Patent application number | Description | Published |
20110102986 | ELECTRONIC EQUIPMENT WITH HINGE MECHANISM - In the electronic equipment of the present application, a center axis of a cylindrical portion | 05-05-2011 |
20110199730 | ELECTRONIC APPARATUS - An electronic apparatus includes the following: a heat dissipation chamber that is formed by liquid tightly separating the inside of s main unit case with a partition, has an inlet air vent and an outlet air vent in the partition, and includes a heat dissipation portion; a cooling fan that is located in the heat dissipation chamber; an inlet that is provided in the main unit case to introduce outside air into the heat dissipation chamber through the inlet air vent; and an outlet that is provided in the main unit case to exhaust an air flow sent from the cooling fan to the outside through the outlet air vent. An air channel that extends from the inlet air vent through a side wall of the main unit case to communicate the heat dissipation chamber with the inlet is liquid tightly sealed from the internal space of the main unit case with a sealing wall. A plurality of plate-shaped ribs are provided in the air channel so as to extend in a flow path direction and arranged in a lateral direction of the inlet air vent. The rigidity of the main unit case can be ensured sufficiently while maintaining the liquid tightness between the inside of the main unit case and the heat dissipation chamber. | 08-18-2011 |
20110211300 | ELECTRONIC DEVICE PROVIDED WITH COVER - An electronic device includes: a first housing | 09-01-2011 |
20110211312 | BLOWER AND ELECTRIC APPARATUS INCLUDING THE SAME - A blower includes a fan, an inlet through which air is drawn into the fan, and an outlet through which an air flow from the fan is exhausted. The inlet and the outlet have slits with a specific width or an array of through holes with a specific diameter. The relationship A09-01-2011 | |
20110222237 | ELECTRONIC APPARATUS PROVIDED WITH COOLING STRUCTURE - An electronic apparatus includes a first chamber in which a heat generator is arranged and a second chamber separated with a partition from the first chamber. The electronic apparatus is provided with a first cabinet having the partition and an isolation wall that encloses to seal the first chamber, a second cabinet enclosing the second chamber and having an intake port and an exhaust port, a thermoconductive member arranged in the first chamber and connected thermally to the heat generator and to the partition, a heat collecting-radiating member arranged in the second chamber and connected thermally to the partition, and an air blower arranged in the second chamber so as to circulate the air in the second chamber. | 09-15-2011 |
20120059162 | FUSED IMIDAZOLE DERIVATIVE HAVING TTK INHIBITORY ACTION - Provided are a compound represented by general formula (1) and having a TTK inhibitory action and a medicine containing the compound. In formula (1), (X, Y, V, W) is (—N═, ═CR | 03-08-2012 |
20120106043 | ELECTRONIC APPARATUS - Provided is an electronic device that is user-friendly in both hand-held use and table-placed use, and furthermore is highly reliable with respect to external impact. The electronic device includes a main body part and a support member. The support member connected by the connection part are attached to a pivot shaft that is disposed on the rear surface side of the main body part, such that the support member can pivot from a position at which the connection part protrudes outward beyond an outer edge of the main body part in a plan view from the front surface side of the main body part. At least a portion of the support member is at the same position as or a position more rearward than the portion of the main body part that protrudes the most rearward. | 05-03-2012 |
20120208813 | 3-CARBAMOYL-2-PYRIDONE DERIVATIVES - The present invention provides compounds having an agonistic activity to the cannabinoid receptor, which is represented by the formula (I): | 08-16-2012 |
20120243152 | Holding Device and Electronic Device Including the Same - A holding device includes a plurality of holding sections each including a recess or an opening through which a hand of a user can be inserted; and a connection section connecting the plurality of holding sections to each other. When the holding device is fixed to two surfaces of an electronic device which are adjacent to each other, a handle that can be held by the user with a hand and a grip belt that can be supported by the user with the hand can be connected to each other via the connection section. Thus, the number of parts can be reduced and management of parts is easy. | 09-27-2012 |
20120250240 | Extension Device and Information Processing System Including the Same - An information processing system includes: a main device including first and second engagement portions in a principal surface and a third engagement portion in a surface on the main-device side reverse from the principal surface; and an extension device including a placement portion on which the main device is placed, a first wall portion provided standing on one edge side of the placement portion, a second wall portion facing the first wall portion across the placement portion, a first engaging portion and a second engaging portion formed in the first wall portion, and a third engaging portion formed in the second wall portion. The first engaging portion engages the first engagement portion, the second engaging portion engages the second engagement portion, and the third engaging portion engages the third engagement portion. In the information processing system, the main device can be prevented from being improperly mounted on the extension device. | 10-04-2012 |
20120257342 | Extension Device and Information Processing System Including the Same - A main device includes fixing portions that fix a holding device to one principal surface thereof and project from the one principal surface. An extension device includes a placement portion on which the main device is placed and a wall portion on which the placement portion is provided in a standing manner. The wall portion that faces the one principal surface, to which the holding device is fixed, in a parallel relation, has such a shape as to not interfere with the fixing portions that fix the holding device of the main device, when the main device is placed on the placement portion. The main device can be mounted on the extension device with the holding device mounted thereon, and time and effort to remove the holding device can be saved when the main device is mounted on the extension device. | 10-11-2012 |
20130044418 | Electronic Device | 02-21-2013 |
20130044420 | ELECTRONIC DEVICE | 02-21-2013 |
20140009883 | MOBILE COMPUTING DEVICE - An electronic apparatus includes a first chamber in which a heat generator is arranged and a second chamber separated with a partition from the first chamber. The electronic apparatus is provided with a first cabinet having the partition and an isolation wall that encloses to seal the first chamber, a second cabinet enclosing the second chamber and having an intake port and an exhaust port, a thermoconductive member arranged in the first chamber and connected thermally to the heat generator and to the partition, a heat collecting-radiating member arranged in the second chamber and connected thermally to the partition, and an air blower arranged in the second chamber so as to circulate the air in the second chamber. | 01-09-2014 |
20150212554 | ELECTRONIC DEVICE PROVIDED WITH COVER - An electronic device includes: a first housing | 07-30-2015 |
20150299223 | 2-SUBSTITUTED CEPHEM COMPOUNDS - The present invention relates to 2-substituted cephem compounds of Formula (I) having a quaternary ammonium group on the 3-side chain, preferably together with a cathechol group, or pharmaceutically acceptable salts thereof, which exhibit potent antimicrobial spectrum against a variety of bacteria including Gram negative bacteria and/or Gram positive bacteria, corresponding pharmaceutical compositions, methods of making, treatment methods for bacterial infections or uses thereof. | 10-22-2015 |
