Patent application number | Description | Published |
20080315292 | Atomic Layer Deposition Method and Semiconductor Device Formed by the Same - There is provided a method of manufacturing a semiconductor device, including the following steps: flowing a first precursor gas to the semiconductor substrate within a ALD chamber to form a first discrete monolayer on the semiconductor substrate; flowing an inert purge gas to the semiconductor substrate within the ALD chamber; flowing a second precursor gas to the ALD chamber to react with the first precursor gas which has formed the first monolayer, thereby forming a first discrete compound monolayer; and flowing an inert purge gas; forming a first dielectric layer to cover the discrete compound monolayer; forming a second third monolayer above first dielectric layer; and forming a second discrete compound monolayer; and forming a second dielectric layer to cover the second discrete compound monolayer above the first dielectric layer. There is also provided a semiconductor device formed by the ALD method. | 12-25-2008 |
20080315293 | Atomic Layer Deposition Method and Semiconductor Device Formed by the Same - There is provided a method of manufacturing a semiconductor device, including the following steps: flowing a first precursor gas to the semiconductor substrate within the ALD chamber to form a first discrete monolayer on the semiconductor substrate; flowing an inert purge gas to the semiconductor substrate within the ALD chamber; flowing a second precursor gas to the ALD chamber to react with the first precursor gas which has formed the first monolayer, thereby forming a first discrete compound monolayer; and flowing an inert purge gas; and forming a second discrete compound monolayer above the semiconductor substrate by the same process as that for forming the first discrete compound monolayer. There is also provided a semiconductor device in which the charge trapping layer is a dielectric layer containing the first and second discrete compound monolayers formed by the ALD method. | 12-25-2008 |
20080315295 | Atomic Layer Deposition Method and Semiconductor Device Formed by the Same - Disclosed are atomic layer deposition method and a semiconductor device including the atomic layer, including the steps: placing a semiconductor substrate in an atomic layer deposition chamber; feeding a first precursor gas to the semiconductor substrate within the chamber to form a first discrete monolayer on the semiconductor substrate; feeding an inert purge gas to the semiconductor substrate within the chamber to remove the first precursor gas which has not formed the first discrete monolayer on the semiconductor substrate; feeding a second precursor gas to the chamber to react with the first precursor gas which has formed the first discrete monolayer, forming a discrete atomic size islands; and feeding an inert purge gas to the semiconductor substrate within the chamber to remove the second precursor gas which has not reacted with the first precursor gas and byproducts produced by the reaction between the first and the second precursor gases. | 12-25-2008 |
20110018608 | Bipolar Transistor, Band-Gap Reference Circuit and Virtual Ground Reference Circuit - The present invention provides a bipolar transistor, a method for forming the bipolar transistor, a method for turning on the bipolar transistor, and a band-gap reference circuit, virtual ground reference circuit and double band-gap reference circuit with the bipolar transistor. The bipolar transistor includes: a Silicon-On-Insulator wafer; a base area, an emitter area and a collector area; a base area gate dielectric layer on a top silicon layer and atop the base area; a base area control-gate on the base area gate dielectric layer; an emitter electrode connected to the emitter area via a first contact; a collector electrode connected to the collector area via a second contact; and a base area control-gate electrode connected to the base area control-gate via a third contact. Processes of forming the bipolar transistor are fully compatible with traditional standard CMOS processes; and the base current to turn on the bipolar transistor is based on the GIDL current and formed by applying a voltage to the base area control-gate electrode without any need of contact. | 01-27-2011 |
