Patent application number | Description | Published |
20080278717 | CONTAMINATION-INSPECTING APPARATUS AND DETECTION CIRCUIT - The detection part has: a subtraction module for calculating correction data from data of detection systems when a reference-voltage generation module applies a reference voltage to the detection systems; a data-holding module for holding the correction data; an addition module for making a correction of detection data; a comparison module for comparing the detection data with switching data; and a selector for switching data of the detection systems including data subjected to the correction according to the output of the comparison module. | 11-13-2008 |
20090122305 | DETECTION CIRCUIT AND FOREIGN MATTER INSPECTION APPARATUS FOR SEMICONDUCTOR WAFER - In a foreign matter inspection apparatus for a semiconductor wafer, a PMT which detects reflection light, an amplifier which amplifies a signal detected by the PMT and in which response characteristics of amplification are controlled by a control signal, an A/D converter which converts the signal amplified by the amplifier into a predetermined code and outputs the code, a control circuit which generates a control signal based on information of the semiconductor wafer having a correlation with the reflection light, and a data processing circuit which detects a foreign matter on the semiconductor wafer based on the code output from the A/D converter are provided. | 05-14-2009 |
20100033862 | Inspection Apparatus and Inspection Method of Magnetic Disk or Magnetic Head - The present invention provides a technique for converting burst data to digital data, applying FFT operation to 2 | 02-11-2010 |
20100067135 | Inspection Apparatus and Inspection Method of Magnetic Disk or Magnetic Head - The present invention is designed to support plural servo patterns by setting a portion of the information of the servo pattern as a detection pattern, comparing the demodulated pattern of the portion of the information with the detection pattern, and controlling an operation timing of a test according to a result of the comparison. | 03-18-2010 |
20110211277 | DETECTING CIRCUIT AND INSPECTING APPARATUS - A detecting circuit, which can detect plural types of servo signals, including a cosine/sine value detector for sampling a servo signal supplied from an inspected object and thereby obtaining a cosine value and a sine value, an amplitude/phase detector for obtaining at least amplitude information and phase information on the basis of the cosine value and the sine value obtained by the cosine/sine value detector, and a servo selector/position detector for selecting a servo scheme of the inspected object and detecting a position of the inspected object on the basis of the amplitude information and the phase information obtained by the amplitude/phase detector. | 09-01-2011 |
20120075021 | WIDEBAND LOW NOISE SENSOR AMPLIFIER CIRCUIT - A circuit having a sensor with a stray capacitance value. An output from the sensor is connected to the input of an amplifier while a negative capacitance circuit is electrically connected in parallel with the sensor output. The negative capacitance circuit reduces the effect of the sensor stray capacitance to provide an increased bandwidth and decreased noise on the amplifier output. | 03-29-2012 |
20120194939 | PATTERNED MEDIUM INSPECTION METHOD AND INSPECTION APPARATUS - A patterned medium inspection method according to the present invention includes a timing computation process including a read process reading the reproduced signal of a patterned medium under inspection and a computation process computing the signal interval values from the patterned medium reproduced signal read in the read process, and a judgment process judging the quality of the patterned medium using the reproduced signal interval values computed in the computation process. | 08-02-2012 |
20120313650 | INSPECTION DEVICE AND INSPECTION METHOD - An inspection device for detecting small foreign bodies is provided with a first electrode and a second electrode disposed on either side of the inspection target, a power source connected to the aforementioned first electrode, a conveyance speed control unit for controlling the conveyance speed of the aforementioned inspection target, a current detection unit which, connected to the aforementioned second electrode, detects currents generated by changes in the static capacitance formed between the aforementioned first electrode and the aforementioned second electrode, and a defect detection unit which detects defects on the basis of the aforementioned current. Furthermore, the aforementioned second electrode rotates in the direction opposite of the conveyance direction of the aforementioned inspection target. Furthermore, the aforementioned power source includes a DC or an AC power source. | 12-13-2012 |
20130187667 | Inspection Equipment and Inspection Method - Foreign metal inspection equipment is provided with: a conveying device for conveying a sample to be subjected to inspection; electrodes positioned so as to face the surface of the sample; a measurement device for measuring the capacitance between the electrodes and the sample being conveyed by the conveying device; and a processing unit that inspects for foreign metal mixed in the sample on the basis of the change in capacitance measured by the measurement device. | 07-25-2013 |
20130286387 | DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE - When the intensity of scattering light from a defect on a sample becomes very low according to the diameter of the defect, the dark noise from a sensor device itself accounts which a large proportion of the detected signal outputted from the sensor and thus it is difficult to detect minute defects. Furthermore, since a laser light source is pulsed into oscillation, pulse components from the laser light source are superimposed on the detected signal outputted from the sensor, and therefore it is difficult to detect defects with high accuracy. The present invention is a defect inspection device having irradiation means which producing pulsed operation and irradiating a surface of a sample with a laser beam, detection means which detecting scattering light generated at the surface of the sample in response to the irradiation provided by the irradiation means, and a processing portion which generating a delay signal based on the laser beam emitted by the irradiation means and processing the scattering light detected by the detection means using the delay signal. | 10-31-2013 |