Patent application number | Description | Published |
20100085551 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A lithographic apparatus includes an illumination system configured to condition a radiation beam; a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a mirror block provided with a substrate table constructed to hold a substrate; and a projection system configured to project the patterned radiation beam onto a target portion of the substrate, wherein the mirror block is constructed and arranged to reduce slip between the mirror block and the substrate table. Slip can occur if the acceleration of the mirror block is high and the substrate table slips locally with respect to the mirror block. Slip may lead to exposure errors since the position of the substrate is no longer determined with the desired accuracy. | 04-08-2010 |
20100110408 | CALIBRATION METHOD AND LITHOGRAPHIC APPARATUS FOR CALIBRATING AN OPTIMUM TAKE OVER HEIGHT OF A SUBSTRATE - A calibration method for calibrating an optimum take over height of a substrate in a lithographic apparatus between a substrate table and an ejector element moveable to load and unload the substrate from the substrate table, the method including clamping the substrate on one of the substrate table and ejector element; moving the ejector element between an unloaded state wherein the substrate is supported by the substrate table and a loaded state wherein the substrate is at least partly supported by the ejector element; determining a reference height of the ejector element at me moment that me weight of me substrate is at least partly taken over between the substrate table and the ejector element; and determining the optimum take over height for the ejector element from the determined reference height. | 05-06-2010 |
20100143832 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - In an immersion lithographic apparatus, bubble formation in immersion liquid is reduced or prevented by reducing a gap size or area on a substrate table. The gap size is reduced using an edge member which may be, for example, a ring known as a BES (Bubble Extraction System) ring. Information regarding the shape and/or cross-sectional dimension (e.g., diameter) of the substrate, or information regarding the size of the gap, is transmitted to a controller that controls the edge member in order for the edge member, for example, to be reduced to an appropriate size to reduce the gap as much as possible, desirably without compressing the edge of the substrate. Alternatively or additionally, the gap may be reduced by moving the substrate and/or edge member adjacent the edge of a surface of the substrate table. | 06-10-2010 |
20110116060 | LITHOGRAPHIC APPARATUS, REMOVABLE MEMBER AND DEVICE MANUFACTURING METHOD - A member is provided to prevent immersion liquid ingress to a gap between components or to adhere to at least one component to provide a surface to a feature of an immersion system. The member has a plastic sealing portion that is adhered to the component(s). The plastic sealing portion is opaque to DUV radiation. It may be resistant to degradation through exposure to DUV radiation. It may have a liquid phobic coating or property. | 05-19-2011 |
20110199592 | LITHOGRAPHIC APPARATUS, REMOVABLE MEMBER AND DEVICE MANUFACTURING METHOD - A sealing member is provided to prevent immersion liquid ingress to a gap between components. The sealing member has a plastic or polymer sealing portion that is adhered to the components forming the gap being sealed. The sealing member is constructed so as to reduce the force-coupling, in particular the time-related force-coupling, between the components being sealed. | 08-18-2011 |
20110222045 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate is disclosed, the apparatus including a substrate table constructed to hold a substrate, a first clamping system configured to clamp the substrate table to a substrate table support structure, and a second clamping system configured to clamp a substrate to the substrate table after the substrate table has been clamped to the substrate table support structure. | 09-15-2011 |
20110292369 | SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS, A METHOD OF FLATTENING AN EDGE OF A SUBSTRATE AND A DEVICE MANUFACTURING METHOD - A substrate table to support a substrate is disclosed. The substrate table includes a substrate support to support the substrate and to apply a bending force to an edge of the substrate in a first direction. A substrate edge manipulator is provided that is configured to apply a variable bending force to the edge of the substrate in a second direction, which second direction has at least a component opposite in direction to the first direction. | 12-01-2011 |
