| Patent application number | Description | Published |
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| 20110256726 | PLASMA ACTIVATED CONFORMAL FILM DEPOSITION - Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by the following operations: (a) exposing the substrate surface to a first reactant in vapor phase under conditions allowing the first reactant to adsorb onto the substrate surface; (b) exposing the substrate surface to a second reactant in vapor phase while the first reactant is adsorbed on the substrate surface; and (c) exposing the substrate surface to plasma to drive a reaction between the first and second reactants adsorbed on the substrate surface to form the film. | 10-20-2011 |
| 20120009802 | PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION - Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by intermittent delivery of dopant species to the film between the cycles of adsorption and reaction. | 01-12-2012 |
| 20120077349 | PLASMA-ACTIVATED DEPOSITION OF CONFORMAL FILMS - Embodiments related to depositing thin conformal films using plasma-activated conformal film deposition (CFD) processes are described herein. In one example, a method of processing a substrate includes, applying photoresist to the substrate, exposing the photoresist to light via a stepper, patterning the resist with a pattern and transferring the pattern to the substrate, selectively removing photoresist from the substrate, placing the substrate into a process station, and, in the process station, in a first phase, generating radicals off of the substrate and adsorbing the radicals to the substrate to form active species, in a first purge phase, purging the process station, in a second phase, supplying a reactive plasma to the surface, the reactive plasma configured to react with the active species and generate the film, and in a second purge phase, purging the process station. | 03-29-2012 |
| 20130196516 | METHODS FOR UV-ASSISTED CONFORMAL FILM DEPOSITION - Described are methods of making silicon nitride (SiN) materials and other silicon-containing films, including carbon-containing and/or oxygen-containing films such as SiCN (also referred to as SiNC), SiON and SiONC films, on substrates. According to various embodiments, the methods involve electromagnetic radiation-assisted activation of one or more reactants. In certain embodiments, for example, the methods involve ultraviolet (UV) activation of vapor phase amine coreactants. The methods can be used to deposit silicon-containing films, including SiN and SiCN films, at temperatures below about 400° C. | 08-01-2013 |
| 20130210241 | Precursors for Plasma Activated Conformal Film Deposition - A method of depositing a film on a substrate surface includes providing a substrate in a reaction chamber; selecting a silicon-containing reactant from a precursor group consisting of di-tert-butyl diazidosilane, bis(ethylmethylamido)silane, bis(diisopropylamino)silane, bis(tert-butylhydrazido)diethylsilane, tris(dimethylamido) silylazide, tris(dimethylamido)silylamide, ethylsilicon triazide, diisopropylaminosilane, and hexakis(dimethylamido)disilazane; introducing the silicon-containing reactant in vapor phase into the reaction chamber under conditions allowing the silicon-containing reactant to adsorb onto the substrate surface; introducing a second reactant in vapor phase into the reaction chamber while the silicon-containing reactant is adsorbed on the substrate surface, and wherein the second reactant is introduced without first sweeping the silicon-containing reactant out of the reaction chamber; and exposing the substrate surface to plasma to drive a reaction between the silicon-containing reactant and the second reactant on the substrate surface to form the film. | 08-15-2013 |
| 20130309415 | SYSTEMS AND METHODS FOR MODULATING STEP COVERAGE DURING CONFORMAL FILM DEPOSITION - Systems and methods for processing a substrate include a) arranging a substrate on a pedestal in a processing chamber; b) supplying precursor to the processing chamber; c) purging the processing chamber; d) performing radio frequency (RF) plasma activation; e) purging the processing chamber; and f) prior to purging the processing chamber in at least one of (c) or (e), setting a vacuum pressure of the processing chamber to a first predetermined pressure that is less than a vacuum pressure during at least one of (b) or (d) for a first predetermined period. | 11-21-2013 |
| 20140051262 | METHODS FOR UV-ASSISTED CONFORMAL FILM DEPOSITION - Described are methods of making silicon nitride (SiN) materials and other silicon-containing films, including carbon-containing and/or oxygen-containing films such as SiCN (also referred to as SiNC), SiON and SiONC films, on substrates. According to various embodiments, the methods involve electromagnetic radiation-assisted activation of one or more reactants. In certain embodiments, for example, the methods involve ultraviolet (UV) activation of vapor phase amine coreactants. The methods can be used to deposit silicon-containing films, including SiN and SiCN films, at temperatures below about 400° C. | 02-20-2014 |
| 20140106574 | GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AND PECVD METHOD - Provided herein are methods and apparatus for filling one or more gaps on a semiconductor substrate. The disclosed embodiments are especially useful for forming seam-free, void-free fill in both narrow and wide features. The methods may be performed without any intervening etching operations to achieve a single step deposition. In various implementations, a first operation is performed using a novel PEALD fill mechanism to fill narrow gaps and line wide gaps. A second operation may be performed using PECVD methods to continue filling the wide gaps. | 04-17-2014 |
| 20140209026 | PLASMA ACTIVATED DEPOSITION OF A CONFORMAL FILM ON A SUBSTRATE SURFACE - An apparatus deposits a film on a substrate including a reaction chamber arranged on a substrate support. An inlet port delivers gas phase reactants to the reaction chamber. A plasma generator provides plasma to the reaction chamber. A controller is configured to flow a silicon-containing reactant from a precursor group consisting of di-tert-butyl diazidosilane, tris(dimethylamido)silylazide, and bis(tert-butylhydrazido)diethyl silane. The silicon-containing reactant is introduced in vapor phase into the reaction chamber. The controller flows a second reactant in vapor phase into the reaction chamber. | 07-31-2014 |
| 20150107513 | SYSTEMS FOR MODULATING STEP COVERAGE DURING CONFORMAL FILM DEPOSITION - A system for processing a substrate include a processing chamber including a pedestal to support a substrate and a controller configured to a) supply precursor to the processing chamber; b) purge the processing chamber; c) perform radio frequency (RF) plasma activation; d) purge the processing chamber; and e) prior to purging the processing chamber in at least one of (b) or (d), set a vacuum pressure of the processing chamber to a first predetermined pressure that is less than a vacuum pressure during at least one of (a) or (c) for a first predetermined period. | 04-23-2015 |
| 20150110968 | TANDEM SOURCE ACTIVATION FOR CYCLICAL DEPOSITION OF FILMS - A method includes flowing reactant gases into a process chamber. Plasma having a first power level is supplied using a plasma source. The process chamber is dosed with the precursor. The first power level is sufficient to enhance adsorption of the precursor on a surface of the substrate and is insufficient to decompose the precursor that is adsorbed. After a first predetermined period, the method includes removing a portion of the precursor that does not adsorb onto the substrate. The precursor that is adsorbed is activated using plasma having a second power level using the plasma source. The second power level is greater than the first power level and is sufficient to decompose the precursor. | 04-23-2015 |
| 20150243545 | INHIBITOR PLASMA MEDIATED ATOMIC LAYER DEPOSITION FOR SEAMLESS FEATURE FILL - Systems and methods for depositing film in a substrate processing system includes performing a first atomic layer deposition (ALD) cycle in a processing chamber to deposit film on a substrate including a feature; after the first ALD cycle, exposing the substrate to an inhibitor plasma in the processing chamber for a predetermined period to create a varying passivated surface in the feature; and after the predetermined period, performing a second ALD cycle in the processing chamber to deposit film on the substrate. | 08-27-2015 |
| 20150354059 | SYSTEMS AND METHODS FOR REMOVING PARTICLES FROM A SUBSTRATE PROCESSING CHAMBER USING RF PLASMA CYCLING AND PURGING - Systems and methods for operating a substrate processing system include processing a substrate arranged on a substrate support in a processing chamber. At least one of precursor gas and/or reactive gas is supplied during the processing. The substrate is removed from the processing chamber. Carrier gas and purge gas are selectively supplied to the processing chamber. RF plasma is generated in the processing chamber during N cycles, where N is an integer greater than one. The RF plasma is on for a first period and off for a second period during each of the N cycles. The purge gas is supplied during at least part of each of the N cycles. | 12-10-2015 |