20150362953 | ELECTRONIC APPARATUS - An electronic apparatus of the present invention has a bottom surface on which a first connection terminal is disposed, and a rear surface on which a second connection terminal is disposed. The first connection terminal and the second connection terminal are formed on a common substrate. An edge formed by the bottom surface and the rear surface is formed by the substrate. The electronic apparatus is to be connected to an expansion unit including a first connection-target terminal to which the first connection terminal is to be connected and a second connection-target terminal to which the second connection terminal is to be connected. | 12-17-2015 |
Patent application number | Description | Published |
20090198713 | COMMUNICATION APPARATUS AND COMMUNICATION METHOD - When stored stream data is deleted/edited, the packet sequence completely included in a deletion range is deleted from the stream data, and the stream data is segmented into first stream data before the start point of the deletion range and second stream data after the end point of the deletion range. First and second stream management data corresponding to the first and second stream data are generated. The index value of the packet including the start point of the deletion range is written in the header of the first stream management data. The index value of the packet including the end point of the deletion range is written in the header of the second stream management data. In addition, an index base value for correcting the index value is written in the header of the second stream management data. | 08-06-2009 |
20090208003 | Authentication Method, Host Computer and Recording Medium - According to one embodiment, a host computer updates the media key block MKB in a first updatable memory device in the case where the version number of the media key block MKB read from a recording medium is newer than that of the media key block MKB in the first updatable memory device. The host computer generates a medium unique key Kmu based on a media key Km calculated from the media key block MKB read from the recording medium and a media ID read from the recording medium. The host computer executes the authentication and key exchange AKE process with the recording medium based on the medium unique key Kmu. | 08-20-2009 |
20100017626 | INFORMATION PROCESSING APPARATUS, AUTHENTICATION METHOD, AND STORAGE MEDIUM - According to one embodiment, a storage medium comprises an encrypted content, key management information which is updated whenever necessary and includes a media key block including encrypted media keys obtained by encrypting a media key which is a base of an authentication key used for mutual authentication with another apparatus by using different device keys, and first and second application keys which encrypt the title keys for each application of the content and are alternately updated and encrypted when the key management information is updated. | 01-21-2010 |
20100250934 | CONTENT PROTECTION DEVICE AND CONTENT PROTECTION METHOD - According to one embodiment, a content protection device includes a writing module configured to write protection information into file management information item in order to protect a content which is specified to be protected, wherein the writing module is configured to write the protection information corresponding to sectors which stores content key management information file includes content key link information item includes content key position information item of encrypted content key corresponding to content which is specified to be protected, or to write protection information corresponding to at least part of a sectors which stores content key management file includes encrypted content key corresponding to content which is specified to be protected. | 09-30-2010 |
20100268953 | RECORDING DEVICE, AND CONTENT-DATA PLAYBACK SYSTEM - A recording device configured to store content data in an encrypted manner, the recording device comprises a memory unit which stores various data, and a controller which controls the memory unit. The controller possesses a controller key and unique identification information, and is configured to generate a controller-unique key unique for each controller in accordance with the controller key and the identification information. The memory unit stores an MKB generated by encrypting a medium key with a device key set that is a collection of a plurality of device keys, an encrypted device key set generated by encrypting the device key set with the controller-unique key, and a device-key-set index which uniquely identifies the device key set. The controller comprises a decryption unit which obtains a device key set by decrypting the encrypted device key set with the controller-unique key, an ID generating unit which generates a medium ID from the identification information and the device-key-set index, and an authentication unit which executes an authentication process with an exterior in accordance with the device key set, the medium ID and the MKB. | 10-21-2010 |
20110091032 | METHOD AND APPARATUS FOR INFORMATION REPRODUCTION - According to one embodiment, a content recording apparatus including, a key preparing section configured to prepare a key to encrypt an acquired stream, a file preparing section configured to add identification information to the acquired stream to prepare a file, a hash calculating section configured to calculate a hash value concerning the identification information added to the stream by the file preparing section, a key file preparing section configured to integrate the hash value calculated by the hash calculating section and the key prepared by the key preparing section to prepare a key file, and a writing section configured to write the key file prepared by the key file preparing section in the protected area of a recording medium. | 04-21-2011 |
20120272065 | Authentication Method, Host Computer and Recording Medium - According to one embodiment, a host computer updates the media key block MKB in a first updatable memory device in the case where the version number of the media key block MKB read from a recording medium is newer than that of the media key block MKB in the first updatable memory device. The host computer generates a medium unique key Kmu based on a media key Km calculated from the media key block MKB read from the recording medium and a media ID read from the recording medium. The host computer executes the authentication and key exchange AKE process with the recording medium based on the medium unique key Kmu. | 10-25-2012 |
20130060830 | REMOTE ACCESS SYSTEM, ELECTRONIC APPARATUS AND METHOD OF PROCESSING REMOTE ACCESS - According to one embodiment, an electronic apparatus includes a first module and a second module. The first module receives a remote command from another electronic apparatus and transmits a response to the remote command to the other electronic apparatus. The remote command includes command type information indicating a type of the local command. The second module issues one or more local commands including the local command to the storage device and transmits a first response from the storage device to the other electronic apparatus by storing the first response into a second response to the remote command, in accordance with a process specified by the command type information in the remote command. | 03-07-2013 |
20130061015 | ACCESS CONTROL APPARATUS AND ACCESS CONTROL SYSTEM - According to one embodiment, an access control apparatus includes a medium communication module configured to perform communication with a removable medium, a access module configured to perform access to the removable medium using the communication module, a wireless communication module configured to perform wireless communication with a external device, and to receive access request to the removable medium, and a controller configured to assign an access right to access the removable medium to one of the access module and the external device, the control module assigning the access right in response to a request of assignment of the access right, the request being transmitted from the external device or the access module. | 03-07-2013 |
20130326142 | ELECTRONIC DEVICE AND DATA TRANSFER METHOD - According to one embodiment, an electronic device including, a communication module configured to transfer data, a controller configured to transmit data to the second electronic device through the communication module, and configured to temporarily hold the data in a receiving buffer of the second electronic device, and a data controller configured to receive free space information of the receiving buffer of the second electronic device from the second electronic device through the communication module, and configured to prepare data, which is transmitted to each mobile medium from the communication module through the second electronic device, based on the received free space information. | 12-05-2013 |
