Patent application number | Description | Published |
20100004785 | CONTROL DEVICE AND CONTROL METHOD OF PLASMA PROCESSING SYSTEM, AND STORAGE MEDIUM STORING CONTROL PROGRAM - In a control device of a plasma processing system, a communication unit is configured to receive processing information related to a carrier of a next processing lot. A determination unit is configured to determine whether the processing information received by the communication unit has pre-treatment information related to one of the plasma processing devices. When it is determined that the processing information has the pre-treatment information by the determination unit, a generation unit is configured to generate an object for declaring execution of the pre-treatment for the carrier of a next processing lot if a desired condition of transferring of the carrier is satisfied. In addition, if the object is generated by the generation unit, a process executing control unit is configured to start the pre-treatment for the target object in the carrier of a next processing lot without any notification that the carrier reaches a destination plasma processing device. | 01-07-2010 |
20100010658 | CONTROL DEVICE AND CONTROL METHOD OF PLASMA PROCESSING SYSTEM, AND STORAGE MEDIUM STORING CONTROL PROGRAM - In a control device of a plasma processing system, a storage unit is configured to store a reference recipe indicating an order of the plasma processing. An operation unit calculates a state variation value of each of the plasma processing devices by a predetermined timing at a plurality of processing lot intervals. A table generation unit generates an adjusting table for adjusting the reference recipe from the calculated state variation value of each of the plasma processing devices. In addition, a process executing control unit adjusts the reference recipe by using one of the generated adjusting tables for the plasma processing devices by the table generation unit and performs the plasma processing on the target object in the corresponding plasma processing device according to an order of the adjusted reference recipe. | 01-14-2010 |
20100089423 | CLEANING METHOD AND STORAGE MEDIUM - A cleaning method is provided to clean processing chambers of a substrate processing apparatus for transferring substrates included in each of lots to the processing chambers on a lot basis and processing the substrates in the processing chambers simultaneously. The cleaning method includes checking whether a lot is switched to another lot to which different cleaning conditions are applied prior to the processing in the processing chambers, performing a cleaning process on the processing chambers under cleaning conditions of a previous lot by transferring cleaning substrates into the processing chambers when it is determined that a lot is switched to another lot to which different cleaning conditions are applied, and omitting the cleaning process of the processing chambers when it is determined that a lot is switched to another lot to which the same cleaning conditions are applied. | 04-15-2010 |
20100280643 | LOT PROCESSING START DETERMINING METHOD AND CONTROL UNIT - A lot processing start determining method includes: storing, in a memory, processing conditions of each lot in a first substrate vessel and a maximum usable number of dummy substrates in a second substrate vessel; counting the used number the dummy substrates in the second substrate vessel; and calculating the number of dummy substrates required to process all substrates of a next lot in the first substrate vessel based on the processing conditions of each lot which are stored in the memory, adding the calculated number of the dummy substrates of the next lot to the counted used number of the dummy substrates, and determining whether the added value exceeds the maximum usable number of the dummy substrates stored in the memory. The method further includes prohibiting start of processing the next lot when the added value is determined to exceed the maximum usable number of the dummy substrate. | 11-04-2010 |
Patent application number | Description | Published |
20090017280 | ORGANIC-INORGANIC HYBRID COMPOSITION, METHOD FOR PRODUCING THE SAME, MOLDING AND OPTICAL COMPONENT - An organic-inorganic hybrid composition comprising inorganic fine particles having a refractive index of from 1.90 to 3.00, and a thermoplastic resin having a functional group capable of forming a chemical bond with the inorganic fine particles at one or more polymer chain terminals and having a number average molecular weight of from 1,000 to 500,000. The composition has high refraction properties and excellent transparency. | 01-15-2009 |
20090035548 | ORGANIC-INORGANIC HYBRID COMPOSITION, METHOD FOR PRODUCING THE SAME, MOLDING AND OPTICAL COMPONENT - An organic-inorganic hybrid composition comprising inorganic fine particles and a thermoplastic resin having a functional group capable of forming a chemical bond with the inorganic fine particles at a side chain thereof, the composition having a refractive index of 1.60 or more at a wavelength of 589 nm and a light transmittance of 70% or more at a wavelength of 589 nm in terms of the composition having a thickness of 1 mm. The composition has high refraction properties and excellent transparency. | 02-05-2009 |