| 20160032453 | SYSTEMS AND METHODS FOR VAPOR DELIVERY - A vapor delivery system includes an ampoule to store liquid precursor and a heater to partially vaporize the liquid precursor. A first valve communicates with a push gas source and the ampoule. A second valve supplies vaporized precursor to a heated injection manifold. A valve manifold includes a first node in fluid communication with an outlet of the heated injection manifold, a third valve having an inlet in fluid communication with the first node and an outlet in fluid communication with vacuum, a fourth valve having an inlet in fluid communication with the first node and an outlet in fluid communication with a second node, a fifth valve having an outlet in fluid communication with the second node, and a sixth valve having an outlet in fluid communication with the second node. A gas distribution device is in fluid communication with the second node. | 02-04-2016 |
| Patent application number | Description | Published |
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| 20140134827 | CONFORMAL FILM DEPOSITION FOR GAPFILL - A method and apparatus for conformally depositing a dielectric oxide in high aspect ratio gaps in a substrate is disclosed. A substrate is provided with one or more gaps into a reaction chamber where each gap has a depth to width aspect ratio of greater than about 5:1. A first dielectric oxide layer is deposited in the one or more gaps by CFD. A portion of the first dielectric oxide layer is etched using a plasma etch, where etching the portion of the first dielectric oxide layer occurs at a faster rate near a top surface than near a bottom surface of each gap so that the first dielectric oxide layer has a tapered profile from the top surface to the bottom surface of each gap. A second dielectric oxide layer is deposited in the one or more gaps over the first dielectric oxide layer via CFD. | 05-15-2014 |
| 20140141542 | METHODS FOR DEPOSITING FILMS ON SENSITIVE SUBSTRATES - Methods and apparatus to form films on sensitive substrates while preventing damage to the sensitive substrate are provided herein. In certain embodiments, methods involve forming a bilayer film on a sensitive substrate that both protects the underlying substrate from damage and possesses desired electrical properties. Also provided are methods and apparatus for evaluating and optimizing the films, including methods to evaluate the amount of substrate damage resulting from a particular deposition process and methods to determine the minimum thickness of a protective layer. The methods and apparatus described herein may be used to deposit films on a variety of sensitive materials such as silicon, cobalt, germanium-antimony-tellerium, silicon-germanium, silicon nitride, silicon carbide, tungsten, titanium, tantalum, chromium, nickel, palladium, ruthenium, or silicon oxide. | 05-22-2014 |
| 20140209562 | PLASMA ACTIVATED CONFORMAL FILM DEPOSITION - Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by the following operations: (a) exposing the substrate surface to a first reactant in vapor phase under conditions allowing the first reactant to adsorb onto the substrate surface; (b) exposing the substrate surface to a second reactant in vapor phase while the first reactant is adsorbed on the substrate surface; and (c) exposing the substrate surface to plasma to drive a reaction between the first and second reactants adsorbed on the substrate surface to form the film. | 07-31-2014 |
| 20150017812 | SEQUENTIAL PRECURSOR DOSING IN AN ALD MULTI-STATION/BATCH REACTOR - Disclosed herein are methods of depositing layers of material on multiple semiconductor substrates at multiple processing stations within one or more reaction chambers. The methods may include dosing a first substrate with film precursor at a first processing station and dosing a second substrate with film precursor at a second processing station with precursor flowing from a common source, wherein the timing of said dosing is staggered such that the first substrate is dosed during a first dosing phase during which the second substrate is not substantially dosed, and the second substrate is dosed during a second dosing phase during which the first substrate is not substantially dosed. Also disclosed herein are apparatuses having a plurality of processing stations contained within one or more reaction chambers and a controller with machine-readable instructions for staggering the dosing of first and second substrates at first and second processing stations. | 01-15-2015 |
| 20150099372 | SEQUENTIAL PRECURSOR DOSING IN AN ALD MULTI-STATION/BATCH REACTOR - Disclosed herein are methods of depositing layers of material on multiple semiconductor substrates at multiple processing stations within one or more reaction chambers. The methods may include dosing a first substrate with film precursor at a first processing station and dosing a second substrate with film precursor at a second processing station with precursor flowing from a common source, wherein the timing of said dosing is staggered such that the first substrate is dosed during a first dosing phase during which the second substrate is not substantially dosed, and the second substrate is dosed during a second dosing phase during which the first substrate is not substantially dosed. Also disclosed herein are apparatuses having a plurality of processing stations contained within one or more reaction chambers and a controller with machine-readable instructions for staggering the dosing of first and second substrates at first and second processing stations. | 04-09-2015 |
| 20150126042 | SOFT LANDING NANOLAMINATES FOR ADVANCED PATTERNING - Methods for depositing nanolaminate protective layers over a core layer to enable deposition of high quality conformal films over the core layer for use in advanced multiple patterning schemes are provided. In certain embodiments, the methods involve depositing a thin silicon oxide or titanium oxide film using plasma-based atomic layer deposition techniques with a low high frequency radio frequency (HFRF) plasma power, followed by depositing a conformal titanium oxide film or spacer with a high HFRF plasma power. | 05-07-2015 |
| 20150147482 | CHAMBER UNDERCOAT PREPARATION METHOD FOR LOW TEMPERATURE ALD FILMS - Methods and apparatus disclosed herein relate to the formation and use of undercoats on the interior surfaces of reaction chambers used to deposit films on substrates. The undercoats are deposited through atomic layer deposition methods. The disclosed undercoats help prevent metal contamination, provide improved resistance to flaking, and are relatively thin. Because of the superior resistance to flaking, the disclosed undercoats allow more substrates to be processed between subsequent cleaning operations, thereby increasing throughput. | 05-28-2015 |
| 20150221519 | VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS - Vacuum-integrated photoresist-less methods and apparatuses for forming metal hardmasks can provide sub-30 nm patterning resolution. A metal-containing (e.g., metal salt or organometallic compound) film that is sensitive to a patterning agent is deposited on a semiconductor substrate. The metal-containing film is then patterned directly (i.e., without the use of a photoresist) by exposure to the patterning agent in a vacuum ambient to form the metal mask. For example, the metal-containing film is photosensitive and the patterning is conducted using sub-30 nm wavelength optical lithography, such as EUV lithography. | 08-06-2015 |
| 20150235835 | HIGH GROWTH RATE PROCESS FOR CONFORMAL ALUMINUM NITRIDE - Methods of depositing conformal aluminum nitride films on semiconductor substrates are provided. Disclosed methods involve (a) exposing a substrate to an aluminum-containing precursor, (b) purging the aluminum-containing precursor for a duration insufficient to remove substantially all of the aluminum-containing precursor in gas phase, (c) exposing the substrate to a nitrogen-containing precursor to form aluminum nitride, (d) purging the nitrogen-containing precursor, and (e) repeating (a) through (d). Increased growth rate and 100% step coverage and conformality are attained. | 08-20-2015 |
| 20150243883 | PLASMA ASSISTED ATOMIC LAYER DEPOSITION TITANIUM OXIDE FOR CONFORMAL ENCAPSULATION AND GAPFILL APPLICATIONS - The embodiments herein relate to methods and apparatus for depositing an encapsulation layer over memory stacks in MRAM and PCRAM applications. The encapsulation layer is a titanium dioxide (TiO | 08-27-2015 |