20130326628 | ELECTRONIC DEVICE - According to one embodiment, an electronic device including, an acquiring module configured to acquire, via the external device, contents which are held in a contents holding medium and which are protected by the first contents protection scheme, and an output module configured to convert the acquired contents protected by the first contents protection scheme to the second contents protection scheme and then outputs the contents to the external device by the second contents protection scheme. | 12-05-2013 |
20140040634 | RECORDING DEVICE, AND CONTENT-DATA PLAYBACK SYSTEM - A recording device configured to store content data in an encrypted manner, the recording device comprises a memory unit which stores various data, and a controller which controls the memory unit. The controller possesses a controller key and unique identification information, and is configured to generate a controller-unique key unique for each controller in accordance with the controller key and the identification information. The memory unit stores an MKB generated by encrypting a medium key with a device key set that is a collection of a plurality of device keys, an encrypted device key set generated by encrypting the device key set with the controller-unique key, and a device-key-set index which uniquely identifies the device key set. | 02-06-2014 |
20140059273 | HOST APPARATUS AND MEMORY DEVICE - According to one embodiment, a host apparatus is capable of accessing memory device. The host apparatus includes application software, a dedicated file system, and an interface circuit. The application software issues, to a file system, a request for access to the memory device. The dedicated file system manages a memory area of the memory device in accordance with a method appropriate to a flash memory in response to the access request. The dedicated file system manages logical address spaces by predetermined unit areas, and sequentially writes data into one of reserved unit areas. The application software issues the access request to the dedicated file system without recognizing a size of the unit area. | 02-27-2014 |
20140337626 | CONTENT REPRODUCING DEVICE, CONTENT REPRODUCING METHOD, AND CONTENT REPRODUCING SYSTEM - According to one embodiment, a content reproducing device is provided with connection unit and reproducing unit. The connection unit connects a license server and removable medium to each other in such a manner that mutual authentication can be carried out between the license server and removable medium, and rights information can be downloaded from the license server to the removable medium. The reproducing unit carries out mutual authentication between itself and the removable medium and, when the authentication is successful, acquires rights information recorded on the removable medium to thereby decrypt the encrypted content item delivered by the content server on the basis of the rights information, and subject the decrypted content item to streaming reproduction. | 11-13-2014 |
20150261941 | RECORDING DEVICE, AND CONTENT-DATA PLAYBACK SYSTEM - A recording device configured to store content data in an encrypted manner, the recording device comprises a memory unit which stores various data, and a controller which controls the memory unit. The controller possesses a controller key and unique identification information, and is configured to generate a controller-unique key unique for each controller in accordance with the controller key and the identification information. The memory unit stores an MKB generated by encrypting a medium key with a device key set that is a collection of a plurality of device keys, an encrypted device key set generated by encrypting the device key set with the controller-unique key, and a device-key-set index which uniquely identifies the device key set. | 09-17-2015 |
Patent application number | Description | Published |
20090025021 | OPTICAL DISC RECORDING AND REPRODUCING APPARATUS, OPTICAL DISC RECORDING AND REPRODUCING METHOD, AND OPTICAL DISC MANUFACTURING METHOD - The BCA recording and reproducing apparatus performs recording of data onto an optical disc placed on a recording turntable, reproduction of data recorded on an optical disc placed on a reproducing turntable and ejection of an optical disc placed on an exchanging table and placement of a new optical disc on the exchanging table in parallel. A processing time is thereby shortened compared with the case of performing data recording, reproduction and exchange in series. | 01-22-2009 |
20090232314 | APPARATUS, METHOD, AND COMPUTER PROGRAM PRODUCT FOR PROCESSING INFORMATION - An information processing apparatus performs mutual authentication with another information processing apparatus storing key management information and at least one of apparatus secret keys, the key management information containing encrypted secret keys each being a secret key encrypted with a different one of the apparatus secret keys respectively assigned to information processing apparatuses. The apparatus transmits, to the other apparatus, designation information specifying one of the encrypted secret keys decryptable with the apparatus secret key, out of the encrypted secret keys contained in the key management information usable by the apparatus, receives the encrypted secret key specified by the designation information out of the encrypted secret keys contained in the key management information stored in the other apparatus from the other apparatus, obtains the secret key by decrypting the encrypted secret key with the apparatus secret key, and performs authentication with the other apparatus based on the secret key. | 09-17-2009 |
20100333103 | INFORMATION PROCESSOR AND INFORMATION PROCESSING METHOD - According to one embodiment, an information processor includes a management module that manages a plurality of register areas in a host controller for processing data protected by copyright. The register areas store confidential information for copyright protection. The management module includes a use state management module and a release module. The use state management module manages use state information on whether the register areas are used by existing process tasks. When all the register areas are occupied by the existing process tasks and a new process task requests for the use of a register area to perform a process based on the confidential information, the release module releases a register area occupied by one of the existing process tasks according to the use state information to assign the register area to the new process task. | 12-30-2010 |
20110286146 | DIELECTRIC CERAMIC COMPOSITION AND CERAMIC ELECTRONIC COMPONENT - A dielectric ceramic composition includes BaTiO | 11-24-2011 |
20120075768 | DIELECTRIC CERAMIC COMPOSITION AND MANUFACTURING METHOD THEREOF, AND CERAMIC ELECTRONIC DEVICE - Dielectric ceramic composition comprising a compound having perovskite-type crystal structure and Y-oxide, and the compound is shown by a general formula ABO | 03-29-2012 |
20120252657 | DIELECTRIC CERAMIC COMPOSITION AND CERAMIC ELECTRONIC DEVICE - A dielectric ceramic composition comprises barium titanate as a main component, and as subcomponents, 1.00 to 2.50 moles of an oxide of Mg, 0.01 to 0.20 mole of an oxide of Mn and/or Cr, 0.03 to 0.15 mole of an oxide of at least one element selected from a group consisting of V, Mo and W, 0.20 to 1.50 mole of an oxide of R1 where R1 is at least one selected from a group consisting of Y and Ho, 0.20 to 1.50 mole of an oxide of R2 where R2 is at least one selected from a group consisting of Eu, Gd and Tb and 0.30 to 1.50 mole of an oxide of Si and/or B, in terms of each oxide with respect to 100 moles of the barium titanate. | 10-04-2012 |
