Guangqing
Guangqing Chen, Fremont, CA US
Patent application number | Description | Published |
---|---|---|
20150185625 | METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET - A method of metrology target design is described. The method includes determining a sensitivity of a parameter of a metrology target design to a perturbation of a process parameter for forming, or measuring the formation of, the metrology target, and determining a robustness of the metrology target design based on the sum of the sensitivity multiplied by the perturbation of at least one of the process parameters. | 07-02-2015 |
20150185626 | METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET - A system to, and a method to, select a metrology target for use on a substrate including performing a lithographic simulation for a plurality of points on a process window region for each proposed target, identifying a catastrophic error for any of the plurality of points for each proposed target, eliminating each target having a catastrophic error at any of the plurality of points, performing a metrology simulation to determine a parameter over the process window for each target not having a catastrophic error at any of the plurality of points, and using the one or more resulting determined simulated parameters to evaluate target quality. | 07-02-2015 |
20150186581 | METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET - A method of metrology target design is described. The method includes determining a sensitivity of a parameter for a metrology target design to an optical aberration, determining the parameter for a product design exposed using an optical system of a lithographic apparatus, and determining an impact on the parameter of the metrology target design based on the parameter for the product design and the product of the sensitivity and one or more of the respective aberrations of the optical system. | 07-02-2015 |
20150186582 | METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET - A method of metrology target design is described. The method includes providing a range or a plurality of values for design parameter of a metrology target and by a processor, selecting, by solving for and/or sampling within the range or the plurality of values for the design parameters, a plurality of metrology target designs having one or more design parameters meeting a constraint for a design parameter of the metrology target. | 07-02-2015 |
Guangqing Li, Foothill Ranch, CA US
Patent application number | Description | Published |
---|---|---|
20140116932 | Novel Liquid Chromatographic Media and Methods of Synthesizing the Same - The present invention provides a bisamide-containing novel liquid chromatographic media and method of synthesizing the same. A novel polar bisamide functional group, which can form hydrogen bonds or ion pairs with residual silanols on the surface of silica gel, is used as the bonded phase on the surface of silica gel to better shield the activity of silanols and to eliminate the influence of residual silanol groups. Compared with conventional C18 columns, these novel bonded phases have different selectivity; they can work not only in 0 to 100% water but also in 0 to 100% organic mobile phase. In particular, they exhibit good peak shapes and resolutions for polar and basic compounds and have good stability within a very wide pH range. These properties make the new stationary phases a useful complement to conventional C18 columns for a variety of HPLC applications. | 05-01-2014 |
Guangqing Zhang, Shenzhen CN
Patent application number | Description | Published |
---|---|---|
20140071638 | INTEGRAL DATA LINE STORAGE STRUCTURE OF DIGITAL DEVICE - An integral data line storage structure of a digital device relates to the technical field of digital devices, and in particular, to improvements of a data connection line storage structure of a digital device such as a mobile hard disk, a multimedia player, a DV, a digital camera, a mobile phone, a tablet computer, an MP4, or a recorder pen, so as to solve the technical disadvantage that the data connection line matching the existing digital device is inconvenient to carry and store. The integral data line storage structure of a digital device includes a digital device body and a data connection line connected to the digital device body. The data connection line is of a flat shape through injection molding, and a wiring groove for receiving the data connection line when not used is disposed on the digital device body. When not used, the data connection line may be received in the wiring groove, so that the data connection line and the digital device body form a unity, which is convenient to carry, has a compact overall structure, and achieves good dustproof effect. | 03-13-2014 |