| 20150247238 | RF CYCLE PURGING TO REDUCE SURFACE ROUGHNESS IN METAL OXIDE AND METAL NITRIDE FILMS - Methods of reducing particles in semiconductor substrate processing are provided herein. Methods involve performing a precursor-free radio frequency cycle purge without a substrate in the process chamber by introducing a gas without a precursor into the process chamber through the showerhead and igniting a plasma one or more times after a film is deposited on the substrate by introducing a vaporized liquid precursor to the process chamber. | 09-03-2015 |
| 20150249013 | CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TRANSISTORS - Disclosed herein are methods of doping a fin-shaped channel region of a partially fabricated 3-D transistor on a semiconductor substrate. The methods may include forming a multi-layer dopant-containing film on the substrate, forming a capping film comprising a silicon carbide material, a silicon nitride material, a silicon carbonitride material, or a combination thereof, the capping film located such that the multi-layer dopant-containing film is located in between the substrate and the capping film, and driving dopant from the dopant-containing film into the fin-shaped channel region. Multiple dopant-containing layers of the film may be formed by an atomic layer deposition process which includes adsorbing a dopant-containing film precursor such that it forms an adsorption-limited layer on the substrate and reacting adsorbed dopant-containing film precursor. Also disclosed herein are multi-station substrate processing apparatuses for doping the fin-shaped channel regions of partially fabricated 3-D transistors. | 09-03-2015 |
| 20150315706 | LOW VOLUME SHOWERHEAD WITH POROUS BAFFLE - A low volume showerhead in a semiconductor processing apparatus can include a porous baffle to improve the flow uniformity and purge time during atomic layer deposition. The showerhead can include a plenum volume, one or more gas inlets in fluid communication with the plenum volume, a faceplate including a plurality of first through-holes for distributing gas onto a substrate in the semiconductor processing apparatus, and a porous baffle positioned in a region between the plenum volume and the one or more gas inlets. The one or more gas inlets can include a stem having a small volume to improve purge time. The baffle can be porous and positioned between the stem and the plenum volume to improve flow uniformity and avoid jetting. | 11-05-2015 |
| 20150332912 | SINGLE ALD CYCLE THICKNESS CONTROL IN MULTI-STATION SUBSTRATE DEPOSITION SYSTEMS - Disclosed are methods of depositing films of material on multiple semiconductor substrates in a multi-station processing chamber. The methods may include loading a first set of one or more substrates into the processing chamber at a first set of one or more process stations and depositing film material onto the first set of substrates by performing N cycles of film deposition. Thereafter, the methods may further include transferring the first set of substrates from the first set of process stations to a second set of one or more process stations, loading a second set of one or more substrates at the first set of process stations, and depositing film material onto the first and second sets of substrates by performing N′ cycles of film deposition, wherein N′ is not equal to N. Also disclosed are apparatuses and computer-readable media which may be used to perform similar operations. | 11-19-2015 |
| 20150348854 | MULTI-STATION PLASMA REACTOR WITH RF BALANCING - Methods and apparatus for multi-station semiconductor deposition operations with RF power frequency tuning are disclosed. The RF power frequency may be tuned according to a measured impedance of a plasma during the semiconductor deposition operation. In certain implementations of the methods and apparatus, a RF power parameter may be adjusted during or prior to the deposition operation. Certain other implementations of the semiconductor deposition operations may include multiple different deposition processes with corresponding different recipes. The recipes may include different RF power parameters for each respective recipe. The respective recipes may adjust the RF power parameter prior to each deposition process. RF power frequency tuning may be utilized during each deposition process. | 12-03-2015 |
| 20150368797 | TANDEM SOURCE ACTIVATION FOR CVD OF FILMS - A method for processing a substrate in a substrate processing system includes flowing reactant gases into a process chamber including a substrate, supplying a first power level sufficient to promote rearrangement of molecules on a surface of the substrate, waiting a first predetermined period, and, after the first predetermined period, performing plasma-enhanced, pulsed chemical vapor deposition of film on the substrate by supplying one or more precursors while supplying a second power level for a second predetermined period. The second power level is greater than the first power level. The method further includes removing reactants from the process chamber. | 12-24-2015 |
| 20150380278 | HARDWARE FOR THE SEPARATION AND DEGASSING OF DISSOLVED GASES IN SEMICONDUCTOR PRECURSOR CHEMICALS - An apparatus for degassing gases having large gas molecules, such as argon, from liquids for use in semiconductor processing is provided. The apparatus includes a spool-free tubing in a cylindrical vessel with a removable lid and crystalline window. The apparatus is assembled by removing the lid, connecting the tubing via connectors to an inlet and outlet in the lid, and placing the tubing into the vessel with the lid, and securing the lid. | 12-31-2015 |
| 20160035566 | METHODS AND APPARATUSES FOR SHOWERHEAD BACKSIDE PARASITIC PLASMA SUPPRESSION IN A SECONDARY PURGE ENABLED ALD SYSTEM - Disclosed are methods of depositing films of material on semiconductor substrates employing the use of a secondary purge. The methods may include flowing a film precursor into a processing chamber and adsorbing the film precursor onto a substrate in the processing chamber such that the precursor forms an adsorption-limited layer on the substrate. The methods may further include removing at least some unadsorbed film precursor from the volume surrounding the adsorbed precursor by purging the processing chamber with a primary purge gas, and thereafter reacting adsorbed film precursor while a secondary purge gas is flowed into the processing chamber, resulting in the formation of a film layer on the substrate. The secondary purge gas may include a chemical species having an ionization energy and/or a disassociation energy equal to or greater than that of O | 02-04-2016 |
| 20160052651 | FILL ON DEMAND AMPOULE - Methods and apparatus for use of a fill on demand ampoule are disclosed. The fill on demand ampoule may refill an ampoule with precursor concurrent with the performance of other deposition processes. The fill on demand may keep the level of precursor within the ampoule at a relatively constant level. The level may be calculated to result in an optimum head volume. The fill on demand may also keep the precursor at a temperature near that of an optimum precursor temperature. The fill on demand may occur during parts of the deposition process where the agitation of the precursor due to the filling of the ampoule with the precursor minimally effects the substrate deposition. Substrate throughput may be increased through the use of fill on demand. | 02-25-2016 |
| 20160052655 | FILL ON DEMAND AMPOULE REFILL - Methods and apparatus for use of a fill on demand ampoule are disclosed. The fill on demand ampoule may refill an ampoule with precursor concurrent with the performance of other deposition processes. The fill on demand may keep the level of precursor within the ampoule at a relatively constant level. The level may be calculated to result in an optimum head volume. The fill on demand may also keep the precursor at a temperature near that of an optimum precursor temperature. The fill on demand may occur during parts of the deposition process where the agitation of the precursor due to the filling of the ampoule with the precursor minimally effects the substrate deposition. Substrate throughput may be increased through the use of fill on demand. | 02-25-2016 |
| 20160056032 | METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW TEMPERATURE ALD SYSTEMS BY SHOWERHEAD ACTIVE HEATING AND/OR PEDESTAL COOLING - Disclosed are methods of depositing films of material on semiconductor substrates. The methods may include flowing a film precursor into a processing chamber through a showerhead substantially maintained at a first temperature, and adsorbing the film precursor onto a substrate held on a substrate holder such that the precursor forms an adsorption-limited layer while the substrate holder is substantially maintained at a second temperature. The first temperature may be at least about 10° C. above the second temperature, or the first temperature may be at or below the second temperature. The methods may further include removing at least some unadsorbed film precursor from the volume surrounding the adsorbed film precursor, and thereafter reacting adsorbed film precursor to form a film layer. Also disclosed herein are apparatuses having a processing chamber, a substrate holder, a showerhead, and one or more controllers for operating the apparatus to employ the foregoing film deposition techniques. | 02-25-2016 |
