Horioka, JP
Kazuhiko Horioka, Kanagawa JP
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20090091273 | LIGHT SOURCE FOR GENERATING EXTREME ULTRAVIOLET LIGHT FROM PLASMA - A plasma generation apparatus for generating a plasma within a discharge chamber is disclosed, which includes a plurality of electrodes disposed within the discharge chamber, a power supply device operative to flow a discharge current between electrodes for performing self-heating of a plasma between the electrodes and for applying a self-magnetic field to the plasma, and a control unit for control of the power supply device, wherein the control unit controls the power supply device in such a way as to confine the plasma in a space, thereby improving the conversion efficiency of extreme ultraviolet (EUV) light. A plasma generation method is also disclosed. | 04-09-2009 |
20110248635 | PLASMA LIGHT SOURCE AND PLASMA LIGHT GENERATION METHOD - A plasma light source includes a pair of coaxial electrodes | 10-13-2011 |
Kazuhiko Horioka, Yokohama-Shi JP
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20080237501 | EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND EXTREME ULTRAVIOLET RADIATION GENERATING METHOD - High temperature plasma raw material ( | 10-02-2008 |
20090084992 | METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION AND AN EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE - To achieve pulse-stretched EUV radiation without putting a large heat load on electrodes or requiring sophisticated control, a pulsed power is supplied between a first electrode and a second electrode provided inside a chamber to form a narrow discharge channel therebetween. A laser beam from a laser source irradiates high temperature plasma material to form low temperature plasma gas having an ion density of approximately 10 | 04-02-2009 |
20090127479 | EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND A METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION - High temperature plasma raw material is added drop-wise, for example, and evaporated by irradiation with a laser beam. The laser beam passes through a discharge area between a pair of electrodes and irradiates the high temperature plasma raw material. Pulsed power is applied to the space between the electrodes in such a way that discharge current reaches a specified threshold value at a time when at least part of the evaporated material reaches the discharge channel. As a result, discharge starts between the electrodes, plasma is heated and excited and then EUV radiation is generated. The EUV radiation thus generated passes through a foil trap, is collected by EUV radiation collector optics and then extracted. The irradiation of the laser beam allows setting of the space density of the high temperature plasma raw material to a specified distribution and defining of the position of a discharge channel. | 05-21-2009 |
Kazuhiko Horioka, Tokyo JP
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20120145930 | LLP EUV LIGHT SOURCE AND METHOD FOR PRODUCING THE SAME - An LPP EUV light source includes a vacuum chamber | 06-14-2012 |
Keiji Horioka, Chiba JP
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20090008033 | METHOD AND APPARATUS FOR SHAPING A MAGNETIC FIELD IN A MAGNETIC FIELD-ENHANCED PLASMA REACTOR - A magnetic field generator which provides greater control over the magnetic field is provided. The magnetic field generator has a plurality of overlapping main magnetic coil sections for forming a magnetic field generally parallel to the top surface of the supporting member. In other embodiments, sub-magnetic coil sections are placed symmetrically around the main magnetic coil sections. | 01-08-2009 |
20110115589 | METHOD AND APPARATUS FOR SHAPING A MAGNETIC FIELD IN A MAGNETIC FIELD-ENHANCED PLASMA REACTOR - A magnetic field generator which provides greater control over the magnetic field is provided. The magnetic field generator has a plurality of overlapping main magnetic coil sections for forming a magnetic field generally parallel to the top surface of the supporting member. In other embodiments, sub-magnetic coil sections are placed symmetrically around the main magnetic coil sections. | 05-19-2011 |
Keiji Horioka, Tokyo JP
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20080260966 | PLASMA PROCESSING METHOD - Embodiments of the present invention relate to plasma processing apparatus and methods of use thereof. In some embodiments, a method of controlling a plasma in a process chamber includes providing a chamber for processing a substrate and having a processing volume defined therein wherein a plasma is to be formed during operation, the chamber further having a plasma control magnet assembly comprising a plurality of magnets that provide a magnetic field having a magnitude is greater than about 10 Gauss in an upper region of the processing volume and less than about 10 Gauss in a lower region of the processing volume proximate a substrate to be processed; supplying a process gas to the chamber; and forming a plasma in the processing volume from the process gas. | 10-23-2008 |
20080299465 | FREQUENCY TRIPLING USING SPACER MASK HAVING INTERPOSED REGIONS - A method for fabricating a semiconductor mask is described. A semiconductor stack having a sacrificial mask comprised of a series of lines is first provided. A spacer mask having spacer lines adjacent to the sidewalls of the series of lines of the sacrificial mask is then formed. The spacer mask also has interposed lines between the spacer lines. Finally, the sacrificial mask is removed to provide only the spacer mask. The spacer mask having interposed lines triples the frequency of the series of lines of the sacrificial mask. | 12-04-2008 |
