Lill
Anton Lill, Lauffen DE
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20090210074 | INTERFACE DEVICE - The invention relates to an interface device ( | 08-20-2009 |
20130142011 | METHOD FOR OPERATING AN ULTRASONIC SENSOR OF A DRIVER ASSISTANCE SYSTEM IN A MOTOR VEHICLE, DRIVER ASSISTANCE SYSTEM, AND MOTOR VEHICLE - The invention relates to a method for operating at least one ultrasonic sensor ( | 06-06-2013 |
Barry Lill, Cambridgeshire GB
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20160096652 | CONTAINER | 04-07-2016 |
20160096669 | Box | 04-07-2016 |
Clifford Lill, Mount Pleasant, SC US
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20130011191 | PRESS-FIT RESTRICTOR PLATE - Restrictor plates and systems for a catch basin hood are provided. The hood can include a front external surface, a front internal surface and an inlet extending therebetween. The hood inlet can defined by a plurality of surfaces, such as a top surface and a bottom surface oriented so that a height-wise cross-section of a flow channel defined by the hood inlet can be substantially trapezoidal, narrowing from an upstream side towards a downstream side. The restrictor plate can include a curbed inlet defined by a plurality of walls, including a top wall and a bottom wall oriented so that a height-wise cross-section of a curbed flow channel defined by the curbed inlet is substantially trapezoidal, whereby the top and bottom walls of the curbed inlet are disposed against respective top and bottom surfaces of the hood inlet without contacting the hood front external surface when secured thereto. | 01-10-2013 |
20130011192 | ADJUSTABLE RECESSED RESTRICTOR PLATE ASSEMBLY - Embodiments of a restrictor plate assembly are disclosed that are adapted for being installed into a curb box hood for restricting particulate flow through an inlet mouth of the hood and into a cavity of the hood. An exemplary assembly can include a lengthwise proximate member and a lengthwise distal member which slide lengthwise against each other for increasing a length of the restrictor plate assembly, so that the proximate member can engage a widthwise proximate internal side wall of the hood, and the distal member engages a widthwise distal internal side wall of the hood; thereby securing the restrictor plate assembly within the hood. | 01-10-2013 |
Clifford F. Lill, Hawthorne, NJ US
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20110005045 | CATCH BASIN CLAMP SYSTEM - A clamp includes a base section, from which a pair of sidewalls and prongs extend, where the prongs are designed to grip gussets within the curb inlet and maintain proper alignment with designated portions of the restrictor plate despite manufacturing variations in gussets positioning within the curb inlet. The clamp is capable of securely positioning a floatable restrictor plate within or flush with an opening of the curb inlet so as to prevent floatables from entering storm sewer systems through the curb inlet. | 01-13-2011 |
20110100886 | RESTRICTOR PLATE WITH SECURING SYSTEM - A restrictor plate assembly is disclosed. The assembly is adapted for being positioned within a catch basin throat so that the throat extends rearward of the assembly. The assembly has a longitudinally extending restrictor plate and a restrictor plate securing system, which includes a first clamp arm, pivotally positioned against the restrictor plate, for engaging a first throat surface of the catch basin; a second clamp arm pivotally positioned against the restrictor plate, for engaging a second throat surface of the catch basin, the second throat surface opposing the first throat surface; and an urging member which simultaneously urges the first and second clamp arms against the first and second throat surfaces, respectively. | 05-05-2011 |
20110284439 | RESTRICTOR PLATE WITH SECURING SYSTEM - A restrictor plate assembly is disclosed. The assembly is adapted for being positioned within a catch basin throat so that the throat extends rearward of the assembly. The assembly has a longitudinally extending restrictor plate and a restrictor plate securing system, which includes a first clamp arm, pivotally positioned against the restrictor plate, for engaging a first throat surface of the catch basin; a second clamp arm pivotally positioned against the restrictor plate, for engaging a second throat surface of the catch basin, the second throat surface opposing the first throat surface; and an urging member which simultaneously urges the first and second clamp arms against the first and second throat surfaces, respectively. | 11-24-2011 |
20120294676 | RESTRICTOR PLATE WITH SECURING SYSTEM - A restrictor plate assembly is disclosed. The assembly is adapted for being positioned within a catch basin throat so that the throat extends rearward of the assembly. The assembly has a longitudinally extending restrictor plate and a restrictor plate securing system, which includes a first clamp arm, pivotally positioned against the restrictor plate, for engaging a first throat surface of the catch basin; a second clamp arm pivotally positioned against the restrictor plate, for engaging a second throat surface of the catch basin, the second throat surface opposing the first throat surface; and an urging member which simultaneously urges the first and second clamp arms against the first and second throat surfaces, respectively. | 11-22-2012 |
Clifford F. Lill, Howthorne, NJ US
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20120068135 | GRATE WALL - A barrier for preventing wildlife from entering a roadway is disclosed. The barrier includes a plate having a bottom edge adapted for piercing a ground surface, and at least one opening in the plate for connecting a corresponding at least one post to the ground so as to provide additional vertical support for the plate. | 03-22-2012 |