| 20160064211 | HIGH GROWTH RATE PROCESS FOR CONFORMAL ALUMINUM NITRIDE - Methods of depositing conformal aluminum nitride films on semiconductor substrates are provided. Disclosed methods involve (a) exposing a substrate to an aluminum-containing precursor, (b) purging the aluminum-containing precursor for a duration insufficient to remove substantially all of the aluminum-containing precursor in gas phase, (c) exposing the substrate to a nitrogen-containing precursor to form aluminum nitride, (d) purging the nitrogen-containing precursor, and (e) repeating (a) through (d). Increased growth rate and 100% step coverage and conformality are attained. | 03-03-2016 |
| 20160079036 | Systems and Methods for Suppressing Parasitic Plasma and Reducing Within-Wafer Non-Uniformity - A substrate processing system for depositing film on a substrate includes a processing chamber defining a reaction volume. A showerhead includes a stem portion having one end connected adjacent to an upper surface of the processing chamber. A base portion is connected to an opposite end of the stem portion and extends radially outwardly from the stem portion. The showerhead is configured to introduce at least one of process gas and purge gas into the reaction volume. A plasma generator is configured to selectively generate RF plasma in the reaction volume. An edge tuning system includes a collar and a parasitic plasma reducing element that is located around the stem portion between the collar and an upper surface of the showerhead. The parasitic plasma reducing element is configured to reduce parasitic plasma between the showerhead and the upper surface of the processing chamber. | 03-17-2016 |
| 20160079057 | SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATINGTHICKNESS CHANGES AT SUBSTRATE EDGES - A substrate processing system for depositing film on a substrate includes a processing chamber defining a reaction volume and including a substrate support for supporting the substrate. A gas delivery system is configured to introduce process gas into the reaction volume of the processing chamber. A plasma generator is configured to selectively generate RF plasma in the reaction volume. A clamping system is configured to clamp the substrate to the substrate support during deposition of the film. A backside purging system is configured to supply a reactant gas to a backside edge of the substrate to purge the backside edge during the deposition of the film. | 03-17-2016 |
| 20160090650 | METHOD AND APPARATUS FOR RF COMPENSATION IN PLASMA ASSISTED ATOMIC LAYER DEPOSITION - The embodiments herein relate to methods, apparatus, and systems for depositing film on substrates. In these embodiments, the substrates are processed in batches. Due to changing conditions within a reaction chamber as additional substrates in the batch are processed, various film properties may trend over the course of a batch. Disclosed herein are methods and apparatus for minimizing the trending of film properties over the course of a batch. More specifically, film property trending is minimized by changing the amount of RF power used to process substrates over the course of the batch. Such methods are sometimes referred to as RF compensation methods. | 03-31-2016 |
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| 20090258890 | TOPOISOMERASE-TARGETING AGENTS - The invention provides compounds of formula I or formula II: | 10-15-2009 |
| 20100240664 | SOLUBILIZED TOPOISOMERASE POISON AGENTS - The invention provides compounds of formula I: | 09-23-2010 |
| 20110230531 | THERAPEUTIC COMPOUNDS - The invention provides compounds of formula (I) wherein A, B, R | 09-22-2011 |
| 20120004235 | METHODS TO TREAT CANCER - The invention provides methods and pharmaceutical compositions for treating certain cancers with compounds of formula (I) wherein A, B, W, Y, Z, and R | 01-05-2012 |
| 20120022061 | BENZO [C] PHENANTHRIDINES AS ANTIMICROBIAL AGENTS - The present invention provides compounds of formula I: formula (I) wherein X | 01-26-2012 |
| 20120046234 | THERAPEUTIC COMPOUNDS - The invention provides compounds of formula I, II, and III as defined herein, as well as salts thereof. The compounds may have activity as anti-proliferative agents. | 02-23-2012 |
| 20120059026 | ANTIMICROBIAL AGENTS - The invention provides a compound of formula (I): or a salt or prodrug thereof, wherein Y, W, Z, Z | 03-08-2012 |
| 20120071527 | THERAPEUTIC COMPOUNDS - The invention provides compounds of formula I: | 03-22-2012 |
| 20120101117 | METHYLENEDIOXYBENZO [I] PHENANTHRIDINE DERIVATIVES USED TO TREAT CANCER - The invention provides compounds of formula I: wherein A, B, X, and Y have any of the values defined in the specification, as well as pharmaceutical compositions comprising such compounds, processes for preparing such compounds, and therapeutic methods for treating cancer and other topoisomerase mediated conditions. | 04-26-2012 |
| 20120237531 | TOPOISOMERASE INHIBITORS - The invention provides compounds of formula I: (I) wherein A, B, W, Y, Z, R | 09-20-2012 |
| 20120238595 | THERAPEUTIC COMPOUNDS - The invention provides compounds of formula (I) wherein u, d, v, m, n, R | 09-20-2012 |
| 20130109713 | ANTIMICROBIAL AGENTS | 05-02-2013 |
| 20140315939 | ANTIMICROBIAL AGENTS - The invention provides a compound of formula I: | 10-23-2014 |
| 20140350024 | ANTIMICROBIAL AGENTS - The invention provides methods of treating a bacterial infection in a mammal comprising administering to the mammal a substituted bicyclic heteroaromatic ring compound of formula I: wherein two of X | 11-27-2014 |
| 20150031694 | ANTIMICROBIAL AGENTS - The invention provides compounds of formula (I): wherein R | 01-29-2015 |
| 20150133465 | ANTIMICROBIAL AGENTS - The invention provides compounds of formula (I): | 05-14-2015 |
| 20150232454 | THERAPEUTIC HYDROXYPYRIDINONES, HYDROXYPYRIMIDINONES AND HYDROXYPYRIDAZINONES - The invention provides compounds of formula (I): and salts and prodrugs thereof wherein R4, X1 and X2 have any of the meanings defined in the specification, as well as pharmaceutical compositions comprising the compounds or salts and methods for their use in therapy. The compounds have useful antiviral properties. | 08-20-2015 |
| 20150291531 | THERAPEUTIC HYDROXYQUINOLONES - The invention provides compounds of formula (I) and salts thereof wherein R | 10-15-2015 |
| 20150307517 | ANTIMICROBIAL AGENTS - The invention provides compounds of formula (I): | 10-29-2015 |
| 20150322022 | THERAPEUTIC CATECHOLS - The invention provides compounds of formula I: | 11-12-2015 |
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| 20090287375 | METHOD FOR DETERMINING ABSOLUTE STEERING WHEEL ANGLE FROM A SINGLE-TURN STEERING WHEEL ANGLE SENSOR - A method and algorithm for determining a steering wheel angle of a vehicle steering mechanism upon power up of a vehicle using a single-turn steering wheel angle sensor by eliminating plausible steering wheel angles until one and only one steering wheel angle possibility remains. | 11-19-2009 |
| 20110184603 | DIRECTION DETERMINATION FOR ACTIVE PARK ASSIST - A vehicle has a hybrid electric system and a parking assist system. The hybrid electric system includes at least one motor outputting a direction-indicating speed signal. The parking assist system configured for affecting steering and speed control of the vehicle for maneuvering the vehicle into a target parking location. Affecting the steering and speed control of the vehicle dependent upon parking assist control information derived using the direction-indicating speed signal. | 07-28-2011 |
| 20110260887 | VEHICLE PARK ASSIST WITH STEERING CENTERING - A park assist system for parking a vehicle in a parking space makes steering control inputs and prompts the vehicle driver to make necessary brake and/or gear shift actions to execute a desired steering trajectory. After the vehicle is properly parked, the park assist system actuates the steering system to place it in a centered condition. | 10-27-2011 |
| 20120090395 | METHOD AND SYSTEM FOR COMPENSATION OF ULTRASONIC SENSOR - A system and method for compensating ultrasonic sensors mounted on a vehicle for speed of sound variations. The ultrasonic sensor is operatively coupled to a power train control module having a pressure sensor that continuously monitors atmospheric pressure and a controller configured for computing a compensated speed of sound using the monitored atmospheric pressure. The ultrasonic sensor sends an ultrasonic wave and determines the time lag in receiving the reflected ultrasonic wave from an object. Subsequently, the ultrasonic sensor generates a signal corresponding to the relative distance between the vehicle and the object using the compensated speed of sound and the time lag. | 04-19-2012 |
