSFET is electrically connected to one of the two capacitor electrodes, wherein the capacitor structure comprises a plurality of first sub-capacitors and a plurality of second sub-capacitors which are stacked in an alternate manner, each of the plurality of the first sub-capacitors and the plurality of the second sub-capacitors comprises a top capacitor plate, a bottom capacitor plate and a dielectric layer sandwiched therebetween, and the plurality of the first sub-capacitors and the plurality of the second sub-capacitors are connected in parallel with the two capacitor electrodes, and wherein each of the first sub-capacitors has a bottom capacitor plate which is formed from a common first electrode layer with a top capacitor plate of an underlying second sub-capacitor, and each of the second sub-capacitors has a bottom capacitor plate which is formed from a common second electrode layer with a top capacitor plate of an underlying first sub-capacitor, and wherein the first electrode layer and the second electrode layer are made of different conductive materials. | 10-27-2011 |
20110298053 | MANUFACTURING METHOD OF GATE STACK AND SEMICONDUCTOR DEVICE - A manufacturing method of a gate stack with sacrificial oxygen-scavenging metal spacers includes: forming a gate stack structure consisting of an interfacial oxide layer, a high-K dielectric layer and a metal gate electrode, on a semiconductor substrate; conformally depositing a metal layer covering the semiconductor substrate and the gate stack structure; and selectively etching the metal layer to remove the portions of the metal layer covering the top surface of the gate stack structure and the semiconductor substrate, so as to only keep the sacrificial oxygen-scavenging metal spacers surrounding the gate stack structure in the outer periphery of the gate stack structure. A semiconductor device manufactured by this process. | 12-08-2011 |
20110303951 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - The present application discloses a semiconductor device and a method for manufacturing the same. The semiconductor device comprises a semiconductor substrate; a first semiconductor layer on the semiconductor substrate; a second semiconductor layer surrounding the first semiconductor layer; a high k dielectric layer and a gate conductor formed on the first semiconductor layer; source/drain regions formed in the second semiconductor layer, wherein the second semiconductor layer has a slant sidewall in contact with the first semiconductor layer. The semiconductor device has an increased output current, an increased operating speed, and a reduced power consumption due to the channel region of high mobility. | 12-15-2011 |
20120001229 | Semiconductor Device and Method for Forming the Same - A semiconductor device comprises a semiconductor substrate on an insulating layer; and a second gate, the second gate is located on the insulating layer and is embedded at least partially in the semiconductor substrate. A method for forming a semiconductor device comprises: forming a semiconductor substrate on an insulating layer; forming a void within the semiconductor substrate, with the insulating layer being exposed by the void; and forming a second gate, with the void being filled with at least one part of the second gate. It facilitates the reduction of the short channel effects, resistances of source and drain regions, and parasitic capacitances. | 01-05-2012 |
20120025317 | SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR FABRICATING THE SAME - A semiconductor device structure and a method for fabricating the same. A method for fabricating semiconductor device structure includes forming gate lines on a semiconductor substrate; forming gate sidewall spacers surrounding the gate lines; forming respective source/drain regions in the semiconductor substrate and on either side of the respective gate lines; forming conductive sidewall spacers surrounding the gate sidewall spacers; and cutting off the gate lines, the gate sidewall spacers and the conductive sidewall spacers at predetermined positions, in which the cut gate lines are electrically isolated gates, and the cut conductive sidewall spacers are electrically isolated lower contacts. The method is applicable to the manufacture of contacts in integrated circuits. | 02-02-2012 |
20120043593 | Semiconductor Device Structure and Method for Manufacturing the same - The present invention presents a method for manufacturing a semiconductor device structure as well as the semiconductor device structure. Said method comprises: providing a semiconductor substrate; forming a first insulating layer on the semiconductor substrate; forming a shallow trench isolation embedded in the first insulating layer and the semiconductor substrate; forming a channel region embedded in the semiconductor substrate; and forming a gate stack stripe on the channel region. Said method further comprises, before forming the channel region, performing a source/drain implantation on the semiconductor substrate. By means of forming the source/drain regions in a self-aligned manner before forming the channel region and the gate stack, said method achieves the advantageous effects of the replacement gate process without using a dummy gate, thereby simplifying the process and reducing the cost. | 02-23-2012 |