Clifford F. Lill, Harrison, NJ US
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20120292239 | RECESSED RESTRICTOR PLATE - A restrictor plate assembly | 11-22-2012 |
Clifford F. Lill, Mount Pleasant, SC US
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20130087089 | Dock Protector For Use With A Floating Dock - Aspects of the present disclosure are directed to a dock protector apparatus. The apparatus includes an elongated pipe and a flange. A floating dock includes at least one floating dock section coupled to mooring pipes secured to a river or lake bed. The mooring pipes are slidably coupled and to the dock section by pipe sleeve assemblies that enable the dock section to slide vertically along the mooring posts. A dock protector apparatus is inserted within an interior cavity of each mooring pipe. Under tidal surge conditions, the decking may reach a vertical position above a top end of the mooring posts. In order to present the deck section from becoming decoupled from the mooring posts, the dock protector apparatus extends upwardly and remains coupled to both the mooring posts and the dock section, thereby maintaining an essentially laterally-rigid mooring between the dock section and the mooring post. | 04-11-2013 |
David Lill, Spokane, WA US
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20150067670 | SYNCHRONIZING AND CONTROLLING SOFTWARE DOWLOANDS, SUCH AS FOR UTILITY METER-READING DATA COLLECTION AND PROCESSING CRSOSS-REFERENCE TO RELATED APPLICATIONS - Method and apparatus to manage software updates of networked data collection devices are disclosed. Example disclosed methods involve in response to receiving a software update, determining if the data collection device is to receive the software update and, if the data collection device is to receive the software update, setting, in memory, a state indicator for the data collection device to an update state. Disclosed methods also include in response to receiving a configuration request from the data collection device when the corresponding state indicator is set to the update state, sending an update command to the data collection device, the update command to include a bill of materials corresponding to the software update and a time for the software update to take effect. | 03-05-2015 |
F.h. Erich Lill, Schwaig DE
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20160107250 | TOOL FOR MACHINING WORKPIECES | 04-21-2016 |
James P. Lill, Rochester, NY US
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20120152610 | Ventilated Heat Shield - Ventilated heat shields and methods are disclosed. The ventilated heat shield can use varying patterns of insulating material with ventilation regions arranged in one or more two-dimensional (2D) and/or three-dimensional (3D) patterns to provide thermal insulation and air channels that allow for dissipation of heat and the inflow of cooling air. The ventilated heat shield can be used in applications where two surfaces are required to be in very close proximity or contact with each other to reduce the transfer of heat from one surface to the other. An example application for the ventilated heat shield is in a vehicle braking system. | 06-21-2012 |
20120249391 | COMPACT DIPOLE ADAPTER FOR WHIP ANTENNA - A portable whip antenna ( | 10-04-2012 |
20140098718 | WIRELESS COMMUNICATIONS SYSTEM INCLUDING SINGLE CHANNEL RETRANSMISSION AND RELATED METHODS - A wireless communications system may include wireless communications devices configured to communicate with one another on a given channel via a time division based communications protocol. A communication initiation wireless communications device configured to transmit data in an initiator time slot of the given channel. A repeater wireless communications device configured to receive the transmitted data from the communications initiation wireless communications device in the initiator time slot and retransmit the data in a repeater time slot of the given channel. A receiver wireless communications device configured to determine a respective quality metric for data from each of the initiator time slot and the repeater time slot, and use data from the initiator time slot or the repeater time slot based upon the respective quality metrics thereof. | 04-10-2014 |
Jeffrey S. Lill, Sammamish, WA US
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20090037558 | DIGITAL CONTENT MANAGEMENT SYSTEM AND METHODS - Systems and methods for locating network sites using a target digital object in a networked environment are presented. In operation, a request to locate network sites using the target digital object is received. In response to the request, identification information corresponding to the target digital object is obtained. Content of a plurality of network sites on a network is also obtained. For each network site of the obtained plurality of network sites, a determination is made as to whether a digital object on the network site matches the target digital object according to the identification information corresponding to the target digital object. A report indicating the network sites that include a digital object that matches the target digital object is then generated and returned in response to the request. | 02-05-2009 |
20120272325 | DIGITAL CONTENT MANAGEMENT SYSTEM AND METHODS - Systems and methods for locating network sites using a target digital object in a networked environment are presented. In operation, a request to locate network sites using the target digital object is received. In response to the request, identification information corresponding to the target digital object is obtained. Content of a plurality of network sites on a network is also obtained. For each network site of the obtained plurality of network sites, a determination is made as to whether a digital object on the network site matches the target digital object according to the identification information corresponding to the target digital object. A report indicating the network sites that include a digital object that matches the target digital object is then generated and returned in response to the request. | 10-25-2012 |