20130038854 | SUBSTRATE TABLE ASSEMBLY, AN IMMERSION LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD - A substrate table assembly, an immersion lithographic apparatus and a device manufacturing method are disclosed. The substrate table assembly includes a substrate table to support a substrate; and a gas handling system to provide a gas to a region between the substrate table and a substrate mounted on the substrate table, wherein the gas provided by the gas handling system has a thermal conductivity greater than or equal to 100 mW/(m.K) at 298 K. | 02-14-2013 |
20130045447 | LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A support table configured to support a substrate, the support table having a support section to support a substrate and a conditioning system to supply heat energy to and/or remove heat energy from the support section, wherein the conditioning system comprises a plurality of conditioning units that are independently controllable. | 02-21-2013 |
20130094005 | SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A support table for a lithographic apparatus, the support table having a support section and a conditioning system, wherein the support section, the conditioning system, or both, is configured such that heat transfer to or from a substrate supported on the support table, resulting from the operation of the conditioning system, is greater in a region of the substrate adjacent an edge of the substrate than it is in a region of the substrate that is at the center of the substrate. | 04-18-2013 |
20150109599 | SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support apparatus. The extraction body is spaced from the object holder such that the extraction body is substantially decoupled from the object holder. The extraction body comprises a projection configured such that it surrounds the object holder and such that, in use, a layer of liquid is retained on the projection and in contact with an object supported on the object holder. | 04-23-2015 |
20150131064 | OBJECT HOLDER AND LITHOGRAPHIC APPARATUS - An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is different to a second material defining the passageway. | 05-14-2015 |
20150277243 | SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A support table for a lithographic apparatus, the support table having a support section and a conditioning system, wherein the support section, the conditioning system, or both, is configured such that heat transfer to or from a substrate supported on the support table, resulting from the operation of the conditioning system, is greater in a region of the substrate adjacent an edge of the substrate than it is in a region of the substrate that is at the center of the substrate. | 10-01-2015 |
Patent application number | Description | Published |
20100119701 | Method For Preparing a Conductive Strain Sensor on the Surface of a Device - The invention provides a method for preparing a conductive strain sensor on the surface of a device to measure strain at the surface of the device, which method comprises the steps of
| 05-13-2010 |
20100295904 | DROPLET BREAK-UP DEVICE - The invention relates to a droplet break up device comprising: a chamber for containing a printing liquid comprising a bottom plate; a pump for pressurizing the printing liquid; an outlet channel having a central axis, provided in said chamber for ejecting the printing liquid; and an actuator for breaking up a fluid jetted out of the outlet channel. The actuator is provided around the outlet channel, arranged to symmetrically impart a pressure pulse central to the outlet channel axis. Accordingly, smaller droplets can be delivered at higher frequencies. | 11-25-2010 |
20100313947 | METHOD AND APPARATUS FOR APPLYING A MATERIAL ON A SUBSTRATE - The invention provides a method for applying a material onto a substrate using a droplet printing technique wherein a gas stream is released into the direction of a substrate, which gas stream comprises a carrier gas and droplets of a suspension of the material or droplets of a solution of a precursor of the material or droplets of a precursor of the material as such, whereby the droplets in the gas stream are first maintained in a steady flow and subsequently in a converging flow before the droplets are contacted with the substrate. The invention further provides an apparatus for carrying out said method. | 12-16-2010 |
20110050812 | DROPLET SELECTION MECHANISM - A method and droplet selection device are provided for a continuous printer for selectively deflecting a droplet from a predetermined printing trajectory. In particular, a droplet selection device is provided for a continuous printer, comprising a droplet ejection system arranged to generate a continuous stream of droplets from a first fluid jetted out of an outlet channel; and a jet system arranged to generate a second jet for colliding the jet into the stream of droplets. The jet system comprises a deflector to selectively deflect the second jet into the continuous stream of droplets, so as to selectively deflect the droplets from a predefined printing trajectory. | 03-03-2011 |
