Patent application number | Description | Published |
20090269494 | FILM-FORMING APPARATUS, FILM-FORMING METHOD AND RECORDING MEDIUM - A film forming apparatus comprises a processing chamber for holding therein a to-be-processed substrate, a first gas supplying means for supplying into the processing chamber a first vapor source including a metal alkoxide having a tertiary butoxyl group as a ligand, and a second gas supplying means for supplying into the processing chamber a second vapor source including a silicon alkoxide source, wherein the first gas supplying means and the second gas supplying means are connected to a pre-reaction means for causing pre-reactions of the first vapor source and the second vapor source, and the film forming apparatus is configured to supply the first vapor source and the second vapor source after the pre-reactions into the processing chamber. | 10-29-2009 |
20100267243 | PLASMA PROCESSING METHOD AND APPARATUS - In the plasma processing by an electrically negative gas, the in-plane uniformity of plasma processing is enhanced compared to the conventional case by controlling the ion density in the plasma. Not only is a processing gas being an electrically negative gas introduced from a processing gas source | 10-21-2010 |
20100321029 | PLASMA MEASURING METHOD, PLASMA MEASURING DEVICE AND STORAGE MEDIUM - Provided is a technique capable of ascertaining the process condition of the boundary between electrically positive and negative plasma regions. In a vacuum chamber, one of the parameters of process conditions is stepwisely changed to generate a plasma under at least three process conditions. The parameters include a flow rate ratio between an electrically negative gas and an electrically positive gas, a pressure in the vacuum chamber and the magnitude of an energy supplied to the gases. Next, a voltage is applied to a Langmuir probe positioned in that plasma, and a current-voltage curve indicating the relationship between the applied voltage and the electric current to flow through the probe is acquired for each of the process conditions. On the basis of the current-voltage curve group acquired, the process conditions are determined for the boundary between the electrically positive and negative plasma regions. | 12-23-2010 |
20110201208 | PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS - According to one embodiment, a process gas containing a fluorocarbon-based gas being an etch gas having a deposition property and SF | 08-18-2011 |
Patent application number | Description | Published |
20120019583 | INK JET PRINTING APPARATUS AND INK JET PRINTING METHOD - An ink jet printing apparatus and an ink jet printing method, whereby high-permeation ink and low-permeation ink are employed to prevent a reduction in optical density is provided. The ink jet printing apparatus controls ejection of ink from print heads, so that only low-permeation ink is ejected onto the edge area of a print medium that is adjacent to a non-printing area, and this time, high-permeation ink is not employed. Further, the ink jet printing apparatus controls ejection of ink from the print heads, so that both low-permeation ink and high-permeation ink are employed for the non-edge area that is adjacent to the edge area, and to perform printing, the low-permeation ink is ejected onto the non-edge area prior to the high-permeation ink. | 01-26-2012 |
20150070436 | INK JET RECORDING INK, INK JET RECORDING METHOD, INK JET RECORDING HEAD, AND INK JET RECORDING APPARATUS - An ink jet recording ink including a pigment; water; and water-soluble compounds. The pigment comprises a resin-dispersed pigment dispersed with a (meth)acrylate-based random copolymer having an acid value of 100-160 mgKOH/g. The water-soluble compounds include at least ethylene urea and a water-soluble compound having a hydrophilicity-hydrophobicity coefficient defined by the following equation (A) of 0.37 or less The total content of the water-soluble compounds is 22-50 mass % with respect to the total amount of the ink The content of the ethylene urea is 11.0 mass % or more with respect to the total amount of the ink, and the proportion of the amount of the ethylene urea in the total amount of the water-soluble compounds is 50% by mass or less, | 03-12-2015 |
20150070437 | INK JET RECORDING INK, INK JET RECORDING METHOD, INK JET RECORDING HEAD, AND INK JET RECORDING APPARATUS - An ink jet recording ink including a coloring material; water; and three kinds of water-soluble compounds. The content of the water is 70 mass % or more with respect to the total amount of the ink. Each water-soluble compound has a molecular weight of 80 or more and is a liquid compound having a vapor pressure at 20° C. of 5 Pa or less or a solid compound, and at least one kind of the water-soluble compounds is a solid compound. In case that the water-soluble compounds are mixed at a ratio at which the water-soluble compounds are incorporated into the ink to provide a mixture, a 40% aqueous solution of the mixture has a water activity value of 0.88-0.91 and a viscosity of 3.3 mPa·s or less. The total content of the water-soluble compounds in the ink is 20-25 mass % with respect to the total amount of the ink. | 03-12-2015 |