Jennie Lill, Pacifica, CA US
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20160069895 | IMMUNOGENIC MUTANT PEPTIDE SCREENING PLATFORM - The present disclosure provides methods of identifying a disease-specific immunogenic peptide through a series of selection steps. Immunogenic epitopes identified by methods of the present disclosure are applicable for use in peptide-based immunotherapy, preferably cancer therapy. Furthermore, the methods of the present disclosure may be performed in a high-throughput manner and serve as a means of personalized vaccine development and therapy. Also provided are compositions of immunogenic peptides as well as methods of treatment comprising said compositions. | 03-10-2016 |
Joerg Lill, Aarau CH
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20130345159 | PURIFIED CARDIOGENIN ISOMER AND RELATED METHODS - A cardiogenin major isomer is obtained from a methanol extract of | 12-26-2013 |
Joseph Lill, Rochester, NH US
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20160047013 | PROCESS AND SYSTEM FOR DE-COATING OF ALUMINUM SCRAP CONTAMINATED WITH ORGANIC COATINGS - A method for removal of organic coatings from loose aluminum scrap includes passing the scrap through a Multiple Hearth Furnace operatively maintained in the range of 500° F.-1600° F. Each hearth in the furnace is independently temperature controlled and held under a slightly negative pressure environment. The hearths heat the scrap such that pyrolysis of the coatings occurs within the hearth. Organic compounds liberated during this process are partially or entirely consumed within the furnace combustion products are exhausted through the top. Hydrogen fluoride contained in the products of combustion is incinerated prior to final discharge from the system and routing to additional environmental equipment for particle removal. Scrap is continuously fed into the top of the furnace, and agitated and mechanically moved within each hearth toward an output of another hearth therebelow. The agitation and movement of the scrap exposes the scrap to the hearth atmosphere to assist in processing of the scrap. The discharge of the scrap in the final hearth supplies hot (250° F.-900° F.), clean material for the next step in the process for secondary aluminum recycling. | 02-18-2016 |
Joseph E. Lill, Waynesville, OH US
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20110304667 | COLOR CONSISTENCY FOR A MULTI-PRINTHEAD SYSTEM - A printing system using multiple printheads maintains color consistency between the printheads by printing a first color patch ( | 12-15-2011 |
20110304668 | COLOR CONSISTENCY FOR A MULTI-PRINTHEAD SYSTEM - A printing system using multiple printheads maintains color consistency between the printheads by printing a first color patch ( | 12-15-2011 |
Joseph Edward Lill, Waynesville, OH US
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20140063098 | ALIGNING PRINT DATA USING MATCHING PIXEL PATTERNS - A method for aligning multi-channel digital image data for a digital printer having a plurality of printheads is described. A test pattern including test pattern indicia printed using individual printheads is scanned and analyzed to detect locations of the printed test pattern indicia. One of the printheads is designated to be a reference printhead, and one or more of the other printheads are designated to be non-reference printheads. Spatial adjustment parameters are determined for each of the non-reference printheads responsive to the detected test pattern indicia locations. Digital image data for the non-reference printheads is modified by designating an input pixel neighborhood within which an image pixel should be inserted or deleted, comparing the image pixels in the input pixel neighborhood to a plurality of predefined pixel patterns to identify a matching pixel pattern; and determining a modified pixel neighborhood responsive to the matching pixel pattern. | 03-06-2014 |
20140063099 | ALIGNING PRINT DATA FOR OVERLAPPING PRINTHEADS - A method for aligning multi-channel digital image data for a digital printer having an array of printheads for each of a plurality of channels is described. A test pattern including test pattern indicia printed using individual printheads is scanned and analyzed to detect locations of the printed test pattern indicia. For each array position, one of the printheads is designated to be a reference printhead, and one or more of the other printheads are designated to be non-reference printheads. Spatial adjustment parameters are determined for each of the non-reference printheads responsive to the detected test pattern indicia locations. Digital image data to be printed with the non-reference printheads is modified in accordance with the determined spatial adjustment parameters. | 03-06-2014 |
20140063513 | MODIFYING PRINT DATA USING MATCHING PIXEL PATTERNS - A method for aligning multi-channel digital image data for a digital printer having a plurality at least one printhead is described. One or more spatial adjustment parameters are determined for each of the printheads. The spatial adjustment parameters can be determined by comparing locations of test pattern indicia in a printed test pattern to predefined reference indicia locations. Digital image data for the non-reference printheads is modified by designating an input pixel neighborhood within which an image pixel should be inserted or deleted, comparing the image pixels in the input pixel neighborhood to a plurality of predefined pixel patterns to identify a matching pixel pattern; and determining a modified pixel neighborhood responsive to the matching pixel pattern. | 03-06-2014 |
