Patent application number | Description | Published |
20100129539 | SUBSTRATE HOLDER MOUNTING DEVICE AND SUBSTRATE HOLDER CONTAINER CHAMBER - A substrate holder mounting device is provided that is compact and has a simple structure. The substrate holder mounting device according to the present invention is provided with: a first and a second mounting mechanisms ( | 05-27-2010 |
20110052349 | VACUUM PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD - A robot according to this invention includes a driving mechanism, a first arm rotatably connected to the driving mechanism, a second arm rotatably connected to the first arm, and an X-shaped end effector rotatably disposed at the distal end of the second arm. Of the four distal ends of the end effector, two distal ends include holding units which can hold substrates in one direction, and the remaining two distal ends include holding units which can hold substrates in the opposite direction. | 03-03-2011 |
20110168086 | SUBSTRATE HOLDER MOUNTING DEVICE AND SUBSTRATE HOLDER CONTAINER CHAMBER - A substrate holder mounting device is provided that is compact and has a simple structure. The substrate holder mounting device according to the present invention is provided with: a first and a second mounting mechanisms ( | 07-14-2011 |
20120006257 | SUBSTRATE HOLDER STOCKER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE HOLDER MOVING METHOD USING THE SUBSTRATE HOLDER STOCKER DEVICE - A substrate holder stocker device capable of reducing foot print is provided. The device includes: a movable table A which holds a plurality of substrate holders side by side in a plate thickness direction thereof and moves back and forth; a movable table B which is provided parallel to the movable table A and holds a plurality of the substrate holders side by side in a plate thickness direction thereof, and which moves back and forth; and an inter-table transfer mechanism for allowing the substrate holder which is held by one of the movable tables A and B stopped at predetermined positions to be held by the other of the movable tables A and B. | 01-12-2012 |
20140183394 | CONDUCTANCE VALVE AND VACUUM PROCESSING APPARATUS - A conductance valve is configured to be able to adjust the conductance by adjusting the opening degree of an opening formed in part of the wall surface a vacuum vessel. The conductance valve includes a swing arm which is pivotally coupled to a driving portion, and a rectangular valve body which is coupled to the swing arm and is pivotal with respect to it. When the swing arm pivots, the rectangular valve body is pivoted by a predetermined angle. The overhang of the valve body at the closed position of the conductance valve can be reduced. | 07-03-2014 |