20110051496 | Resistive Random Access Memory and the Method of Operating the Same - A resistive random access memory utilizing gate induced drain leakage current as the read operation current and the write operation current and a method of operation the same, wherein the resistive random access memory including a plurality of arrayed memory cells, a plurality of bit-lines and a plurality word-lines, each memory cell including: a switching resistor having a first terminal and a second terminal, the first terminal of the switching resistor being connected to one bit-line; and a MOSFET being connected to the second terminal and having a gate, a source, a drain and a substrate, the gate being connected to one word-line, the read operation current and the write operation current of the memory cell being gate induced drain leakage current of the MOSFET. The RRAM array presented in this invention has superior scalability for resistors as well as transistors, which leads to a memory array with higher density. | 03-03-2011 |
20110063888 | Green Transistor for Resistive Random Access Memory and Method of Operating the Same - A random access memory includes a plurality of memory cells arrayed in bit-lines and word-lines. Each memory cell comprises a green transistor (gFET) including a gate, a source, and a drain; a switching resistor including a first terminal and a second terminal; and a reference resistor including a third terminal and a fourth terminal. The first terminal of the switching resistor and the third terminal is connected to a bit-line, the second terminal of the switching resistor is connected to the first source of the gFET, the fourth terminal of the reference resistor is connected to the second source of the gFET, and the gate of the gFET is connected to a word-line. The method of operating the RRAM includes a write operation and a read operation The write operation comprises steps of: applying a first voltage to the bit-line to perform a large voltage difference across the bit-line and the drain of the gFET, applying a second voltage to the gate of the gFET to turn on the gFET transiently, and a large current pulse flowing through the switching resistor for changing the resistance state. The read operation comprises steps of: applying a third voltage to the bit-line to perform a small voltage difference across the bit-line and the drain of the gFET, applying a second voltage to the word-line to turn on the gFET, and comparing the current through the switching resistor with the current through the reference resistor so as to read the data stored in the memory cell. | 03-17-2011 |
20110090731 | GREEN TRANSISTOR FOR NANO-SI FERRO-ELECTRIC RAM AND METHOD OF OPERATING THE SAME - The present disclosure provides a green transistor for nano-Si Ferro-electric random access memory (FeRAM) and method of operating the same. The nano-Si FeRAM includes a plurality of memory cells arranged in an array with bit-lines and word-lines, and each memory cell includes a MOSFET including a gate, a source, a drain, a substrate, and a data storage element formed on the drain spacer of the gate and made of nano-Si in porous SiO | 04-21-2011 |
20120168853 | SEMICONDUCTOR NON-VOLATILE MEMORY DEVICE - A semiconductor non-volatile memory (NVM) device, comprising: a semiconductor substrate; a three-layer stack structure of medium layer-charge trapping layer-medium layer disposed on the semiconductor substrate; a gate disposed above the three-layer stack structure; a source and a drain disposed in the semiconductor substrate at either side of the three-layer stack structure; wherein the charge trapping layer is a dielectric layer containing one or more discrete compound clusters formed by atomic layer deposition (ALD) method. | 07-05-2012 |
20140354347 | BIPOLAR TRANSISTOR, BAND-GAP REFERENCE CIRCUIT AND VIRTUAL GROUND REFERENCE CIRCUIT - The present invention provides a bipolar transistor, a method for forming the bipolar transistor, a method for turning on the bipolar transistor, and a band-gap reference circuit, virtual ground reference circuit and double band-gap reference circuit with the bipolar transistor. The bipolar transistor includes: a Silicon-On-Insulator wafer; a base area, an emitter area and a collector area; a base area gate dielectric layer on a top silicon layer and atop the base area; a base area control-gate on the base area gate dielectric layer; an emitter electrode connected to the emitter area via a first contact; a collector electrode connected to the collector area via a second contact; and a base area control-gate electrode connected to the base area control-gate via a third contact. Processes of forming the bipolar transistor are fully compatible with traditional standard CMOS processes; and the base current to turn on the bipolar transistor is based on the GIDL current and formed by applying a voltage to the base area control-gate electrode without any need of contact to the base. | 12-04-2014 |
Patent application number | Description | Published |
