Patent application number | Description | Published |
20100039629 | METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - An illumination system of a microlithographic projection exposure apparatus has a pupil surface and an essentially flat arrangement of desirably individually drivable beam deviating elements for variable illumination of the pupil surface. Each beam deviating element allows deviation of a projection light beam incident on it to be achieved as a function of a control signal applied to the beam deviating element. A measurement illumination instrument directs a measurement light beam, independent of the projection light beams, onto a beam deviating element. A detector instrument records the measurement light beam after deviation by the beam deviating element. An evaluation unit determines the deviation of the projection light beam from measurement signals provided by the detector instrument. | 02-18-2010 |
20100103400 | ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - An illumination system of a microlithographic projection exposure apparatus comprises a pupil surface and an arrangement of individually drivable beam deviating elements. Each beam deviating element is configured to direct light impinging thereon onto different positions on the pupil surface in response to a control signal applied to the beam deviating element. According to the disclosure an attenuation unit is provided which is configured to reduce the intensity of light, which is directed by any arbitrary beam deviating element (onto the pupil surface, by more than 50%. This makes it possible to reduce the intensity of light in the pupil surface that has been reflected by defective beam deviating elements. | 04-29-2010 |
20100157268 | ILLUMINATION SYSTEM OF A MICROLOTHOGRAPHIC PROJECTION EXPOSURE APPARATUS - An illumination system of a microlithographic projection exposure apparatus includes a beam deflection array including a number beam deflection elements, for example mirrors. Each beam deflection element is adapted to deflect an impinging light beam by a deflection angle that is variable in response to control signals. The light beams reflected from the beam deflection elements produce spots in a system pupil surface. The number of spots illuminated in the system pupil surface during an exposure process, during which a mask is imaged on a light sensitive surface, is greater than the number of beam deflection elements. This may be accomplished with the help of a beam multiplier unit that multiplies the light beams reflected from the beam deflection elements. In another embodiment the beam deflecting elements are controlled such that the irradiance distribution produced in the system pupil surface changes between two consecutive light pulses of an exposure process. | 06-24-2010 |
20100277708 | ILLUMINATION SYSTEM OF A MICROLOTHOGRAPHIC PROJECTION EXPOSURE APPARATUS - An illumination system of a microlithographic projection exposure apparatus includes a beam deflection array including a number beam deflection elements, for example mirrors. Each beam deflection element is adapted to deflect an impinging light beam by a deflection angle that is variable in response to control signals. The light beams reflected from the beam deflection elements produce spots in a system pupil surface. The number of spots illuminated in the system pupil surface during an exposure process, during which a mask is imaged on a light sensitive surface, is greater than the number of beam deflection elements. This may be accomplished with the help of a beam multiplier unit that multiplies the light beams reflected from the beam deflection elements. In another embodiment the beam deflecting elements are controlled such that the irradiance distribution produced in the system pupil surface changes between two consecutive light pulses of an exposure process. | 11-04-2010 |
20110012010 | ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - An illumination system for illuminating a mask in a microlithographic projection exposure apparatus includes an array of mirrors or other beam deflecting elements. Each beam deflecting element produces on the surface a projection light spot at a position that is variable by changing a deflection angle produced by the beam deflecting element. A spot shape measuring unit measures the shapes of spots which are produced on the spot measuring unit by the beam deflecting elements. The spot shape measuring unit is arranged outside of every possible path projection light is allowed to take between the array and the mask. A control unit controls the beam deflecting elements such that, at a given instant during an exposure operation of the apparatus, at least one beam deflecting element directs projection light exclusively on the spot shape measuring unit, and at least some beam deflecting elements direct projection light exclusively on the surface. | 01-20-2011 |
