Patent application number | Description | Published |
20080226430 | Carrying mechanism, a carrying device and a vacuum processing apparatus - A carrying device which can prevent an object to be carried from being contaminated with dust and carry the object to a correct position. The present invention is constructed by first and second parallelogram linkages. The second parallelogram linkage is formed by using a link of the first parallelogram linkage, has four sides with an equal length, and is linearly extended or retracted along a linear guide. Links of the first parallelogram linkage and links of the second parallelogram linkage are configured to rotate while being in a restrained state of 90° at pivots of both ends of the common link of the first and second parallelogram linkage, respectively. An arm is provided at a pivot of an end of a link opposed to the link of the first parallelogram linkage such that the arm rotates in a restrained state of 90° relative to the link. | 09-18-2008 |
20090092467 | Stage apparatus - To enable division for transportation and secure proper treatment on a substrate to be treated, the present invention provides a stage apparatus ( | 04-09-2009 |
20090173278 | Stage apparatus - To obtain a stage apparatus that can be divided for land transportation and can properly treat a substrate to be treated, the present invention provides a stage apparatus including a substrate holding plane which holds a substrate to be treated W, a pair of guide frames ( | 07-09-2009 |
20100109220 | Substrate Holding Mechanism and Substrate Assembly Apparatus Including the Same - Object To provide a substrate assembly apparatus capable of simplifying a structure of the apparatus and performing appropriate detachment of a substrate constantly. | 05-06-2010 |
20100135751 | ROTATION INTRODUCTION MECHANISM, SUBSTRATE TRANSFER APPARATUS, AND VACUUM PROCESSING APPARATUS - There are provided a rotation introduction mechanism which transmits a rotating motion on the atmosphere side into vacuum, is arranged simply, has a low sliding resistance, and has a long life, a substrate transfer apparatus, a substrate transfer apparatus having a small pivot radius and generating a smaller amount of dusts, and a vacuum processing apparatus. A lubricant holding member is attached to a vacuum seal mechanism. The substrate transfer apparatus is arranged such that a first link mechanism includes a first arm and a fourth arm, a second link mechanism includes a second arm and a third arm, the first arm is fixedly attached to a first drive shaft, the first arm is fixedly attached to a second drive shaft, the third arm is rotatably attached to the first drive shaft, and the fourth arm is rotatably attached to the second drive shaft. The vacuum processing apparatus includes the substrate transfer apparatus. | 06-03-2010 |
20110062641 | STAGE EQUIPPED WITH ALIGNMENT FUNCTION, PROCESSING APPARATUS HAVING THE STAGE EQUIPPED WITH ALIGNMENT FUNCTION, AND METHOD OF ALIGNING SUBSTRATE - There is provided an inexpensive stage which is equipped with an alignment function and is capable of easily performing high-accuracy alignment especially in a θ direction even in case an object to be processed is large in weight. The stage equipped with an alignment function has a stage main body for holding a substrate while leaving a processing surface thereof open to access. The stage is provided with: a suction means capable of sucking that surface of the substrate which lies opposite to the processing surface; a gas supply means for supplying a gas to such a region of the substrate as is other than a portion sucked by the suction means; and a drive means to give a rotating force to the suction means so that the substrate can be rotated on the same plane by causing the suction means to serve as the center of rotation. | 03-17-2011 |
20110227294 | Seal Mechanism and Treatment Apparatus - [Object] To provide a seal mechanism that reduces a maintenance frequency for replenishment of a lubricating material and has small friction resistance, and a treatment apparatus equipped with the seal mechanism.
| 09-22-2011 |
20120025054 | HOLDING APPARATUS, CONVEYING APPARATUS, AND ROTATION-TRANSMITTING APPARATUS - A holding apparatus, a conveying apparatus, and a rotation-transmitting apparatus are provided that are capable of holding an object in a tiltable manner. A conveying apparatus according to one form of the present invention includes a pad supported by a supporting member on a hand. A concave portion is formed on the pad, and by the concave portion engaging with the supporting member fixed to the hand, a pad is supported in a tiltable manner. A conveying object is held by an adhesive layer of the pad adhering thereto. By tilting with respect to the hand , the pad follows the shape or vibration of the conveying object, with the result that the conveying object can be conveyed stably. | 02-02-2012 |
20120114456 | HOLDING APPARATUS, CONVEYING APPARATUS, AND ROTATION-TRANSMITTING APPARATUS - A holding apparatus, a conveying apparatus, and a rotation-transmitting apparatus are provided that are capable of stably holding an object while suppressing an influence of a change in shape of the object and a fluctuation of a holding form. A conveying apparatus according to one form of the present invention includes a hand and a holding body provided on the hand. The holding body includes a holding member that includes a holding surface that comes into close contact with a holding object, the holding member being capable of holding a conveying object on the holding surface, and a viscoelastic member that is formed of a viscoelastic material and bonds the hand to the holding member. By the viscoelastic member being elastically deformed and the entire surface of the holding member being brought into close contact with the holding object, the conveying apparatus is capable of holding the conveying object on the hand. | 05-10-2012 |
20130129462 | Substrate Conveyance Method and Substrate Conveyance System - [Object] To provide a wafer conveyance method and a wafer conveyance system that are able to quickly transfer a wafer without losing positional accuracy. | 05-23-2013 |
Patent application number | Description | Published |
20100040447 | TRANSPORT APPARATUS - A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of the apparatus is small because first and second rotary shafts are arranged concentrically, and a dead center escaping mechanism has a simple structure with a small thickness. Since a connecting portion of a hand portion can be made thin, an opening of a gate valve through which the hand portion is inserted can be reduced. As a result, it becomes difficult for dust inside a transport chamber to enter a processing chamber. A second aspect of the present invention is directed to a spaced dual shaft-type transport apparatus. Although the lengths of first arms provided at rotating shafts may differ from the lengths of second arms provided between the first arms and a substrate supporting portion, the apparatus is free from malfunction even when the lengths thereof differ because the transmission of a rotative force of a dead center escaping mechanism is released at a position except at a dead center in the present invention. | 02-18-2010 |
