Patent application number | Description | Published |
20100245566 | SYSTEM AND METHOD FOR INSPECTION - Method and inspection system. The inspection system includes: (i) a stage, for supporting an inspected object and for moving the inspected object by a movement that is characterized by speed variations; (ii) a signal generator, for generating triggering pulses at a fixed frequency regardless of the speed variations; (iii) a stage location generator, for providing location information indicative of a location of the stage at points of time that are determined by the triggering pulses; (iv) a strobe illuminator for illuminating areas of the inspected object in response to the triggering pulses; (v) a camera for acquiring images of areas of the inspected object in response to the triggering pulses; wherein overlaps between the images of the areas of the inspected object are characterized by overlap variations; and (vi) a processor for associating location information to the acquired images. | 09-30-2010 |
20110255097 | METHOD AND SYSTEM FOR EVALUATING A HEIGHT OF STRUCTURES - A system and method for measuring a height difference between an extremum portion of a microscopic structure and a background element, the method includes detecting, by a sensor, first and second interference patterns by a sensor; wherein the first and second interference patterns are generated by illuminating an area of a sample by a first light beam and directing towards the sensor a first reference light beam of a first wavelength (w | 10-20-2011 |
20120105869 | THREE DIMENSIONAL INSPECTION AND METROLOGY BASED ON SHORT PULSES OF LIGHT - A system and a method may be provided. The system may include an illumination module arranged to illuminate an object by short pulses of light that form at least one spot on the object; a collection module that comprises a sensor that is arranged to generate detection signals representative of three dimensional information about the object: and a mechanical stage that is arranged to introduce a movement between the object and at least one of the collection module and the illumination module. | 05-03-2012 |
20120274946 | METHOD AND SYSTEM FOR EVALUATING A HEIGHT OF STRUCTURES - A method and system for interference based detection of height (H) of a microscopic structure. Wherein N*(Ws/2)>H>(N−1)*(Ws/2); wherein N is a positive integer, w | 11-01-2012 |
20130044208 | SYSTEM AND A METHOD FOR INSEPCTING AN OBJECT USING A HYBRID SENSOR - A method and an inspection system may be provided. The inspection system may include (a) a hybrid sensor that may include a monochromatic portion that is arranged to obtain a monochromatic image of a first area of an object; a multiple-color portion that is arranged to obtain a multi-colored image of a second area of the object; wherein the monochromatic portion comprises monochromatic sensing elements that sense radiation of a same frequency band; wherein the multiple-color portion comprises color sensing elements of different types, wherein different types of color sensing elements are associated with different frequency bands; (b) a storage element arranged to store the monochromatic image and the multiple-color image; and (c) a defect detection module arranged to detect defects by processing at least one of the monochromatic image and the multiple-color image. | 02-21-2013 |
20130050468 | INSPECTION SYSTEM AND A METHOD FOR INSPECTING MULTIPLE WAFERS - A method and an inspection system that includes: a multi wafer support device arranged to concurrently support multiple wafers; optics arranged to acquire images of the multiple wafers supported by the multi wafer support element; | 02-28-2013 |
20130170712 | METHOD AND SYSTEM FOR MEASURING BUMPS BASED ON PHASE AND AMPLITUDE INFORMATION - A device for measuring a height of a microscopic structure, the device may include: a storage circuit arranged to store information that comprises amplitude information and phase information, wherein the information is indicative of a shape and a size of the microscopic structure; a mask generation circuit arranged to threshold pixels of the amplitude information to provide a mask that comprises masked amplitude pixels; a phase information circuit arranged to apply the mask on the phase information to provide masked phase pixels; select, out of the masked phase pixels, selected phase pixels that correspond to a phase criterion, the selected phase pixels have selected phase pixels attribute values; find, out of the phase information, elected phase pixels that have the selected phase pixel attribute values; and a height calculation circuit arranged to generate a height measurement result based the elected phase pixels. | 07-04-2013 |
20140104410 | SYSTEM AND A METHOD FOR INSEPCTING AN OBJECT USING A HYBRID SENSOR - A system, that includes a hybrid sensor that comprises: a monochromatic portion that is arranged to obtain a monochromatic image of a first area of an object; a multiple-color portion that is arranged to obtain a multi-colored image of a second area of the object; wherein the monochromatic portion comprises monochromatic sensing elements that sense radiation of a same frequency band; wherein the multiple-color portion comprises color sensing elements of different types, wherein different types of color sensing elements are associated with different frequency bands. | 04-17-2014 |