| Patent application number | Description | Published |
|---|
| 20120099094 | DUAL-STAGE EXCHANGE SYSTEM FOR LITHOGRAPHIC APPARATUS - A dual-stage exchange system for a lithographic apparatus comprises a silicon chip stage ( | 04-26-2012 |
| 20120099095 | DUAL-STAGE EXCHANGE SYSTEM FOR LITHOGRAPHIC APPARATUS - A dual-stage exchange system for a lithographic apparatus comprises a silicon chip stage ( | 04-26-2012 |
| 20120127448 | DUAL WAFER STAGE EXCHANGING SYSTEM FOR LITHOGRAPHIC DEVICE - A dual wafer stage exchanging system for a lithographic device is disclosed, said system comprises two wafer stages running between an exposure workstation and a pre-processing workstation, and said two stages are set on a base and suspended above the upper surface of the base by air bearings. Each wafer stages is passed through by a Y-direction guide rail respectively, wherein one end of said guide rail is connected with a main driving unit and another end of said guide rail is detachably coupled with one of the two X-direction auxiliary driving units with single degree of freedom, and said two wafer stages are capable of moving in Y-direction along the guide rails and moving in X-direction under the drive of the auxiliary driving units with single degree of freedom. The position exchange of said two wafer stages can be enabled by the detachment and connection of the Y-direction guide rails and the auxiliary units with single degree of freedom. | 05-24-2012 |
| 20130038853 | NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO-MOTION TABLE AND APPLICATION THEREOF - A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion. | 02-14-2013 |
| 20150058386 | METHOD, ELECTRONIC DEVICE, AND STORAGE MEDIUM FOR CREATING VIRTUAL DIRECTORY - A method for creating a virtual directory includes locating at least one file of a designated type by traversing a storage region, extracting attribute information of the at least one file, and creating a virtual directory according to the attribute information of the at least one file. The attribute information including at least two of a name, a play address, or episode information of the at least one file. | 02-26-2015 |
| 20150341698 | METHOD AND DEVICE FOR PROVIDING SELECTION OF VIDEO - Provided are a method and a device for providing a selection of video, which belong to the field of Internet technology. The method comprises: for an arbitrary video, acquiring a characteristic identification of the video; determining m videos with the same characteristic identification, which includes at least two types of videos, where m≧2, wherein the at least two types of videos comprise any two or all of types of online video, offline video, and live video; and providing a list of the selection of video according to the m videos. Problems in the related art, that playing and selecting of only a single type of multi-episode video, switching between different types of videos requiring a large amounts of additional operations and influencing of video fluency when a user views the video, may be solved. | 11-26-2015 |
| 20150369331 | NEGATIVE STIFFNESS SYSTEM FOR GRAVITY COMPENSATION OF MICROPOSITIONER - A negative stiffness system for gravity compensation of a micropositioner of wafer table in lithography machine, characterized in that, the negative stiffness system includes at least three sets of quasi-zero stiffness units, each of the sets of quasi-zero stiffness units comprises a pair of negative stiffness springs and a positive stiffness spring, the positive stiffness spring is vertically positioned, the pair of negative stiffness springs are obliquely and symmetrically positioned at two sides of the positive stiffness spring, upper ends | 12-24-2015 |
| 20160138903 | TWO-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM - A two-DOF heterodyne grating interferometer displacement measurement system, comprising a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component, wherein the grating interferometer comprises a polarizing spectroscope, a reference grating and dioptric elements. The measurement system achieves the displacement measurement on the basis of the grating diffraction, the optical Doppler effect and the optical beat frequency principle. When the grating interferometer and the measurement grating conduct two-DOF linear relative motion, the system can output two linear displacements. The measurement system can achieve sub-nanometer or even higher resolution and accuracy, and can simultaneously measure two linear displacements. The measurement system has the advantages of insensitivity to the environment, high measurement accuracy, a small volume and light weight, and can improve the comprehensive performance of a workpiece stage as a position measurement system for an ultra-precise workpiece stage of a photoetching machine. | 05-19-2016 |