20120002185 | MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - A microlithographic projection exposure apparatus includes an optical surface, which may be formed by a plurality of micro-mirrors, and a measurement device which is configured to measure a parameter related to the optical surface at a plurality of locations. The measurement device includes an illumination unit with a plurality of illumination members, each having a light exit facet. An optical imaging system establishes an imaging relationship between an object plane in which at least two light exit facets are arranged, and an image plane which at least substantially coincides with the optical surface. A detector unit measures the property of measuring light after it has interacted with the optical surface, and an evaluation unit determines the surface related parameter for each of the locations on the basis of the properties determined by the detector unit. | 01-05-2012 |
20120127440 | OPTICAL ASSEMBLY FOR PROJECTION LITHOGRAPHY - An optical assembly for projection lithography has an optical component to guide imaging or illumination light. The optical component has a reflective substrate that contains a fluorescent component. An excitation light source is used to produce fluorescence excitation light. An excitation optical system is used to guide the fluorescence excitation light to the fluorescent component of the substrate. The optical assembly also has a fluorescent light detector and a fluorescence optical system for guiding fluorescent light to the fluorescent light detector. The fluorescent light is produced via fluorescence of the fluorescent component upon irradiation with fluorescence excitation light. The optical assembly can detect a temperature or temperature distribution of the substrate of the optical component with a high degree of precision. | 05-24-2012 |
20120212720 | DEVICE FOR GUIDING ELECTROMAGNETIC RADIATION INTO A PROJECTION EXPOSURE APPARATUS - A device for guiding electromagnetic radiation into a projection exposure apparatus for semiconductor lithography includes an optical fibre and an actuator for the mechanical manipulation of a section of the fibre as a result of which a temporally averaged homogenization of an intensity profile of electromagnetic radiation emerging at an exit end of the fibre can be achieved. A projection exposure apparatus for semiconductor lithography is equipped with the abovementioned device. | 08-23-2012 |
20120293784 | METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - Microlithographic illumination system includes individually drivable elements to variably illuminate a pupil surface of the system. Each element deviates an incident light beam based on a control signal applied to the element. The system also includes an instrument to provide a measurement signal, and a model-based state estimator configured to compute, for each element, an estimated state vector based on the measurement signal. The estimated state vector represents: a deviation of a light beam caused by the element; and a time derivative of the deviation. The illumination system further includes a regulator configured to receive, for each element: a) the estimated state vector; and b) target values for: i) the deviation of the light beam caused by the deviating element; and ii) the time derivative of the deviation. | 11-22-2012 |
20130077074 | MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - A microlithographic projection exposure apparatus includes a projection light source. The apparatus also includes a heating light source for generating heating light which is at least partly absorbed by an optical element. An illumination optical unit directs the heating light onto the optical element such that the heating light has a predefined intensity distribution on an optical surface of the optical element. The illumination optical unit includes a deflection element which is a diffractive optical element or a refractive freeform element. The deflection element simultaneously directs the heating light impinging thereon in different directions. | 03-28-2013 |
20130077077 | OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MICROLITHOGRAPHIC EXPOSURE METHOD - An optical system for a microlithographic projection exposure apparatus and a microlithographic exposure method are disclosed. In an embodiment an optical system for a microlithographic projection exposure apparatus includes at least one mirror arrangement having a plurality of mirror elements which are displaceable independently of each other for altering an angular distribution of the light reflected by the mirror arrangement. The optical system also includes at least one manipulator downstream of the mirror arrangement in the light propagation direction. The manipulator has a raster arrangement of manipulator elements so that light incident on the manipulator during operation of the optical system is influenced differently in its polarization state and/or in its intensity in dependence on the incidence location. | 03-28-2013 |
20130230073 | Method and arrangement for determining the heating condition of a mirror in an optical system - The invention concerns a method of and an arrangement for determining the heating condition of a mirror in an optical system, in particular in a microlithographic projection exposure apparatus. In an embodiment the mirror is an EUV mirror and a method according to the invention comprises the following steps: deflecting at least one input measuring beam on to the mirror; ascertaining at least one optical parameter of at least one output measuring beam produced from the input measuring beam after interaction with the mirror; and determining the heating condition of the mirror on the basis of the parameter. | 09-05-2013 |