20100111649 | TRANSFER DEVICE AND VACUUM PROCESSING APPARATUS USING THE SAME - A transfer device that avoids the problem of a vacuum apparatus being contaminated by grease, dust, and others and having a small base area is provided. Corrosion protection according to an existing technology may be applied to the transfer device. The transfer device may have a transfer section to support and transfer an object to be transferred, a link to transmit power from a device main body to the transfer section and move the transfer section in the horizontal direction, and a guide mechanism disposed between the device main body and the transfer section guide. The guide mechanism may have pivotally connected first and second guide arms. The first guide arm at one end of the guide mechanism may be attached to the device main body, and the second guide arm at the other end thereof may be attached to the transfer section. | 05-06-2010 |
20100146762 | STAGE APPARATUS ASSEMBLING METHOD - An assembling method that is high in assembly accuracy and easily performed at the actual installation site is provided. In this method, the sub base plates on the sub mounting tables are aligned with respect to a main base plate on a main mounting table at a temporary installation site, and the state thereof is maintained. Then, the main mounting table and the sub mounting tables are separated from each other to be transferred to the actual installation site, and the positioning state is restored at the actual installation site. Since a positional alignment can be performed at the temporary installation site, the work required at the actual installation site can be reduced. Furthermore, since a fine adjustment can be performed at the actual installation site, the accuracy in the positional alignment can be improved. | 06-17-2010 |
20100163703 | STAGE APPARATUS - A stage apparatus enables easy position alignment at a real installation site. Mounts | 07-01-2010 |
20100177153 | STAGE APPARATUS - A stage apparatus that achieves a high accuracy in assembling and enables easy work at a real installation site. In a stage apparatus of the present invention, sub rails are arranged on respective sub base plates, which are connected respectively with the first and second main rails on a main base plate to extend the first and second main rails. Accordingly, when the sub base plates are fixed to the main base plate | 07-15-2010 |
20110199441 | DISCHARGE UNIT AND DISCHARGE APPARATUS - The backing pressure of an ink tank is controlled. The ink tank is connected to a pressure control apparatus. The pressure control apparatus has first and second check valves. When the internal pressure of the ink tank becomes smaller than that of outside atmosphere by a first predetermined pressure or more, the first check valve is switched into an open state to connect the outside atmosphere and the ink tank. To the contrary, when the internal pressure of the ink tank becomes larger than that of outside atmosphere by a second predetermined pressure or more, the second check valve is switched to an open state to connect the ink tank with the outside atmosphere. Therefore, the internal pressure of the ink tank is controlled precisely enough to stabilize the meniscus. | 08-18-2011 |
20110211936 | CONVEYING DEVICE AND VACUUM APPARATUS - The present invention provides a technology for holding an object to be reliably conveyed for the sake of high speed conveyance not only in a low temperature environment but also in a high temperature environment, and for reducing dust while conveying the object to be conveyed. A conveying device includes a link mechanism, which can expand and contract, has a plurality of arms to which power from a drive source is transmitted, and a mounting section which is connected to an operating tip section of the link mechanism through a drive link section and on which a substrate is mounted. The mounting section has latch sections for making contact with and latching side portions of the substrate. The drive link sections of the link mechanism are provided with cam mechanism-based pressing means. The pressing means includes cam drive surfaces which are formed on the drive link sections of the link mechanism, and a follower mechanism section having a protruded-shaped pressing section which has follower rollers being in contact with and capable of following the cam drive surfaces and is guided and moved toward the latch sections of the mounting section by movement of the follower rollers. | 09-01-2011 |
20120251287 | ROTATION-TRANSMITTING MECHANISM, CONVEYING APPARATUS, AND DRIVING APPARATUS - A rotation-transmitting mechanism capable of obtaining a high deceleration ratio in a small number of stages, and a conveying apparatus and driving apparatus using the rotation-transmitting mechanism are provided. In one form, a rotation-transmitting mechanism includes an inner rotating body and an outer rotating body arranged coaxially with the inner rotating body. Further, the rotation-transmitting mechanism includes a driving rotating body and rotating body arranged on an input side (lower stage), and two planetary rotating bodies arranged on an output side (upper stage). When the driving rotating body is rotated by a motor on the input side, the two planetary rotating bodies revolve around the inner rotating body while rotating on the output side. At this time, the planetary rotating bodies revolve very slowly around the inner rotating body. | 10-04-2012 |
20120288347 | CONVEYING DEVICE AND VACUUM APPARATUS - A conveying device includes an extensible link mechanism having a plurality of arms receiving power from a drive source, a mounting section for mounting a substrate, connected to an operation tip section of the link mechanism through third left and right arms. A downstream-side pressing mechanism making contact with and pressing a side portion of the substrate toward the link mechanism in accordance with the operation of the link mechanism is provided in an area of the mounting section on the downstream side in the direction of substrate conveyance. An upstream-side pressing mechanism making contact with and pressing the side portion of the substrate in the direction of substrate conveyance in accordance with the operation of the link mechanism is provided in an area of the mounting section on the upstream side in the direction of substrate conveyance. | 11-15-2012 |