Kevin Lill, Farmington Hills, MI US
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20160121884 | IMPACT MITIGATION BY INTELLIGENT VEHICLE POSITIONING - A method and system for mitigating the impact of a vehicle collision senses location, speed, orientation, and direction of movement data of a host vehicle and an interfering vehicle that has moved or is moving into the path of the host vehicle. A control unit analyzes the data and determines whether a collision is unavoidable. If so, the control unit determines a vehicle path for the host vehicle that will minimize the effects of the collision. By changing the vehicle path, the impact of the collision is less direct and the effect on both of the vehicles is mitigated to some degree. | 05-05-2016 |
Kirsten Agnes Lill, Koln DE
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20160102405 | Multi-Step Method for Electrodeposition - The subject matter of the present invention is a multi-step method for the anti-corrosive coating of metal components, in which a reaction rinse is used after a conversion treatment but before electrodeposition is carried out on the component. The conversion treatment includes first the deposition of a thin inorganic layer containing the elements Zr and/or Ti. The metal component is then treated with a reaction rinse containing a surface-active substance and is subsequently subjected to electrodeposition. | 04-14-2016 |
Kirsten Agnes Lill, Duesseldorf DE
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20150176138 | METHOD FOR CORROSION-PROTECTIVE SERIAL SURFACE TREATMENT OF METALLIC COMPONENTS - The present invention relates to a method for serial surface treatment of metallic components comprising aluminum surfaces, wherein an alkaline pretreatment is followed by a conversion treatment. According to the invention, the intention during the alkaline pretreatment is that a maximum value for the concentration of dissolved zinc is not exceeded, in order to ensure a sufficient quality of the corrosion-protective coating on the aluminum surface of the components following the surface treatment. In a preferred embodiment, the content of dissolved zinc is effectively held below the respective bath-typical maximum value of dissolved zinc by the addition of compounds constituting a source of sulfide ions. The functionality of the surface treatment can be additionally increased by likewise controlling the content of dissolved aluminum in the alkaline pretreatment such that, by adding compounds constituting a source for silicate anions, a threshold value for dissolved aluminum is not exceeded. | 06-25-2015 |
Mark Paul Lill, Elgin, IL US
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20160039388 | IGNITION LOCK MECHANISM - A lock mechanism for a motor vehicle ignition switch comprises a housing defining a barrel and a locking cylinder fitted for rotation in the barrel. A cap is fitted over one end of the housing capturing a frangible lock insert between the housing and cap. The frangible lock insert includes an electrically conductive pathway between radially displaced connection points on the rim of the insert. A circuit includes the electrically conductive pathway which is interrupted by disintegration of the frangible lock insert. Such disintegration occurs upon efforts to tamper with the lock mechanism or application of brute force to the sensor. | 02-11-2016 |
20160061197 | THERMAL-OPERATED PUMP - A thermal operated fluid pump has a plunger which is moved by a thermally expandable element to compress a fluid, such as natural gas, into a storage cylinder. | 03-03-2016 |
Markus A. Lill, West Lafayette, IN US
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20110207808 | LONG-CHAIN CARBOXYCHROMANOLS AND ANALOGS FOR USE AS ANTI-INFLAMMATORY AGENTS - Provided are long-chain carboxychromanol compounds useful for treating conditions associated with the need to inhibit cyclooxygenase-1, cyclooxygenase-2, and/or 5-lipoxygenase, and pharmaceutical formulations containing the compounds. | 08-25-2011 |
Michael Lill, Kaiserslautern DE
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20090233233 | OPTICAL ARRANGEMENT FOR IMMERSION LITHOGRAPHY WITH A HYDROPHOBIC COATING, AS WELL AS PROJECTION EXPOSURE APPARATUS COMPRISING THE SAME - An optical arrangement for immersion lithography, having at least one component ( | 09-17-2009 |
Michael Lill, Aalen DE
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20080291419 | PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY - In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium. | 11-27-2008 |
20080297745 | PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY - In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium. | 12-04-2008 |
Norbert Lill, Kronberg DE
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20090082255 | Acidic Insulin Preparations Having Improved Stability - The invention relates to a pharmaceutical formulation comprising a polypeptide selected from the group consisting of insulin, an insulin metabolite, an insulin analog, an insulin derivative and combinations thereof; a surfactant or combinations of two or more surfactants; optionally a preservative or combinations of two or more preservatives; and optionally an isotonicizing agent, buffers or further excipients or combinations thereof, the pharmaceutical formulation having a pH in the acidic range. | 03-26-2009 |
20100216692 | Acidic Insulin Preparations Having Improved Stability - The invention relates to a pharmaceutical formulation comprising a polypeptide selected from the group consisting of insulin, an insulin metabolite, an insulin analog, an insulin derivative and combinations thereof; a surfactant or combinations of two or more surfactants; optionally a preservative or combinations of two or more preservatives; and optionally an isotonicizing agent, buffers or further excipients or combinations thereof, the pharmaceutical formulation having a pH in the acidic range. | 08-26-2010 |