20140233006 | METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - Microlithographic illumination system includes individually drivable elements to variably illuminate a pupil surface of the system. Each element deviates an incident light beam based on a control signal applied to the element. The system also includes an instrument to provide a measurement signal, and a model-based state estimator configured to compute, for each element, an estimated state vector based on the measurement signal. The estimated state vector represents: a deviation of a light beam caused by the element; and a time derivative of the deviation. The illumination system further includes a regulator configured to receive, for each element: a) the estimated state vector; and b) target values for: i) the deviation of the light beam caused by the deviating element; and ii) the time derivative of the deviation. | 08-21-2014 |
20150300807 | METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - Microlithographic illumination system includes individually drivable elements to variably illuminate a pupil surface of the system. Each element deviates an incident light beam based on a control signal applied to the element. The system also includes an instrument to provide a measurement signal, and a model-based state estimator configured to compute, for each element, an estimated state vector based on the measurement signal. The estimated state vector represents: a deviation of a light beam caused by the element; and a time derivative of the deviation. The illumination system further includes a regulator configured to receive, for each element: a) the estimated state vector; and b) target values for: i) the deviation of the light beam caused by the deviating element; and ii) the time derivative of the deviation. | 10-22-2015 |
Patent application number | Description | Published |
20110179465 | APPARATUS, AND AN ASSOCIATED METHOD, FOR FACILITATING SECURE OPERATIONS OF A WIRELESS DEVICE - An apparatus, and an associated method, facilitates security at a wireless device, such as a wireless device comprising a mobile computing platform. A security decision engine is provided that monitors for an event necessitating a security decision. When a security decision is required, request is made of a knowledge fetcher, provided by a trusted third-party, installed at the wireless device for the security decision. The knowledge fetcher obtains the security decision, such as by obtaining the security decision from a remote, trusted third-party server, and provides the security decision to the decision engine. Use is made of the security decision pursuant to a setting for which the security decision is needed. | 07-21-2011 |
20110179468 | APPARATUS, AND AN ASSOCIATED METHOD, FOR FACILITATING SECURE OPERATIONS OF A WIRELESS DEVICE - An apparatus, and an associated method, facilitates security relating to installation of, such as downloading of, and application at a wireless device. When selection is made to install the application, a security decision is required of a trusted, third-party to install the application. A request is made of a trusted, third-party entity for the security decision. Responsive to the security decision, the application is either allowed to be downloaded to the wireless device or prohibited from being downloaded to the wireless device. | 07-21-2011 |
20120124640 | DATA SOURCE BASED APPLICATION SANDBOXING - A computing device and a method for a computing device to control access to data stored on a data store of the device. An access component of the device having control over access to the data. The access component being operative to receive a request for data from a requesting component, identify an assigned access domain of the requesting component and an assigned data domain of the requested data and determine whether the requesting component is authorized to access the data by comparing the assigned access domain and the data domain with permissions specified in a security policy. If the assigned access domain is authorized to access the data domain, the access component may provide access to the requested data. | 05-17-2012 |
20120317565 | METHODS AND DEVICES FOR CONTROLLING ACCESS TO COMPUTING RESOURCES - Methods and devices for controlling access to resources are disclosed herein. In one example embodiment, the method comprises: executing an application at a first computing device, wherein an attempt to access a computing resource on the computing device is made by the application; determining that the application is not configured to access the computing resource, in response to the attempt; displaying, in a user interface of the computing device, a permission request to allow the application to access the computing resource; and transmitting data from the computing device to the application server, the data notifying the application server that the attempt to access the computing resource was made by the application when the application was not configured to access the computing resource, and the data being usable by the application server to determine whether a corresponding computing resource on at least one different computing device is likely to be accessed when the application is executed on the at least one different computing device. | 12-13-2012 |