20120310897 | ELECTRONIC DEVICE AND INFORMATION PROCESSING METHOD - According to one embodiment, an electronic device includes: a content processor configured to process content recorded in a recording medium; a first controller configured to, before the content processor terminates processing of the content, perform control such that status information indicating a processing status of the content recorded in the recording medium is changed from first information indicating a processing status of the content before start of the processing performed by the content processor to second information indicating a processing status of the content after termination of the processing performed by the content processor; and a second controller configured to, when the processing of the content performed by the content processor is not normally terminated, perform control such that the status information is changed from the second information to the first information. | 12-06-2012 |
20130087084 | MELTING EQUIPMENT - The melting equipment has a melting furnace that combusts and melts ash, a secondary combustion chamber disposed above the melting furnace, a slag extraction chute that guides slag generated in the melting furnace downward, a bypass channel ( | 04-11-2013 |
20130113917 | CIGARETTE INSPECTION APPARATUS - An image of the filter end faces of a bundle of cigarettes arranged side by side with axes thereof paralleled is acquired as an inspection image, and the diameters of the individual cigarettes of the bundle in the inspection image are obtained and compared with normal diameters associated with the respective cigarettes in the inspection image, to determine axial displacement of cigarettes from the bundle (first determination section). Also, the centers of gravity of the end faces of the individual cigarettes are obtained, and based on the difference between an inter-center-of-gravity distance which is the distance between an outermost cigarette in the bundle and its adjacent cigarette, and an inter-center-of-gravity distance which is the distance between adjacent cigarettes located in the central part of the bundle and belonging to the same tier as the outermost cigarette, axial displacement of the outermost cigarettes is determined (second determination section). | 05-09-2013 |
20130215259 | CIGARETTE INSPECTION APPARATUS - To analyze an inspection image obtained by taking an image of filter end faces of filter cigarettes horizontally arranged, from an axial direction, and thus inspect an excess cigarette feeding error, there are provided a first judging device that the number of cigarettes according to shape information of the filter end faces obtained from the inspection image, and a second judging device that obtains the centroid positions of the filter end faces from the inspection image, and detects that there is an excess feeding error when difference between a maximum value and a minimum value of the centroid-to-centroid distance of adjacent filter end faces is substantially equal to a previously-known diameter of the filter end face. | 08-22-2013 |
20130287285 | CIGARETTE INSPECTION DEVICE - A cigarette inspection device designed to obtain an image showing filter end faces of a bundle C of filtered cigarettes arranged side by side with their axes parallel to one another, analyze the image and determine whether the bundle is short of filtered cigarettes comprises a first determination section which determines how many filtered cigarettes are arranged side by side from contours of filter end faces in the image generated, and determines whether the bundle consists of a predetermined number of filtered cigarettes, and a second determination section which determines whether the first determination section has falsely recognized one cigarette as two. | 10-31-2013 |
20130319298 | FLUIDIZED BED GASIFICATION FURNACE - A fluidized bed gasification furnace includes a control device that identifies a defective fluidization spot of a fluidized bed based on distribution of temperatures detected by a plurality of temperature sensors, temporarily increases an amount of supplied combustion gas to air boxes located below the identified defective fluidization spot, and increases a speed of discharge of noncombustibles and a fluidization medium discharged by an extruder. | 12-05-2013 |
20130319300 | GASIFICATION MELTING FACILITY - This gasification melting facility includes: a fluidized bed gasification furnace that generates pyrolysis gas by thermally decomposing waste and discharges incombustibles; a vertical cyclone melting furnace that includes a pyrolysis gas duct through which the pyrolysis gas is introduced; a pyrolysis gas passage that connects the fluidized bed gasification furnace with the pyrolysis gas duct of the vertical cyclone melting furnace; pulverizer that pulverize the incombustibles into pulverized incombustibles so that the particle size of the incombustibles becomes fine; and airflow transporter that puts the pulverized incombustibles in the pyrolysis gas passage, and separating metal contained in the pulverized incombustibles by a difference in specific gravity while conveying the pulverized incombustibles together with airflow. The pyrolysis gas and the pulverized incombustibles are melted in the vertical cyclone melting furnace. | 12-05-2013 |
20130327258 | GARBAGE SUPPLY DEVICE - A garbage supply device, which supplies waste to a gasification furnace that gasifies waste, includes a casing, two feed screws provided in the casing, and a middle shaft that is provided between the two supply screws, has a plurality of protrusions, and is repeatedly rotated forward or backward. | 12-12-2013 |
20130340689 | COMBUSTION DEVICE - A combustion device includes a device main body having a combustion chamber installed above a cyclone melting furnace configured to combust a pyrolysis gas generated from a waste material after incineration while turning the pyrolysis gas, and configured to combust an unburnt gas discharged from the cyclone melting furnace. Further, the combustion device includes a plurality of sidewall boiler water pipes configured to cover a sidewall of the device main body from a periphery thereof and extending along the sidewall throughout upward and downward directions of the device main body. | 12-26-2013 |
20140000496 | WASTE MATERIAL SUPPLY DEVICE AND WASTE MATERIAL PROCESSING DEVICE | 01-02-2014 |
20140075207 | APPARATUS, METHOD, AND COMPUTER PROGRAM PRODUCT FOR PROCESSING INFORMATION - An information processing apparatus performs mutual authentication with another information processing apparatus storing key management information and at least one of apparatus secret keys, the key management information containing encrypted secret keys each being a secret key encrypted with a different one of the apparatus secret keys respectively assigned to information processing apparatuses. The apparatus transmits, to the other apparatus, designation information specifying one of the encrypted secret keys decryptable with the apparatus secret key, out of the encrypted secret keys contained in the key management information usable by the apparatus, receives the encrypted secret key specified by the designation information out of the encrypted secret keys contained in the key management information stored in the other apparatus from the other apparatus, obtains the secret key by decrypting the encrypted secret key with the apparatus secret key, and performs authentication with the other apparatus based on the secret key. | 03-13-2014 |
20140119542 | INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND INFORMATION PROCESSING PROGRAM PRODUCT - According to one embodiment, an information processing control method includes: receiving encrypted main video data obtained by encrypting main video data obtained by down-converting video data corresponding to an initial resolution of a content and encrypted sub video data obtained by encrypting sub video data as a difference between high-resolution video data obtained by up-converting the main video data and the video data corresponding to the initial resolution; acquiring a first encryption key corresponding to the encrypted sub video data; generating a second encryption key corresponding to the encrypted main video data from the first encryption key by using a one-way function; decoding the encrypted sub video data by using the first encryption key and decode the encrypted main video data by using the second encryption key generated; and processing each of the main video data and the sub video data obtained by decoding to generate the video data. | 05-01-2014 |
