Patent application number | Description | Published |
20080315121 | Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector - The invention relates to a radiation detector, a method of manufacturing a radiation detector and a lithographic apparatus comprising a radiation detector. The radiation detector has a radiation-sensitive surface. The radiation-sensitive surface is sensitive for radiation with a wavelength between 10-200 nm. The radiation detector has a silicon substrate, a dopant layer, a first electrode and a second electrode. The silicon substrate is provided in a surface area at a first surface side with doping profile of a certain conduction type. The dopant layer is provided on the first surface side of the silicon substrate. The dopant layer has a first layer of dopant material and a second layer. The second layer is a diffusion layer which is in contact with the surface area at the first surface side of the silicon substrate. The first electrode is connected to dopant layer. The second electrode is connected to the Silicon substrate. | 12-25-2008 |
20090021717 | Radiation Detector, Method of Manufacturing a Radiation Detector, and Lithographic Apparatus Comprising a Radiation Detector - A radiation detector, a method of manufacturing a radiation detector, and a lithographic apparatus comprising a radiation detector. The radiation detector has a radiation sensitive surface. The radiation sensitive surface is sensitive to radiation wavelengths between 10-200 nm and charged particles. The radiation detector has a silicon substrate, a dopant layer, a first electrode, and a second electrode. The silicon substrate is provided in a surface area at a first surface side with doping profile of a certain conduction type. The dopant layer is provided on the first surface side of the silicon substrate. The dopant layer has a first layer of dopant material and a second layer. The second layer is a diffusion layer in contact with the surface area at the first surface side of the silicon substrate. The first electrode is connected to dopant layer. The second electrode is connected to the silicon substrate. | 01-22-2009 |
20120268722 | Radiation Detector, Method of Manufacturing a Radiation Detector, and Lithographic Apparatus Comprising a Radiation Detector - In one an embodiment, there is provided an assembly comprising at least one detector. Each of the at least one detector includes a substrate having a doped region of a first conduction type, a layer of dopant material of a second conduction type located on the substrate, a diffusion layer formed within the substrate and in contact with the layer of dopant material and the doped region of the substrate, wherein a doping profile, which is representative of a doping material concentration of the diffusion layer, increases from the doped region of the substrate to the layer of dopant material, a first electrode connected to the layer of dopant material, and a second electrode connected to the substrate. The diffusion layer is arranged to form a radiation sensitive surface. | 10-25-2012 |
Patent application number | Description | Published |
20090026137 | Liquid filtration media - A liquid filter with a composite medium that has a nanoweb adjacent to and optionally bonded to a microporous membrane. The membrane is characterized by an LRV value of 3.7 at a rated particle size, and the nanoweb has a fractional filtration efficiency of greater than 0.1 at the rated particle size of the membrane. The nanoweb also has a thickness efficiency ratio of greater than 0.0002 at that efficiency. The nanoweb acts to provide depth filtration to the membrane, prefilters particles and extends the lifetime of the membrane. | 01-29-2009 |
20100038307 | FILTRATION MEDIA FOR LIQUID FILTRATION - Filtration media including at least one layer of nanofibers having average diameters less than 1000 nanometers with optional scrim layer(s) are disclosed for filtering particulate matter in liquid. The media achieve flow rates of at least 0.055 L/min/cm | 02-18-2010 |
20110033608 | PROCESS FOR MAKING COATED, WATER-SWELLABLE HYDROGEL MICROSPHERES - A process for coating water-swellable hydrogel microspheres with various coating materials is described. The coating process described herein is a fluidized bed process, which utilizes inert, cofluidization particles to aid the fluidization of the microspheres. The use of the cofluidization particles increases the efficiency of the coating process and improves the quality of the coating obtained. | 02-10-2011 |
20110042316 | LIQUID FILTRATION MEDIA - A liquid filter with a composite medium that has a nanoweb adjacent to and optionally bonded to a microporous membrane. The membrane is characterized by an LRV value of 3.7 at a rated particle size, and the nanoweb has a fractional filtration efficiency of greater than 0.1 at the rated particle size of the membrane. The nanoweb also has a thickness efficiency ratio of greater than 0.0002 at that efficiency. The nanoweb acts to provide depth filtration to the membrane, prefilters particles and extends the lifetime of the membrane. | 02-24-2011 |