Patent application number | Description | Published |
20080270048 | METHOD AND APPARATUS FOR MODIFYING INTERACTIONS BETWEEN AN ELECTRICAL GENERATOR AND A NONLINEAR LOAD - A method and apparatus for modifying interactions between an electrical generator and a nonlinear load is described. One illustrative embodiment receives a main control signal at a control input of an engine of the electrical generator, the main control signal controlling at least one of output power, output current, and output voltage delivered by the electrical generator to the nonlinear load, the engine being one of a power amplifier and a converter; measures the impedance of the nonlinear load; and feeds to the electrical generator a compensation signal corresponding to the measured impedance, the compensation signal rendering a transfer function of the output power of the electrical generator with respect to the main control signal substantially insensitive to variations in the impedance of the nonlinear load to stabilize the output power of the electrical generator. | 10-30-2008 |
20090278598 | METHOD AND APPARATUS FOR MODIFYING INTERACTIONS BETWEEN AN ELECTRICAL GENERATOR AND A NONLINEAR LOAD - A method and apparatus for modifying interactions between an electrical generator and a nonlinear load is described. One illustrative embodiment receives a main control signal at a control input of an engine of the electrical generator, the main control signal controlling at least one of output power, output current, and output voltage delivered by the electrical generator to the nonlinear load, the engine being one of a power amplifier and a converter; measures the impedance of the nonlinear load; and feeds to the electrical generator a compensation signal corresponding to the measured impedance, the compensation signal rendering a transfer function of the output power of the electrical generator with respect to the main control signal substantially insensitive to variations in the impedance of the nonlinear load to stabilize the output power of the electrical generator. | 11-12-2009 |
20100168932 | DUAL-MODE CONTROL OF A POWER GENERATOR - An improved method and apparatus for managing an application of power with a power generator to a load, the apparatus comprising a power generator configured to apply power to the load; a controller coupled to the power generator, the controller configured to control a plurality of parameters to optimize operational performance of the power system in response to indicia of operational performance of the power system; and a performance assessor, coupled to the power generator and coupled to the controller, the performance assessor configured to provide the indicia of operational performance of the power system to the controller, where the indicia of the operational performance are relative to a plurality of metrics indicative of operational efficiency of the power system. | 07-01-2010 |
20100174420 | METHOD AND APPARATUS FOR ADJUSTING THE REFERENCE IMPEDANCE OF A POWER GENERATOR - A method and apparatus for allowing the user of a power generator coupled to a time-varying load, to define an alternative reference impedance to enable on or more metrics to be provided relative to the alternative reference impedance. The metrics, for example, may provide indicia of performance of the power generator system. One illustrative embodiment provides a power delivery system that applies power to a plasma chamber to create a plasma therein; determines a reference impedance of the plasma at an operating condition; and controls the power delivery system based on the determined reference impedance. | 07-08-2010 |
20100283395 | MULTI-FEED RF DISTRIBUTION SYSTEMS AND METHODS - Improved power distribution architectures for the uniform delivery of single frequency RF power to plasma chambers are disclosed. The architectures include feeding into multiple points across a single large-area electrode, multiple electrodes driving a common plasma discharge as well as multiple coils driving a common plasma discharge. The time-averaged electromagnetic field distribution may be controlled using an array of generator and match (delivery) systems, one of which may be capable of absorbing net power and presenting controlled impedance to the plasma load. In variations, an M+N port network (with M the number of generators and N the number of feed points on the electrode) may be implemented to level the power required from each generator while maintaining a desired field strength distribution. | 11-11-2010 |
20110148303 | EFFICIENT ACTIVE SOURCE IMPEDANCE MODIFICATION OF A POWER AMPLIFIER - A system, method, and apparatus for stabilizing interactions between an electrical generator and a nonlinear load are described. One illustrative embodiment includes an impedance element that is coupled to an output of the generator and a power source coupled to the impedance element. The power source applies power to, or across, the impedance element so as to reduce energy loss that would ordinarily occur due to energy dissipation by way of the impedance element. In many variations, the power source operates within a defined bandwidth so that a stabilizing effect is achieved outside of this bandwidth. | 06-23-2011 |
20120218042 | METHOD AND APPARATUS FOR MODIFYING THE SENSITIVITY OF AN ELECTRICAL GENERATOR TO A NONLINEAR LOAD - A method and generator for modifying interactions between a load and the generator are described. The method includes applying output power to the load using a power amplifier, controlling a level of the output power responsive to a power control setting, and adjusting a conduction angle of the power amplifier to reduce a level of sensitivity of the power amplifier to variations of an impedance of the load. The generator includes a compensation subsystem coupled to the power amplifier that controls a conduction angle of the power amplifier to enable a sensitivity of the power amplifier to be adjusted. | 08-30-2012 |
20140155008 | FREQUENCY TUNING SYSTEM AND METHOD FOR FINDING A GLOBAL OPTIMUM - A generator and method for tuning the generator are disclosed. The method includes setting the frequency of power applied by the generator to a current best frequency and sensing a characteristic of the power applied by the generator. A current best error based upon the characteristic of the power is determined, and the frequency of the power at the current best frequency is maintained for a main-time-period. The frequency of the power is then changed to a probe frequency and maintained at the probe frequency for a probe-time-period, which is less than the main-time-period. The current best frequency is set to the probe frequency if the error at the probe frequency is less than the error at the current best frequency. | 06-05-2014 |
20140167835 | Three Terminal PIN Diode - This disclosure describes a switch having a collector, base, emitter, and an intrinsic region between the collector and base. The intrinsic region increases the efficiency of the switch and reduces losses. The collector, base, and emitter each have respective terminals, and an AC component of current passing through the base terminal is greater than an AC component of current passing through the emitter terminal. Additionally, in an on-state a first alternating current between the base and collector terminals is greater than a second alternating current between the collector and emitter terminals. In other words, AC passes primarily between collector and base as controlled by a DC current between the base and emitter. | 06-19-2014 |
20140239813 | RELIABLE PLASMA IGNITION AND REIGNITION - This disclosure describes systems, methods, and apparatus for ensuring desirable ignition of plasma in a plasma processing chamber via providing increased instantaneous power during an ignition period for both continuous wave (CW) and pulsed power delivery. The systems, methods, and apparatus can be applied to both initial ignition of a plasma and reignition of a plasma where pulsed power delivery leads to periodic extinction of the plasma. | 08-28-2014 |