20130270641 | METHODS OF FORMING FINFET SEMICONDUCTOR DEVICES SO AS TO TUNE THE THRESHOLD VOLTAGE OF SUCH DEVICES - Disclosed herein are various methods of forming FinFET semiconductor devices so as to tune the threshold voltage of such devices. In one example, the method includes forming a plurality of spaced-apart trenches in a semiconducting substrate to define at least one fin (or fins) for the device, prior to forming a gate structure above the fin (or fins), performing a first epitaxial growth process to grow a first semiconductor material on exposed portions of the fin (or fins) and forming the gate structure above the first semiconductor material on the fin (or fins). | 10-17-2013 |
20130288468 | METHODS OF FORMING SELF-ALIGNED CONTACTS FOR A SEMICONDUCTOR DEVICE FORMED USING REPLACEMENT GATE TECHNIQUES - One illustrative method disclosed herein involves forming an etch stop layer above a plurality of sacrificial gate structures, performing an angled ion implant process to implant an etch-inhibiting species into less than an entirety of the etch stop layer, and forming a layer of insulating material above the etch stop layer. The method further includes removing the sacrificial gate structures, forming replacement gate structures, forming a hard mask layer above the replacement gate structures and layer of insulating material, forming a patterned hard mask layer, performing another etching process through the patterned hard mask layer to define an opening in the layer of insulating material to expose a portion of the etch stop layer, performing another etching process on the exposed portion to define a contact opening therethrough that exposes a doped region and forming a conductive contact in the opening that is conductively coupled to the doped region. | 10-31-2013 |
20130288471 | METHODS OF FORMING SELF-ALIGNED CONTACTS FOR A SEMICONDUCTOR DEVICE - One illustrative method disclosed herein involves forming gate structures for first and second spaced-apart transistors above a semiconducting substrate, forming an etch stop layer above the substrate and the gate structures, performing at least one angled ion implant process to implant at least one etch-inhibiting species into less than an entirety of the etch stop layer, after performing at least one angled ion implant process, forming a layer of insulating material above the etch stop layer, performing at least one first etching process to define an opening in the layer of insulating material and thereby expose a portion of the etch stop layer, performing at least one etching process on the exposed portion of the etch stop layer to define a contact opening therethrough that exposes a doped region formed in the substrate, and forming a conductive contact in the opening that is conductively coupled to the doped region. | 10-31-2013 |
20140131777 | INTEGRATED CIRCUITS AND METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH SALICIDE CONTACTS ON NON-PLANAR SOURCE/DRAIN REGIONS - Integrated circuits and methods for fabricating integrated circuits are provided. In an embodiment, a method for fabricating an integrated circuit includes forming a fin over a semiconductor substrate. The method further includes selectively epitaxially growing a silicon-containing material on the fin and providing the fin with a diamond-shaped cross-section and with an upper portion and a lower portion. The lower portion of the fin is covered with a masking layer. Further, a salicide layer is formed on the upper portion of the fin, and the masking layer prevents formation of the salicide layer on the lower portion of the fin. | 05-15-2014 |
20140134814 | METHODS OF MANUFACTURING INTEGRATED CIRCUITS HAVING FINFET STRUCTURES WITH EPITAXIALLY FORMED SOURCE/DRAIN REGIONS - Methods of manufacturing semiconductor integrated circuits having FinFET structures with epitaxially formed source and drain regions are disclosed. For example, a method of fabricating an integrated circuit includes forming a plurality of silicon fin structures on a semiconductor substrate, forming disposable spacers on vertical sidewalls of the fin structures, and depositing a silicon oxide material over the fins and over the disposable spacers. The method further includes anisotropically etching at least one of the fin structures and the disposable spacers on the sidewalls of the at least one fin structure, thereby leaving a void in the silicon oxide material, and etching the silicon oxide material and the disposable spacers from at least one other of the fin structures, while leaving the at least one other fin structure un-etched. Still further, the method includes epitaxially growing a silicon material in the void and on the un-etched fin structure. An un-merged source/drain region is formed in the void and a merged source/drain region is formed on the un-etched fin structure. | 05-15-2014 |