Rachel Edith Lill, Redhill GB
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20090209494 | 21-DEOXYMACBECIN ANALOGUES USEFUL AS ANTITUMOR AGENTS - The present invention relates to 21-deoxymacbecin analogues that are useful, e.g. in the treatment of cancer, B-cell malignancies, malaria, fungal infection, diseases of the central nervous system and neurodegenerative diseases, diseases dependent on angiogenesis, autoimmune diseases or as a prophylactic pretreatment for cancer. The present invention also provides methods for the production of these compounds and their use in medicine, in particular in the treatment and or prophylaxis of cancer or B-cell malignancies. | 08-20-2009 |
Robert J. Lill, Wichita, KS US
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20090205991 | MEDICAL TUBING BAG - A medical tubing bag disclosed herein includes an interior tube receiving area, and first and second openings. In one embodiment, a first guide is adjacent the first opening. The bag is used, in embodiments, to handle surplus tubing between a concentrator and a cannula. Depending on the embodiment, the tubing can be retracted and released from the bag either manually or using some sort of reel system. | 08-20-2009 |
Steven A. Lill, Waterloo CA
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20140146455 | CARRYING CASE FOR CONTROLLING A MOBILE DEVICE - A carrying case for controlling a mobile device is provided, the carrying case comprising: a body enabled to mate with a mobile device to physically protect the mobile device; at least one input device, the body comprising the input device; a processor enabled to control communications with the mobile device; a power interface enabled to receive power from the mobile device to power the processor; and, a data interface enabled for relaying the communications between one or more of the at least one input device and the processor, and the mobile device, for controlling applications at the mobile device. | 05-29-2014 |
20140146464 | CARRYING CASE FOR CONTROLLING A MOBILE DEVICE - A carrying case for controlling a mobile device is provided, the carrying case comprising: a body enabled to mate with a mobile device to physically protect the mobile device; at least one input device, the body comprising the input device; a processor enabled to control communications with the mobile device; a power interface enabled to receive power from the mobile device to power the processor; and, a data interface enabled for relaying the communications between one or more of the at least one input device and the processor, and the mobile device, for controlling applications at the mobile device. | 05-29-2014 |
Steven Anthony Lill, Waterloo CA
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20140244268 | METHOD AND APPARATUS FOR VOICE CONTROL OF A MOBILE DEVICE - A method and apparatus for voice control of a mobile device are provided. The method establishes a connection between the mobile device and a voice-control module. Responsive to establishing the connection, the mobile device enters into an intermediate mode; and the voice-control module monitors for verbal input comprising a verbal command from among a set of predetermined verbal commands. The voice-control module sends instructions to the mobile device related to the verbal command received; and the mobile device acts on the received instructions. An apparatus/voice control module (VCM) for voice control of a mobile device, wherein the VCM includes a connection module configured for establishing a connection between the VCM and the mobile device; a monitoring module configured for monitoring for a verbal command from among a set of predetermined verbal commands; and a communications module configured for sending instructions to the mobile device related to the verbal command received. | 08-28-2014 |
20140333431 | DEVICE FOR PROVIDING NOTIFICATIONS WHILE MATED WITH A CARRYING CASE - A device for providing notifications while mated with a carrying case is provided. The device comprises: an indicator; a first detector configured to detect when the device is mated with a carrying case, the carrying case having an open configuration and a closed configuration, wherein the indicator is hidden in the closed configuration and at least partially exposed in the open configuration; a second detector configured to detect when the carrying case is in the open configuration; and, a processor configured to place the indicator in a given notification mode when the first detector detects that the device is mated with the carrying case and the second detector detects that the carrying case is in the open configuration. | 11-13-2014 |
20140361876 | DEVICE FOR DETECTING A CARRYING CASE - A device for detecting a carrying case, and methods there for, are provided. The device includes: an orientation sensor; a near field communication (NFC) reader; and, a processor configured to place the device in a carrying case mode when an orientation of the device is within a given angular range as determined using the orientation sensor, and the NFC reader detects an NFC tag. | 12-11-2014 |
Thomas Martin Lill, Port Huron, MI US