20080299776 | FREQUENCY DOUBLING USING SPACER MASK - A method for fabricating a semiconductor mask is described. A semiconductor stack having a sacrificial mask and a spacer mask is first provided. The sacrificial mask is comprised of a series of lines and the spacer mask has spacer lines adjacent to the sidewalls of the series of lines. Next, the spacer mask is cropped. Finally, the sacrificial mask is removed to provide a cropped spacer mask. The cropped spacer mask doubles the frequency of the series of lines of the sacrificial mask. | 12-04-2008 |
20110008969 | FREQUENCY DOUBLING USING SPACER MASK - A method for fabricating a semiconductor mask is described. A semiconductor stack having a sacrificial mask and a spacer mask is first provided. The sacrificial mask is comprised of a series of lines and the spacer mask has spacer lines adjacent to the sidewalls of the series of lines. Next, the spacer mask is cropped. Finally, the sacrificial mask is removed to provide a cropped spacer mask. The cropped spacer mask doubles the frequency of the series of lines of the sacrificial mask. | 01-13-2011 |
Masahiro Horioka, Ome-Shi JP
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20090160811 | INFORMATION PROCESSING APPARATUS AND INPUT CONTROL METHOD - According to one embodiment, an information processing apparatus includes a case, a display device provided in the case, a plurality of touch switches configured to output an operation signal in accordance with the change of capacitance and arranged inside the case, two or more touch switches being arranged in the vicinity of each two adjacent sides of the display device along each side, a keyboard controller configured to receive a key code, and a touch switch controller configured to receive the operation signal of the plurality of touch switches, the touch switch controller outputting, to the keyboard controller, the key code which corresponds to simultaneous input operations of a plurality of keys allocated to the operation of a particular touch switch when the operation signal is input from the particular touch switch. | 06-25-2009 |
Masaru Horioka, Kanagawa JP
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20090141871 | VOICE RESPONSE SYSTEM - A voice response system attempts to respond to spoken user input and to provide computer-generated responses. If the system decides it cannot provide valid responses, the current state of user session is determined and forwarded to a human operator for further action. The system maintains a recorded history of the session in the form of a dialog history log. The dialog history and information as to the reliability of past speech recognition efforts is employed in making the current state determination. The system includes formatting rules for controlling the display of information presented to the human operator. | 06-04-2009 |
Masaru Horioka, Sagamihara-Shi JP
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20080215335 | COMPUTER, DISPLAY CONTROL DEVICE, POINTER POSITION CONTROL METHOD, AND PROGRAM - To provide a pointer position control method and the like for manipulating a pointer more easily. The user moves the pointer P two-dimensionally and perform click and other operations by using only “voice”—by varying the volume and pitch of produced voice without uttering any specific command. The user moves the pointer P by varying the volume and switches the travel direction of the pointer P by changing the pitch. Also, by stopping to vary the volume, the user can automatically enter a fine adjustment mode in which the user can make fine adjustments. Furthermore, the user can perform a click by stopping to produce voice suddenly and return to normal speech recognition mode by keeping silent. | 09-04-2008 |
Satoru Horioka, Tokyo JP
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20150265734 | Light Irradiation Apparatus - In a light irradiation apparatus, an elongated body has flexibility that allows for elastic restoration. An LED chip is closely fixed to a tip portion of the elongated body and emits ultraviolet light. A cover unit covers the LED chip so as to protect the LED chip and allows the ultraviolet light emitted by the LED chip to pass through the cover unit. A conductive unit extends in a longitudinal direction of the elongated body and passes electric current for allowing the LED chip to emit light. An insulation unit covers the conductive unit so as to ensure electrical insulation of the conductive unit. | 09-24-2015 |
Satoru Horioka, Higashimurayama-Shi JP
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20150246172 | INDWELLING NEEDLE FOR EXTRACORPOREAL CIRCULATION - A seal member and outer cylinder needle (OCN) tip part for blocking, in a fluid-tight state, both external peripheral space (EPS) end parts formed between the external-peripheral-surface of an inner needle (IN) and internal peripheral surface of an OCN, for slidably holding the IN in close contact; an opening part formed on the OCN external-peripheral-surface and for intravascular communication with the EPS; an OCN connection part for communicating between the EPS and blood circuit end; an IN connection part for communicating between the IN internal space and other blood circuit end. The movable IN positioned between the projecting position where the tip part protrudes from the OCN tip and the housed position housing the tip inside the OCN. The IN punctures the blood vessel interior while holding the projecting position, and moved to the housed position after puncture allowing blood to extracorporeally circulate via the OCN and IN connection part. | 09-03-2015 |
Seiji Horioka, Hachioji-Shi JP
