Patent application number | Description | Published |
20090021119 | Angular velocity sensor and manufacturing method thereof - A substrate is made of single crystal silicon and having a tuning folk shape. The substrate includes plural arms extending in parallel with each other and a joint section for connecting respecting ends of the arms with each other. An angular velocity sensor includes a barrier layer containing silicon oxide provided on each of the arms of the substrate, a first adhesion layer containing titanium provided on the barrier layer a first electrode layer containing at least one of titanium and titanium oxide provided on the first adhesion layer, an orientation control layer provided on the first electrode layer, a piezoelectric layer provided on the orientation control layer, a second adhesion layer provided on the piezoelectric layer, and a second electrode layer provided on the second adhesion layer. This angular velocity sensor has a small size and stable characteristics. | 01-22-2009 |
20100125988 | PROCESS FOR FABRICATING PIEZOELECTRIC ELEMENT - A method for fabricating a piezoelectric element capable of ensuring high piezoelectric characteristics by preventing generation of unnecessary electric field in a piezoelectric thin film layer during the fabrication process. The method for fabricating a piezoelectric element comprises a first step for depositing a lower electrode layer, a piezoelectric thin film layer and an upper electrode layer sequentially on a substrate, a second step for performing etching including dry etching, a third step for performing polarization by applying a voltage between the lower electrode layer and the upper electrode layer, and a fourth step for segmenting into individual piezoelectric elements wherein the lower electrode layer and the upper electrode layer are held in short circuit state at least when dry etching is performed. | 05-27-2010 |
20100296147 | OPTICAL REFLECTION ELEMENT - An optical reflection device includes a mirror having a reflection surface configured to reflect light, a first support beam connected to the mirror, a tuning fork vibrator connected to the first support beam, a second support beam connected to the tuning fork vibrator, and a supporter connected to the second support beam. The first support beam has a first end connected to the mirror and a second end located on an opposite side to the first end, and extends along a center axis. The tuning fork vibrator includes a joining portion connected to the second end of the first support beam, a first arm extending from the first joining portion while separated from the first center axis, and a second arm extending from the first joining portion symmetrically to the first arm about the first center axis. The second support beam has a third end connected to the joining portion of the tuning fork vibrator and a fourth end located on an opposite side to the third end, and extends along the first center axis. | 11-25-2010 |
20110032590 | MEANDERING OSCILLATOR, OPTICAL REFLECTING ELEMENT USING MEANDERING OSCILLATOR, AND IMAGE PROJECTION DEVICE USING MEANDERING OSCILLATOR - A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved. | 02-10-2011 |
20110101828 | PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME - A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the piezoelectric layer, and the piezoelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the piezoelectric element realizes the piezoelectric layer having a high orientation in a polarization axis direction, high proportionality of a displacement amount with respect to an applied voltage, and a large absolute value of the displacement amount. | 05-05-2011 |
20120113492 | OPTICAL REFLECTION ELEMENT - An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode. | 05-10-2012 |
20120206019 | PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME - A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the piezoelectric layer, and the piezoelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the piezoelectric element realizes the piezoelectric layer having a high orientation in a polarization axis direction, high proportionality of a displacement amount with respect to an applied voltage, and a large absolute value of the displacement amount. | 08-16-2012 |
20120320439 | OPTICAL REFLECTION ELEMENT - An optical reflection element has a frame, a pair of meandering-shaped vibration elements, a mirror having a reflection surface, and a pair of protective beams. The vibration elements have their respective outer ends supported by confronting portions of an inside of the frame. The vibration elements support the mirror with respective inner ends thereof. The protective beams extend from the respective confronting portions of the inside of the frame toward the mirror with a predetermined space from the vibration elements and in parallel with a vibration axis of the vibration elements. | 12-20-2012 |
20130050791 | OPTICAL REFLECTION ELEMENT - An optical reflection element includes a frame, a meandrous vibrating part having an outer end connected with an inside of the frame, and a mirror part supported by an inner end of the meandrous vibrating part. The meandrous vibrating part has a meandrous shape that includes curved portions and vibrating beams alternately connected with the curved portions. A curvature of respective one of the curved portions is smaller than a curvature of at least one of the curved portions which is located closer to the inner end than the respective one of the curved portions. This optical reflection element has a large deflection angle of the mirror part. | 02-28-2013 |