20120317638 | METHOD AND DEVICES FOR MANAGING PERMISSION REQUESTS TO ALLOW ACCESS TO A COMPUTING RESOURCE - Methods and devices for managing permission requests to allow access to a computing resource are disclosed herein. In one example embodiment, the method comprises: for an application to be installed on the computing device, determining an application category that the application is associated with, and retrieving a common permissions list for the application category, wherein the common permissions list identifies at least one computing resource that applications associated with the application category are configured to access; during an installation of the application on the computing device, determining one or more computing resources on the computing device that the application is configured to access when the application is executed on the computing device; determining which computing resources, of the one or more computing resources on the computing device that the application is configured to access when the application is executed on the computing device, are not identified in the common permissions list; and for each computing resource that the application is configured to access when the application is executed on the computing device that is not identified in the common permissions list, providing, in a user interface of the computing device, a permission request to allow the application to access the computing resource. | 12-13-2012 |
20130167252 | AUTONOMOUS ACCESS CONTROL - Methods and devices for controlling actions associated with a plurality of resources available on a computing device are described herein. One example embodiment comprises: presenting a request for a usage preference that indicates a manner in which the computing device is preferred to be used; receiving input indicating the usage preference; determining an action for a resource that is to be controlled in order to satisfy the usage preference, wherein the determining is performed according to a heuristic that maps the usage preference to the action for the at least one resource; and controlling whether or not to allow the action to be performed; wherein the request for the usage preference or the input identifying the usage preference does not explicitly indicate that the determined action is to be controlled in order to satisfy the usage preference. | 06-27-2013 |
20140109085 | METHODS AND DEVICES FOR CONTROLLING ACCESS TO COMPUTING RESOURCES - Methods and devices for controlling access to resources are disclosed herein. In one example embodiment, the method comprises: executing an application at a first computing device, wherein an attempt to access a computing resource on the computing device is made by the application; determining that the application is not configured to access the computing resource, in response to the attempt; displaying, in a user interface of the computing device, a permission request to allow the application to access the computing resource; and transmitting data from the computing device to the application server, the data notifying the application server that the attempt to access the computing resource was made by the application when the application was not configured to access the computing resource, and the data being usable by the application server to determine whether a corresponding computing resource on at least one different computing device is likely to be accessed when the application is executed on the at least one different computing device. | 04-17-2014 |
20140115693 | MANAGING PERMISSION SETTINGS APPLIED TO APPLICATIONS - Some aspects of what is described here relate to managing permission settings applied to applications on a mobile device. Multiple management policies that apply to an application associated with a perimeter on a device are identified. A priority ranking for each management policy is determined for the application based on the perimeter with which the application is associated. A permission setting based on the priority rankings is applied to the application. | 04-24-2014 |
20140122633 | Method and Apparatus Pertaining to Sharing Information Via a Private Data Area - Information is shared between processing entities that each have a corresponding private data area by placing data corresponding to information for a first one of the private data areas for a first one of the processing entities directly into a second one of the private data areas for a second one of the processing entities without placing the data in an intervening shared data area and without directly invoking a system administrator-like entity. In addition, these private data areas can be pre-populated with a plurality of directories that each have a one-to-one correspondence to a particular predetermined information recipient and then providing a link to a given one of the recipients as corresponds to a given one of the directories when information is placed in that directory to provide the corresponding predetermined information recipient with at least read access to the information. | 05-01-2014 |