20100104842 | ORGANIC-INORGANIC HYBRID COMPOSITION - An organic-inorganic hybrid composition comprising a thermoplastic resin and inorganic fine particles, wherein the thermoplastic resin is a resin comprising a repeat unit in which a structure unit represented by the following formula (1) is contained in the main chain of the repeat unit: | 04-29-2010 |
20110135903 | THERMOPLASTIC RESIN, ORGANIC-INORGANIC HYBRID COMPOSITION AND OPTICAL PARTS - An optical part comprising a thermoplastic resin having a recurring unit represented by the following formula (1): | 06-09-2011 |
Patent application number | Description | Published |
20080212905 | Motion Guide Device - A motion guide device having a novel scoop section structure whose scoop section is not likely to break even if a movement member is moved at high speed. A scoop section ( | 09-04-2008 |
20090154849 | MOTION GUIDE DEVICE - Provided is a motion guide device having a scooping portion that is not damaged even when a moving member is moved at high speed. | 06-18-2009 |
20090154850 | MOTION GUIDE DEVICE, RELATIVE MOTION SYSTEM AND DISPLACEMENT ABSORBING MECHANISM - Provided is a motion guide device having a low rigidity in the vertical direction and a low rigidity in the horizontal direction. | 06-18-2009 |
20090169139 | MOTION GUIDE DEVICE AND METHOD OF ASSEMBLING MOTION GUIDE DEVICE - A motion guide device is provided which is able to damp the moving block from vibrating in a direction perpendicular to an axis of the raceway rail. | 07-02-2009 |
20100080496 | MOTION GUIDE DEVICE - Provided is a motion guide device capable of guiding a moving body smoothly without rattle and facilitating separation of the moving body from a main body. The motion guide device includes: a raceway rail having a rolling-element rolling part; a moving block having a rolling-element circulation path including a loaded rolling-element rolling part facing the rolling-element rolling part of the raceway rail and being mounted on the raceway rail movable relative to the raceway rail; a plurality of rolling elements arranged in the rolling-element circulation path of the moving block; and the raceway rail having a mounting member which does not have the rolling-element rolling part and is configured to be mounted onto a counterpart device, and a raceway rail main body which has the rolling-element rolling part and is configured to be mounted on the mounting member detachably. | 04-01-2010 |
20130247700 | ELECTRIC ACTUATOR WITH SHOCK ABSORBING MECHANISM - An electric actuator is capable of easily achieving reduction in weight and size when compared to a hydraulic cylinder device, capable of being used in place of the hydraulic cylinder device, and capable of freely extending in response to a suddenly-applied impact load. An electric actuator converts rotation of an electric motor into advancing/retracting motion of an output rod using a screw shaft and a nut member mounted to the screw shaft. The output rod includes: a drive cylinder, to which the nut member is provided, the drive cylinder being arranged around the screw shaft; and a movable cylinder arranged to overlap the drive cylinder around the screw shaft and freely advancing and retreating with respect to the drive cylinder. The electric actuator further includes a releasing mechanism provided between the drive cylinder and the movable cylinder, for engaging the movable cylinder with the drive cylinder. | 09-26-2013 |
Patent application number | Description | Published |
20120046420 | POLYMER, METHOD FOR PRODUCING POLYMER, RESIN COMPOSITION FOR OPTICAL MATERIAL, SHAPED ARTICLE, OPTICAL MATERIAL, AND LENS - A polymer containing a recurring unit having an aliphatic polycyclic structure, wherein at least two atoms constituting the ring skeleton of the aliphatic polycyclic structure constitute the main chain of the polymer, and the recurring unit has an aliphatic ring containing a sulfonyl group as the constitutive group of the ring skeleton, has high refractivity, high Abbe's number, high-level heat resistance, high-level light transmittance and low water absorption. | 02-23-2012 |
20130131212 | CURABLE RESIN COMPOSITION AND MOLDED ARTICLE - Disclosed is a curable resin composition comprising a polymer (A) that has a main chain comprising carbon atoms and a side chain having a polymerizing unsaturated linking group and has a cyclic structure in the main chain and/or the side chain, and a compound having a polymerizing unsaturated group. The curable resin composition has good optical characteristics, good heat resistance and good moldability. | 05-23-2013 |
20130237630 | SEMI-CURED PRODUCT, CURED PRODUCT AND METHOD OF MANUFACTURING THESE, OPTICAL COMPONENT, CURABLE RESIN COMPOSITION - A heat-resistant cured product is efficiently produced by obtaining a semi-cured product where a curable resin composition containing a (meth)acrylate monomer, a non-conjugated vinylidene group-containing compound and a thermal radical-polymerization initiator is processed by at least one of photoirradiation and heating to give a semi-cured product having a complex viscosity of from 10 | 09-12-2013 |