20140298613 | FOREIGN MATTER REMOVING APPARATUS AT TRACK BRANCH, AND NOZZLE USED IN THE SAME - Provided is a foreign matter removing apparatus at a track branch, and a nozzle used in this apparatus that are capable of sufficiently securing foreign matter removing performance as well as significantly reducing generation of noises. In the nozzle for the foreign matter removing apparatus at a track branch, compressed air supplied from piping is injected from each nozzle element. Slits are formed in each nozzle element, a sloped portion is formed at a front end of the nozzle element, and this sloped portion opposes a tongue rail. | 10-09-2014 |
20150082038 | DISPLAY CONTROL APPARATUS, DISPLAY CONTROL METHOD AND SERVER SYSTEM - A display control apparatus performs download processing and streaming processing. In the download processing, after first mutual authentication between removable media and a license server, the removable media receive and store a first title key from a license server and first encrypted content from a content server. In the streaming processing, the removable media and the license server perform second mutual authentication, the removable media receive and store a second title key and a content address from the license server, the removable media and the display control apparatus perform third mutual authentication, the display control apparatus acquires the second title key and the content address recorded on the removable media, the display control apparatus streams and receives second encrypted content from the content server, and the display control apparatus decodes the streamed-and-received second encrypted content using the second title key, and streams and reproduces the decoded second encrypted content. | 03-19-2015 |
Patent application number | Description | Published |
20090114156 | Film formation apparatus for semiconductor process - A film formation apparatus for a semiconductor process includes a support member having a plurality of support levels configured to support target substrates inside a reaction chamber; a film formation gas supply system configured to supply a film formation gas into the reaction chamber and including a gas distribution nozzle; a cleaning gas supply system configured to supply a cleaning gas for etching a by-product film deposited inside the reaction chamber; and an exhaust system configured to exhaust gas from inside the reaction chamber. The cleaning gas supply system includes a gas nozzle disposed near a bottom of the reaction chamber and having a gas supply port at its top directed upward, and the gas supply port is located below the lowermost one of the support levels of the support member. | 05-07-2009 |
20090117743 | Film formation apparatus and method for using same - A method for using a film formation apparatus for a semiconductor process to form a thin film on a target substrate inside a reaction chamber includes performing a cleaning process to remove a by-product film deposited on a predetermined region in a gas route from a film formation gas supply system, which supplies a film formation gas contributory to film formation, through the reaction chamber to an exhaust system, by alternately repeating an etching step and an exhaust step a plurality of times in a state where the reaction chamber does not accommodate the target substrate. The etching step includes supplying a cleaning gas in an activated state for etching the by-product film onto the predetermined region, thereby etching the by-product film. The exhaust step includes stopping supply of the cleaning gas and exhausting gas by the exhaust system from a space in which the predetermined region is present. | 05-07-2009 |
20090124083 | Film formation apparatus and method for using same - A method for using a film formation apparatus for a semiconductor process to form a thin film on a target substrate while supplying a film formation reactive gas from a first nozzle inside a reaction chamber includes performing a cleaning process to remove a by-product film deposited inside the reaction chamber and the first nozzle, in a state where the reaction chamber does not accommodate the target substrate. The cleaning process includes, in order, an etching step of supplying a cleaning reactive gas for etching the by-product film into the reaction chamber, and activating the cleaning reactive gas, thereby etching the by-product film, and an exhaust step of stopping supply of the cleaning reactive gas and exhausting gas from inside the reaction chamber. The etching step is arranged to use conditions that cause the cleaning reactive gas supplied in the reaction chamber to flow into the first nozzle. | 05-14-2009 |
20090124087 | Vertical plasma processing apparatus and method for using same - A vertical plasma processing apparatus for a semiconductor process for performing a plasma process on target substrates all together includes an exciting mechanism configured to turn at least part of a process gas into plasma. The exciting mechanism includes first and second electrodes provided to a plasma generation box and facing each other with a plasma generation area interposed therebetween, and an RF power supply configured to supply an RF power for plasma generation to the first and second electrodes and including first and second output terminals serving as grounded and non-grounded terminals, respectively. A switching mechanism is configured to switch between a first state where the first and second electrodes are connected to the first and second output terminals, respectively, and a second state where the first and second electrodes are connected to the second and first output terminals, respectively. | 05-14-2009 |
20090181548 | VERTICAL PLASMA PROCESSING APPARATUS AND METHOD FOR SEMICONDUCTOR PROCESS - A vertical plasma processing apparatus for a semiconductor process includes a process container having a process field configured to accommodate a plurality of target substrates at intervals in a vertical direction, and a marginal space out of the process field. In processing the target substrates, a control section simultaneously performs supply of a process gas to the process field from a process gas supply circuit and supply of a blocking gas to the marginal space from a blocking gas supply circuit to inhibit the process gas from flowing into the marginal space. | 07-16-2009 |
20100189927 | FILM FORMATION APPARATUS AND METHOD FOR USING SAME - A method for using a film formation apparatus includes performing a main cleaning process and a post cleaning process in this order inside a reaction chamber. The main cleaning process is arranged to supply a cleaning gas containing fluorine into the reaction chamber while exhausting gas from inside the reaction chamber, thereby etching a film formation by-product containing silicon. The post cleaning process is arranged to remove a silicon-containing fluoride generated by the main cleaning process and remaining inside the reaction chamber and to alternately repeat, a plurality of times, supplying an oxidizing gas into the reaction chamber to transform the silicon-containing fluoride into an intermediate product by oxidization, and supplying hydrogen fluoride gas into the reaction chamber while exhausting gas from inside the reaction chamber to remove the intermediate product by a reaction between the hydrogen fluoride gas and the intermediate product. | 07-29-2010 |
20100278999 | PLASMA PROCESS APPARATUS AND PLASMA PROCESS METHOD - A disclosed plasma process apparatus is disclosed that applies a plasma process to an object to be processed, including a cylindrical processing container configured to be evacuatable to vacuum, a holding unit configured to hold plural objects to be processed and inserted into and to be extracted from the cylindrical processing container, a gas supplying unit configured to supply a gas into the processing container, an activating unit configured to be located along a longitudinal direction of the processing container and to activate the gas by plasma generated by a high frequency power, a cylindrical shield cover configured to surround a periphery of the processing container and to be connected to ground for shielding from high frequency, and a cooling device configured to cause the cooling gas to flow through a space between the cylindrical shield cover and the cylindrical processing container during the plasma process. | 11-04-2010 |