| 20120256766 | INTEGRATION OF GLOBAL POSITIONING SYSTEM AND ACTIVE PARKING ASSIST FUNCTIONALITIES - A vehicle has a global positioning system and an active parking assist system. The global positioning system is configured for providing information designating a present location of the vehicle and for providing information designating configuration of a target parking location proximate to the present location of the vehicle. The active parking assist system is configured to affect maneuvering of the vehicle into the target parking location. The active parking assist system is coupled to the global positioning system for acquiring the present location information therefrom and the target parking location information therefrom. The active parking assist system determines a type of assisted parking functionality to implement for affect maneuvering of the vehicle into the target parking location dependent upon the present location information and the target parking location information. | 10-11-2012 |
| 20120271512 | DETECTION OF AND COUNTER-MEASURES FOR JACKKNIFE ENABLING CONDITIONS DURING TRAILER BACKUP ASSIST - A vehicle comprises a trailer angle detection apparatus and a trailer backup control system coupled to the trailer angle detection apparatus. The trailer angle detection apparatus is configured for outputting a signal generated as a function of an angle between the vehicle and a trailer towably attached to the vehicle. The trailer backup control system includes a jackknife enabling condition detector and a jackknife counter-measures controller. The jackknife counter-measures controller alters a setting of at least one vehicle operating parameter for alleviating an adverse jackknife condition during backing of the trailer by the vehicle when the jackknife enabling condition detector determines that a jackknife enabling condition has been attained at a particular point in time during backing of the trailer by the vehicle. | 10-25-2012 |
| 20120271514 | ROTATABLE DRIVER INTERFACE FOR TRAILER BACKUP ASSIST - A trailer backup steering input apparatus is coupled to a vehicle. The trailer backup steering input apparatus comprises a rotatable control element (e.g., a knob) and a rotatable control element movement sensing device. The rotatable control element biased to an at-rest position between opposing rotational ranges of motion. The rotatable control element movement sensing device is coupled to the rotatable control element for sensing movement of the rotatable control element. The rotatable control element movement sensing device outputs a signal generated as a function of an amount of rotation of the rotatable control element with respect to the at-rest position, a rate movement of the rotatable control element, and/or a direction of movement of the rotatable control element with respect to the at-rest position. | 10-25-2012 |
| 20120271515 | TRAILER PATH CURVATURE CONTROL FOR TRAILER BACKUP ASSIST - A vehicle has a trailer backup steering input apparatus, a trailer backup assist control module coupled to the a trailer backup steering input apparatus, and an electric power assist steering system coupled to the trailer backup assist control module and. The trailer backup steering input apparatus is configured for outputting a trailer path curvature signal approximating a desired curvature for a path of travel of a trailer towably coupled to the vehicle. The trailer backup assist control module is configured for determining vehicle steering information as a function of the trailer path curvature signa. The electric power assist steering system is configured for controlling steering of steered wheels of the vehicle as a function of the vehicle steering information. | 10-25-2012 |
| 20120271522 | MANAGING JACKKNIFE ENABLING CONDITIONS DURING BACKING OF A TRAILER BY REDUCING SPEED OF A VEHICLE BACKING THE TRAILER - A vehicle comprises a trailer angle detection apparatus and a trailer backup control system. The trailer angle detection apparatus is configured for outputting hitch angle information generated as a function of an angle between the vehicle and a trailer towably attached thereto. The trailer backup control system includes a jackknife enabling condition detector and a jackknife counter-measures controller coupled to the trailer angle detection apparatus. The jackknife enabling condition detector is coupled to the trailer angle detection apparatus for receiving the hitch angle information therefrom and for determining if a jackknife enabling condition has been attained at a particular point in time during backing of the trailer by the vehicle. The jackknife counter-measures controller implements a vehicle speed reducing action in response to the jackknife enabling condition detector determining that the jackknife enabling condition has been attained at the particular point in time during backing of the trailer. | 10-25-2012 |
| 20130151080 | POWER ON DEMAND STEERING WHEEL ANGLE SENSOR - A system for powering a steering angle sensor coupled to a steering wheel and a controller comprising a switch, coupled to the sensor and the controller. The switch is activated upon motion of the steering wheel or steering shaft. The switch, when activated, connects a power supply, such as a vehicle battery, to the sensor and the controller so that a new steering angle may be sensed and stored. After a predetermined period of time, the controller sends a signal to deactivate the switch and disconnect the power supply. | 06-13-2013 |
| 20130311059 | VELOCITY SENSITIVE PASSENGER VEHICLE TRAILER BRAKE CONTROLLER - A method of controlling a trailer brake system using a trailer brake controller positioned within a passenger vehicle is provided. The method includes obtaining intended braking inputs and developing an effective baseline trailer brake controller output profile based thereon. The method scales the effective baseline trailer brake controller output profile in response to an adjustable gain setting set by an operator. A vehicle velocity is obtained and used to calculate a correction factor to the effective baseline trailer brake controller output profile. The effective baseline trailer brake controller output profile is then adjusted using the correction factor to generate a corrected trailer brake controller output signal. | 11-21-2013 |
| 20140021912 | VEHICLE BATTERY CHARGING SYSTEM AND METHOD - A vehicle includes a battery, a charge plate electrically connected with the battery, and a sensor that detects objects in a vicinity of the charge plate. The vehicle also includes a control system that causes an association signal to be repeatedly transmitted during a battery charge procedure to maintain charging of the battery via the charge plate, and in response to an object being detected in the vicinity of the charge plate, causes the transmission of the association signal to be interrupted to stop charging of the battery. | 01-23-2014 |
| 20140046545 | DETECTION OF AND COUNTER-MEASURES FOR JACKKNIFE ENABLING CONDITIONS DURING TRAILER BACKUP ASSIST - A trailer backup control system includes a jackknife enabling condition detector and a jackknife counter-measures controller. The jackknife counter-measures controller alters a setting of at least one vehicle operating parameter for alleviating an adverse jackknife condition during backing of the trailer by the vehicle when the jackknife enabling condition detector determines that a jackknife enabling condition has been attained at a particular point in time during backing of the trailer by the vehicle, restricts a trailer backup steering input apparatus and issues a warning to the driver using the trailer backup steering input apparatus. | 02-13-2014 |
| 20140052337 | TRAILER BACKUP ASSIST SYSTEM - The trailer backup assist system has a human machine interface coupled to a controller having a setup module, a calibration module, an activation module and a control module configured to receive trailer measurements, apply trailer measurements, activate and control vehicle systems to calibrate and implement a curvature control algorithm that controls the reverse movement of the vehicle-trailer combination in a manner consistent with a driver request. | 02-20-2014 |
| 20140058614 | TRAILER MONITORING SYSTEM AND METHOD - A vehicle trailer backup assist system and method includes a hitch angle detection apparatus and a target monitor controller. The target monitor controller processes images acquired of the trailer towed by a towing vehicle to assist with placement of a target on the trailer. The target monitor controller also monitors the target and provides feedback to the user as to proper positioning of the target on the trailer. A target move detection routine detects movement of a target by processing the pixels of the image to determine if a new trailer has been connected. Further, a trailer connection monitoring routine monitors for a changed trailer based on loss of the hitch angle or target for a predetermined time period. | 02-27-2014 |