20120043624 | ULTRA-THIN BODY TRANSISTOR AND METHOD FOR MANUFCTURING THE SAME - An ultra-thin body transistor and a method for manufacturing an ultra-thin body transistor are disclosed. The ultra-thin body transistor comprises: a semiconductor substrate; a gate structure on the semiconductor substrate; and a source region and a drain region in the semiconductor substrate and on either side of the gate structure; in which the gate structure comprises a gate dielectric layer, a gate embedded in the gate dielectric layer, and a spacer on both sides of the gate; the ultra-thin body transistor further comprises: a body region and a buried insulated region located sequentially under the gate structure and in a well region; two ends of the body region and the buried insulated region are connected with the source region and the drain region respectively; and the body region is isolated from other regions in the well region by the buried insulated region under the body region. The ultra-thin body transistor has a thinner body region, which decreases the short channel effect. In the method for manufacturing an ultra-thin body transistor together with the replacement-gate process, the forming of the buried insulated region is self-aligned with the gate, which reduces the parasitic resistance under the spacer. | 02-23-2012 |
20120056278 | Method for Manufacturing Contacts for a Semiconductor Device, and Semiconductor Device Having Such Contacts - A manufacturing method for contacts for a semiconductor device and a semiconductor device having said contacts, said method forms contact structures whose lower part consists of a plurality of contact holes and whose upper part consists of a trench contact, said contact holes having relatively smaller diameters, and the trench contacts having relatively larger contact areas. Thus contact holes with smaller diameters and trench contacts having larger contact areas can be easily connected to the metal layer above them, thereby improving the electrical conductivity of the contacts and improving the overall performances of the device. | 03-08-2012 |
20120097923 | GRAPHENE DEVICE AND METHOD FOR MANUFACTURING THE SAME - The invention provides a graphene device structure and a method for manufacturing the same, the device structure comprising a graphene layer; a gate region in contact with the graphene layer; semiconductor doped regions formed in the two opposite sides of the gate region and in contact with the graphene layer, wherein the semiconductor doped regions are isolated from the gate region; a contact formed on the gate region and contacts formed on the semiconductor doped regions. The on-off ratio of the graphene device is increased through the semiconductor doped regions without increasing the band gap of the graphene material, i.e., without affecting the mobility of the material or the speed of the device, thereby increasing the applicability of the graphene material in CMOS devices. | 04-26-2012 |
20120104495 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - The present application discloses a semiconductor structure and a method for manufacturing the same. The semiconductor structure according to the present invention adjusts a threshold voltage with a common contact, which has a portion outside the source or drain region extending to the back-gate region and provides an electrical contact of the source or drain region and the back-gate region, which leads to a simple manufacturing process, an increased integration level and a lowered manufacture cost. Moreover, the asymmetric design of the back-gate structure further increases the threshold voltage and improves the performance of the device. | 05-03-2012 |
20120104508 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - There is provided a semiconductor structure and a method for manufacturing the same. The semiconductor structure according to the present invention comprises: a semiconductor substrate; a channel region formed on the semiconductor substrate; a gate stack formed on the channel region; and source/drain regions formed on both sides of the channel region and embedded in the semiconductor substrate. The gate stack comprises: a gate dielectric layer formed on the channel region; and a conductive layer positioned on the gate dielectric layer. For an nMOSFET, the conductive layer has a compressive stress to apply a tensile stress to the channel region; and for a pMOSFET, the conductive layer has a tensile stress to apply a compressive stress to the channel region. | 05-03-2012 |
20120112358 | STACK-TYPE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A stack-type semiconductor device includes a semiconductor substrate; and a plurality of wafer assemblies arranged in various levels on the semiconductor substrate, in which the wafer assembly in each level includes an active part and an interconnect part, and the active part and the interconnect part each have conductive through vias, wherein the conductive through vias in the active part are aligned with the conductive through vias in the interconnect part in a vertical direction, so that the active part in each level is electrically coupled with the active part in the previous level and/or the active part in the next level by the conductive through vias. Such a stack-type semiconductor device and the related methods can be applied in a process after the FEOL or in a semiconductor chip packaging process and provide a 3-dimensional semiconductor device of high integration and high reliability. | 05-10-2012 |