20140151807 | COMBINATION FINFET AND PLANAR FET SEMICONDUCTOR DEVICE AND METHODS OF MAKING SUCH A DEVICE - A device includes a plurality of trenches and fins defined in a substantially un-doped layer of semiconducting material, a gate insulation layer positioned on the fins and on the bottom of the trenches, a gate electrode and a device isolation structure. One method disclosed herein involves identifying a top width of each of a plurality of fins and a depth of a plurality of trenches to be formed in a substantially un-doped layer of semiconducting material, wherein, during operation, the device is adapted to operate in at least three distinguishable conditions depending upon a voltage applied to the device, performing at least one process operation to define the trenches and fins in the layer of semiconducting material, forming a gate insulation layer on the fins and on a bottom of the trenches and forming a gate electrode above the gate insulation layer. | 06-05-2014 |
20140167120 | METHODS OF FORMING A FINFET SEMICONDUCTOR DEVICE BY PERFORMING AN EPITAXIAL GROWTH PROCESS - A method of forming a FinFET device involves performing an epitaxial growth process to form a layer of semiconducting material on a semiconducting substrate, wherein a first portion of the layer of semiconducting material will become a fin structure for the FinFET device and wherein a plurality of second portions of the layer of semiconducting material will become source/drain structures of the FinFET device, forming a gate insulation layer around at least a portion of the fin structure and forming a gate electrode above the gate insulation layer. | 06-19-2014 |
20140252480 | COMBINATION FINFET AND PLANAR FET SEMICONDUCTOR DEVICE AND METHODS OF MAKING SUCH A DEVICE - A device includes a plurality of trenches and fins defined in a substantially un-doped layer of semiconducting material, a gate insulation layer positioned on the fins and on the bottom of the trenches, a gate electrode and a device isolation structure. One method disclosed herein involves identifying a top width of each of a plurality of fins and a depth of a plurality of trenches to be formed in a substantially un-doped layer of semiconducting material, wherein, during operation, the device is adapted to operate in at least three distinguishable conditions depending upon a voltage applied to the device, performing at least one process operation to define the trenches and fins in the layer of semiconducting material, forming a gate insulation layer on the fins and on a bottom of the trenches and forming a gate electrode above the gate insulation layer. | 09-11-2014 |
20140264489 | WRAP AROUND STRESSOR FORMATION - For the formation of a stressor on one or more of a source and drain defined on a fin of FINFET semiconductor structure, a method can be employed including performing selective epitaxial growth (SEG) on one or more of the source and drain defined on the fin, separating the fin from a bulk silicon substrate at one or more of the source and drain, and further performing SEG on one or more of the source and drain to form a wrap around epitaxial growth stressor that stresses a channel connecting the source and drain. The formed stressor can be formed so that the epitaxial growth material defining a wrap around configuration connects to the bulk substrate. The formed stressor can increase mobility in a channel connecting the defined source and drain. | 09-18-2014 |
20140319615 | FINFET WITH ACTIVE REGION SHAPED STRUCTURES AND CHANNEL SEPARATION - A semiconductor structure in fabrication includes a n-FinFET and p-FinFET. Stress inducing materials such as silicon and silicon germanium are epitaxially grown into naturally diamond-shaped structures atop the silicon fins of the n-FinFET and p-FinFET areas. The diamond structures act as the source, drain and channel between the source and drain. The diamond structures of the channel are selectively separated from the fin while retaining the fin connections of the diamond-shaped growth of the source and the drain. Further fabrication to complete the structure may then proceed. | 10-30-2014 |
