Patent application number | Description | Published |
20080308904 | P-DOPED REGION WITH IMPROVED ABRUPTNESS - A method of manufacturing a semiconductor device. The method comprises providing C atoms in a semiconductor substrate. The method also comprises implanting In atoms and p-type dopants into a predefined region of the substrate that is configured to have the carbon atoms. The method further comprises thermally annealing the semiconductor substrate to transform the predefined region into an activated doped region. | 12-18-2008 |
20090004805 | Damage Implantation of a Cap Layer - A method for fabricating a transistor on a semiconductor wafer includes providing a partial transistor containing a gate stack, extension regions, and source/drain sidewalls. The method also includes performing a source/drain implant of the semiconductor wafer, forming a cap layer over the semiconductor wafer, and performing a source/drain anneal. In addition, the method includes performing a damage implant of the cap layer and removing the cap layer over the semiconductor wafer. | 01-01-2009 |
20090079008 | CMOS Fabrication Process - Ultra high temperature (UHT) anneals above 1200 C for less than 100 milliseconds for PMOS transistors reduce end of range dislocations, but are incompatible with stress memorization technique (SMT) layers used to enhance NMOS on-state current. This invention reverses the conventional order of forming the NMOS first by forming PSD using carbon co-implants and UHT annealing them before implanting the NSD and depositing the SMT layer. End of range dislocation densities in the PSD space charge region below 100 cm | 03-26-2009 |
20090166675 | STRAIN ENGINEERING IN SEMICONDUCTOR COMPONENTS - This disclosure relates to strain engineering to improve the performance of semiconductor components that include a strained region of the semiconductor substrate. The disclosure involves the amorphization of the target region and the recrystallization of the atomic lattice whilst imposing a strain on the region. The region so formed will form a strained lattice, wherein the strain is uniformly distributed throughout the region, and which retains the intrinsic strain even if the source of the mechanical strain is removed. The disclosure includes methods for forming semiconductor substrates having strained regions (such as semiconductor components having a strained channel region) and semiconductor components formed thereby, as well as variations having various properties and advantages. | 07-02-2009 |
20090170277 | IMPLANT DAMAGE OF LAYER FOR EASY REMOVAL AND REDUCED SILICON RECESS - A method for semiconductor processing is provided, wherein a removal of one or more layers is aided by structurally weakening the one or more layers via ion implantation. A semiconductor substrate is provided having one or more primary layers formed thereon, and a secondary layer is formed over the one or more primary layers. One or more ion species are implanted into the secondary layer, therein structurally weakening the secondary layer, and a patterned photoresist layer is formed over the secondary layer. Respective portions of the secondary layer and the one or more primary layers that are not covered by the patterned photoresist layer are removed, and the patterned photoresist layer is further removed. At least another portion of the secondary layer is removed, wherein the structural weakening of the secondary layer increases a removal rate of the at least another portion of the secondary layer. | 07-02-2009 |
20090286375 | METHOD OF FORMING SIDEWALL SPACERS TO REDUCE FORMATION OF RECESSES IN THE SUBSTRATE AND INCREASE DOPANT RETENTION IN A SEMICONDUCTOR DEVICE - A method of forming sidewall spacers for a gate in a semiconductor device includes re-oxidizing/annealing silicon of the substrate and silicon of the gate after formation of the gate. The substrate is re-oxidized by performing an anneal in an inert atmosphere or ambient. The substrate may be re-oxidized/annealing after depositing an oxide layer covering the substrate and gate. Additionally, the substrate may be re-oxidized/annealing after forming the gate without depositing the oxide layer. | 11-19-2009 |
20100133624 | CMOS Fabrication Process - Ultra high temperature (UHT) anneals above 1200 C for less than 100 milliseconds for PMOS transistors reduce end of range dislocations, but are incompatible with stress memorization technique (SMT) layers used to enhance NMOS on-state current. This invention reverses the conventional order of forming the NMOS first by forming PSD using carbon co-implants and UHT annealing them before implanting the NSD and depositing the SMT layer. End of range dislocation densities in the PSD space charge region below 100 cm | 06-03-2010 |
20100210081 | STRESS MEMORIZATION DIELECTRIC OPTIMIZED FOR NMOS AND PMOS - A method for forming a tensile SiN stress layer for stress memorization enhancement of NMOS transistors with a high Si—H/N—H bond ratio that does not degrade PMOS transistors. | 08-19-2010 |