20120126244 | SHALLOW TRENCH ISOLATION STRUCTURE AND METHOD FOR FORMING THE SAME - The invention provides a STI structure and a method for manufacturing the same. The STI includes a semiconductor substrate; a first trench formed on the upper surface of the semiconductor substrate and filled with an epitaxial layer, wherein the upper surface of the epitaxial layer is higher than that of the semiconductor substrate; and a second trench formed on the epitaxial layer and filled with a first dielectric layer, wherein the upper surface of the first dielectric layer is flush with that of the epitaxial layer, and the width of the second trench is smaller than that of the first trench. The invention reduces the influences of divots on performance of the semiconductor device. | 05-24-2012 |
20120126245 | SHALLOW TRENCH ISOLATION STRUCTURE AND METHOD FOR FORMING THE SAME - The invention provides a STI structure and method for forming the same. The STI structure includes a semiconductor substrate; a first trench embedded in the semiconductor substrate and filled up with a first dielectric layer; and a second trench formed on a top surface of the semiconductor substrate and interconnected with the first trench, wherein the second trench is filled up with a second dielectric layer, a top surface of the second dielectric layer is flushed with that of the semiconductor substrate, and the second trench has a width smaller than that of the first trench. The invention reduces dimension of divots and improves performance of the semiconductor device. | 05-24-2012 |
20120132923 | SUBSTRATE FOR INTEGRATED CIRCUIT AND METHOD FOR FORMING THE SAME - The present invention relates to substrates for ICs and method for forming the same. The method comprises the steps of: forming a hard mask layer on the bulk silicon material; etching the hard mask layer and the bulk silicon material to form a first part for shallow trench isolation of at least one trench; forming a dielectric film on the sidewall of the at least one trench; further etching the bulk silicon material to deepen the at least one trench so as to form a second part of the at least one trench; completely oxidizing or nitridizing parts of the bulk silicon material which are between the second parts of the trenches, and parts of the bulk silicon material which are between the second parts of the trenches and side surfaces of the bulk silicon substrate; filling dielectric materials in the first and second parts of the at least one trench; and removing the hard mask layer. | 05-31-2012 |
20120139048 | MOSFET AND METHOD FOR MANUFACTURING THE SAME - The present application discloses a MOSFET and a method for manufacturing the same. The MOSFET comprises an SOI chip comprising a semiconductor substrate, a buried insulating layer on the semiconductor substrate, and a semiconductor layer on the buried insulating layer; source/drain regions formed in the semiconductor layer; a channel region formed in the semiconductor layer and located between the source/drain regions; and a gate stack comprising a gate dielectric layer on the semiconductor layer, and a gate conductor on the gate dielectric layer, wherein the MOSFET further comprises a backgate formed in a portion of the semiconductor substrate below the channel region, and the backgate has a non-uniform doping profile, and wherein the buried insulating layer serves as a gate dielectric layer of the backgate. The MOSFET has an adjustable threshold voltage by changing the type of dopant and/or the doping profile in the backgate, and reduces a leakage current of the semiconductor device. | 06-07-2012 |
20120149181 | METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER - There is provided a method for manufacturing a semiconductor wafer, comprising: performing heating so that metals dissolve into semiconductors of the wafer to form a semiconductor-metal compound; and performing cooling so that the formed semiconductor-metal compound retrogradely melt to form a mixture of the metals and the semiconductors. According to embodiments of the present invention, it is possible to achieve wafers of a high purity applicable to the semiconductor manufacture. | 06-14-2012 |
20120153393 | Transistor, Semiconductor Device Comprising the Transistor and Method for Manufacturing the Same - The invention relates to a transistor, a semiconductor device comprising the transistor and manufacturing methods for the transistor and the semiconductor device. The transistor according to the invention comprises: a substrate comprising at least a base layer, a first semiconductor layer, an insulating layer and a second semiconductor layer stacked sequentially; a gate stack formed on the second semiconductor layer; a source region and a drain region located on both sides of the gate stack respectively; a back gate comprising a back gate dielectric and a back gate electrode formed by the insulating layer and the first semiconductor layer, respectively; and a back gate contact formed on a portion of the back gate electrode. The back gate contact comprises an epitaxial part raised from the surface of the back gate electrode, and each of the source region and the drain region comprises an epitaxial part raised from the surface of the second semiconductor layer. As compared to a conventional transistor, the manufacturing process of the transistor of the invention is simplified and the cost of manufacture is reduced. | 06-21-2012 |
20120168829 | MOS TRANSISTOR AND METHOD FOR FORMING THE SAME - The invention provides a MOS transistor and a method for forming the MOS transistor. The MOS transistor includes a semiconductor substrate; a gate stack on the semiconductor substrate, and including a gate dielectric layer and a gate electrode on the semiconductor substrate in sequence; a source region and a drain region, respectively at sidewalls of the gate stack sidewalls of the gate stack and in the semiconductor; sacrificial metal spacers on sidewalls of the gate stack sidewalls of the gate stack, and having tensile stress or compressive stress. This invention scales down the equivalent oxide thickness, improves uniformity of device performance, raises carrier mobility and promotes device performance. | 07-05-2012 |
