Patent application number | Description | Published |
20090080060 | SEPARABLE MODULATOR - A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts. | 03-26-2009 |
20090135463 | MOVEABLE MICRO-ELECTROMECHANICAL DEVICE - A MEMS device is provided. The MEMS device may include a first plate, a second plate and a third plate. The MEMS device may also include a first power supply configured to provide a voltage to the first plate and a second power supply configured apply a voltage to the second plate. In some embodiments, a third power supply may provide a voltage to the third plate. | 05-28-2009 |
20090219604 | PHOTONIC MEMS AND STRUCTURES - An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials. | 09-03-2009 |
20090257109 | METHOD AND SYSTEM FOR PACKAGING A MEMS DEVICE - A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device. | 10-15-2009 |
20090279174 | PRINTABLE STATIC INTERFEROMETRIC IMAGES - Methods of fabricating a static interferometric image device and static interferometric image device formed by the same are disclosed. In one embodiment, a method includes providing a substrate. A plurality of liquid layers are formed over the substrate by an inkjet process such that the layers are lateral to one another. The liquid layers contain a solidifiable material or particles. Then, the plurality of liquid layers are solidified to form a plurality of solid layers. In some embodiments, the substrate includes pre-defined cavities, and the liquid layers are formed in the cavities. In other embodiments, the substrate includes a substantially planar, stepped, or continuously transitioning surface, and the liquid layers are formed on the surface. The inkjet process provides optical fillers or spacers for defining interferometric gaps between absorbers and reflectors in the display device, based at least partially on an image that the display device is designed to display. | 11-12-2009 |
20090323168 | ELECTROMECHANICAL DEVICES AND METHODS OF FABRICATING SAME - In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the micro electromechanical systems device. | 12-31-2009 |
20100019336 | MEMS DEVICES HAVING OVERLYING SUPPORT STRUCTURES AND METHODS OF FABRICATING THE SAME - Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference. | 01-28-2010 |
20100039370 | METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF - An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope. | 02-18-2010 |
20100214645 | SEPARABLE MODULATOR - A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts. | 08-26-2010 |
20100220248 | PROJECTION DISPLAY - A system and method for displaying an image using projection optics is disclosed. In one embodiment, a projector comprises an array of display elements, each display element comprising a first layer which is at least partially reflective and a second layer which is at least partially reflective and spaced a variable distance from the first layer, a controller configured to change the variable distances of the display elements based on image data representing an image, a light source configured to illuminate the array of display elements, and at least one lens configured to refract light reflected by or transmitted through the array so as project the image. | 09-02-2010 |
20100245980 | SYSTEM AND METHOD FOR A MEMS DEVICE - Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer. | 09-30-2010 |
20100309540 | METHOD AND DEVICE FOR PROVIDING ILLUMINATION TO INTERFEROMETRIC MODULATORS - An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope. | 12-09-2010 |
20100320555 | CONTROLLING ELECTROMECHANICAL BEHAVIOR OF STRUCTURES WITHIN A MICROELECTROMECHANICAL SYSTEMS DEVICE - In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device. | 12-23-2010 |
20110000210 | Integrated System for Using Thermal Energy Conversion - In one embodiment, the invention provides a method for using heat to perform work, comprising: operating a first thermodynamic cycle wherein heat for a first working fluid is provided by combustion of a fuel-based (FB) energy source; operating a second thermodynamic cycle wherein heat for a second working fluid is from a combination of a non-fuel-based (NFB) energy source and waste heat from the first thermodynamic cycle. | 01-06-2011 |
20110019380 | METHOD AND DEVICE FOR MODULATING LIGHT - Improvements in an interferometric modulator that has a cavity defined by two walls. | 01-27-2011 |
20110026096 | METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION - Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer. | 02-03-2011 |
20110026100 | Dynamic Motile Medium - In one embodiment of the invention there is provided a device for modulating light. The device comprises a plurality of nano-scale particles; a conformal structure defining a surface to which the nano-scale particles conform under influence of a displacement force; and a displacement mechanism to apply the displacement force to the nano-scale particles; wherein the nano-scale particles when they conform to the conformal structure change the optical characteristics of the conformal structure. | 02-03-2011 |