20100252887 | Damage Implantation of a Cap Layer - A method for fabricating a transistor on a semiconductor wafer includes providing a partial transistor containing a gate stack, extension regions, and source/drain sidewalls. The method also includes performing a source/drain implant of the semiconductor wafer, forming a cap layer over the semiconductor wafer, and performing a source/drain anneal. In addition, the method includes performing a damage implant of the cap layer and removing the cap layer over the semiconductor wafer. | 10-07-2010 |
20100270622 | Semiconductor Device Having a Strain Inducing Sidewall Spacer and a Method of Manufacture Therefor - The present invention provides a method for manufacturing a semiconductor device as well as a semiconductor device. The method, among other steps, may include forming a gate structure over a substrate, and forming a strain inducing sidewall spacer proximate a sidewall of the gate structure, the strain inducing sidewall configured to introduce strain in a channel region below the gate structure. | 10-28-2010 |
20110147850 | CARBON AND NITROGEN DOPING FOR SELECTED PMOS TRANSISTORS ON AN INTEGRATED CIRCUIT - A method of forming an integrated circuit (IC) including a core and a non-core PMOS transistor includes forming a non-core gate structure including a gate electrode on a gate dielectric and a core gate structure including a gate electrode on a gate dielectric. The gate dielectric for the non-core gate structure is at least 2 Å of equivalent oxide thickness (EOT) thicker as compared to the gate dielectric for the core gate structure. P-type lightly doped drain (PLDD) implantation including boron establishes source/drain extension regions in the substrate. The PLDD implantation includes selective co-implanting of carbon and nitrogen into the source/drain extension region of the non-core gate structure. Source and drain implantation forms source/drain regions for the non-core and core gate structure, wherein the source/drain regions are distanced from the non-core and core gate structures further than their source/drain extension regions. Source/drain annealing is performed after source and drain implantation. | 06-23-2011 |
20110147854 | INDIUM, CARBON AND HALOGEN DOPING FOR PMOS TRANSISTORS - A method of forming an integrated circuit (IC) having at least one PMOS transistor includes performing PLDD implantation including co-implanting indium, carbon and a halogen, and a boron specie to establish source/drain extension regions in a substrate having a semiconductor surface on either side of a gate structure including a gate electrode on a gate dielectric formed on the semiconductor surface. Source and drain implantation is performed to establish source/drain regions, wherein the source/drain regions are distanced from the gate structure further than the source/drain extension regions. Source/drain annealing is performed after the source and drain implantation. The co-implants can be selectively provided to only core PMOS transistors, and the method can include a ultra high temperature anneal such as a laser anneal after the PLDD implantation. | 06-23-2011 |
20130146979 | Compensated Well ESD Diodes With Reduced Capacitance - An integrated circuit with a shallow trench isolated, low capacitance, ESD protection diode. An integrated circuit with a gate space isolated, low capacitance, ESD protection diode. An integrated circuit with a gate space isolated, low capacitance, ESD protection diode in parallel with a shallow trench isolated, low capacitance, ESD protection diode. | 06-13-2013 |
20130149829 | DUAL NSD IMPLANTS FOR REDUCED RSD IN AN NMOS TRANSISTOR - In an embodiment of the invention, a method of forming an NMOS (n-type metal-oxide semiconductor) transistor is disclosed. A dual mask pattern is used to ion-implant source/drain regions of the NMOS transistor. The first mask allows first doses of As (arsenic), P (phosphorous) and N (Nitrogen) to be ion-implanted. After these doses are ion-implanted, a high temperature (900-1050 C) spike anneal is performed to activate the formed source/drains. A second mask allows a second dose of phosphorus to be implanted in the source/drain regions. The second dose of the phosphorus is typically higher than the first dose of phosphorus. The second dose of phosphorus lowers the Rsd (resistance of the source and drain regions) and dopes n-type poly-silicon blocks. | 06-13-2013 |
20130149849 | COMBINING ZTCR RESISTOR WITH LASER ANNEAL FOR HIGH PERFORMANCE PMOS TRANSISTOR - An integrated circuit containing a PMOS transistor may be formed by implanting boron in the p-channel source drain (PSD) implant step at a dose consistent with effective channel length control, annealing the PSD implant, and subsequently concurrently implanting boron into a polysilicon resistor with a zero temperature coefficient of resistance using an implant mask which also exposes the PMOS transistor, followed by a millisecond anneal. | 06-13-2013 |
20130187227 | FLATBAND SHIFT FOR IMPROVED TRANSISTOR PERFORMANCE - An integrated circuit includes MOS and DEMOS transistors with at least one of indium, carbon, nitrogen, and a halogen dopant raising the threshold voltage of a portion of the DEMOS transistor gate overlying the DEMOS transistor channel. An integrated circuit includes MOS and LDMOS transistors with at least one of indium, carbon, nitrogen, and a halogen dopant raising the threshold voltage of a portion of the LDMOS transistor gate overlying the DEMOS transistor channel. A method of forming an integrated circuit with MOS and DEMOS transistors with at least one of indium, carbon, nitrogen, and a halogen dopant raising the threshold voltage of a portion of the DEMOS transistor gate overlying the DEMOS transistor channel. A method of forming an integrated circuit with MOS and LDMOS transistors with at least one of indium, carbon, nitrogen, and a halogen dopant raising the threshold voltage of a portion of the LDMOS transistor gate overlying the DEMOS transistor channel. | 07-25-2013 |