20140319624 | METHODS OF FORMING A FINFET SEMICONDUCTOR DEVICE BY PERFORMING AN EPITAXIAL GROWTH PROCESS - A method of forming a FinFET device involves performing an epitaxial growth process to form a layer of semiconducting material on a semiconducting substrate, wherein a first portion of the layer of semiconducting material will become a fin structure for the FinFET device and wherein a plurality of second portions of the layer of semiconducting material will become source/drain structures of the FinFET device, forming a gate insulation layer around at least a portion of the fin structure and forming a gate electrode above the gate insulation layer. | 10-30-2014 |
20150016174 | INTEGRATED CIRCUITS WITH PROGRAMMABLE ELECTRICAL CONNECTIONS AND METHODS FOR FABRICATING THE SAME - Methods and apparatus are provided for an integrated circuit with a programmable electrical connection. The apparatus includes an inactive area with a memory line passing over the inactive area. The memory line includes a programmable layer. An interlayer dielectric is positioned over the memory line and the inactive area, and an extending member extends through the interlayer dielectric. The extending member is electrically connected to the programmable layer of the memory line at a point above the inactive area. | 01-15-2015 |
20150024557 | SEMICONDUCTOR DEVICE HAVING LOCAL BURIED OXIDE - There is set forth herein a semiconductor device fabricated on a bulk wafer having a local buried oxide region underneath a channel region of a MOSFET. In one embodiment the local buried oxide region can be self-aligned to a gate, and a source/drain region can be formed in a bulk substrate. A local buried oxide region can be formed in a semiconductor device by implantation of oxygen into a bulk region of the semiconductor device followed by annealing. | 01-22-2015 |
20150035018 | DEVICES AND METHODS OF FORMING BULK FINFETS WITH LATERAL SEG FOR SOURCE AND DRAIN ON DIELECTRICS - Devices and methods for forming semiconductor devices with FinFETs are provided. One intermediate semiconductor device includes, for instance: a substrate with at least one fin with at least one channel; at least one gate over the channel; at least one hard-mask over the gate; and at least one spacer disposed over the gate and hard-mask. One method includes, for instance: obtaining an intermediate semiconductor device; forming at least one recess into the substrate, the recess including a bottom and at least one sidewall exposing a portion of the at least one fin; depositing a dielectric layer into the at least one recess; removing at least a portion of the dielectric layer to form a barrier dielectric layer; and performing selective epitaxial growth in the at least one recess over the barrier dielectric layer. | 02-05-2015 |
20150062996 | EMBEDDED SELECTOR-LESS ONE-TIME PROGRAMMABLE NON-VOLATILE MEMORY - An OTP anti-fuse memory array without additional selectors and a manufacturing method are provided. Embodiments include forming wells of a first polarity in a substrate, forming a bitline of the first polarity in each well, and forming plural metal gates across each bitline, wherein no source/drain regions are formed between the metal gates. | 03-05-2015 |
20150099336 | METHODS OF MANUFACTURING INTEGRATED CIRCUITS HAVING FINFET STRUCTURES WITH EPITAXIALLY FORMED SOURCE/DRAIN REGIONS - Methods of manufacturing semiconductor integrated circuits having FinFET structures with epitaxially formed source and drain regions are disclosed. A method of fabricating an integrated circuit includes forming a plurality of silicon fin structures on a semiconductor substrate, epitaxially growing a silicon material on the fin structures, wherein a merged source/drain region is formed on the fin structures, and anisotropically etching at least one of the merged source drain regions to form an un-merged source/drain region. | 04-09-2015 |
20150126008 | METHODS OF FORMING STRESSED MULTILAYER FINFET DEVICES WITH ALTERNATIVE CHANNEL MATERIALS - Disclosed are methods and devices that involve formation of alternating layers of different semiconductor materials in the channel region of FinFET devices. The methods involve forming such alternating layers of different semiconductor materials in a cavity formed above the substrate fin and thereafter forming a gate structure around the fin using gate first or gate last techniques. | 05-07-2015 |
20150137235 | FINFET SEMICONDUCTOR DEVICE HAVING LOCAL BURIED OXIDE - There is set forth herein in one embodiment a FinFET semiconductor device having a fin extending from a bulk silicon substrate, wherein there is formed wrapped around a portion of the fin a gate, and wherein proximate a channel area of the fin aligned to the gate there is formed a local buried oxide region aligned to the gate. In one embodiment, the local buried oxide region is formed below a channel area of the fin. | 05-21-2015 |
