Patent application number | Description | Published |
20080199283 | SUBSTRATE PROCESSING APPARATUS - In a processing block, a plurality of back surface cleaning units and a main robot are provided. The main robot is provided between the back surface cleaning units provided on one side of the processing block and the back surface cleaning units provided on the other side of the processing block. A reversing unit used to reverse a substrate and a substrate platform used to transfer and receive substrates between an indexer robot and the main robot are provided adjacent to each other in the vertical direction between the indexer robot and the processing block. The main robot transports substrates among the plurality of back surface cleaning units, the substrate platform, and the reversing unit. | 08-21-2008 |
20080199284 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus is composed of an indexer block, a first processing block and a second processing block that are provided in parallel with one another. The indexer block is provided with an indexer robot. The first processing block is provided with a plurality of back surface cleaning units and a first main robot. The second processing block is provided with a plurality of end surface cleaning units, a plurality of top surface cleaning units and a second main robot. | 08-21-2008 |
20110008148 | SUBSTRATE TRANSPORTING APPARATUS, SUBSTRATE PLATFORM SHELF AND SUBSTRATE PROCESSING APPARATUS - In a substrate processing apparatus consisting of an indexer block and a processing block, a substrate is transported between the indexer block and the processing block by an indexer robot. The indexer robot includes two hands that are provided one above the other on a rotating stage. The other hand moves in a vertical direction to one hand. A difference in height between the one hand and the other hand can be adjusted so as to be equal to spacing between substrate storing grooves of a carrier where the substrate that is to be carried into the indexer block is stored. In addition, the difference in height between the one hand and the other hand can be adjusted so as to be equal to spacing between support plates of a substrate platform provided between the indexer block and the processing block. | 01-13-2011 |
20130180551 | Substrate Processing Apparatus - A substrate processing apparatus is composed of an indexer block, a first processing block and a second processing block that are provided in parallel with one another. The indexer block is provided with an indexer robot. The first processing block is provided with a plurality of back surface cleaning units and a first main robot. The second processing block is provided with a plurality of end surface cleaning units, a plurality of top surface cleaning units and a second main robot. | 07-18-2013 |
20130206185 | Substrate Processing Apparatus - A substrate processing apparatus is composed of an indexer block, a first processing block and a second processing block that are provided in parallel with one another. The indexer block is provided with an indexer robot. The first processing block is provided with a plurality of back surface cleaning units and a first main robot. The second processing block is provided with a plurality of end surface cleaning units, a plurality of top surface cleaning units and a second main robot. | 08-15-2013 |
20140202499 | SUBSTRATE PROCESSING METHOD - A substrate processing apparatus has an indexer block and a processing block. One side of the processing block has a vertical stack of a plurality of top surface cleaning units and the other side of the processing block has a vertical stack of a plurality of back surface cleaning units. Reversing units for reversing the substrate W are provided one above the other between the indexer block and the processing block. For example, one reversing unit is used for reversing the substrate before a back surface cleaning processing by the back surface cleaning unit or for other purposes, and the other reversing unit is used for placing the substrate W after a top surface cleaning processing by the top surface cleaning unit or for other purposes. | 07-24-2014 |
20140202501 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus has an indexer block and a processing block. One side of the processing block has a vertical stack of a plurality of top surface cleaning units and the other side of the processing block has a vertical stack of a plurality of back surface cleaning units. Reversing units for reversing the substrate W are provided one above the other between the indexer block and the processing block. For example, one reversing unit is used for reversing the substrate before a back surface cleaning processing by the back surface cleaning unit or for other purposes, and the other reversing unit is used for placing the substrate W after a top surface cleaning processing by the top surface cleaning unit or for other purposes. | 07-24-2014 |
Patent application number | Description | Published |
20090087285 | SUBSTRATE PROCESSING APPARATUS - An FOUP transport robot transports an FOUP, which stores a plurality of substrates, between a loading port and an FOUP placement stage. An indexer robot transfers substrates (unprocessed substrates) stored in the FOUP placed on the FOUP placement stage, to a cleaning part through a substrate transfer part; or receives and stores substrates (processed substrates) subjected to scrub cleaning in the cleaning part, into the FOUP through the substrate transfer part. A plurality of FOUP placement stages are provided around the indexer robot, so that the indexer robot does not have to move in a horizontal direction at the time of transport. | 04-02-2009 |
20090211040 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus includes: a brush for cleaning a substrate; a seesaw member which is swingable with a support member serving as a fulcrum and which has a force point section at one side with respect to the fulcrum and an actuating point section at the other side with respect to the fulcrum; a pushing actuator arranged to give a driving force to the force point section of the seesaw member, thereby to swing the seesaw member around the fulcrum, thus giving, to the seesaw member, a pushing force for pushing the brush to the substrate; and a transmission member which has an affected point section for receiving, from the actuating point section of the seesaw member, a driving force given to the force point section, and which transmits, to the brush, a pushing force for pushing the same to the substrate. | 08-27-2009 |
