Oleg P.
Oleg P. Kishkovich, Greenville, RI US
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20080257159 | Air handling and chemical filtration system and method - The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal. | 10-23-2008 |
20090320681 | Filtering system for a semiconductor processing tool - The present invention provides a filtering system for a semiconductor processing tool. In one embodiment, the filtering system is associated with the semiconductor processing tool. A system of the invention comprises a first and second filter layer in fluid communication with a gas flow path. The flow path is a gas stream comprising volatile silica containing compounds such as hexamethyldisiloxane and trimethylsilanol. The gas flow path passes through the first and second filter layer to fluidly communicate with the semiconductor processing tool. Preferably, the first filter layer of the filtering system is upstream along the gas flow path from the second filter layer. The medias of the first and second filter layers are selected and arranged based on given contaminant concentrations. The invention also provides a method for filtering gas containing hexamethyldisiloxane and trimethylsilanol in communication with a semiconductor processing tool, which employs a system comprising a first and second filter layer. | 12-31-2009 |
20100294397 | SYSTEM FOR PURGING RETICLE STORAGE - The present invention provides a method, system, and components for protecting reticles and specifically for minimizing haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced humidity level on reticles or by temporarily storing the reticle in a container in proximity to a desiccant or getter when not being purged, haze formation can be eliminated, minimized, or sufficiently controlled. Moreover, a filter media in the container may be positioned to be “recharged” during the substantially continual purging of the reticle, a reduced desirable humidity level can be readily maintained in the reticle container when the container is not currently being purged. Additionally, the system of the invention can comprise an ionizer associated with the purge system. For example, the ionizer can be associated with at least one of the plurality of purge lines of the purge system. The system of the invention can also include a purge gas source connected to the purge system that comprises a source of CDA or extra CDA. The storage housing can comprise a plurality of shelves that each include a plurality of reticle storage receptacles. | 11-25-2010 |
Oleg P. Kishkovich, Grenville, RI US
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20110114129 | METHODS AND APPARATUSES FOR CONTROLLING CONTAMINATION OF SUBSTRATES - Components, systems, and methods for maintaining an extremely dry environment within substrate containers formed of polymers provides supplemental exterior gas washing of the substrate container to minimize permeation of moisture and oxygen through the polymer walls of the container and to control desorption of water entrapped in the polymer walls of the container. | 05-19-2011 |
Oleg P. Kutenkov, Tomsk RU
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20110190565 | PLASMA REACTOR FOR GAS TO LIQUID FUEL CONVERSION - A non-thermal, repetitively-pulsed gliding discharge reactor includes a high-voltage power source configured to provide a pulsed high-voltage potential; a gas inlet; a liquid sorbent inlet; a product outlet; a plurality of first electrodes connected to the high-voltage power source; a plurality of second electrodes that are grounded; and a trough; the plurality of first electrodes being separated from the plurality of second electrodes by a discharge region. | 08-04-2011 |
Oleg P. Lapets, Allison Park, PA US
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20100166287 | Neuronal Profiling - The present invention provides automated methods for cell body extension analysis, software for carrying out such methods, and detection devices comprising such software. | 07-01-2010 |
Oleg P. Pishnyak, Akron, OH US
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20120162548 | METHOD FOR ELECTROPHORESIS IN LIQUID CRYSTALS - A method of electrophoretic movement of particles through a liquid crystal utilizes a direct (DC) or alternating (AC) electric field that is applied along the liquid crystal director (for liquid crystals with a positive dielectric anisotropy) or perpendicular to the director (for liquid crystals with a negative dielectric anisotropy). A perpendicular or tilted orientation of the liquid crystal molecules at the surface of the particle causes distortions, such that the fore-aft (or left-right) symmetry of the particle is broken. The asymmetric orientation of the liquid crystal around the particle allows both charged and neutral particles to be transported, even when the particles themselves are perfectly symmetric (spherical). | 06-28-2012 |