Patent application number | Description | Published |
20150036909 | METHOD, APPARATUS AND SYSTEM FOR LOCALIZING A SPINE - A method and a corresponding apparatus and system localizes a spine in an image, in particular a computed tomography (CT) image, of a human or animal body, allowing for a reduced need for computational power and/or memory on the one hand and assuring a reliable localization of the spine on the other hand. The method includes a) acquiring a plurality of slice images of at least a part of a human or animal body, and b) automatically selecting slice images and/or parts of slice images from the acquired plurality of slice images by considering at least one parameter (μ | 02-05-2015 |
20150173701 | METHOD, APPARATUS AND SYSTEM FOR AUTOMATED SPINE LABELING - A method, an apparatus, and a system label one or more parts of a spine in an image, in particular a computed tomography (CT) image, of a human or animal body, and in order to achieve a reliable spine labeling and a high throughput of images, match a model of a spine segment with segments of the spine in the image by starting matching the model of a spine segment with an initial segment of the spine in the image, wherein the initial segment of the spine in the image is located at an initial position along the spine in the image, and continue to match the model of a spine segment with one or more further segments of the spine in the image, wherein the further segments of the spine in the image are located at positions farther along the spine in the image. | 06-25-2015 |
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20090318668 | Water-Soluble CC-1065 Analogs and Their Conjugates - This invention relates to novel analogs of the DNA-binding alkylating agent CC-1065 and to their conjugates. Furthermore this invention concerns intermediates for the preparation of said agents and their conjugates. The conjugates are designed to release their (multiple) payload after one or more activation steps and/or at a rate and time span controlled by the conjugate in order to selectively deliver and/or controllably release one or more of said DNA alkylating agents. The agents, conjugates, and intermediates can be used to treat an illness that is characterized by undesired (cell) proliferation. As an example, the agents and the conjugates of this invention may be used to treat a tumor. | 12-24-2009 |
20110163258 | MIXTURES OF ALKALI METAL POLYSULFIDES - The present invention relates to mixtures of alkali metal polysulfides and to mixtures of alkali metal polysulfides and alkali metal thiocyanates, to processes for preparation thereof, to the use thereof as heat transfer or heat storage fluids, and to heat transfer or heat storage fluids which comprise the mixtures of alkali metal polysulfides or the mixtures of alkali metal polysulfides and alkali metal thiocyanates. | 07-07-2011 |
20110247606 | FLUID SULFUR WITH IMPROVED VISCOSITY AS A HEAT CARRIER - Mixture comprising elemental sulfur and an additive comprising anions. | 10-13-2011 |
20110271953 | DEVICE AND METHOD FOR STORING HEAT - The invention relates to a device for storing heat, comprising a heat storage medium which absorbs heat in order to store heat and releases heat in order to use the stored heat, and a container for holding the heat storage medium, the container being closed by a gastight cover, and the device comprising volume compensation means in order to compensate for a volume increase of the heat storage medium ( | 11-10-2011 |
20120217681 | PROCESS FOR PRODUCING NANOFIBRES - The present invention relates to a process for producing metal oxide nanofibers using a sol-gel precursor. The nanofibers produced by the process according to the invention are notable for an increased metal oxide content compared to the prior art. | 08-30-2012 |
Patent application number | Description | Published |
20100288983 | PROCESS FOR POLING A FERROELECTRIC MATERIAL DOPED WITH A METAL - A process for poling a ferroelectric material doped with a metal, which process comprises: (i) defining an electrode pattern on a −z face of a crystal of the ferroelectric material doped with the metal; (ii) providing an electrode material; (iii) poling at a temperature of not more than 45° C.; and (iv) poling by a two-stage voltage-controlled application of electric field based on a first poling stage of domain nucleation and a second poling stage of domain spreading. | 11-18-2010 |