20120168865 | Transistor and Method for Manufacturing the Same - The invention relates to a transistor and a method for manufacturing the transistor. The transistor according to an embodiment of the invention may comprise: a substrate which comprises at least a back gate of the transistor, an insulating layer and a semiconductor layer stacked sequentially, wherein the back gate of the transistor is used for adjusting the threshold voltage of the transistor; a gate stack formed on the semiconductor layer, wherein the gate stack comprises a gate dielectric and a gate electrode formed on the gate dielectric; a spacer formed on sidewalls of the gate stack; and a source region and a drain region located on both sides of the gate stack, respectively, wherein the height of the gate stack is lower than the height of the spacer. The transistor enables the height of the gate stack to be reduced and therefore the performance of the transistor is improved. | 07-05-2012 |
20120181509 | GRAPHENE DEVICE AND METHOD FOR MANUFACTURING THE SAME - A graphene device structure and a method for manufacturing the same are provided. The graphene device structure comprises: a graphene layer; a gate region formed on the graphene layer; and a doped semiconductor region formed at one side of the gate region and connected with the graphene layer, wherein the doped semiconductor region is a drain region of the graphene device structure, and the graphene layer formed at one side of the gate region is a source region of the graphene device structure. The on/off ratio of the graphene device structure may be improved by the doped semiconductor region without increasing the band gaps of the graphene material, so that the applicability of the graphene material in CMOS devices may be enhanced without decreasing the carrier mobility of graphene materials and speed of the devices. | 07-19-2012 |
20120193798 | SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - The present invention relates to a semiconductor device structure and a method for manufacturing the same; the structure comprises: a semiconductor substrate on which a device structure is formed thereon; an interlayer dielectric layer formed on the device structure, wherein a trench is formed in the interlayer dielectric layer, the trench comprises an incorporated via trench and a conductive wiring trench, and the conductive wiring trench is positioned on the via trench; and a conductive layer filled in the trench, wherein the conductive layer is electrically connected with the device structure; wherein the conductive layer comprises a conductive material and a nanotube/wire layer surrounded by the conductive material. Wherein, the conductive layer comprises a conductive material and a nanotube/wire layer surrounded by the conductive material. The conductive layer of the structure has better thermal conductivity, conductivity and high anti-electromigration capability, thus is able to effectively prevent metal ions from diffusing outwards. | 08-02-2012 |
20120217583 | SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME - A semiconductor structure and a method for forming the structure are provided. The semiconductor structure has a STI structure which has a top surface higher than or as high as that of source/drain stressors. A dummy gate and a spacer are added on the STI structure. The method comprises: providing a semiconductor substrate; embedding a STI structure in the semiconductor substrate in order to form isolated active areas; forming a gate stack on the active area, and forming a dummy gate on the STI structure; forming a first spacer on sidewalls of the dummy gate, wherein a part of the first spacer lands on the active area; and embedding source/drain stressors in the semiconductor substrate and at opposite sides of the gate stack, wherein the top surface of the STI structure is higher than or as high as that of the source/drain stressor. | 08-30-2012 |
20120217592 | SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME - It is provided a method for forming a semiconductor device, the semiconductor device comprising a PMOS device, wherein forming the PMOS device comprises: removing the sidewall spacer so as to form a void; and filling the void with an assistant layer, the assistant layer having a first compressive stress. Alternatively, a gate is formed in the PMOS device, the gate having a second compressive stress; the sidewall spacer is removed, so as to form a void; and the void is filled with an assistant layer. A semiconductor device comprising a PMOS device, the PMOS device comprising: an assistant layer, the assistant layer being formed on a semiconductor substrate, the assistant layer surrounding both a gate and a gate dielectric layer, or surrounding the gate and positioned on the gate dielectric layer, wherein the assistant layer has a first compressive stress, or the assistant layer has a first compressive stress and the gate has a second compressive stress, so as to produce a compressive stress in the channel region of the PMOS device. This helps to improve the device performance | 08-30-2012 |
