Patent application number | Description | Published |
20080225373 | IMAGE DISPLAY APPARATUS AND OPTICAL MEMBER THEREFOR - An image display apparatus capable of switching a display mode between a directional display mode of displaying a first image in a first viewing direction and a second image in a second viewing direction and a non-directional display mode of displaying the same image in both the first and second viewing directions includes an image forming unit and an optical member. The image forming unit forms an image and emits image light representing the image. The optical member is disposed adjacent to an emitting side of the image forming unit and is used for switching the display mode. The optical member includes two light-transmitting plate members, a lens member disposed between the two plate members and having a predetermined refractive index, a refractive-index variable medium sealed in a gap between the lens member and the two plate members, and a refractive-index adjusting unit that adjusts a refractive index of the refractive-index variable medium. The refractive-index adjusting unit is configured to (i) set the optical member to be in a first usage state in which the optical member performs a lens action by adjusting the refractive-index variable medium to have a refractive index different from the predetermined refractive index so that the display mode of the image display apparatus is set to be the directional display mode and (ii) set the optical member to be in a second usage state in which the optical member functions as a light-transmitting plate performing no lens action by adjusting the refractive-index variable medium to have the same refractive index as the predetermined refractive index so that the display mode of the image display apparatus is set to be the non-directional display mode. | 09-18-2008 |
20100026931 | ILLUMINATING DEVICE AND LIQUID CRYSTAL DISPLAY APPARATUS - An illuminating device includes light emitting elements extending in a lengthwise direction and a light guide plate having a first principal surface for emitting light from the light emitting elements and a second principal surface facing the first principal surface. The light guide plate has light guide regions corresponding to the light emitting elements. The light emitting elements overlap the light guide plate on a side of the second principal surface of the light guide plate in plan view. The side of the second principal surface of the light guide plate has first sectional surfaces, on which light originated from each of the light emitting elements is incident. The side of the second principal surface of the light guide plate has second sectional surfaces, each having a reflection surface for reflecting the light originated from each light emitting element toward the first sectional surface, corresponding to the light emitting elements. | 02-04-2010 |
20110090419 | ELECTROOPTICAL DEVICE AND ELECTRONIC DEVICE - An electrooptical device includes a display element having a plurality of pixels, a lenticular lens which is arranged at a view side of the display element and spatially separates the pixels, and an observation optical system which is arranged at the view side with respect to the lenticular lens. An image of the pixels by the lenticular lens is formed between the observation optical system and a front focal point of the observation optical system. | 04-21-2011 |
20130135722 | POLARIZATION SEPARATION DEVICE AND DISPLAY APPARATUS - A polarization separation device includes a first end surface on which incident light is incident, a polarization separation surface that reflects an s-polarized light component and transmits a p-polarized light component, a second end surface that is arranged to be opposed to the first end surface, converts the p-polarized light component transmitted through the polarization separation surface to the s-polarized light component, and reflects the converted light component to an optical axis direction which is the same as the incident light, a third end surface from which the s-polarized light component reflected by the polarization separation surface without transmitting through the polarization separation surface is output, and a fourth end surface that is arranged to be opposed to the third end surface and from which the s-polarized light component reflected by the second end surface and the polarization separation surface is output. | 05-30-2013 |
20130250380 | VIRTUAL IMAGE DISPLAY APPARATUS - A virtual image display apparatus includes an organic EL device that outputs light having one kind of wavelength band, a light guide member, and a reflection-type volume hologram that is disposed on a first face of the light guide member and diffracts and reflects light of a predetermined wavelength band of the light that has entered. The organic EL device includes an optical resonance structure that causes the above-mentioned light of one-kind wavelength band to resonate. | 09-26-2013 |
20140204438 | OPTICAL DEVICE AND IMAGE DISPLAY APPARATUS - An optical device includes a light-conducting member, having a first panel surface disposed facing an image forming unit, that conducts image light incident on a light entry plane formed at an end of the first panel surface to a light exit plane formed in front of the viewer's eye; a first diffractive optics element, provided on the light entry plane, that diffracts the image light incident on the light entry plane in a predetermined direction and transmits that light into the light-conducting member; a second diffractive optics element, provided on the light exit plane, that diffracts the image light exiting from the light exit plane in a predetermined direction and transmits that light to the front of the viewer's eye; and one or more reflective planes disposed within a waveguide for the image light diffracted by the first diffractive optics element. | 07-24-2014 |
20140340749 | Display apparatus - In a display apparatus, image light emitted from an image forming device is incident on an image light incidence portion of a light guide member after being diffracted by a second diffractive optical element, and emitted from an image light emission portion after moving forward in the light guide member. The image light emitted from the image light emission portion is diffracted by a first diffractive optical element and reaches the eyes of an observer. On a position where unnecessary external light is made incident on the light guide member, an external light noise reduction element which has a polarizing member and the like is provided. For this reason, even when the unnecessary external light is made incident on the light guide member, it is possible to inhibit the unnecessary external light from reaching the eye of the observer. | 11-20-2014 |
