Patent application number | Description | Published |
20090140374 | SEMICONDUCTOR DEVICE WITH IMPROVED CONTROL ABILITY OF A GATE AND METHOD FOR MANUFACTURING THE SAME - Disclosed is a semiconductor device capable of improving a control ability of a gate and enhancing operation characteristics of the gate. The semiconductor device comprises a semiconductor substrate having a recessed active region. An isolation structure is formed to define the recessed active region in the semiconductor substrate and the isolation structure includes a trench, a side wall insulation layer formed over the surface of the trench, and an insulation layer formed over the side wall insulation layer to fill the trench. A portion of the side wall insulation layer adjoining a gate forming area of the recessed active region is removed to form a moat, and a gate is formed over the semiconductor substrate including the moat. | 06-04-2009 |
20100207092 | PHASE CHANGE MEMORY DEVICE SWITCHED BY SCHOTTKY DIODES AND METHOD FOR MANUFACTURING THE SAME - A phase change memory device and a method for manufacturing the same is presented. The phase change memory device includes a semiconductor substrate, a bit line, switching elements, bottom electrodes, a phase change layer, and top electrodes. The semiconductor substrate has a cell area and a peripheral area. The bit line is formed on the semiconductor substrate. The switching elements are formed on portions of the bit line in the cell area. The bottom electrodes are formed on the switching elements. The phase change layer is formed on the bottom electrodes. The top electrodes are formed on the phase change layer. | 08-19-2010 |
20100301305 | PHASE CHANGE MEMORY DEVICE WITH ALTERNATING ADJACENT CONDUCTION CONTACTS AND FABRICATION METHOD THEREOF - A phase change memory device and an associated method of making same are presented. The phase change memory device, includes first wiring lines, second wiring lines, memory cells, and conduction contacts. The first wiring lines are arranged substantially in parallel to each other so that the first wiring lines are grouped into odd and even numbered first wiring lines. The memory cells are coupled to the first and second wiring lines. The conduction contacts coupled to the first wiring lines so that only one conduction contact is coupled to a center of a corresponding odd numbered first wiring line. Also only two corresponding conduction contacts are coupled to opposing edges of a corresponding even numbered first wiring line. Accordingly, the conduction contacts are arranged on the first wiring lines so that conduction contacts are not adjacent to each other with respect to immediately adjacent first wiring lines. | 12-02-2010 |
20110076824 | FABRICATION METHOD OF PHASE CHANGE RANDOM ACCESS MEMORY DEVICE - A method of fabricating a phase change random access memory device includes forming a sacrificial layer of a predetermined height within a bottom electrode contact hole. The method also includes forming an insulating layer on a whole resultant structure including the bottom electrode contact hole. The method also includes forming a spacer on a sidewall of the bottom electrode contact hole by etching the insulating layer and removing the sacrificial layer. | 03-31-2011 |
20110143477 | METHOD OF MANUFACTURING A PHASE CHANGE MEMORY DEVICE USING A CROSS PATTERNING TECHNIQUE - A method of manufacturing a phase change memory device is provided. A first insulating layer having a plurality of metal word lines spaced apart at a constant distance is formed on a semiconductor substrate. A plurality of line structures having a barrier metal layer, a polysilicon layer and a hard mask layer are formed to be overlaid on the plurality of metal word lines. A second insulating layer is formed between the line structures. Cross patterns are formed by etching the hard mask layers and the polysilicon layers of the line structures using mask patterns crossed with the metal word lines. A third insulating layer is buried within spaces between the cross patterns. Self-aligned phase change contact holes are formed and at the same time, diode patterns formed of remnant polysilicon layers are formed by selectively removing the hard mask layers constituting the cross patterns. | 06-16-2011 |
20120149163 | PHASE CHANGE MEMORY DEVICE WITH ALTERNATING ADJACENT CONDUCTION CONTACTS AND FABRICATION METHOD THEREOF - A phase change memory device and an associated method of making same are presented. The phase change memory device, includes first wiring lines, second wiring lines, memory cells, and conduction contacts. The first wiring lines are arranged substantially in parallel to each other so that the first wiring lines are grouped into odd and even numbered first wiring lines. The memory cells are coupled to the first and second wiring lines. The conduction contacts coupled to the first wiring lines so that only one conduction contact is coupled to a center of a corresponding odd numbered first wiring line. Also only two corresponding conduction contacts are coupled to opposing edges of a corresponding even numbered first wiring line. Accordingly, the conduction contacts are arranged on the first wiring lines so that conduction contacts are not adjacent to each other with respect to immediately adjacent first wiring lines. | 06-14-2012 |
20140254256 | VERTICAL TYPE SEMICONDUCTOR DEVICE, FABRICATION METHOD THEREOF AND OPERATION METHOD THEREOF - A vertical type semiconductor device and a fabrication method thereof are provided. The vertical type semiconductor device includes a pillar structure having a stacking structure of a conductive layer and a data storage material and formed on a common source region, and a gate electrode formed to surround the data storage material of the pillar structure. | 09-11-2014 |
20140308786 | HIGH-INTEGRATION SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor memory device includes a semiconductor substrate, an active region including a plurality of unit active regions and disposed over and spaced from the semiconductor substrate, a pair of word lines formed on a top surface and sides of the unit active region, a dummy word line disposed at a contact of the unit active regions and formed on top surfaces and sides of the unit active regions, a source region in the unit active region between the pair of word lines and electrically connected to the semiconductor substrate, drain regions formed in the unit active region between the pair of word lines and the dummy word line, and first storage layers formed on the drain regions and electrically connected to the drain regions. | 10-16-2014 |
20140319451 | MEMORY CELL ARRAY AND VARIABLE RESISTIVE MEMORY DEVICE INCLUDING THE SAME - A memory cell array includes a semiconductor substrate, a first word line formed on the semiconductor substrate, a second word line formed on the semiconductor substrate and extending substantially parallel to the first word line, a first inter-pattern insulating layer interposed between the first and second word lines, first active pillars formed within the first word line and arranged along the first word line at a first interval, and second active pillars formed within the second word lines, and arranged along the second word line to face the first active pillars, respectively, with the first inter-pattern insulating layer interposed therebetween. | 10-30-2014 |
20140367769 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device forms a salicide layer to surround an upper surface and a circumference of a lateral surface of a pillar. A contact area between the pillar and a lower electrode may be increased to reduce a contact resistance. | 12-18-2014 |