Patent application number | Description | Published |
20080203881 | Micro-Column With Simple Structure - The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the alignment and assembly of an electron emission source and lenses. The electron column having an electron emission source and a lens unit according to the present invention is characterized in that the lens unit includes two or more lens layers and performs both a source lens function and a focusing function. Furthermore, the electron column is characterized in that the lens unit includes one or more deflector-type lens layers and additionally performs a deflector function. | 08-28-2008 |
20080210866 | Motioning Equipment for Electron Column - Provided is motioning equipment which provides relative motion between electron column emitting electron beam and a sample on which the electron beam is irradiated. The motioning equipment includes multi-microcolumn for emitting electron beams on the sample, supports for supporting the multi-microcolumns, and driving means for driving the supports to move the multi-microcolumns. | 09-04-2008 |
20080211380 | Scanning Field Emission Display - Provided is a scanning field emission display (SFED). The SFED includes an electron emitter and a module for inducing electron emission of the electron emitter and deflecting an electron beam. A multi-SFED may be realized as a large-sized thin and flat display by arranging in an n×m array. | 09-04-2008 |
20080272298 | Inspection Equipment for Fine Pattern and Morphology Using Microcolumn - Inspection equipment using a microcolumn is disclosed. The inspection equipment of the present invention can conduct inspection of a fine circuit, which could not be conducted using conventional optical inspection equipment. Furthermore, the present invention can rapidly inspect a display, having a relatively large area, and can have a precise inspection function and a repair function. The inspection equipment of the present invention includes a plurality of microcolumns, a shaft, to which the microcolumns are coupled, and which is disposed in a direction perpendicular to a direction in which an object is moved, and a detector for detecting electron beams radiated from the microcolumns onto the object to determine whether errors exist in a circuit of the object. | 11-06-2008 |
20090200482 | Method for Focusing Electron Beam in Electron Column - The present invention relates to a method for improving focusing in an electron column that generates an electron beam. The method for controlling the focusing of an electron beam in according to the present invention reduces the spot size of the electron beam when the electron beam reaches a specimen, so that resolution can be increased and the line width of a pattern in a semiconductor lithography process can be reduced, with the result that the performance of the electron can be improved. | 08-13-2009 |
20100163745 | Housing for A Micro-Column - Disclosed therein is a housing for micro-column, which can easily align and assemble the micro-column and improve stability of the micro-column. The housing for manufacturing micro-column including an electron emitter, deflectors, and lenses, the housing includes: an electron emitter holder in which the electron emitter is inserted; a holder base in which the electron emitter holder is inserted; and a column base coupled with the holder base, whereby the electron emitter can be aligned and fixed between the electron emitter holder and the holder base in X- and Y-axial directions via bolts and socket set screws inserted into the tap holes. | 07-01-2010 |