20100068014 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CONVEYING APPARATUS FOR USE IN THE SAME - A substrate processing apparatus includes a substrate processing section that processes a plurality of substrates assuming a vertical posture in a batch manner; a first traversing mechanism that laterally moves a first traverse holding portion along a first traversing path between a substrate transfer position and a substrate delivery position; a second traversing mechanism that laterally moves a second traverse holding portion along a second traversing path disposed below the first traversing path between the substrate transfer position and the substrate delivery position; an elevation mechanism that raises and lowers an elevation holding portion in the substrate transfer position; and a main transfer mechanism that conveys a plurality of substrates assuming a vertical posture in a batch manner between the substrate delivery position and the substrate processing section, the first and second traverse holding portions, and the elevation holding portion each holds a plurality of substrates assuming a vertical posture in a batch manner. | 03-18-2010 |
20100249993 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSPORT METHOD - A substrate processing apparatus includes: a plurality of substrate processing sections arranged alongside a transport passage; a standby mechanism which retains a substrate in standby, the standby mechanism being movable along the transport passage; a transport mechanism which transports the substrate between the standby mechanism and each of the substrate processing sections, the transport mechanism being movable along the transport passage; a first movement mechanism which moves the transport mechanism along the transport passage; and a second movement mechanism which moves the standby mechanism along the transport passage. | 09-30-2010 |
20120237320 | SUBSTRATE TREATING APPARATUS - A substrate treating apparatus includes a pod storage unit | 09-20-2012 |
20140377044 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CONVEYING APPARATUS FOR USE IN THE SAME - A substrate processing apparatus includes a substrate processing section that processes a plurality of substrates assuming a vertical posture in a batch manner; a first traversing mechanism that laterally moves a first traverse holding portion along a first traversing path between a substrate transfer position and a substrate delivery position; a second traversing mechanism that laterally moves a second traverse holding portion along a second traversing path disposed below the first traversing path between the substrate transfer position and the substrate delivery position; an elevation mechanism that raises and lowers an elevation holding portion in the substrate transfer position; and a main transfer mechanism that conveys a plurality of substrates assuming a vertical posture in a batch manner between the substrate delivery position and the substrate processing section, the first and second traverse holding portions, and the elevation holding portion each holds a plurality of substrates assuming a vertical posture in a batch manner. | 12-25-2014 |
Patent application number | Description | Published |
20090247304 | COMMUNICATION GAME SYSTEM, GAME APPARATUS, SERVER, STORAGE MEDIUM STORING A PROGRAM, AND GAME CONTROL METHOD - A communication game system includes a plurality of game apparatuses which are able to wirelessly communicate with each other. Each of the game apparatus registers identifying information of an opponent obtained by a short-distance wireless communication or by user's input in a friend list. Thereafter, the game apparatus connects to the Internet, and inquires server, etc. whether or not it is possible to communicate with the opponent in the friend list over a network. If it is possible to communicate, the game apparatus obtains an address of the opponent to make a network communication. In a case that a still another opponent being connected to its own apparatus exists, when other game apparatus makes a connection, its own game apparatus transmits their identifying information to introduce the communicating opponents to each other. The game apparatuses introduced to each other make a communication over a network, and add the identifying information of the opponents to the friend list, if necessary. | 10-01-2009 |
20090253518 | COMMUNICATION GAME SYSTEM, GAME APPARATUS, SERVER, STORAGE MEDIUM STORING A PROGRAM, AND GAME CONTROL METHOD - A communication game system includes a plurality of game apparatuses which are able to wirelessly communicate with each other. Each of the game apparatus registers identifying information of an opponent obtained by a short-distance wireless communication or by user's input in a friend list. Thereafter, the game apparatus connects to the Internet, and inquires server, etc. whether or not it is possible to communicate with the opponent in the friend list over a network. If it is possible to communicate, the game apparatus obtains an address of the opponent to make a network communication. In a case that a still another opponent being connected to its own apparatus exists, when other game apparatus makes a connection, its own game apparatus transmits their identifying information to introduce the communicating opponents to each other. The game apparatuses introduced to each other make a communication over a network, and add the identifying information of the opponents to the friend list, if necessary. | 10-08-2009 |
20110021275 | WIRELESS COMMUNICATION GAME SYSTEM AND STORAGE MEDIUM STORING A WIRELESS COMMUNICATION GAME PROGRAM - A wireless communication game system includes at least one parent device and a plurality of child devices that can communicate wirelessly with one another. The parent device transmits a parent device program and game data for distribution and generation information indicating what generation the data for distribution belongs to when counting from the one in the parent device. Each of the child devices receives the data for distribution and executes the parent device program to update the generation information and transmit to another plurality of child devices the parent device program and game data for distribution and the updated generation information. | 01-27-2011 |