20110187778 | DROPLET SELECTION MECHANISM - A method and droplet selection device are provided for a continuous printer for selectively ejecting a second droplet and to have it collided with a predefined first droplet. In particular, the device comprises a first droplet ejection system arranged to generate a continuous stream of first droplets from a fluid jetted out of an outlet channel; and a second droplet ejection system arranged to generate second droplets for colliding the second droplets into the first droplets so as to selectively deflect the first droplets from a predefined printing trajectory. The second droplet ejection system comprises a control circuit to selectively eject the second droplet and to have it collided with a predefined first droplet. | 08-04-2011 |
20120104111 | Effective Droplet Drying - In one aspect, the invention provides a system and method for spray drying a fluid. The system comprises a fluid reservoir ( | 05-03-2012 |
Patent application number | Description | Published |
20130303002 | INTERCONNECT STRUCTURE AND METHOD FOR PRODUCING SAME - There is provided a three-dimensional interconnect structure for micro-electronic devices and a method for producing such an interconnect structure. The method comprises a step wherein a backbone structure is manufactured using an additive layer-wise manufacturing process. The backbone structure comprises a three-dimensional cladding skeleton and a support structure. The cladding skeleton comprises layered freeform skeleton parts that will form the electric interconnections between the electric contacts of the interconnect structure after a conductive material is applied on the backbone structure. The support structure supports the layered freeform skeleton parts. Parts of the support structure may be removed to isolate and/or expose the electric interconnections. The cladding skeleton can be embedded by an insulating material for providing a further support. | 11-14-2013 |
20140346698 | METHOD OF SPRAY-DRYING AND APPARATUS FOR SPRAY-DRYING - Method of spray-drying a high-viscosity fluid, e.g. comprising a food product. The method comprises providing a nozzle plate wherein at least one nozzle is provided, said nozzle plate having an inner main surface and an outer main surface. The method comprises providing the high-viscosity fluid in a reservoir that is in fluidum connection with the at least one nozzle. The method comprises pressurizing the high-viscosity fluid in the reservoir, wherein the fluid flows, as a result of said pressurizing, towards the nozzle plate, thus creating a pressure difference over the at least one nozzle so that the fluid flows out of the at least one nozzle, thereby passing the outer main surface after passing the inner main surface. A cross-sectional area of the at least one nozzle in the inner main surface exceeds a cross-sectional area of the at least one nozzle in the outer main surface. | 11-27-2014 |
20140375726 | CONTINUOUS JET PRINTING OF A FLUID MATERIAL - An apparatus and method are for printing a fluid material by a continuous jet printing technique. The apparatus includes a flow restricting structure arranged near an outflow opening for restricting a flow of the material between a reservoir and the outflow opening by a restricted passage through the flow restricting structure. Furthermore, the flow restricting structure, an actuating surface, and a nozzle are arranged to bind a micro volume directly adjacent an inside of the outflow opening for the purpose of guiding or reflecting pressure variations generated by the pressure regulating mechanism towards the outflow opening. | 12-25-2014 |
Patent application number | Description | Published |
20090219319 | MATERIAL JET SYSTEM - Material jet system, comprising a container for molten jet material ( | 09-03-2009 |
20100119701 | Method For Preparing a Conductive Strain Sensor on the Surface of a Device - The invention provides a method for preparing a conductive strain sensor on the surface of a device to measure strain at the surface of the device, which method comprises the steps of
| 05-13-2010 |
20100247760 | MULTI COMPONENT PARTICLE GENERATING SYSTEM - The invention relates to a method of generating a ‘multicomponent particle comprising: and a multicomponent particle generating system comprising: a first nozzle constructed to generate at least one isolated particle; a second nozzle arranged to generate a generally uninterrupted fluid jet without breaking up, —said first and second nozzles arranged to have said isolated particle collide with the fluid jet so as to combine said particle with fluid of the second fluid jet, for providing a multicomponent particle; and a collector by which said isolated particles can be captured after collision with the fluid jet. | 09-30-2010 |