20150137236 | SILICON-ON-INSULATOR FINFET WITH BULK SOURCE AND DRAIN - Embodiments of the invention provide a semiconductor structure including a finFET having an epitaxial semiconductor region in direct physical contact with a plurality of fins, wherein the epitaxial semiconductor region traverses an insulator layer and is in direct physical contact with the semiconductor substrate. The gate of the finFET is disposed over an insulator layer, such as a buried oxide layer. Methods of forming the semiconductor structure are also included. | 05-21-2015 |
20150187947 | FINFET WITH ACTIVE REGION SHAPED STRUCTURES AND CHANNEL SEPARATION - A semiconductor structure in fabrication includes a n-FinFET and p-FinFET. Stress inducing materials such as silicon and silicon germanium are epitaxially grown into naturally diamond-shaped structures atop the silicon fins of the n-FinFET and p-FinFET areas. The diamond structures act as the source, drain and channel between the source and drain. The diamond structures of the channel are selectively separated from the fin while retaining the fin connections of the diamond-shaped growth of the source and the drain. Further fabrication to complete the structure may then proceed. | 07-02-2015 |
20150200251 | MOS TRANSISTOR OPERATED AS OTP CELL WITH GATE DIELECTRIC OPERATING AS AN E-FUSE ELEMENT - A process and device are provided for a high-k gate-dielectric operating as a built-in e-fuse. Embodiments include: providing first and second active regions of a transistor, separated by a gate region of the transistor, on a substrate; forming an interfacial layer on the gate region; minimizing the interfacial layer; forming a high-k gate dielectric layer on the interfacial layer to operate as an e-fuse element, the high-k gate dielectric layer and interfacial layer having a combined breakdown voltage less than three times a circuit operating voltage associated with the transistor; and forming a metal gate on the high-k gate dielectric layer. | 07-16-2015 |
20150200298 | MODIFIED TUNNELING FIELD EFFECT TRANSISTORS AND FABRICATION METHODS - Tunneling field effect transistors and fabrication methods thereof are provided, which include: obtaining a gate structure disposed over a substrate structure; and providing a source region and a drain region within the substrate structure separated by a channel region, the channel region underlying, at least partially, the gate structure, and the providing including: modifying the source region to attain a narrowed source region bandgap; and modifying the drain region to attain a narrowed drain region bandgap, the narrowed source region bandgap and the narrowed drain region bandgap facilitating quantum tunneling of charge carriers from the source region or the drain region to the channel region. Devices including digital modulation circuits with one or more tunneling field effect transistor(s) are also provided. | 07-16-2015 |
20150221726 | FINFET WITH ISOLATED SOURCE AND DRAIN - A FinFET has shaped epitaxial structures for the source and drain that are electrically isolated from the substrate. Shaped epitaxial structures in the active region are separated from the substrate in the source and drain regions while those in the channel region remain. The gaps created by the separation in the source and drain are filled with electrically insulating material. Prior to filling the gaps, defects created by the separation may be reduced. | 08-06-2015 |
20150228648 | FINFET WITH MULTILAYER FINS FOR MULTI-VALUE LOGIC (MVL) APPLICATIONS AND METHOD OF FORMING - A method of forming a multi-valued logic transistor with a small footprint and the resulting device are disclosed. Embodiments include forming plural fins on a silicon substrate, each fin covered with a hardmask; filling spaces between the fins and hard masks with an oxide; removing the hardmasks and recessing each fin, forming a cavity in the oxide over each fin; forming plural Si-based layers in each cavity with an increasing percentage of Ge or C or with an decreasing concentration of dopant from a bottom layer to a top layer; performing CMP for planarization to a top of the fins; recessing the oxide to a depth slightly below a top portion of the fin having a thickness equal to a thickness of each Si-based layer; and forming a high-k gate dielectric and a metal gate electrode over the plural Si-based layers. | 08-13-2015 |
20150255277 | CONFORMAL NITRIDATION OF ONE OR MORE FIN-TYPE TRANSISTOR LAYERS - Fin-type transistor fabrication methods and structures are provided having one or more nitrided conformal layers, to improve reliability of the semiconductor device. The method includes, for example, providing at least one material layer disposed, in part, conformally over a fin extending above a substrate, the material layer(s) including a gate dielectric layer; and performing a conformal nitridation process over an exposed surface of the material layer(s), the conformal nitridation process forming an exposed, conformal nitrided surface. | 09-10-2015 |