20110032597 | ELECTRIC FIELD POLING OF FERROELECTRIC MATERIALS - A method of inducing a periodic variation of nonlinearity value in a sample of ferroelectric material comprises arranging a pair of electrodes on opposite faces of the sample, one electrode defining a desired pattern of nonlinearity variation, applying a pre-bias voltage across the sample for a predetermined time using the electrodes, the pre-bias voltage being less than the coercive field of the ferroelectric material; and after the predetermined time, applying a current-controlled poling voltage across the sample using the electrodes, to produce domain inversion in the sample according to the desired pattern of nonlinearity variation. The pre-bias voltage may be 75% of the coercive field or more, and applied for a pre-determined time between 1 and 100 seconds. | 02-10-2011 |
20110063719 | COMPENSATION FOR THE GOUY PHASE SHIFT IN QUASI-PHASE MATCHING - A sample of nonlinear optical material for use in a nonlinear optical device contains a grating comprising alternating regions of inverted and non-inverted nonlinear coefficient of the material, with the regions separated by boundaries positioned such that the grating can provide quasi-phase matching of a selected nonlinear optical interaction, and compensate for phase mismatch arising from the Gouy phase shift of one or more focused optical beams involved in the interaction. The boundary positions can be calculated for second harmonic generation or optical parametric generation and oscillation. | 03-17-2011 |
Patent application number | Description | Published |
20130085165 | Buccal Drug Delivery - A lozenge is provided that has stable pH and stable levels of active ingredient over time. It comprises a combination of (i) at least one gum and (ii) at least one non-crystallising sugar or non-crystallising sugar alcohol in a matrix designed for controlled buccal delivery of a drug. The lozenge also contains water and optional components selected from flavourings, taste masking agents, colourings, buffer components, pH adjusting agents, excipients, stabilizers and sweeteners. Methods of preparing the lozenge are also provided. | 04-04-2013 |
20130087946 | Buccal Drug Delivery - A lozenge is provided that has stable pH and stable levels of active ingredient over time. It comprises a combination of (i) at least one gum and (ii) at least one non-crystallising sugar or non-crystallising sugar alcohol in a matrix designed for controlled buccal delivery of a drug. The lozenge also contains water and optional components selected from flavourings, taste masking agents, colourings, buffer components, pH adjusting agents, excipients, stabilizers and sweeteners. Methods of preparing the lozenge are also provided. | 04-11-2013 |
20140054826 | Buccal Drug Delivery - A lozenge is provided that has stable pH and stable levels of active ingredient over time. It comprises a combination of (i) at least one gum and (ii) at least one non-crystallising sugar or non-crystallising sugar alcohol in a matrix designed for controlled buccal delivery of a drug. The lozenge also contains water and optional components selected from flavourings, taste masking agents, colourings, buffer components, pH adjusting agents, excipients, stabilizers and sweeteners. Methods of preparing the lozenge are also provided. | 02-27-2014 |
Patent application number | Description | Published |
20120322722 | Pyruvamide Compounds as Inhibitors of Dust Mite Group 1 Peptidase Allergen and Their Use - The present invention pertains generally to the field of therapeutic compounds and more specifically to certain pyruvamide compounds of the formula (X) (for convenience, collectively referred to herein as “PVA compounds”), which, inter alia, inhibit a dust mite Group 1 peptidase allergen (e.g., Der p 1, Der f 1, Eur m 1). The present invention also pertains to pharmaceutical compositions comprising such compounds, and the use of such compounds and compositions, both in vitro and in vivo, to inhibit a dust mite Group 1 peptidase allergen, and in the treatment of diseases and disorders that are mediated by a dust mite Group 1 peptidase allergen; that are ameliorated by the inhibition of a dust mite Group 1 peptidase allergen; asthma; rhinitis; allergic conjunctivitis; atopic dermatitis; an allergic condition which is triggered by dust mites; an allergic condition which is triggered by a dust mite Group 1 peptidase allergen; and canine atopy. | 12-20-2012 |
20130217617 | Pyruvamide Compounds as Inhibitors of Dust Mite Group 1 Peptidase Allergen and Their Use - The present invention pertains generally to the field of therapeutic compounds, and more specifically to certain pyruvamide compounds of the following formula (for convenience, collectively referred to herein as “PVA compounds”), which, inter alia, inhibit a dust mite Group 1 peptidase allergen (e.g., Der p 1, Der f 1, Eur m 1). The present invention also pertains to pharmaceutical compositions comprising such compounds, and the use of such compounds and compositions, both in vitro and in vivo, to inhibit a dust mite Group 1 peptidase allergen, and in the treatment of diseases and disorders that are mediated by a dust mite Group 1 peptidase allergen; that are ameliorated by the inhibition of a dust mite Group 1 peptidase allergen; asthma; rhinitis; allergic conjunctivitis; atopic dermatitis; an allergic condition which is triggered by dust mites; an allergic condition which is triggered by a dust mite Group 1 peptidase allergen; and canine atopy. | 08-22-2013 |