| 20140067223 | BRAKE PRESSURE APPLY - A method for brake pressure apply in a hydraulic brake system includes commanding a cage clearance reduction phase and commanding a wheel control phase subsequent to the cage clearance reduction phase. Accordingly, the cage clearance is reduced prior to entering the wheel control phase. A method for cage clearance reduction in a hydraulic brake system for roll stability control is also provided. | 03-06-2014 |
| 20140188344 | SYSTEM AND METHOD OF CALIBRATING A TRAILER BACKUP ASSIST SYSTEM - A system and a method are provided for calibrating a backup assist system for a trailer attached to a vehicle. The method includes driving the vehicle forward substantially straight above a threshold speed, sensing a yaw rate of the vehicle, and sensing a measured hitch angle of the trailer. A yaw sensor continuously senses the yaw rate of the vehicle and a hitch sensor continuously measures the hitch angle for determining an angle rate based on the measured hitch angle. Further, a controller determines an offset between the measured hitch angle and an actual hitch angle when the yaw rate and angle rate are substantially zero or otherwise the same. | 07-03-2014 |
| 20140188346 | SYSTEM AND METHOD FOR DETERMINING A HITCH ANGLE OFFSET - A system and a method are provided for estimating an actual hitch angle between a vehicle and a trailer. A hitch sensor on the vehicle continuously senses a measured hitch angle and a steering sensor continuously senses a steering angle of steered wheels of the vehicle. A controller determines an offset between the measured hitch angle and the actual hitch angle when the measured hitch angle and the steering angle are substantially constant while the vehicle and trailer are reversing. | 07-03-2014 |
| 20140218506 | SYSTEM AND METHOD FOR CALCULATING A HORIZONTAL CAMERA TO TARGET DISTANCE - A system and method for calculating a horizontal camera to target distance is provided. A camera on board a vehicle is configured to image a target on a trailer that is aligned with the vehicle. A controller is in communication with the camera and is supplied a user-obtained measurement. The controller is configured to calculate a first horizontal distance and a second horizontal distance, and to sum the first and second horizontal distances to calculate a horizontal camera to target distance. | 08-07-2014 |
| 20140218522 | TRAILER ACTIVE BACK-UP ASSIST WITH LANE WIDTH HMI - A vehicle comprises a communication interface for enabling information to be communicated to a and from an occupant of the vehicle and a trailer back-up assist system coupled to the communication interface. The trailer back-up assist system is operable for determining a selected width of a lane within which the vehicle and an attached trailer are to be backed from a current position of the vehicle to reach a targeted location for the attached trailer and for outputting to the occupant of the vehicle via the communication interface information characterizing an ability of the vehicle to be backed within the lane from the current position of the vehicle. | 08-07-2014 |
| 20140222288 | TRAILER ACTIVE BACK-UP ASSIST WITH OBJECT AVOIDANCE - A trailer back-up assist apparatus comprises an obstacle sensing system operable to output information characterizing proximity of a object adjacent to a vehicle-trailer combination while the vehicle-trailer combination is being backed toward a targeted location and a trailer back-up assist system correction apparatus coupled to the obstacle sensing system. The trailer back-up assist system uses the information characterizing proximity of the object to determine if a path of the vehicle-trailer combination needs to be altered to limit a potential of the vehicle-trailer combination colliding with the object and implements a path correction action to alter the path of travel of the vehicle-trailer combination to reduce the potential for the vehicle-trailer combination colliding with the object. | 08-07-2014 |
| 20140239891 | VEHICLE BATTERY CHARGING SYSTEM AND METHOD - A vehicle includes a battery and a charge plate electrically connected with the battery. The vehicle also includes a control system that causes an association signal to be repeatedly transmitted during a battery charge procedure to maintain charging of the battery via the charge plate, and in response to an object being detected in the vicinity or predicted to enter the vicinity of the charge plate, causes the transmission of the association signal to be interrupted to stop charging of the battery. | 08-28-2014 |
| 20140267689 | SYSTEM AND METHOD FOR ADJUSTING AN IMAGE CAPTURE SETTING - An imaging system and method of a trailer backup assist system is provided and includes a camera having an image sensor. The camera is mounted on the rear of a vehicle and images a target provided on a trailer. A controller is included for adjusting an image capture setting of the camera based on a status input from a vehicle lighting system, image data from the camera, and locational input from a positioning device. | 09-18-2014 |
| 20140288777 | DETECTION OF AND COUNTER-MEASURES FOR JACKKNIFE ENABLING CONDITIONS DURING TRAILER BACKUP ASSIST - A vehicle comprises a trailer angle detection apparatus and a trailer backup control system coupled to the trailer angle detection apparatus. The trailer angle detection apparatus is configured for outputting a signal generated as a function of an angle between the vehicle and a trailer towably attached to the vehicle. The trailer backup control system includes a jackknife enabling condition detector and a jackknife counter-measures controller. The jackknife counter-measures controller alters a setting of at least one vehicle operating parameter for alleviating an adverse jackknife condition during backing of the trailer by the vehicle when the jackknife enabling condition detector determines that a jackknife enabling condition has been attained at a particular point in time during backing of the trailer by the vehicle. | 09-25-2014 |
| 20140297128 | TRAILER LENGTH ESTIMATION IN HITCH ANGLE APPLICATIONS - A vehicle system for estimating a trailer length is disclosed and includes a first sensor for measuring a wheel steer angle and a second sensor for measuring a hitch angle. A processor is in communication with the first and second sensors and is operable to determine a wheel steer angle change and a hitch angle change. The processor performs a first computation if the wheel steer angle change and the hitch angle change satisfy a threshold requirement and performs a second computation if at least one of the wheel steer angle change and the hitch angle change does not satisfy the threshold requirement. | 10-02-2014 |
| 20140297129 | TRAILER LENGTH ESTIMATION IN HITCH ANGLE APPLICATIONS - A vehicle system for estimating a trailer length is disclosed and includes a first sensor for measuring a wheel steer angle and a second sensor for measuring a hitch angle. A processor is in communication with the at least one sensor and is operable to determine a ratio between the wheel steer angle and the hitch angle, generate a running average of the ratio, and calculate the trailer length based on an average ratio between the wheel steer angle and the hitch angle. | 10-02-2014 |
| 20140303847 | OBJECT AVOIDANCE FOR A TRAILER BACKUP ASSIST SYSTEM - A trailer backup assist system, according to one embodiment, includes a steering input device for inputting a desired backing path of a trailer. The trailer backup assist system also includes a first sensor that senses a hitch angle between a vehicle and the trailer. Further, the trailer backup assist system includes a second sensor that senses a proximity of an object in a perimeter field of at least one of the vehicle and the trailer. A controller of the trailer backup assist system generates an available set of backing paths for the trailer based on the proximity of the object and the hitch angle. The available set of backing paths does not include backing paths that cross a space occupied by the object or that cause a jackknife condition between the vehicle and the trailer. | 10-09-2014 |
| 20140309887 | TRAILER ANGLE DETECTION TARGET PLAUSIBILITY - According to one aspect of the present invention, a system for determining target plausibility is comprised of an imaging device for imaging a scene and generating image data, sensors for generating hitch angle measurements, steering angle measurements, and vehicle speed measurements. A controller in communication with the imaging device and the sensors, wherein when a driving condition is satisfied, the controller calculates a hitch angle and selects a plausible target from the imaged scene based on the image data and the calculated hitch angle. | 10-16-2014 |
| 20140324295 | HITCH ANGLE MONITORING SYSTEM AND METHOD - A hitch angle monitoring system and method are provided. A display shows an imaged scene of a hitch connection between a tow vehicle and a trailer. A processor is configured to superimpose an overlay on the imaged scene, wherein the overlay indicates a hitch angle position limit. A hitch angle position indicator is shown on the display and visually relates a current hitch angle position to the hitch angle position limit. | 10-30-2014 |