20150255456 | REPLACEMENT FIN INSOLATION IN A SEMICONDUCTOR DEVICE - Embodiments herein provide approaches for forming a set of replacement fins in a semiconductor device. Specifically, a device is formed having a set of replacement fins over a substrate, each of the set of replacement fins comprising a first section separated from a second section by a liner layer, the first section having a lower dopant centration than a dopant concentration of the second section. In one embodiment, sequential epitaxial deposition with insitu doping is used to form the second section, the liner layer, and then the first section of each of the set of replacement fins. In another embodiment, the second section is formed over the substrate, and the liner layer is formed through a carbon implant. The first section is then epitaxially formed over the liner layer, and serves as the fin channel. As provided, upward dopant diffusion is suppressed, resulting in the first section of each fin being maintained with low doping so that the fin channel is fully depleted channel during device operation. | 09-10-2015 |
20150287727 | SILICON-ON-INSULATOR FINFET WITH BULK SOURCE AND DRAIN - Embodiments of the invention provide a semiconductor structure including a finFET having an epitaxial semiconductor region in direct physical contact with a plurality of fins, wherein the epitaxial semiconductor region traverses an insulator layer and is in direct physical contact with the semiconductor substrate. The gate of the finFET is disposed over an insulator layer, such as a buried oxide layer. Methods of forming the semiconductor structure are also included. | 10-08-2015 |
20150311120 | FABRICATING FIELD EFFECT TRANSISTOR(S) WITH STRESSED CHANNEL REGION(S) AND LOW-RESISTANCE SOURCE/DRAIN REGIONS - Methods of fabricating field effect transistors having a source region and a drain region separated by a channel region are provided which include: using a single mask step in forming a first portion(s) and a second portion(s) of at least one of the source region or the drain region, the first portion(s) including a first material selected and configured to facilitate the first portion(s) stressing the channel region, and the second portion(s) including a second material selected and configured to facilitate the second portion(s) having a lower electrical resistance than the first portion(s). One embodiment includes: providing the first material with a crystal lattice structure; and forming the second material by disposing another material interstitially with respect to the crystal lattice structure. Another embodiment includes forming the first portion and the second portion within at least one of a source cavity or a drain cavity of the semiconductor substrate. | 10-29-2015 |
20150332963 | T-SHAPED CONTACTS FOR SEMICONDUCTOR DEVICE - A transistor, planar or non-planar (e.g., FinFET), includes T-shaped contacts to the source, drain and gate. The top portion of the T-shaped contact is wider than the bottom portion, the bottom portion complying with design rule limits. A conductor-material filled trench through a multi-layer etching stack above the transistor provides the top portions of the T-shaped contacts. Tapered spacers along inner sidewalls of the top contact portion prior to filling allow for etching a narrower bottom trench down to the gate, and to the source/drain for silicidation prior to filling. | 11-19-2015 |
20150332972 | FABRICATING RAISED FINS USING ANCILLARY FIN STRUCTURES - A method of fabricating a raised fin structure including a raised contact structure is provided. The method may include: providing a base fin structure; providing at least one ancillary fin structure, the at least one ancillary fin structure contacting the base fin structure at a side of the base fin structure; growing a material over the base fin structure to form the raised fin structure; and, growing the material over the at least one ancillary fin structure, wherein the at least one ancillary fin structure contacting the base fin structure increases a volume of material grown over the base fin structure near the contact between the base fin structure and the at least one ancillary fin structure to form the raised contact structure. | 11-19-2015 |