20140017869 | INDIUM, CARBON AND HALOGEN DOPING FOR PMOS TRANSISTORS - A method of forming an integrated circuit (IC) having at least one PMOS transistor includes performing PLDD implantation including co-implanting indium, carbon and a halogen, and a boron specie to establish source/drain extension regions in a substrate having a semiconductor surface on either side of a gate structure including a gate electrode on a gate dielectric formed on the semiconductor surface. Source and drain implantation is performed to establish source/drain regions, wherein the source/drain regions are distanced from the gate structure further than the source/drain extension regions. Source/drain annealing is performed after the source and drain implantation. The co-implants can be selectively provided to only core PMOS transistors, and the method can include a ultra high temperature anneal such as a laser anneal after the PLDD implantation. | 01-16-2014 |
20140021545 | POCKET COUNTERDOPING FOR GATE-EDGE DIODE LEAKAGE REDUCTION - A method of fabricating a Metal-Oxide Semiconductor (MOS) transistor includes providing a substrate having a substrate surface doped with a second dopant type and a gate stack over the substrate surface, and a masking pattern on the substrate surface which exposes a portion of the substrate surface for ion implantation. A first pocket implantation uses the second dopant type with the masking pattern on the substrate surface. At least one retrograde gate edge diode leakage (GDL) reduction pocket implantation uses the first dopant type with the masking pattern on the substrate surface. The first pocket implant and retrograde GDL reduction pocket implant are annealed. After annealing, the first pocket implant provides first pocket regions and the retrograde GDL reduction pocket implant provides an overlap with the first pocket regions to form a first counterdoped pocket portion within the first pocket regions. | 01-23-2014 |
20140120675 | CARBON AND NITROGEN DOPING FOR SELECTED PMOS TRANSISTORS ON AN INTEGRATED CIRCUIT - A method of forming an integrated circuit (IC) including a core and a non-core PMOS transistor includes forming a non-core gate structure including a gate electrode on a gate dielectric and a core gate structure including a gate electrode on a gate dielectric. The gate dielectric for the non-core gate structure is at least 2 Å of equivalent oxide thickness (EOT) thicker as compared to the gate dielectric for the core gate structure. P-type lightly doped drain (PLDD) implantation including boron establishes source/drain extension regions in the substrate. The PLDD implantation includes selective co-implanting of carbon and nitrogen into the source/drain extension region of the non-core gate structure. Source and drain implantation forms source/drain regions for the non-core and core gate structure, wherein the source/drain regions are distanced from the non-core and core gate structures further than their source/drain extension regions. Source/drain annealing is performed after source and drain implantation. | 05-01-2014 |
20140167182 | ZTCR POLY RESISTOR IN REPLACEMENT GATE FLOW - An integrated circuit having a replacement gate MOS transistor and a polysilicon resistor may be formed by removing a portion at the top surface of the polysilicon layer in the resistor area. A subsequently formed gate etch hard mask includes a MOS hard mask segment over a MOS sacrificial gate and a resistor hard mask segment over a resistor body. The resistor body is thinner than the MOS sacrificial gate. During the gate replacement process sequence, the MOS hard mask segment is removed, exposing the MOS sacrificial gate while at least a portion of the resistor hard mask segment remains over the resistor body. The MOS sacrificial gate is replaced by a replacement gate while the resistor body is not replaced. | 06-19-2014 |
20140264623 | TRANSISTOR WITH DEEP NWELL IMPLANTED THROUGH THE GATE - A method of fabricating a CMOS integrated circuit (IC) includes implanting a first n-type dopant at a first masking level that exposes a p-region of a substrate surface having a first gate stack thereon to form NLDD regions for forming n-source/drain extension regions for at least a portion of a plurality of n-channel MOS (NMOS) transistors on the IC. A p-type dopant is implanted at a second masking level that exposes an n-region in the substrate surface having a second gate stack thereon to form PLDD regions for at least a portion of a plurality of p-channel MOS (PMOS) transistors on the IC. A second n-type dopant is retrograde implanted including through the first gate stack to form a deep nwell (DNwell) for the portion of NMOS transistors. A depth of the DNwell is shallower below the first gate stack as compared to under the NLDD regions. | 09-18-2014 |