20110201210 | FILM FORMATION METHOD, FILM FORMATION APPARATUS, AND METHOD FOR USING FILM FORMATION APPARATUS - A film formation method includes a film formation process for forming an SiO | 08-18-2011 |
Patent application number | Description | Published |
20100042840 | CONTENT SHARING SYSTEM AND METHOD - According to an aspect of the invention, there is provided a content sharing system including a first device configured to acquire a right object; a second device configured to acquire a content of the right object from the first device; a session key generation unit provided in the first device and the second device and configured to generate a session key based on mutual authentication; a temporary right object generation unit provided in the first device and configured to generate a temporary right object from the right object by using the session key to supply the generated temporary right to the second device; and a content play unit provided in the second device and configured to receive the temporary right object to play the content of the right object acquired from the first device by using the temporary right object. | 02-18-2010 |
20120213488 | TERMINAL DEVICE - A terminal device determines whether a clock is a secure clock or a self-running clock. If the clock is the self-running clock, the device stores a clocking time of the clock as a timestamp file in a memory card in recording content. In playing back the content, the device determines validity of a clocking time using the timestamp file to play back the content and also updates the stored time of the stored time as the timestamp file to a content playback start time. In contrast, if the clock is the secure clock, the device stores the timestamp file indicating a recording time of the content in the memory card only in recording the content and omits updating the stored time as the timestamp file in playing back the content. | 08-23-2012 |
20120237026 | DATA STRUCTURE OF MULTIMEDIA FILE FORMAT, ENCRYPTING METHOD AND DEVICE THEREOF, AND DECRYPTING METHOD AND DEVICE THEREOF - In a data structure of a multimedia file format, a movie box and a media data box are provided. In each box, a non-encrypted size field, a non-encrypted type field and box data field are provided. In box data of the movie box, information data regarding multimedia data is stored. The multimedia data is encrypted and stored in box data of the media data box. The information data is obtained by referring to the container in the movie box. This information data is held as encryption and encoding information data. By referring to the information data, a data unit of the encrypted multimedia data in the media data box is obtained, and the unit data is decrypted. | 09-20-2012 |
20130301831 | DATA STRUCTURE OF MULTIMEDIA FILE FORMAT, ENCRYPTING METHOD AND DEVICE THEREOF, AND DECRYPTING METHOD AND DEVICE THEREOF - In a data structure of a multimedia file format, a movie box and a media data box are provided. In each box, a non-encrypted size field, a non-encrypted type field and box data field are provided. In box data of the movie box, information data regarding multimedia data is stored. The multimedia data is encrypted and stored in box data of the media data box. The information data is obtained by referring to the container in the movie box. This information data is held as encryption and encoding information data. By referring to the information data, a data unit of the encrypted multimedia data in the media data box is obtained, and the unit data is decrypted. | 11-14-2013 |
Patent application number | Description | Published |
20090018699 | WORK POSITIONING DEVICE - Regarding predetermined positioning criteria (M | 01-15-2009 |
20110152517 | AGENT FOR PREVENTING AND/OR TREATING FUNCTIONAL GASTROINTESTINAL DISORDER - A preventive and/or therapeutic agent which improves an abnormal bowel function such as an abdominal pain, a diarrhea, or a constipation and is effective for preventing or treating a functional gastrointestinal disorder is provided. | 06-23-2011 |
20110239012 | IMAGE PROCESSING DEVICE - The image processing device involves a power-saving condition, which achieves the reduction in power consumption on standby, and the high-speed recovery from its power-saving condition to the normal condition. The image processing device has: a data processing unit which executes the processing of stream data; a communication-processing section which accepts input of a processing request from the data processing unit, and controls the data processing unit; and a nonvolatile memory unit which stores control information involved with data processing. The data processing unit has a power-saving mode in which no power source is supplied, and a normal operation mode in which the power source is supplied. In the power-saving operation mode, the communication-processing section causes the data processing unit to transition to the normal operation mode when detecting a processing request for data processing. Then, the data processing unit acquires control information from the nonvolatile memory, and executes data processing. | 09-29-2011 |
20150268899 | CONTROL APPARATUS, INFORMATION PROCESSING APPARATUS, AND INFORMATION PROCESSING SYSTEM - A control apparatus includes a first communication interface that is connected to a first communication line and performs communication via the first communication line, a second communication interface that is connected to a second communication line and performs communication via the second communication line, a power supplying unit that, in a first operational state, supplies power to the first and second communication interfaces and that, in a second operational state in which power consumption is lower than that in the first operational state, supplies power only to the second communication interface, and a switching unit that performs switching from the second operational state to the first operational state if, in the second operational state, a request for shifting to the first operational state is transmitted from a client apparatus connected to the first communication line to the second communication interface via the first and second communication lines. | 09-24-2015 |
Patent application number | Description | Published |
20110205589 | STORAGE DEVICE, SUBSTRATE, LIQUID CONTAINER, HOST DEVICE, AND SYSTEM - A storage device includes a storage section, a storage control section that controls access of the storage section, a control section that performs a process of communicating with a host device, and first to k-th (k is an integer of 2 or more) terminals. The control section outputs, to the host device, a response signal to give a notification that the corresponding storage device is connected, through an i-th (i is an integer where 1≦i≦k) terminal among the first to k-th terminals. The control section outputs the response signal to the host device in an m-th (m is an integer where 1≦m≦n) output time period, which corresponds to ID information of the corresponding storage device, among first to n-th (n is an integer of 2 or more) output time periods. | 08-25-2011 |
20110208991 | MEMORY DEVICE, BOARD, LIQUID CONTAINER, HOST DEVICE, AND SYSTEM - A memory device includes a memory unit, a memory control unit that controls an access of the memory unit, a control unit that performs a communication process with a host device, a data terminal, a reset terminal, and a clock terminal. The control unit outputs a response signal for reporting the connection of the memory device to the host device through the data terminal in an m-th clock cycle (m is at least an integer of 1≦m≦n) corresponding to ID information of the memory device among first to n-th clock cycles (n is an integer of 2 or more) of clocks input to the clock terminal. | 08-25-2011 |
20110276726 | STORAGE DEVICE, BOARD, LIQUID CONTAINER AND SYSTEM - To provide a storage device, a board, a liquid container, a system and the like, which are capable of efficiently detecting a connection without an increase in the number of terminals. A storage device | 11-10-2011 |