20130252740 | COMMUNICATION GAME SYSTEM, GAME APPARATUS, SERVER, STORAGE MEDIUM STORING A PROGRAM, AND GAME CONTROL METHOD - A communication game system includes a plurality of game apparatuses which are able to wirelessly communicate with each other. Each of the game apparatus registers identifying information of an opponent obtained by a short-distance wireless communication or by user's manual input in a friend list. Thereafter, the game apparatus connects to the Internet, and inquires whether it is possible to communicate with an opponent in the friend list over the network. If it is possible to communicate, the game apparatus obtains an address of the opponent to make a network communication. Even if a user makes a short distance wireless communication with a friend to exchange and register the identifying information or registers the friend by hand and then is parted from the friend, the user can safely communicate with the opponent is to be added to the multiplayer game session, one of the participants transmits identifying information to introduce the communication opponents to each other. The game apparatuses introduced to each other make a communication over a network, and add the identifying information of the opponents to the friend list, if necessary. | 09-26-2013 |
20150148135 | COMMUNICATION GAME SYSTEM, GAME APPARATUS, SERVER, STORAGE MEDIUM STORING A PROGRAM, AND GAME CONTROL METHOD - A communication game system includes a plurality of game apparatuses which are able to wirelessly communicate with each other. Each game apparatus registers identifying information of an opponent obtained by a short-distance wireless communication or by user's manual input in a friend list. Thereafter, the game apparatus connects to the Internet, and inquiries whether it is possible to communicate with an opponent in the friend list over the network. If it is possible to communicate, the game apparatus obtains an address of the opponent to make a network communication. Even if a user makes a short distance wireless communication with a friend to exchange and register the identifying information or registers the friend by hand and then is parted from the friend, the user can safely communicate with the friend across the network without being exposed to unknown players. In a case that an additional opponent is to be added to the multiplayer game session, one of the participants transmits identifying information to introduce the communicating opponents to each other. The game apparatuses introduced to each other make a communication over the network, and add the identifying information of the opponents to the friend list, if necessary. | 05-28-2015 |
20150224404 | COMMUNICATION GAME SYSTEM, GAME APPARATUS, SERVER, STORAGE MEDIUM STORING A PROGRAM, AND GAME CONTROL METHOD - A communication game system includes a plurality of game apparatuses which are able to wirelessly communicate with each other. Each of the game apparatus registers identifying information of an opponent obtained by a short-distance wireless communication or by user's manual input in a friend list. Thereafter, the game apparatus connects to the Internet, and inquires whether it is possible to communicate with an opponent in the friend list over the network. If it is possible to communicate, the game apparatus obtains an address of the opponent to make a network communication. Even if a user makes a short distance wireless communication with a friend to exchange and register the identifying information or registers the friend by hand and then is parted from the friend, the user can safely communicate with the friend across the network without being exposed to unknown players. In a case that an additional opponent is to be added to the multiplayer game session, one of the participants transmits identifying information to introduce the communicating opponents to each other. The game apparatuses introduced to each other make a communication over a network, and add the identifying information of the opponents to the friend list, if necessary. | 08-13-2015 |
20150224405 | COMMUNICATION GAME SYSTEM, GAME APPARATUS, SERVER, STORAGE MEDIUM STORING A PROGRAM, AND GAME CONTROL METHOD - A communication game system includes a plurality of game apparatuses which are able to wirelessly communicate with each other. Each of the game apparatus registers identifying information of an opponent obtained by a short-distance wireless communication or by user's manual input in a friend list. Thereafter, the game apparatus connects to the Internet, and inquires whether it is possible to communicate with an opponent in the friend list over the network. If it is possible to communicate, the game apparatus obtains an address of the opponent to make a network communication. Even if a user makes a short distance wireless communication with a friend to exchange and register the identifying information or registers the friend by hand and then is parted from the friend, the user can safely communicate with the friend across the network without being exposed to unknown players. In a case that an additional opponent is to be added to the multiplayer game session, one of the participants transmits identifying information to introduce the communicating opponents to each other. The game apparatuses introduced to each other make a communication over a network, and add the identifying information of the opponents to the friend list, if necessary. | 08-13-2015 |
20150246282 | COMMUNICATION GAME SYSTEM, GAME APPARATUS, SERVER, STORAGE MEDIUM STORING A PROGRAM, AND GAME CONTROL METHOD - A communication game system includes a plurality of game apparatuses which are able to wirelessly communicate with each other. Each of the game apparatus registers identifying information of an opponent obtained by a short-distance wireless communication or by user's manual input in a friend list. Thereafter, the game apparatus connects to the Internet, and inquires whether it is possible to communicate with an opponent in the friend list over the network. If it is possible to communicate, the game apparatus obtains an address of the opponent to make a network communication. Even if a user makes a short distance wireless communication with a friend to exchange and register the identifying information or registers the friend by hand and then is parted from the friend, the user can safely communicate with the friend across the network without being exposed to unknown players. In a case that an additional opponent is to be added to the multiplayer game session, one of the participants transmits identifying information to introduce the communicating opponents to each other. The game apparatuses introduced to each other make a communication over a network, and add the identifying information of the opponents to the friend list, if necessary. | 09-03-2015 |