20120217623 | INTER-LEVEL DIELECTRIC LAYER, SEMICONDUCTOR DEVICE HAVING SAID INTER-LEVEL DIELECTRIC LAYER AND METHOD FOR MANUFACTURING THE SAME - The present invention discloses an inter-level dielectric layer for a semiconductor device, a method for manufacturing the same and a semiconductor device having said inter-level dielectric layer. The method lies in forming non-interconnected holes within a dielectric layer, and these holes may be filled with porous low-k dielectric material with a much lower dielectric constant, or forming holes within the dielectric layer by filling the upper parts of the holes. The inter-level dielectric layer in such a structure has a much lower dielectric constant, reduces RC delay between devices of integrated circuits and also is easy to integrate; besides, since the holes within the dielectric layer are non-interconnected, they shall not cause change to the dielectric constant of the dielectric material or a short circuit between wires, thus the device shall have better stability and reliability which thence improve performance of the circuit. | 08-30-2012 |
20120220097 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device is provided, in which after forming a gate stack and a first spacer thereof, a second spacer and a third spacer are formed; and then an opening is formed between the first spacer and the third spacer by removing the second spacer. The range of the formation for the raised active area | 08-30-2012 |
20120223331 | SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME - A semiconductor device comprises: a semiconductor substrate located on an insulating layer; and an insulator located on the insulating layer and embedded in the semiconductor substrate, wherein the insulator applies stress therein to the semiconductor substrate. A method for forming a semiconductor device comprises: forming a semiconductor substrate on an insulating layer; forming a cavity within the semiconductor substrate so as to expose the insulating layer; forming an insulator in the cavity, wherein the insulator applies stress therein to the semiconductor substrate. It facilitates the reduction of the short channel effect, the resistance of source/drain regions and parasitic capacitance. | 09-06-2012 |
20120223398 | METHOD FOR MANUFACTURING CONTACT AND SEMICONDUCTOR DEVICE HAVING SAID CONTACT - The present invention relates to a method for manufacturing a contact and a semiconductor device having said contact. The present invention proposes to form first a trench contract of relatively large size, then to form one or more dielectric layer(s) within the trench contact, and then to remove the upper part of the dielectric layer(s) and to fill the same with a conductive material. The use of such a method makes it easy to form a trench contact of relatively large size which is easy for manufacturing; besides, since dielectric layer(s) is/are formed in the trench contact, thence capacitance between a source/drain trench contact and a gate electrode is reduced accordingly. | 09-06-2012 |
20120319185 | NAND STRUCTURE AND METHOD OF MANUFACTURING THE SAME - The present invention provides a NAND gate structure, comprising: a substrate; a gate insulation layer formed on the substrate; a source/drain region formed in the substrate; a middle gate formed on the gate insulator layer, a first gate and a second gate on each side of the middle gate, first sidewall spacers between the first gate and the middle gate and between the second gate and the middle gate, and second sidewall spacers outside the first gate and the second gate, wherein, a first contact hole region is provided on the middle gate, second contact hole regions are provided respectively on the first gate and the second gate, and the first contact hole region and the second contact hole regions are in staggered arrangement. The present invention proposes a new NAND structure and a method of manufacturing the same. With the NAND structure, about 30-50% area of the chip may be effectively reduced. | 12-20-2012 |
20130113025 | SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - The present invention provides a semiconductor device structure and a method for manufacturing the same. The method comprises: providing a semiconductor substrate, forming a first insulating layer on the surface of the semiconductor substrate; forming a shallow trench isolation embedded in the first insulating layer and the semiconductor substrate; forming a stripe-type trench embedded in the first insulating layer and the semiconductor substrate; forming a channel region in the trench; forming a gate stack line on the channel region and source/drain regions on opposite sides of the channel region. Embodiments of the present invention are applicable to manufacture of semiconductor devices. | 05-09-2013 |
20130228893 | TRENCH ISOLATION STRUCTURE AND METHOD FOR FORMING THE SAME - A trench isolation structure and a method of forming the same are provided. The trench isolation structure includes: a semiconductor substrate, and trenches formed on the surface of the semiconductor substrate and filled with a dielectric layer, wherein the material of the dielectric layer is a crystalline material. By using the present invention, the size of the divot can be reduced, and device performances can be improved. | 09-05-2013 |
20130244393 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device is provided, in which after forming a gate stack and a first spacer thereof, a second spacer and a third spacer are formed; and then an opening is formed between the first spacer and the third spacer by removing the second spacer. The range of the formation for the raised active area | 09-19-2013 |