| 20140343793 | TRAILER BACKUP ASSIST SYSTEM WITH NORMALIZED STEERING INPUT DEVICE FOR DIFFERENT TRAILERS - A trailer backup assist system for a vehicle reversing a trailer, according to one embodiment, includes a sensor that senses a hitch angle between the vehicle and the trailer. The trailer backup assist system also includes a steering input device movable between a plurality of successive positions that each provide an incremental change to a desired curvature of the trailer. In addition, the trailer backup assist system includes a controller that generates a steering command for the vehicle to guide the trailer on the desired curvature based on the sensed hitch angle and a kinematic relationship with the trailer. The incremental change is substantially equal for a population of trailers to normalize control of the desired curvature. | 11-20-2014 |
| 20140343795 | OFFSET COMPENSATION FOR TRAILER BACKUP ASSIST STEERING INPUT DEVICE - A trailer backup assist system for a vehicle reversing a trailer, according to one embodiment, includes a sensor that senses a hitch angle between the vehicle and the trailer. The trailer backup assist system may also include a steering input device, such as a rotatable knob, that is movable between a plurality of positions that each provide a desired curvature of the trailer. In addition, the trailer backup assist system may include a controller that determines an offset of the desired curvature when the knob is stationary in a central position. The control then generates a steering command for the vehicle to guide the trailer on the desired curvature, taking into consideration the offset. | 11-20-2014 |
| 20140358417 | SYSTEM FOR DETERMINING HITCH ANGLE - A system for determining a hitch angle between a vehicle and trailer is provided. The system includes an imaging device disposed on the trailer. A first navigation system is disposed on-board the vehicle. A second navigation system is integrated with the imaging device. A controller determines the hitch angle based on data received from the first navigation system and the second navigation system. | 12-04-2014 |
| 20140358424 | SYSTEM AND METHOD OF INPUTTING AN INTENDED BACKING PATH - A path input system is provided. The path input system includes at least one imaging device for generating image data. A GPS device is included for generating satellite image data. A controller generates an aerial view of a vehicle and a trailer based on the image data and the satellite data. A display is included for displaying the aerial view and registering a touch event thereon that inputs an intended path for the vehicle and the trailer. | 12-04-2014 |
| 20140379217 | MAXIMUM TRAILER ANGLE DETERMINATION AND CONTROL FOR A TRAILER BACKUP ASSIST SYSTEM - The trailer backup assist system has a human machine interface coupled to a controller having a setup module, a calibration module, an activation module and a control module configured to receive trailer measurements, apply trailer measurements, activate and control vehicle systems to calibrate and implement a curvature control algorithm that controls the reverse movement of the vehicle-trailer combination in a manner consistent with a driver request. When incorrect trailer measurements have been entered, the trailer backup assist system recognizes the error, initiates a warning and requests corrective action to correct the trailer measurements. Default values for a maximum controllable curvature limit and a maximum controllable angle replace the limits calculated and applied by the calibration model that used incorrect trailer measurements, until corrected trailer measurements may be entered by the driver. | 12-25-2014 |
| 20140379219 | TRAILER BACKUP ASSIST CURVATURE CONTROL - A vehicle has a trailer backup steering input apparatus, a trailer backup assist control module coupled to the a trailer backup steering input apparatus, and an electric power assist steering system coupled to the trailer backup assist control module and. The trailer backup steering input apparatus is configured for outputting a trailer path curvature signal approximating a desired curvature for a path of travel of a trailer towably coupled to the vehicle. The trailer backup assist control module is configured for determining vehicle steering information as a function of the trailer path curvature signal. The electric power assist steering system is configured for controlling steering of steered wheels of the vehicle as a function of the vehicle steering information. | 12-25-2014 |
| 20150057903 | TRAILER HEADING ANGLE USING VEHICLE WHEEL SPEED SENSORS - A system and method of calculating a heading angle for a trailer that is being backed by a vehicle. A trailer backup assist control module, in communication with a hitch angle detecting apparatus, receives a hitch angle and determines displacement of left and right vehicle wheels using information supplied by vehicle wheel speed sensors while the vehicle is backing the trailer. A vehicle heading angle is determined using left and right wheel displacement information and a known vehicle track width. A trailer heading angle is then calculated using the vehicle heading angle and the hitch angle. | 02-26-2015 |
| 20150066296 | TRAILER IDENTIFICATION SYSTEM FOR TRAILER BACKUP ASSIST - A system and method for configuring a trailer backup assist system. The system and method communicates predetermined trailer parameters, which are embedded on a tag attached to the trailer, to a controller in the trailer backup assist system. A trailer backup assist system is configured using the predetermined trailer parameters and the configured trailer backup assist system is activated to operate using the trailer parameters. | 03-05-2015 |
| 20150120141 | METHODS AND SYSTEMS FOR CONFIGURING OF A TRAILER MANEUVERING SYSTEM - A system for configuring a trailer model for a trailer maneuvering system is disclosed. The system comprises a controller having a memory and being operable to communicate with the trailer maneuvering system. The controller is configured to receive trailer dimensional data from a mobile device. The trailer dimensional data may then be stored in the memory as a first trailer profile. The controller is operable to access the trailer dimensional data in the first trailer profile to determine at least one vehicle operation configured to maneuver the trailer. | 04-30-2015 |
| 20150134183 | INTUITIVE DRIVER INTERFACE FOR TRAILER BACKUP ASSIST - A trailer backup steering input apparatus is coupled to a vehicle. The trailer backup steering input apparatus comprises a rotatable control element (e.g., a knob) and a rotatable control element movement sensing device. The rotatable control element biased to an at-rest position between opposing rotational ranges of motion. The rotatable control element movement sensing device is coupled to the rotatable control element for sensing movement of the rotatable control element. The rotatable control element movement sensing device outputs a signal generated as a function of an amount of rotation of the rotatable control element with respect to the at-rest position, a rate movement of the rotatable control element, and/or a direction of movement of the rotatable control element with respect to the at-rest position. | 05-14-2015 |
| 20150134201 | TIRE WINDUP COMPENSATION - A system for measuring and compensating for tire windup occurring in road wheels during parking events. A controller receives data comprising a steering motor current and steering system component movement, from that data determines the amount of tire windup is present, and controls the motor to turn a road wheel to an initial position that allows the tire windup to turn the road wheel to a final position. The final desired position of the road wheel may be one for the desired location of the road wheel itself, for the steering wheel, or for a combination of the two. Final desired angular positions of the steering wheel may be one such that an ignition may have greater visibility or one such that the steering wheel is not locked under load. | 05-14-2015 |
| 20150138340 | TARGET MONITORING SYSTEM AND METHOD - A target monitoring system and method are provided herein. An imager is configured to image a scene rearward of a vehicle and containing a target disposed on a trailer attached to the vehicle. A controller is configured to receive images from the imager, modify each image to increase the size of the imaged target, and analyze the modified images to determine at least one trailer related information. | 05-21-2015 |
| 20150197282 | TRAILER BACKUP ASSIST SYSTEM WITH OBJECT DETECTION - A system for backing a vehicle and a trailer is provided herein. A sensing system is configured to detect objects located in an operating environment of the vehicle and trailer. A backup assist system is configured to communicate with the sensing system and automatically control a braking system of the vehicle to slow or stop the vehicle during a backing maneuver. | 07-16-2015 |