20120047410 | STORAGE DEVICE, CIRCUIT BOARD, LIQUID RESERVOIR AND SYSTEM - A storage device according to some aspects of the invention includes a communication unit configured to perform processing for communication with a host apparatus; a storage unit configured to have a first memory area and a second memory area that store therein received data from the host apparatus, and memory area selection information; a memory control unit configured to select one of the first memory area and the second memory area as a memory area for reading, select the other one thereof as a memory area for writing, and perform control of reading and writing; and an increment determination unit configured to compare a value of data having been read out from the memory area for reading by the memory control unit and a value of the received data to determine a magnitude relation therebetween. | 02-23-2012 |
20120074031 | STORAGE DEVICE, HOST DEVICE, CIRCUIT BOARD, LIQUID RECEPTACLE, AND SYSTEM - A storage device includes a control unit that carries out a communication process with a host device that is connected via a bus; a storage unit into which data from the host device is written; and a storage control unit that controls access to the storage unit. The control unit returns an acknowledgment to the host device in the case where the control unit has received acknowledgment return request information broadcasted from the host device to a plurality of storage devices connected to the bus after the end of a period in which data is written into the plurality of storage devices by the host device, and the data has been successfully written into the storage unit of the storage device to which the control unit belongs. | 03-29-2012 |
20120272018 | STORAGE DEVICE, HOST APPARATUS, CIRCUIT SUBSTRATE, LIQUID CONTAINER, AND SYSTEM - A storage device includes a control unit that performs a process of communicating with a host apparatus which is connected to the storage device through a bus, a storage unit into which data transmitted from the host apparatus are written, and a storage control unit that performs access control on the storage unit. The control unit receives an ID information item from the host apparatus after the end of a period of writing data from the host apparatus to m (m is an integer equal to or greater than 1) storage devices of a plurality of the storage devices connected to the bus, and returns an acknowledgement to the host apparatus if the data transmitted from the host apparatus have been successfully written to the storage unit of the storage device. | 10-25-2012 |
Patent application number | Description | Published |
20120156888 | SLIMMING METHOD OF CARBON-CONTAINING THIN FILM AND OXIDATION APPARATUS - A slimming method includes transferring an object to be processed on which a patterned carbon-containing thin film is formed into a process chamber in an oxidation apparatus; and oxidizing and removing the surface of the carbon-containing thin film by an oxidizing gas while supplying moisture into the process chamber, to reduce widths of the protruded portions on the pattern of the carbon-containing thin film. | 06-21-2012 |
20120164327 | FILM-FORMING METHOD AND FILM-FORMING APPARATUS FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM OR TUNGSTEN OXIDE FILM - A film-forming method includes forming a tungsten film or a tungsten oxide film on an object to be processed, forming a seed layer on the tungsten film or the tungsten oxide film, and forming a silicon oxide film on the seed layer, wherein the seed layer formed on the tungsten film or the tungsten oxide film is formed by heating the object to be processed and supplying an aminosilane-based gas to a surface of the tungsten film or the tungsten oxide film. | 06-28-2012 |
20130109197 | METHOD OF FORMING SILICON OXIDE FILM | 05-02-2013 |
20140004713 | FILM FORMATION METHOD, FILM FORMATION APPARATUS AND STORAGE MEDIUM | 01-02-2014 |
20140199839 | FILM-FORMING METHOD FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM OR TUNGSTEN OXIDE FILM - A film-forming method includes forming a tungsten film or a tungsten oxide film on an object to be processed, heating the object on which the tungsten film or the tungsten oxide film is formed, forming a seed layer on the tungsten film or the tungsten oxide film by supplying an aminosilane-based gas to a surface of the tungsten film or the tungsten oxide film, and forming a silicon oxide film on the seed layer by simultaneously supplying a silicon material gas including silicon and a gas including an oxidizing agent for oxidizing silicon. | 07-17-2014 |
20150087161 | FILM-FORMING METHOD FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM OR TUNGSTEN OXIDE FILM - A film-forming method includes forming a tungsten film or a tungsten oxide film on an object to be processed, forming a seed layer on the tungsten film or the tungsten oxide film, and forming a silicon oxide film on the seed layer, wherein the seed layer formed on the tungsten film or the tungsten oxide film is formed by heating the object to be processed and supplying an aminosilane-based gas to a surface of the tungsten film or the tungsten oxide film. | 03-26-2015 |
20150332917 | FILM-FORMING METHOD FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM OR TUNGSTEN OXIDE FILM - A film-forming method includes forming a tungsten film or a tungsten oxide film on an object to be processed, heating the object on which the tungsten film or the tungsten oxide film is formed, forming a seed layer on the tungsten film or the tungsten oxide film by supplying an aminosilane-based gas to a surface of the tungsten film or the tungsten oxide film, and forming a silicon oxide film on the seed layer by simultaneously supplying a silicon material gas including silicon and a gas including an oxidizing agent for oxidizing silicon. | 11-19-2015 |
Patent application number | Description | Published |
20120194817 | MOVABLE BODY SPECTRUM MEASURING APPARATUS AND MOVABLE BODY SPECTRUM MEASURING METHOD - A movable body spectrum measuring apparatus includes a spectrum sensor mounted in a movable body to measure spectrum data containing information including wavelength information and optical intensity information of a measuring object, a processor mounted in the movable body to discriminate the measuring object by processing the measured spectrum data, and a signal transmission path for transmitting the measured spectrum data from the spectrum sensor to the processor. The movable body spectrum measuring apparatus further includes a data transfer device which acquires reconfigured spectrum data by reconfiguring the measured spectrum data so that selected information as predetermined information is selected from the information contained in the measured spectrum data. The data transfer device transfers the reconfigured spectrum data to the processor via the signal transmission path. | 08-02-2012 |
20130328701 | APPROACHING VEHICLE DETECTION DEVICE AND APPROACHING VEHICLE DETECTION METHOD - There is provided an approaching vehicle detection device that detects an approaching vehicle on the basis of sounds collected by a plurality of sound collectors | 12-12-2013 |
20130338881 | APPROACHING VEHICLE DETECTION DEVICE - An approaching vehicle detection device includes an approaching vehicle detection unit | 12-19-2013 |
20140136096 | APPROACHING VEHICLE DETECTING SYSTEM AND APPROACHING VEHICLE DETECTING METHOD - An approaching vehicle detecting system that detects an approaching vehicle on the basis of sounds collected by a plurality of sound collectors mounted on a host vehicle determines whether a transverse moving direction of a sound source detected by the plurality of sound collectors is a direction approaching the host vehicle, determines whether a vertical position of the sound source detected using the plurality of sound collectors is in the same plane as that of the host vehicle, and detects that sound source as the approaching vehicle when it is determined that the transverse moving direction of the sound source is the direction approaching the host vehicle and the vertical position of the sound source is in the same plane as that of the host vehicle. | 05-15-2014 |
20140204714 | SOUND SOURCE DETECTION DEVICE - Disclosed is a sound source detection device | 07-24-2014 |
20140241126 | SOUND SOURCE DETECTION SYSTEM - A sound source detection system for detecting a sound source (e.g., running sound of a vehicle) based on sound collected by microphones extracts characteristic amounts from the sound collected by the microphones, sets a plurality of classes according to the position of the sound source by a multi-class pattern recognition method (e.g., multi-class SVM) using the characteristic amounts, extracts characteristic amounts from sound collected by the microphones for detection of a sound source, determines a class to which the extracted characteristic amounts belong, from the preset plurality of classes, and estimates the sound source based on the class. | 08-28-2014 |