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20110246124 | REMOTE APPLIANCE OR MACHINE MONITORING METHOD AND SYSTEM - The present invention relates to methods and systems for monitoring operational cycles of one or more appliances, such as washers and dryers, and remotely indicating when such operating cycles have terminated. In one aspect, the present invention provides an appliance or machine monitoring system. The system includes a monitor and transmitter unit configured to monitor an operation cycle of an appliance or machine and transmit a wireless signal upon completion of the operation cycle. The monitor and transmitter unit includes an operation cycle sensor, a signal conditioner, a comparator, and a wireless transmitter broadcasting a wireless signal based upon the signal generated by the comparator. The system further includes a portable receiver and alert unit configured to receive signals generated by the wireless transmitter and generate a signal indicative of completion of an operation cycle of an appliance or machine. | 10-06-2011 |
20140132418 | MACHINE OR DEVICE MONITORING AND ALERT METHOD AND SYSTEM - The present invention relates to methods and systems for monitoring of one or more machines or devices, such as washers and dryers, for a change of state and indicating when the change of state has occurred. In one aspect, the system comprises a monitor and alert unit which generates a signal indicative of the change of the state of the machine or device being monitored and a device or system to produce an alert notification based upon the signal. The monitor and alert unit includes an operational state sensor, a signal conditioner, and a comparator. | 05-15-2014 |
Thorsen B. Lill, Santa Clara, CA US
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20090061544 | TRAJECTORY BASED CONTROL OF PLASMA PROCESSING - A method of controlling a plasma processing according to trajectories connecting start and stop values of parameters controlling the plasma processing, for example, gas flow and power supplied to generate the plasma. The trajectories maybe based on equations including at least time as a variable. At set times within the processing, the values of the parameters are updated according to the predetermined trajectories. Sensors associated with the chamber may also adjust the trajectories, provide variables to the equations, and/or define the trajectories. | 03-05-2009 |
Thorsten Lill, Santa Clara, CA US
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20080197109 | Etch pattern definition using a CVD organic layer as an anti-reflection coating and hardmask - A multilayer antireflective hard mask structure is disclosed. The structure comprises: (a) a CVD organic layer, wherein the CVD organic layer comprises carbon and hydrogen; and (b) a dielectric layer over the CVD organic layer. The dielectric layer is preferably a silicon oxynitride layer, while the CVD organic layer preferably comprises 70-80% carbon, 10-20% hydrogen and 5-15% nitrogen. Also disclosed are methods of forming and trimming such a multilayer antireflective hard mask structure. Further disclosed are methods of etching a substrate structure using a mask structure that contains a CVD organic layer and optionally has a dielectric layer over the CVD organic layer. | 08-21-2008 |
20130109190 | PULSED PLASMA WITH LOW WAFER TEMPERATURE FOR ULTRA THIN LAYER ETCHES | 05-02-2013 |
20130216783 | CERAMIC ARTICLE WITH REDUCED SURFACE DEFECT DENSITY AND PROCESS FOR PRODUCING A CERAMIC ARTICLE - A machined ceramic article having an initial surface defect density and an initial surface roughness is provided. The machined ceramic article is heated to a temperature range between about 1000° C. and about 1800° C. at a ramping rate of about 0.1° C. per minute to about 20° C. per minute. The machined ceramic article is heat-treated in air atmosphere. The machined ceramic article is heat treated at one or more temperatures within the temperature range for a duration of up to about 24 hours. The machined ceramic article is then cooled at the ramping rate, wherein after the heat treatment the machined ceramic article has a reduced surface defect density and a reduced surface roughness. | 08-22-2013 |
20140273292 | METHODS OF FORMING SILICON NITRIDE SPACERS - Embodiments of methods of forming silicon nitride spacers are provided herein. In some embodiments, a method of forming silicon nitride spacers atop a substrate includes: depositing a silicon nitride layer atop an exposed silicon containing layer and an at least partially formed gate stack disposed atop a substrate; modifying a portion of the silicon nitride layer by exposing the silicon nitride layer to a hydrogen or helium containing plasma that is substantially free of fluorine; and removing the modified portion of the silicon nitride layer by performing a wet cleaning process to form the silicon nitride spacers, wherein the wet cleaning process removes the modified portion of the silicon nitride layer selectively to the silicon containing layer. | 09-18-2014 |
20140302680 | INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION - The embodiments disclosed herein pertain to improved methods and apparatus for etching a semiconductor substrate. A plasma grid assembly is positioned in a reaction chamber to divide the chamber into upper and lower sub-chambers. The plasma grid assembly may include one or more plasma grids having slots of a particular aspect ratio, which allow certain species to pass through from the upper sub-chamber to the lower sub-chamber. Where multiple plasma grids are used, one or more of the grids may be movable, allowing for tenability of the plasma conditions in at least the lower sub-chamber. In some cases, an electron-ion plasma is generated in the upper sub-chamber. Electrons that make it through the grid to the lower sub-chamber are cooled as they pass through. In some cases, this results in an ion-ion plasma in the lower sub-chamber. | 10-09-2014 |