20150016146 | ILLUMINATING DEVICE AND LIQUID CRYSTAL DISPLAY APPARATUS - An illuminating device includes light emitting elements extending in a lengthwise direction and a light guide plate having a first principal surface for emitting light from the light emitting elements and a second principal surface facing the first principal surface. The light guide plate has light guide regions corresponding to the light emitting elements. The light emitting elements overlap the light guide plate on a side of the second principal surface of the light guide plate in plan view. The side of the second principal surface of the light guide plate has first sectional surfaces, on which light originated from each of the light emitting elements is incident. The side of the second principal surface of the light guide plate has second sectional surfaces, each having a reflection surface for reflecting the light originated from each light emitting element toward the first sectional surface, corresponding to the light emitting elements. | 01-15-2015 |
20150062715 | OPTICAL DEVICE AND IMAGE DISPLAY APPARATUS - A first diffraction optical element is disposed on a light incident surface of a light guide, a second diffraction optical element is disposed on a light emitting surface of the light guide, and a reflection layer is disposed on an end surface of the light guide. A diffraction grating of the first diffraction optical element and a diffraction grating of the second diffraction optical element has an inclined portion respectively. The inclined portion of the first diffraction optical element and the inclined portion of the second diffraction optical element are inclined in same direction. | 03-05-2015 |
Patent application number | Description | Published |
20090087583 | Film Deposition Method, Film Deposition Apparatus, and Storage Medium - An object to be processed (e.g., semiconductor wafer W) having a recess formed in a surface thereof is placed on a stage | 04-02-2009 |
20090183984 | Seed Film Forming Method, Plasma-Assisted Film Forming System and Storage Medium - The invention is related to A seed film forming method capable of forming a seed film in recesses without forming overhangs. | 07-23-2009 |
20100167540 | Film Forming Method, Plasma Film Forming Apparatus and Storage Medium - Disclosed is a technique for embedding metal in a recess provided in the surface of a process object, such as a semiconductor wafer W, only by plasma sputtering. The metal is copper as a typical example. The recess has a microscopic hole or trench having a diameter or width of 100 nm or less as a typical example. A film forming step and a diffusion step are alternately performed a plurality of times. The film forming step deposits a small amount of a metal film in the recess. The diffusion step moves the deposited metal film toward the bottom portion of the recess. In the film forming step, bias power to be applied to a stage for supporting the wafer W is set to a value ensuring that, on the surface of the wafer W, the rate of metal deposition due to the drawing-in of metal particles is substantially equal to the rate of the sputter etching by plasma. In the diffusion step, the wafer W is maintained at a temperature which permits occurrence of surface diffusion of the metal film deposited in the recess. | 07-01-2010 |
Patent application number | Description | Published |
20100075035 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS - A film formation method is disclosed for depositing a metal film on a target substrate by supplying a metal carbonyl source in gas phase to a surface of the target substrate and decomposing the source near the surface of the target substrate. The method includes a step of preferentially decomposing the metal carbonyl source in an area near the outer peripheral portion of the target substrate when the metal film is being deposited on the surface of the target substrate. As a result, a CO concentration in the atmosphere is increased locally near the outer peripheral portion of the target substrate and the depositing of the metal film on the outer peripheral portion is better controlled. | 03-25-2010 |
20120196052 | METHOD OF FORMING COPPER WIRING AND METHOD AND SYSTEM FOR FORMING COPPER FILM - A method of forming a Cu wiring in a trench or hole formed in a substrate is provided. The method includes forming a barrier film on the surface of the trench or hole, forming a Ru film on the barrier film, and embedding Cu in the trench or hole by forming a Cu film on the Ru film using PVD while annealing the substrate such that migration of copper into the trench or hole occurs. | 08-02-2012 |
20120196437 | METHODS OF FORMING COPPER WIRING AND COPPER FILM, AND FILM FORMING SYSTEM - A method of forming a Cu wiring in a trench or hole formed in a substrate is provided. The method includes forming a barrier film on the surface of the trench or hole, forming a Ru film on the barrier film, and embedding copper in the trench or hole by forming a Cu film on the Ru film using PVD while heating the substrate such that migration of copper into the trench or hole occurs. | 08-02-2012 |
20130237053 | FILM FORMING METHOD AND FILM FORMING APPARATUS - A film forming method which generates metal ions from a metal target with a plasma in a processing chamber and attracts the metal ions with a bias to deposit a metal thin film on a target object wherein trenches are formed. The method includes: generating metal ions from a target and attracting the metal ions into a target object with a bias to form a base film in a trench; ionizing a rare gas with the bias in a state where no metal ion is generated and attracting the generated ions into the target object to etch the base film; and plasma sputtering the target to generate metal ions and attracting the metal ions into the object with a high frequency power for bias to deposit a main film as a metal film, while reflowing the main film by heating. | 09-12-2013 |
20140060572 | PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL OXIDE FILM - In a plasma processing apparatus, a mounting table is provided in a processing chamber, and a remote plasma generating unit is configured to generate an excited gas by exiting a hydrogen-containing gas. The remote plasma generating unit has an outlet for discharging the excited gas. A diffusion unit is provided to correspond to the outlet of the remote plasma generating unit and serves to receive the excited gas flowing from the outlet and diffuse the hydrogen active species having a reduced amount of hydrogen ions. An ion filter is disposed between the diffusion unit and the mounting table while being separated from the diffusion unit. The ion filter serves to capture the hydrogen ions contained in the hydrogen active species diffused by the diffusion unit and allow the hydrogen active species having a further reduced amount of hydrogen ions to pass therethrough the mounting table. | 03-06-2014 |