20100295904 | DROPLET BREAK-UP DEVICE - The invention relates to a droplet break up device comprising: a chamber for containing a printing liquid comprising a bottom plate; a pump for pressurizing the printing liquid; an outlet channel having a central axis, provided in said chamber for ejecting the printing liquid; and an actuator for breaking up a fluid jetted out of the outlet channel. The actuator is provided around the outlet channel, arranged to symmetrically impart a pressure pulse central to the outlet channel axis. Accordingly, smaller droplets can be delivered at higher frequencies. | 11-25-2010 |
20100313947 | METHOD AND APPARATUS FOR APPLYING A MATERIAL ON A SUBSTRATE - The invention provides a method for applying a material onto a substrate using a droplet printing technique wherein a gas stream is released into the direction of a substrate, which gas stream comprises a carrier gas and droplets of a suspension of the material or droplets of a solution of a precursor of the material or droplets of a precursor of the material as such, whereby the droplets in the gas stream are first maintained in a steady flow and subsequently in a converging flow before the droplets are contacted with the substrate. The invention further provides an apparatus for carrying out said method. | 12-16-2010 |
20110050812 | DROPLET SELECTION MECHANISM - A method and droplet selection device are provided for a continuous printer for selectively deflecting a droplet from a predetermined printing trajectory. In particular, a droplet selection device is provided for a continuous printer, comprising a droplet ejection system arranged to generate a continuous stream of droplets from a first fluid jetted out of an outlet channel; and a jet system arranged to generate a second jet for colliding the jet into the stream of droplets. The jet system comprises a deflector to selectively deflect the second jet into the continuous stream of droplets, so as to selectively deflect the droplets from a predefined printing trajectory. | 03-03-2011 |
20110177243 | Multi component particle generating system - The invention relates to a method of generating a multicomponent particle comprising: and a multicomponent particle generating system comprising a movable support constructed to accelerate particles supplied on the movable support; a particle supply system for supplying the particles to the movable support; at least one nozzle arranged to generate a generally uninterrupted fluid jet along at least part of a circumference of the movable support without breaking up; to have said accelerated particles collide with the fluid jet so as to combine said particles with fluid of the fluid jet, for providing a multicomponent particle; and a collector arranged in the trajectory of said particles, by which said particles can be captured after collision with the fluid jet. | 07-21-2011 |
20110211019 | Pressure independent droplet generation - The invention relates to an apparatus for ejecting droplets of a fluid material, comprising: a reservoir for storing the material, a channel connected with the reservoir, which is provided with at least one outflow opening from which, in use, flows a jet of the material breaking up into droplets, a pump for pressurizing the fluid material in the reservoir, so as to pass the material under pressure through the channel in the direction of the outflow opening, and a movable member provided in the reservoir, the member formed by a plurality of surfaces shaped to induce a pressure variation in the fluid material upstream of the outflow opening, for the purpose of obtaining the jet breaking up into droplets; the movable member mounted to have each opposed surface receiving identical hydrostatic pressure, to generate a net resulting zero force exerted on the movable member by the hydrostatic pressure. Accordingly, a simple mechanism is provided for providing multiple printing nozzles. | 09-01-2011 |
20120107498 | MULTI COMPONENT PARTICLE GENERATING SYSTEM - A multicomponent particle generating system may include a first nozzle constructed to generate at least one isolated particle, and a second nozzle arranged to generate a generally uninterrupted fluid jet without breaking up. The first and second nozzles are arranged to have the isolated particle traverse the fluid jet from one side to the other side so as to combine the particle with fluid of the second fluid jet, for providing a multicomponent particle. A collector is arranged on the other side of the fluid jet by which the isolated particles can be captured after collision with the fluid jet. The system includes a modulator, for modulating the second fluid jet so as to provide an undulated jet having thicker and thinner portions. | 05-03-2012 |