20140302681 | INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION - The embodiments disclosed herein pertain to improved methods and apparatus for etching a semiconductor substrate. A plasma grid is positioned in a reaction chamber to divide the chamber into upper and lower sub-chambers. The plasma grid may have slots of a particular aspect ratio which allow certain species to pass through from the upper sub-chamber to the lower sub-chamber. In some cases, an electron-ion plasma is generated in the upper sub-chamber. Electrons that make it through the grid to the lower sub-chamber are cooled as they pass through. In some cases, this results in an ion-ion plasma in the lower sub-chamber. The lower sub-chamber plasma has a lower electron density, lower effective electron temperature, and higher negative ion:positive ion ratio as compared to the upper sub-chamber plasma. The disclosed embodiments may result in an etching process having good center to edge uniformity, selectivity, profile angle, and Iso/Dense loading. | 10-09-2014 |
20140335698 | COMPONENT OF A PLASMA PROCESSING APPARATUS HAVING A PROTECTIVE IN SITU FORMED LAYER ON A PLASMA EXPOSED SURFACE - A component of a plasma processing chamber having a protective liquid layer on a plasma exposed surface of the component. The protective liquid layer can be replenished by supplying a liquid to a liquid channel and delivering the liquid through liquid feed passages in the component. The component can be an edge ring which surrounds a semiconductor substrate supported on a substrate support in a plasma processing apparatus wherein plasma is generated and used to process the semiconductor substrate. Alternatively, the protective liquid layer can be cured or cooled sufficiently to form a solid protective layer. | 11-13-2014 |
20150087154 | HIGH ASPECT RATIO ETCH WITH COMBINATION MASK - A method for etching features in a stack is provided. A combination hardmask is formed by forming a first hardmask layer comprising carbon or silicon oxide over the stack, forming a second hardmask layer comprising metal over the first hardmask layer, and patterning the first and second hardmask layers. The stack is etched through the combination hardmask. | 03-26-2015 |
20150093915 | SULFUR DOPED CARBON HARD MASKS - Provided are methods of forming ashable hard masks (AHMs) with high etch selectivity and low hydrogen content using plasma enhanced chemical vapor deposition. Methods involve exposing a first layer to be etched on a semiconductor substrate to a carbon source and sulfur source, and generating a plasma to deposit a sulfur-doped AHM or amorphous carbon-based film on the first layer. | 04-02-2015 |
20150200106 | HIGH ASPECT RATIO ETCH WITH COMBINATION MASK - A method for etching features in a stack is provided. A combination hardmask is formed by forming a first hardmask layer comprising carbon or silicon oxide over the stack, forming a second hardmask layer comprising metal over the first hardmask layer, and patterning the first and second hardmask layers. The stack is etched through the combination hardmask. | 07-16-2015 |
20150218057 | CERAMIC ARTICLE WITH REDUCED SURFACE DEFECT DENSITY - A machined ceramic article having an initial surface defect density and an initial surface roughness is provided. The machined ceramic article is heated to a temperature range between about 1000° C. and about 1800° C. at a ramping rate of about 0.1° C. per minute to about 20° C. per minute. The machined ceramic article is heat-treated in air atmosphere. The machined ceramic article is heat treated at one or more temperatures within the temperature range for a duration of up to about 24 hours. The machined ceramic article is then cooled at the ramping rate, wherein after the heat treatment the machined ceramic article has a reduced surface defect density and a reduced surface roughness. | 08-06-2015 |
20150280113 | METHOD TO ETCH NON-VOLATILE METAL MATERIALS - A method for etching a stack with an Ru containing layer disposed below a hardmask and above a magnetic tunnel junction (MTJ) stack with pinned layer is provided. The hardmask is etched with a dry etch. The Ru containing layer is etched, where the etching uses hypochlorite and/or O | 10-01-2015 |
20150280114 | METHOD TO ETCH NON-VOLATILE METAL MATERIALS - A method for etching a stack with at least one metal layer in one or more cycles is provided. An initiation step is preformed, transforming part of the at least one metal layer into metal oxide, metal halide, or lattice damaged metallic sites. A reactive step is performed providing one or more cycles, where each cycle comprises providing an organic solvent vapor to form a solvated metal, metal halide, or metal oxide state and providing an organic ligand solvent to form volatile organometallic compounds. A desorption of the volatile organometallic compounds is performed. | 10-01-2015 |
20150340603 | METHOD TO ETCH NON-VOLATILE METAL MATERIALS - A method for etching a stack with at least one metal layer in one or more cycles is provided. An initiation step is preformed, transforming part of the at least one metal layer into metal oxide, metal halide, or lattice damaged metallic sites. A reactive step is performed providing one or more cycles, where each cycle comprises providing an organic solvent vapor to form a solvated metal, metal halide, or metal oxide state and providing an organic ligand solvent to form volatile organometallic compounds. | 11-26-2015 |
20160049281 | DIFFERENTIALLY PUMPED REACTIVE GAS INJECTOR - One process that may be used to remove material from a surface is ion etching. In certain cases, ion etching involves delivery of both ions and a reactive gas to a substrate. The disclosed embodiments permit local high pressure delivery of reactive gas to a substrate while maintaining a much lower pressure on portions of the substrate that are outside of the local high pressure delivery area. The low pressure is achieved by confining the high pressure reactant delivery to a small area and vacuuming away excess reactants and byproducts as they leave this small area and before they enter the larger substrate processing region. The disclosed techniques may be used to increase throughput while minimizing deleterious collisions between ions and other species present in the substrate processing region. | 02-18-2016 |