20140241532 | SOUND SOURCE DETECTING SYSTEM AND SOUND SOURCE DETECTING METHOD - A sound source detecting system that detects a predetermined sound source on the basis of sounds collected by sound collectors includes: a noise extracting unit that extracts a noise from signals of the collected sounds; and a noise suppressing unit that suppresses a signal component of the noise extracted by the noise extracting unit from the signals of the collected sounds. The sound source detecting unit detects a location of the predetermined sound source, such as an approaching vehicle, using information about the sounds having the signals of which the noise is suppressed. | 08-28-2014 |
20150117652 | SOUND SOURCE DETECTION DEVICE, NOISE MODEL GENERATION DEVICE, NOISE REDUCTION DEVICE, SOUND SOURCE DIRECTION ESTIMATION DEVICE, APPROACHING VEHICLE DETECTION DEVICE AND NOISE REDUCTION METHOD - Disclosed is a noise model generation device that generates a noise model suitable for each environment by determining whether an sound source of a detection target is included in sound information collected by an sound collector with high accuracy. The noise model generation device generates a noise model relating to noise information other than the sound source of the detection target included in the sound information collected by the sound collector, which acquires a power spectrum from the sound information; determines whether the sound source of the detection target is included in the sound information collected by evaluating a probability density distribution (histogram) of the power spectrum; and generates a noise model from the collected sound information when it is determined that the sound source of the detection target is not included in the collected sound information. | 04-30-2015 |
20160033964 | VEHICLE CONTROL APPARATUS AND VEHICLE CONTROL METHOD - A vehicle control apparatus that switches an operating condition of a vehicle to a manual operation when the vehicle reaches a preset initial switch position while an automatic operation is underway includes: a driver condition determination unit configured to determine whether or not a driver is in a manual operation acceptance condition; an evacuation space identification unit configured to identify an evacuation space provided on a path of the vehicle before the initial switch position on the basis of map information; and a switch position setting unit configured to set a switch position in which the operating condition of the vehicle is to be switched from the automatic operation to the manual operation, in a position between the vehicle and the evacuation space when the driver is not in the manual operation acceptance condition. | 02-04-2016 |
20160041553 | VEHICLE CONTROL DEVICE - In a vehicle control device that is configured to be capable of switching from an automatic travel of the vehicle to manual travel by a driver, a manual driving adaptation degree of a driver during an automatic travel is calculated based on a driver state (S | 02-11-2016 |
Patent application number | Description | Published |
20150126044 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - A substrate processing apparatus includes a vacuum chamber including a top plate, a rotary table rotatably disposed in the vacuum chamber, a first process gas supply part that supplies a first process gas to be adsorbed on a surface of a substrate placed on the rotary table, a plasma processing gas supply part that is disposed apart from the first process gas supply part in a circumferential direction of the rotary table and supplies a second process gas to the surface of the substrate, a separation gas supply part that supplies a separation gas for separating the first process gas and the second process gas, a plasma generator that converts the second process gas into plasma, and an elevating mechanism that moves at least one of the plasma generator and the rotary table upward and downward. | 05-07-2015 |
20150225849 | METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS - A method for processing a substrate is provided. According to the method, a process gas is supplied to a surface of a substrate, and then a separation gas is supplied to the surface of the substrate. Moreover, a first plasma processing gas is supplied to the surface of the substrate in a first state in which a distance between the first plasma generation unit and the turntable is set at a first distance, and a second plasma processing gas is supplied to the surface of the substrate in a second state in which a distance between the second plasma generation unit and the turntable is set at a second distance shorter than the first distance. Furthermore, the separation gas is supplied to the surface of the substrate. | 08-13-2015 |
20150235813 | PLASMA PROCESSING DEVICE AND OPERATION METHOD - An operation method of a plasma processing device, includes performing a plasma process on a workpiece by supplying first high frequency power of a predetermined output to an electrode and generating plasma; and performing a charge storage process before the plasma process when a time interval from an end of a previous operation of the plasma processing device exceeds a predetermined interval, the charge storage process including supplying, to the electrode, second high frequency power of a lower output than the predetermined output. | 08-20-2015 |
20150332895 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS - A plasma processing method is provided. In the method, a distribution of an amount of processing within a surface of a substrate by a plasma process performed on a film deposited on the substrate is obtained. Next, a flow speed of the plasma processing gas is adjusted by increasing the flow speed of the plasma processing gas supplied to a first area where the amount of processing is expected to be increased or by decreasing the flow speed of the plasma processing gas supplied to a second area where the amount of processing is expected to be decreased. Then, the plasma process is performed on the film deposited on the substrate by supplying the plasma processing gas having the adjusted flow speed into the predetermined plasma process area. | 11-19-2015 |
20160064246 | SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE - A method of processing a substrate is provided. A substrate is placed on a turntable provided in a process chamber. The process chamber includes a process area for supplying an etching gas and a purge area for supplying a purge gas. The process area and the purge area are arranged along a rotational direction of the turntable and divided from each other. The etching gas is supplied into the process area. The purge gas is supplied into the purge area. The turntable rotates to cause the substrate placed on the turntable to pass through the process area and the purge area once per revolution, respectively. A film deposited on a surface of the substrate is etched when the substrate passes the process are. An etching rate of the etching or a surface roughness of the film is controlled by changing a rotational speed of the turntable. | 03-03-2016 |
20160071722 | PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD - A plasma processing apparatus includes a processing chamber. A turntable to receive a substrate thereon is provided in the processing chamber. A first plasma processing area is provided in a predetermined location in a circumferential direction of the turntable and configured to perform a first plasma process by generating first plasma from a first plasma gas. A second plasma processing area is provided apart from the first plasma processing area in the circumferential direction of the turntable and configured to perform a second plasma process by generating second plasma from a second plasma gas. A separation area is provided in each of two locations between the first plasma processing area and the second plasma processing area and configured to prevent the first plasma gas and the second plasma gas from mixing with each other by separating the first plasma processing area from the second plasma processing area. | 03-10-2016 |