20110037907 | CONTROLLER AND DRIVER FEATURES FOR BI-STABLE DISPLAY - An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials. | 02-17-2011 |
20110038027 | METHOD AND DEVICE FOR MODULATING LIGHT WITH SEMICONDUCTOR SUBSTRATE - Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer. | 02-17-2011 |
20110080632 | METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF - An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope. | 04-07-2011 |
20110115762 | MEMS DEVICES HAVING OVERLYING SUPPORT STRUCTURES AND METHODS OF FABRICATING THE SAME - Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference. | 05-19-2011 |
20110120451 | DEVICE FOR HARNESSING SOLAR ENERGY WITH VAPOR INSULATING HEAT TRANSFER CORE - A solar collector is provided, in one embodiment. The solar collector comprises a heat core to convert incident radiation into heat; a wicking layer spaced from the heat core to absorb infrared radiation emitted by the heat core due to the conversion of incident radiation into heat; an inlet to introduce a heat transfer fluid into the wicking layer; wherein the absorption of the infrared radiation is by the heat transfer fluid in the wicking layer and causes a portion of the heat transfer fluid to enter into a vapor phase thereof which propagates into the heat core where it undergoes heating; and an outlet to transport the heated vapor phase of the heat transfer fluid out of the collector. | 05-26-2011 |
20110170166 | DEVICE FOR MODULATING LIGHT WITH MULTIPLE ELECTRODES - Improvements in an interferometric modulator that has a cavity defined by two walls. | 07-14-2011 |
20110170167 | METHOD FOR MODULATING LIGHT WITH MULTIPLE ELECTRODES - Improvements in an interferometric modulator that has a cavity defined by two walls. | 07-14-2011 |
20110205197 | ELECTROMECHANICAL DEVICES HAVING SUPPORT STRUCTURES AND METHODS OF FABRICATING THE SAME - Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, both rivets and posts may be used. In certain embodiments, these support structures are formed from rigid inorganic materials, such as metals or oxides. In certain embodiments, etch barriers may also be deposited to facilitate the use of materials in the formation of support structures which are not selectively etchable with respect to other components within the MEMS device. | 08-25-2011 |
20120062310 | SYSTEM AND METHOD FOR CHARGE CONTROL IN A MEMS DEVICE - An electromechanical device is disclosed. The device includes a variable capacitor, and a switch circuit configured to pre-charge an input node with a pulse charge at said selected voltage level. The switch circuit includes only a first switch coupled to the variable capacitor and the first switch is configured to respond to an enable signal having a duration shorter than a mechanical time constant of the variable capacitor and the first switch is configured to apply the selected voltage level across the variable capacitor to cause the pulse charge to accumulate on the variable capacitor. | 03-15-2012 |
20120085731 | METHOD OF FABRICATING MEMS DEVICES (SUCH AS IMod) COMPRISING USING A GAS PHASE ETCHANT TO REMOVE A LAYER - Improvements in an interferometric modulator that cavity defined by two walls. | 04-12-2012 |
20120099174 | METHOD OF FABRICATING MEMS DEVICES (SUCH AS IMod) COMPRISING USING A GAS PHASE ETCHANT TO REMOVE A LAYER - Improvements in an interferometric modulator that cavity defined by two walls. | 04-26-2012 |
20120140312 | METHOD AND SYSTEM FOR PACKAGING A DEVICE - A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device. | 06-07-2012 |
20120182595 | PHOTONIC MEMS AND STRUCTURES - An interference modulator (IMod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on continuous web fed process. IMods can be used as test structures for evaluation of residual stress in deposited materials. | 07-19-2012 |
20140251311 | INDUCED FLOW SOLAR THERMAL COLLECTOR AND METHOD - A solar thermal collector is provided. The collector comprises a housing defining an inlet, and an outlet for a heat transfer fluid, said housing comprising a window to allow sunlight to pass there through; a heat transfer core disposed within the interior of the housing said housing designed to be heated by exposure to said sunlight; and a heat absorbing component in proximity to the heat transfer core, said heat absorbing component designed to at least partially absorb heat losses from the heat transfer core; wherein a positioning the components within the housing defines at least one path for the heat transfer fluid for preheating of the heat transfer fluid prior to said heat transfer fluid passing through the heat transfer core. | 09-11-2014 |
20140360557 | HYBRID FLOW SOLAR THERMAL COLLECTOR - A hybrid solar thermal collector is provided. The hybrid solar collector comprises a photovoltaic element to convert sunlight into electricity; and a solar thermal collector device comprising an absorber element to convert sunlight into heat; wherein the absorber element is immersed in a heat transfer fluid in use. | 12-11-2014 |