20150357332 | DEVICES AND METHODS OF FORMING BULK FINFETS WITH LATERAL SEG FOR SOURCE AND DRAIN ON DIELECTRICS - Devices and methods for forming semiconductor devices with FinFETs are provided. One intermediate semiconductor device includes, for instance: a substrate with at least one fin with at least one channel; at least one gate over the channel; at least one hard-mask over the gate; and at least one spacer disposed over the gate and hard-mask. One method includes, for instance: obtaining an intermediate semiconductor device; forming at least one recess into the substrate, the recess including a bottom and at least one sidewall exposing a portion of the at least one fin; depositing a dielectric layer into the at least one recess; removing at least a portion of the dielectric layer to form a barrier dielectric layer; and performing selective epitaxial growth in the at least one recess over the barrier dielectric layer. | 12-10-2015 |
20160049488 | SEMICONDUCTOR GATE WITH WIDE TOP OR BOTTOM - A semiconductor structure with wide-bottom and/or wide-top gates includes a semiconductor substrate, a source region(s), a drain region(s) associated with the source region(s), and a gate(s) associated with the source region(s) and the drain region(s) having a top portion and a bottom portion. One of the top portion and the bottom portion of the gate(s) is wider than the other of the top portion and bottom portion. The wide-bottom gate is created using a dummy wide-bottom gate etched from a layer of dummy gate material, creating spacers for the dummy gate, removing the dummy gate material and filling the opening created with conductive material. For the wide-top gate, first and second spacers are included, and instead of removing all the dummy gate material, only a portion is removed, exposing the first spacers. The exposed portion of the first spacers may either be completely or partially removed (e.g., tapered), in order to increase the area of the top portion of the gate to be filled. | 02-18-2016 |
20160064371 | NON-PLANAR ESD DEVICE FOR NON-PLANAR OUTPUT TRANSISTOR AND COMMON FABRICATION THEREOF - Protecting non-planar output transistors from electrostatic discharge (ESD) events includes providing a non-planar semiconductor structure, the structure including a semiconductor substrate with a well of n-type or p-type. The provided non-planar structure further includes raised semiconductor structure(s) coupled to the substrate, non-planar transistor(s) of a type opposite the well, each transistor being situated on one of the raised structure(s), the non-planar transistor(s) each including a source, a drain and a gate, the non-planar structure further including parasitic bipolar junction transistor(s) (BJT(s)) on the raised structure(s), each BJT including a collector and an emitter situated on the raised structure and a base being the well, and a well contact for the base of the BJT. Protecting the non-planar output transistors further includes electrically coupling the drain of the non-planar transistor and the collector of the BJT to an output of a circuit, and electrically coupling the source of the non-planar transistor, the emitter of the BJT and the well contact to a ground of the circuit. | 03-03-2016 |
20160071979 | FIN DEVICE WITH BLOCKING LAYER IN CHANNEL REGION - A method includes forming an ion implant layer in a fin defined on a semiconductor substrate. The semiconductor substrate is annealed to convert the ion implant layer to a dielectric layer. A gate electrode structure is formed above the fin in a channel region after forming the ion implant layer. The fin is recessed in a source/drain region. A semiconductor material is epitaxially grown in the source/drain region. | 03-10-2016 |
20160104541 | NOVEL OTPROM FOR POST-PROCESS PROGRAMMING USING SELECTIVE BREAKDOWN - At least one method, apparatus and system disclosed involves hard-coding data into an integrated circuit device. An integrated circuit device provided. Data for hard-wiring information into a portion of the integrated circuit device is received. A stress voltage signal is provided to a portion of a transistor of the integrated circuit device for causing a dielectric breakdown of the portion of the transistor for hard-wiring the data. | 04-14-2016 |
20160111491 | FIN DEVICE WITH BLOCKING LAYER IN CHANNEL REGION - A semiconductor device includes a fin defined on a substrate and a gate electrode structure formed above the fin. A channel region of the device is defined beneath the gate electrode structure and source/drain regions of the fin are defined adjacent the gate electrode structure. A dielectric layer is defined at least in the channel region. The dielectric layer includes oxygen and at least one of nitrogen, carbon or fluorine. | 04-21-2016 |