| 20150251693 | Trailer backup assist system using gesture commands and method - A trailer target detection system includes a camera located on a vehicle and arranged to capture video images of a trailer towed by the vehicle. The system includes an image processor processing the video images to detect a gesture by a user indicative of position of target on the trailer and identifying location of the target based on the detected gesture. A vehicle trailer backup assist system includes a camera and an image processor for processing images to detect a gesture and determine a command based on the gesture. The processor controls backing of the trailer based on the command. | 09-10-2015 |
| 20150251697 | VEHICLE TARGET IDENTIFICATION USING HUMAN GESTURE RECOGNITION - A trailer target detection system includes a camera located on a vehicle and arranged to capture video images of a trailer towed by the vehicle. The system includes an image processor processing the video images to detect a gesture by a user indicative of position of target on the trailer and identifying location of the target based on the detected gesture. A vehicle trailer backup assist system includes a camera and an image processor for processing images to detect a gesture and determine a command based on the gesture. The processor controls backing of the trailer based on the command. | 09-10-2015 |
| 20150344067 | TRAILER CURVATURE CONTROL WITH ADAPTIVE TRAILER LENGTH ESTIMATION - An apparatus for determining a jackknife condition of a vehicle and trailer is disclosed. The apparatus comprises a processor operable to set an operating range of a hitch angle to a minimum range. The processor monitors the hitch angle while the vehicle is operated in a forward direction and increases the operating range based on the hitch angle observed during the monitoring. The processor is further operable to utilize the increased operating range to prevent a jackknife condition during a guided reverse operation of the vehicle. | 12-03-2015 |
| 20150345938 | LUMINESCENT HITCH ANGLE DETECTION COMPONENT - A lighting system for a trailer is provided herein. The lighting system may include a hitch angle detection component disposed on the trailer. A light source is disposed on the vehicle. A photoluminescent structure is disposed on the hitch angle detection component and configured to luminesce in response to excitation by the light source. The hitch angle detection component may further include a predetermined image pattern of a certain size and shape provided on the top surface thereof for capture by an imaging device and recognition by an image processing unit. | 12-03-2015 |
| 20150345939 | ILLUMINATED HITCH ANGLE DETECTION COMPONENT - A lighting system for a trailer assembly is provided herein. The lighting system includes a hitch angle detection component having a predefined pattern thereon. A light source is disposed within the hitch angle detection component. A photoluminescent structure is disposed on the light source. The photoluminescent structure is configured to luminesce in response to excitation by light output from at least a portion of the light source. | 12-03-2015 |
| 20150367886 | CONTROL MODES FOR A TRAILER BACKUP ASSIST SYSTEM - A trailer backup assist system, according to one embodiment, provides a sensor that senses a hitch angle between a trailer and a vehicle. The trailer backup assist system also provides a selection device for selecting a longitudinal direction of the trailer or the vehicle in a static orientation. Further, the trailer backup assist system provides a controller that generates a steering command to the vehicle when reversing based on the hitch angle to guide the trailer in the selected longitudinal direction. The controller determines a kinematic relationship of the trailer and the vehicle based on a length of the trailer and a wheelbase of the vehicle, whereby the steering command is generated based on the kinematic relationship. | 12-24-2015 |
| 20160023525 | TRAILER SWAY WARNING SYSTEM AND METHOD - A trailer sway warning system, according to one embodiment, includes a hitch angle sensor for sensing a hitch angle between a vehicle and a trailer. The trailer sway warning system includes a vehicle sensor for sensing a dynamic parameter of the vehicle, such as a steering angle rate or a yaw rate of the vehicle. Further, the trailer sway warning system includes a controller that generates a warning signal when the hitch angle is oscillating at a magnitude that exceeds a warning threshold and the dynamic parameter is substantially constant. | 01-28-2016 |
| 20160023526 | HITCH ANGLE WARNING SYSTEM AND METHOD - A hitch angle warning system includes a camera-based hitch angle sensor that senses a hitch angle between a vehicle and a trailer. The hitch angle warning system also includes a controller that estimates an amount of time for the hitch angle to reach a threshold angle based on a rate of change of the hitch angle. The threshold angle may be set to a maximum hitch angle controllable by the vehicle based on a length of the trailer. The controller thereby generates a warning signal when the amount of time is less than a threshold time, which is configured to be greater or equal to than a response time of a driver of the vehicle to make a corrective action. The warning signal may be deactivated when the amount of time is greater than a second time that is greater than the threshold time. | 01-28-2016 |
| 20160031482 | TRAILER BACKUP ASSIST SYSTEM WITH ACTIVE TRAILER BRAKING FOR CURVATURE CONTROL - A trailer backup assist system for a vehicle, according to one embodiment, includes a trailer coupled with the vehicle. The trailer of the trailer backup assist system has a braking system. The trailer backup assist system also includes a sensor that senses a hitch angle between the vehicle and the trailer. In addition, the trailer backup assist system includes a steering input device that provides a desired curvature of the trailer. The trailer backup assist system further includes a controller generating a steering command based on the hitch angle for the vehicle to guide the trailer on the desired curvature and an actuation command for the braking system to reduce a rearward travel distance for the trailer to achieve the desired curvature. | 02-04-2016 |
| 20160039456 | TRAILER BACKUP OFFSET DETERMINATION - A system for calibrating a backup assist system for a trailer attached to a vehicle is provided which includes a hitch sensor continuously measuring a hitch angle for determining an angle rate, a yaw sensor continuously sensing a yaw rate of the vehicle, and a controller configured to determine an offset of the measured hitch angle when vehicle is driving forward and/or rearward. | 02-11-2016 |
| 20160059780 | TRAILER ANGLE DETECTION TARGET FADE WARNING - A method of detecting degradation of an optical target on a trailer. The method includes generating a first set of data corresponding to optical characteristics of an optical target on a trailer. The method also includes generating a second set of data corresponding to optical characteristics of an optical target on a trailer after generating the first set of data. The method further includes providing an alert if differences between the first and second sets of data exceed predefined criteria indicating that the target has degraded. The predefined criteria may comprise fading or other suitable optical characteristics of the target. | 03-03-2016 |
| 20160075369 | Autopark Steering Wheel Snap Reduction - A system and strategy for reducing rapid steering wheel movement at the end of an autopark maneuver. The strategy includes maintaining or ramping-out power-steering motor torque to reduce steering wheel movement that may occur due to tire windup that has occurred up to that point in the autopark maneuver. The strategy may include the stopping of an autopark maneuver at any time during the maneuver, or functioning at the end of an autopark maneuver. The autopark event may be a park-out maneuver. | 03-17-2016 |
| 20160101811 | TRAILER SENSOR MODULE AND ASSOCIATED METHOD OF WIRELESS TRAILER IDENTIFICATION AND MOTION ESTIMATION - A method of identifying a trailer with a vehicle includes a step of transmitting a unique identifier with a wireless transmitter attached to the trailer. The wireless transmitter may be housed as part of a sensor module with a sensor that senses a parameter of the trailer for operating a trailer backup assist system. The housing of the sensor module may be adapted to be removably attached to the trailer. The unique identifier emitted by the wireless transmitter is received with a wireless receiver on the vehicle. After the unique identifier is recognized by a controller on the vehicle, a parameter of the trailer may be accessed for autonomously guiding the trailer along a desired backing path. | 04-14-2016 |
