Patent application number | Description | Published |
20130044299 | PROJECTION-TYPE PHOTOLITHOGRAPHY SYSTEM USING COMPOSITE PHOTON SIEVE - The present disclosure relates to the field of micro-nano fabrication, and provides a projection-type photolithography system using a composite photon sieve. The system comprises: a lighting system, a mask plate, a composite photon sieve and a substrate, which are arranged in order. The lighting system is adapted to generate incident light and irradiate the mask plate with the incident light. The mask plate is adapted to provide an object to be imaged by the composite photon sieve, and the incident light reaches the composite photon sieve after passing through the mask plate. The composite photon sieve is adapted to perform imaging, by which a pattern on the mask plate is imaged on the substrate. The substrate is adapted to receive an image of the pattern on the mask plate imaged by the composite photon sieve. According to the present disclosure, because the composite photon sieve is used instead of a projection objective lens in a conventional projection-type photolithography system, the advantage of high efficiency in the conventional projection-type photolithography system can be reserved, and also photolithography can be performed in batches rapidly, so that photolithography efficiency can be improved. Meanwhile, costs can be effectively cut down and the system can be reduced in size. | 02-21-2013 |
20140177039 | SUB-WAVELENGTH EXTREME ULTRAVIOLET METAL TRANSMISSION GRATING AND MANUFACTURING METHOD THEREOF - A method of manufacturing a sub-wavelength extreme ultraviolet metal transmission grating is disclosed. In one aspect, the method comprises forming a silicon nitride self-supporting film window on a back surface of a silicon-based substrate having both surfaces polished, then spin-coating a silicon nitride film on a front surface of the substrate with an electron beam resist HSQ. Then, performing electron beam direct writing exposure on the HSQ, developing and fixing to form a plurality of grating line patterns and a ring pattern surrounding the grating line patterns. Then depositing a chrome material on the front surface of the substrate through magnetron sputtering. Then, removing the chrome material inside the ring pattern. Then, growing a gold material on the front surface of the substrate through atomic layer deposition. Lastly, removing the gold material on the chrome material outside the ring pattern as well as on and between the grating line patterns, thereby only retaining the gold material on sidewalls of the grating line patterns. | 06-26-2014 |
20150046834 | INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD - Provided are an information processing method and apparatus being applicable to a first electronic device, comprising establishing a communication link between the first and a second electronic device; displaying a first communication interface; judging whether a predetermined condition is satisfied; and displaying a second communication interface when it is judged that the predetermined condition is satisfied; wherein the second communication interface comprises a first area and a second area, the first and second areas are at least partially overlapped, and the first area comprises a first subarea and/or a second subarea, the second subarea is used for displaying first information acquired by the first electronic device, the first subarea is used for displaying second information acquired by the second electronic device, the second area is used for displaying shared information, and at least a part of the shared information is simultaneously displayed on the first and second electronic device. | 02-12-2015 |
20150104094 | DEFECT DETECTION SYSTEM FOR EXTREME ULTRAVIOLET LITHOGRAPHY MASK - A defect detection system for an extreme ultraviolet lithography mask comprises an extreme ultraviolet light source ( | 04-16-2015 |
Patent application number | Description | Published |
20120148013 | SELF ADJUSTING BEARING USED ON CT GANTRY - A self adjusting bearing for use on a CT gantry is provided. The self adjusting bearing is configured to be mounted on a main frame of the CT gantry and is configured to support a rotating base of the CT gantry wherein the self adjusting bearing includes a roller, a first component, and a second component, the roller is configured to support the rotating base and is rotatably mounted on the first component, the second component is configured to be mounted on the main frame, and the first component and the second component are configured to rotatably engage each other such that they can rotate relative to each other during the mounting of the self adjusting bearing. | 06-14-2012 |
20120155607 | BELT-TYPE TABLE AND CT APPARATUS AND A METHOD FOR OBTAINING CALIBRATION DATA FOR A CT APPARATUS - A belt table is provided. The belt table includes a cradle, and a movement driver set configured to drive the cradle to move, wherein the cradle and the movement driver set are configured to cause at least one of low attenuation and nearly zero attenuation to X-rays along a scan plane. | 06-21-2012 |
20120243661 | DATA ACQUIRED SYSTEM AND CT APPARATUS USING THE SAME - A data acquired system is provided. The data acquired system includes a main structure with a cavity formed therein, the cavity having a bottom for mounting a circuit board with electrical components thereto, a fan assembly disposed on the main structure, and an airflow guide disposed within the cavity and configured to guide airflow from the fan assembly for heat dissipation of the electrical components, the airflow guide positioned at a distance above the electrical components to form a gap between the airflow guide and the electrical components, wherein a sidewall of the cavity is provided with an air vent corresponding to the gap such that the airflow passes through the gap and is discharged from the air vent. | 09-27-2012 |
Patent application number | Description | Published |
20120214068 | GRAPHENE HYBRID MATERIALS, APPARATUSES, SYSTEMS AND METHODS - Graphene based materials are provided in connection with various devices and methods of manufacturing. As consistent with one or more embodiments, an apparatus includes a graphene sheet and a single-crystal structure grown on the graphene sheet, with the graphene sheet and single-crystalline structure functioning as an electrode terminal. In various embodiments, the single-crystalline structure is grown on a graphene sheet, such as by using precursor particles to form nanoparticles at the distributed locations, and diffusing and recrystallizing the nanoparticles to form the single-crystal structure. | 08-23-2012 |
20130189580 | STRONGLY COUPLED INORGANIC-GRAPHENE HYBRID MATERIALS, APPARATUSES, SYSTEMS AND METHODS - Nanocarbon-based materials are provided in connection with various devices and methods of manufacturing. As consistent with one or more embodiments, an apparatus includes a nanocarbon structure having inorganic particles covalently bonded thereto. The resulting hybrid structure functions as a circuit node such as an electrode terminal. In various embodiments, the hybrid structure includes two or more electrodes, at least one of which including the nanocarbon structure with inorganic particles covalently bonded thereto. | 07-25-2013 |
20140102686 | THERMAL EXTRACTION USING RADIATION - In one embodiment of the present disclosure, a device is disclosed comprising a macroscopic thermal body and an extraction structure that is electromagnetically-coupled to the thermal emitting area of the thermal body. The macroscopic thermal body having a thermal emitting area, and the extraction structure configured and arranged to facilitate emission from, or receipt to the thermal emitting area that exceeds a theoretical, Stefan-Boltzmann, emission limit for a blackbody having the same thermal emitting area as the thermal body. | 04-17-2014 |