20130107339 | OPTICAL REFLECTION ELEMENT | 05-02-2013 |
20130271804 | VIBRATING ELEMENT HAVING MEANDERING SHAPE, AND OPTICAL REFLECTION ELEMENT - A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes. | 10-17-2013 |
20140339427 | INFRARED SENSOR ELEMENT - An infrared sensor element according to the present invention includes a substrate, and a lower electrode layer, a pyroelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the pyroelectric layer, and the pyroelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the infrared sensor element realizes the pyroelectric layer having a high orientation in a polarization axis direction, an excellent pyroelectric property. | 11-20-2014 |
20140368087 | PIEZOELECTRIC ACTUATOR DEVICE AND METHOD FOR MANUFACTURING SAME - A piezoelectric actuator device includes a vibrator and a driver to vibrate the vibrator. The vibrator includes a lower vibration layer configured to vibrate and an upper vibration layer coupled to an upper surface of the lower vibration layer and configured to vibrate together with the lower vibration layer. The driver includes an upper electrode layer on a lower surface of the lower vibration layer, a piezoelectric layer on a lower surface of the upper electrode layer, and a lower electrode layer on a lower surface of the piezoelectric layer. The lower vibration layer of the vibrator is made of organic material. The upper vibration layer is mainly made of inorganic material. The lower vibration layer has a smaller longitudinal elastic modulus than the upper vibration layer. The piezoelectric actuator device has a large resistance to disturbance vibrations and a large warping amount of the vibrator without increasing power consumption. | 12-18-2014 |
20140368896 | OPTICAL REFLECTING ELEMENT AND ACTUATOR - An optical reflecting device includes a movable plate having a reflecting surface, a first support portion, a first drive part, a first frame, and a monitor part for detecting the rotation of the movable plate. The first support portion is connected to the movable plate. The first drive part is formed in the first support portion and rotates the movable plate about a first axis. The first frame contains the movable plate and the first support portion, and is connected to the first support portion. The monitor part extends from that portion of the outer periphery of the movable plate which is most distant from the first axis. | 12-18-2014 |
20140375898 | SCANNING MIRROR AND SCANNING IMAGE DISPLAY DEVICE - A scanning mirror includes a mirror unit configured to reflect a laser beam, a supporter configured to cause the mirror unit to rotate and oscillate, and an oscillation sensor configured to output a monitor signal indicating oscillation of the mirror unit. A photodetector detects an intensity of the laser beam. When a value of the monitor signal falls out of a predetermined range of a normal operation and a value of the intensity detected by the photodetector fails to decrease, a breaking signal for causing the supporter to oscillate more than a breaking limit angle of the supporter is input. This scanning mirror and an image projection device using this scanning mirror can display an image at sufficient brightness safely. | 12-25-2014 |
20150036201 | OPTICAL REFLECTION ELEMENT - An optical reflection element includes a fixed portion having a pair of sides opposite to each other, a pair of first vibration portions having one ends each connected to respective one of the sides of the fixed portion, a pair of connection portions each connected to respective one of another ends of the first vibration portions, a movable frame rotatably supported by another ends of the first vibration portions via the connection portions, a pair of second vibration portions having one ends each connected to respective one of a pair of sides of the movable frame, and a mirror rotatably connected to another ends of the second vibration portions. The second vibration portions are configured to transmit a rotational vibration about a rotation axis to the mirror. The connection portions are connected to the movable frame in a direction of the rotation axis. The connection portions are connected to a part of the movable frame at which a displacement of the movable frame due to the rotational vibration of the mirror has a minimum amount. This optical reflection element reduces unnecessary vibration, and projects clear images. | 02-05-2015 |
20150049155 | ACTUATOR, OPTICAL REFLECTING ELEMENT, AND IMAGE FORMING DEVICE USING OPTICAL REFLECTING ELEMENT - An actuator includes a frame, a driver portion having one end connected to an inside of the frame, a movable portion connected to another end of the driver portion, and an electrode provided at the movable portion. The driver portion vibrates the movable portion by being driven by a driving signal. The electrode receives a high-frequency signal higher than that of the driving signal. This actuator is driven at a high speed by a large deflection angle, and can prevent dust from adhering to the movable portion. | 02-19-2015 |