20160064232 | ION BEAM ETCH WITHOUT NEED FOR WAFER TILT OR ROTATION - Various embodiments herein relate to methods and apparatus for etching feature on a substrate. In a number of embodiments, no substrate rotation or tilting is used. While conventional etching processes rely on substrate rotation to even out the distribution of ions over the substrate surface, various embodiments herein achieve this purpose by moving the ion beams relative to the ion source. Movement of the ion beams can be achieved in a number of ways including electrostatic techniques, mechanical techniques, magnetic techniques, and combinations thereof. | 03-03-2016 |
20160064260 | ION INJECTOR AND LENS SYSTEM FOR ION BEAM MILLING - The embodiments herein relate to methods and apparatus for performing ion etching on a semiconductor substrate, as well as methods for forming such apparatus. In some embodiments, an electrode assembly may be fabricated, the electrode assembly including a plurality of electrodes having different purposes, with each electrode secured to the next in a mechanically stable manner. Apertures may be formed in each electrode after the electrodes are secured together, thereby ensuring that the apertures are well-aligned between neighboring electrodes. In some cases, the electrodes are made from degeneratively doped silicon, and the electrode assembly is secured together through electrostatic bonding. Other electrode materials and methods of securing may also be used. The electrode assembly may include a hollow cathode emitter electrode in some cases, which may have a frustoconical or other non-cylindrical aperture shape. A chamber liner and/or reflector may also be present in some cases. | 03-03-2016 |
20160079521 | DIELECTRIC REPAIR FOR EMERGING MEMORY DEVICES - Systems and method include providing a non-volatile random access memory (NVRAM) stack including a plurality of layers. The plurality of layers includes a dielectric layer and a metal layer. The metal layer of the NVRAM stack is patterned. The patterning causes damage to lateral side portions of the dielectric layer. The lateral portions of the dielectric layer are repaired by depositing dielectric material on the lateral side portions of the dielectric layer. | 03-17-2016 |
20160086864 | MOVABLE GAS NOZZLE IN DRYING MODULE - Provided herein are methods and apparatuses for cleaning wafers by coating an active surface of the wafer with a film of water to clean the wafer, delivering gas from a gas nozzle to the center of the active surface to break a film of water on the active surface to form a wet-dry boundary while spinning the wafer, and moving the gas nozzle radially outward from the center to the edge of the active surface of the wafer by following the wet-dry boundary. Tracking devices, such as cameras or charge-coupled devices, and systems may be used with an apparatus for cleaning wafers by tracking the wet-dry boundary on the wafer to move the gas nozzle to follow the wet-dry boundary. Cleaning apparatuses provided herein may be integrated with etching tools. | 03-24-2016 |
20160104630 | NOVEL METHOD TO ETCH COPPER BARRIER FILM - A method of opening a barrier film below copper structures in a stack is provided. A pulsed gas is provided into a plasma processing chamber, wherein the providing the pulsed gas comprises providing a pulsed H | 04-14-2016 |
20160111294 | USE OF ION BEAM ETCHING TO GENERATE GATE-ALL-AROUND STRUCTURE - Various embodiments herein relate to methods and apparatus for performing anisotropic ion beam etching to form arrays of channels. The channels may be formed in semiconductor material, and may be used in a gate-all-around device. Generally speaking, a patterned mask layer is provided over a layer of semiconductor material. Ions are directed toward the substrate while the substrate is positioned in two particular orientations with respect to the ion trajectory. The substrate switches between these orientations such that ions impinge upon the substrate from two opposite angles. The patterned mask layer shadows/protects the underlying semiconductor material such that the channels are formed in intersecting shadowed regions. | 04-21-2016 |
20160111309 | EQUIPMENT FRONT END MODULE FOR TRANSFERRING WAFERS AND METHOD OF TRANSFERRING WAFERS - An EFEM useful for transferring wafers to and from wafer processing modules comprises an enclosure having a controlled environment therein bounded by a front wall, a back wall, first and second side walls, a top wall, and a bottom wall. The first side wall and the second side wall include two or more wafer load ports wherein each wafer load port is adapted to receive a FOUP. The front wall includes wafer ports configured to attach to respective load locks operable to allow a wafer to be transferred to a front wall cluster processing tool. The back wall includes a wafer port adapted to be in operational relationship with a back wall cluster processing tool. A robot in the EFEM enclosure is operable to transfer wafers through the wafer load ports, the first front wall wafer port, the second front wall wafer port, and the back wall wafer port. | 04-21-2016 |
Torsten Lill, Santa Clara, CA US
Patent application number | Description | Published |
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20140187046 | METHOD FOR FORMING SPACERS FOR A TRANSITOR GATE - The invention relates to a method for forming spacers for a gate of a field effect transistor, the gate being situated above a layer of semiconductor material, comprising a step of forming a layer of nitride covering the transistor gate, the method being characterized in that it comprises: | 07-03-2014 |