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20110094606 | Pressure Control Apparatus For Supercritical Fluid - An object of the present invention is to provide a pressure control apparatus for a supercritical fluid in which variation in pressure is small even in measurement in which analysis conditions are changed with time to improve separation and other performance. That is, a pressure control apparatus for a supercritical fluid according to the present invention includes: a valve comprising; a valve chamber provided in a midway of a channel through which a supercritical fluid passes; and an electrically-operated valve element located in the valve chamber; wherein a front end of the valve element fits into the valve chamber when the valve is closed, and it travels backward when the valve is opened; a pressure detection member for detecting the pressure of the supercritical fluid in the channel on an upstream or downstream side of the valve chamber; an open/close control member for controlling the pressure detected by the pressure detection member to be a target pressure; and a valve-opening rate adjustment member for adjusting the valve-opening rate when the valve is opened based on the state of the supercritical fluid. | 04-28-2011 |
Tatsuji Horioka, Tokyo JP
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20110318871 | PROCESS FOR PRODUCING PHOTOVOLTAIC DEVICE - There are provided a thermal barrier coating material and a thermal barrier coating member that can suppress spalling when used at a high temperature and have a high thermal barrier effect, a method for producing the same, a turbine member coated with a thermal barrier coating, and a gas turbine. The thermal barrier coating member comprises a heat resistant substrate, a bond coat layer formed thereon, and a ceramic layer formed further thereon, wherein the ceramic layer comprises an oxide which consists of an oxide represented by the general formula A | 12-29-2011 |
20120103401 | SOLAR CELL PANEL - A solar cell panel that is capable of preventing damage to the edge portions of the panel. The solar cell panel is provided with a pair of first protective ribs ( | 05-03-2012 |
20120118360 | SOLAR CELL MODULE, SOLAR CELL PANEL, PROCESS FOR PRODUCING SOLAR CELL MODULE, AND PROCESS FOR PRODUCING SOLAR CELL PANEL - A solar cell module, a solar cell panel, a process for producing a solar cell module and a process for producing a solar cell panel that are capable of inhibiting EVA protrusions and recesses, and capable of inhibiting penetration of moisture into the interior of the solar cell module. The solar cell module comprises a transparent substrate and a back substrate disposed across a photovoltaic layer, an inner seal portion disposed between, and surrounding the periphery of, the transparent substrate and the back substrate, a gap formed in a portion of the inner seal portion and linking a region in which an encapsulant is disposed with the outside, an encapsulant disposed inside the region surrounded by the transparent substrate, the back substrate and the inner seal portion, and an outer seal portion that covers the gap. | 05-17-2012 |
Tatsuji Horioka, Nagasaki JP
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20090165843 | SOLAR PANEL - A solar panel according to the present invention includes a solar cell module body ( | 07-02-2009 |
20090308428 | SOLAR PANEL AND METHOD OF MANUFACTURING SOLAR PANEL - A solar panel has a substrate ( | 12-17-2009 |
20100206360 | SOLAR CELL PANEL AND METHOD OF FABRICATING SOLAR CELL PANEL - Provided is a solar cell panel that hardly retains any moisture between a solar cell panel body and a frame and enables automation of the process of attaching the frame to the solar cell panel body. The solar cell panel includes a solar cell panel body, a frame, and a joint. The solar cell panel body includes a substrate having a first surface on which photoelectric conversion elements are mounted. The frame has an approximately L-shaped cross-section. The joint bonds the frame and a second surface, opposite to the first surface, of the substrate. | 08-19-2010 |
20110203630 | PHOTOVOLTAIC DEVICE AND PROCESS FOR PRODUCING SAME - A photovoltaic device that can prevent performance degradation caused by electrodeposition generated as a result of moisture penetration. In the photovoltaic device, two or more intermediate insulation portions that electrically insulate solar cell unit cells positioned adjacently in the X-direction are formed on the substrate center side of side insulation portions so as to extend in the Y-direction in a parallel arrangement across the X-direction, a conductive portion that electrically connects solar cell unit cells positioned adjacently in the X-direction is provided in a position partway along each of the intermediate insulation portions, and the solar cell unit cells where the conductive portion is positioned are electrically insulated from a solar cell unit cell positioned adjacently in the X-direction by another of the intermediate insulation portions positioned distant from the conductive portion in the X-direction. | 08-25-2011 |
Toshiya Horioka, Osaka-Shi JP
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20090241377 | Sole structure for a shoe - A sole structure | 10-01-2009 |
Yukichi Horioka, Chiba JP
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20110174214 | CRYSTAL GROWING APPARATUS AND CRYSTAL GROWING METHOD - To provide a crystal growing apparatus and a crystal growing method capable of enabling use of a quartz crucible for a longer period of time and improving operation rate. | 07-21-2011 |
20140150714 | METHOD OF COATING QUARTZ CRUCIBLE FOR GROWING SILICON CRYSTAL, AND QUARTZ CRUCIBLE FOR GROWING SILICON CRYSTAL - A coating method for coating a crucible and a quartz crucible for growing a silicon crystal are provided. In the coating method, a bubble-free quartz layer which is 80 μm to 4 mm thick is formed on an inner surface of a crucible for growing a silicon crystal, and the surface of the bubble-free quartz layer is covered with alkaline earth hydroxide, following which heating is performed to a temperature at which the surface becomes devitrified. The surface may be covered by immersing the inner surface in a solution of the alkaline earth hydroxide. The heating may be performed before the crucible for growing silicon crystal is filled with a solid raw material to be melted. | 06-05-2014 |