Patent application number | Description | Published |
20130078057 | LOAD LOCK FAST PUMP VENT - A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone. | 03-28-2013 |
20130089396 | REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM - In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool. | 04-11-2013 |
20140341679 | ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM - A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station. | 11-20-2014 |
Patent application number | Description | Published |
20120060662 | AUTOMATED STICK-FRAME SYSTEM - A automated stick cutting system is provided adapted to produce stick-frame construction components from material for building construction. The automated stick cutting system has a frame having an in-feed portion and an out-feed portion. A saw is adapted to cut the material, the saw coupled to the frame. An in-feed drive is coupled to the frame, the in-feed drive adapted to accept the material from the in-feed portion and feed the material to the saw. A position detector is coupled to the frame, the position detector adapted to track a position of the material relative to the in-feed drive. An out-feed drive is adapted to accept the material uncut from the in-feed drive, the out-feed drive adapted to accept the material cut from the saw and feed cut material to the out-feed portion. An edge detector is adapted to detect a leading edge of the material when being fed to the saw by the in-feed drive. The position detector and the edge detector cooperate with operation of the saw to meter lengths of the material through the in-feed drive and to cut a predetermined length of the material with the saw. | 03-15-2012 |
20120066019 | CONSTRUCTION CONTROL SYSTEM - A building material and workflow control system adapted to manage workflow associated with a building of a construction project at a job site. The building material and workflow control system has a server having a processor and a database. The processor is programmed to identify a construction sequence of the construction project. The processor is further programmed to identify kits of assets and materials needed to execute steps of the construction sequence. The processor is further programmed to identify and implement assembly features on the materials associated with use of the assets needed to execute steps of the construction sequence. The processor is further programmed to provide and stage the kits of assets and materials from a source to the jobsite utilizing real time dynamic knowledge of an erection state of the building at the job site. | 03-15-2012 |
20120174525 | CONSTRUCTION FASTENING AND LOCATING SYSTEM AND METHOD - A construction fastening system adapted to fasten sheathing to framing with one or more fasteners. The fastening system has a frame and a fastening actuator coupled to the frame. The fastening actuator has a fastener reservoir portion and a fastener insertion portion. A position detector is coupled to the frame, the position detector connected to a controller, the position detector adapted to detect a position of the system. A trigger is coupled to the fastening actuator, the trigger coupled to the controller. The fastening actuator is adapted to insert a fastener from the reservoir into the sheathing upon actuation of the trigger. The controller is adapted to actuate the trigger upon detection of a predetermined change in the position of the system. | 07-12-2012 |
20120174527 | FRAME CONSTRUCTION METHOD AND APPARATUS - A method of framing a structure at a job site. The method of framing has a step of providing a framing material kit having framing components, the framing components being pre cut to length and size to form at least a portion of the structure, the framing components having mating pins and mating sockets that mate during assembly of the structure. A step of assembling mating framing components from the framing components to form the portion of the structure by mating the mating pins and the mating sockets and fastening the mating framing components together is provided. | 07-12-2012 |
20120180424 | CONSTRUCTION MATERIAL HANDLING METHOD AND APPARATUS - A method of building a structure at a job site, the method comprising dividing the structure into multiple substructures, the multiple substructures defining the structure; selecting at least one construction automation module adapted to assist in assembly of the structure at the job site, the at least one construction automation module provided at the job site; defining a material kit for at least one substructure, the material kit having components; identifying automation assisted components of the material kit as one or more of the components identified to be handled by the at least one construction automation module; fabricating the material kit for the at least one substructure is provided, the components of the material kit being pre-cut to length and size; delivering the material kit to the job site; supplying the automation assisted components of the material kit to the automation component; and assembling the substructure using the automation component. | 07-19-2012 |
20130079913 | METHODS AND SYSTEMS FOR SEMICONDUCTOR FABRICATION WITH LOCAL PROCESSING MANAGEMENT - A method and system of semiconductor fabrication are provided. In the method, an equipment unit performs a process on substrates to form processed substrates. The equipment unit also communicates processing data to a local scheduler. The local scheduler schedules removal of processed substrates from the equipment unit and delivery of unprocessed substrates to the equipment unit based on the processing data. | 03-28-2013 |
20130343844 | OVERHEAD SUBSTRATE HANDLING AND STORAGE SYSTEM - A material handling system includes an overhead rack defining a plurality of storage positions. The overhead rack defines at least one interior window devoid of storage locations. First and second side rails are disposed above the overhead rack. A first cross rail is movably coupled to the first and second side rails. A first transport vehicle movably is coupled to the first cross rail and operable to descend below the overhead rack through the at least one interior window. | 12-26-2013 |
20140178160 | OVERHEAD SUBSTRATE HANDLING AND STORAGE SYSTEM - A material handling system includes an overhead rack defining a plurality of storage positions. The overhead rack defines at least one interior window devoid of storage locations. First and second side rails are disposed above the overhead rack. A first cross rail is movably coupled to the first and second side rails. A first transport vehicle movably is coupled to the first cross rail and operable to descend below the overhead rack through the at least one interior window. | 06-26-2014 |
20140308108 | SYSTEM FOR SEPARATELY HANDLING DIFFERENT SIZE FOUPS - A system for separately handling different size FOUPs includes an end effector having a surface thereon for supporting a FOUP. The end effector and surface is configured to support different size FOUPs. A fixture or means for engaging and maintaining a FOUP, of different size FOUPs, included to position and maintain each of a different size FOUP on the end effector during transport thereof. A shelf is configured to receive each of said different size FOUPs. The end effector is thus capable of transporting either a first size FOUP or a second, smaller size FOUP. | 10-16-2014 |
20140360531 | WAFER CARRIER PURGE APPARATUSES, AUTOMATED MECHANICAL HANDLING SYSTEMS INCLUDING THE SAME, AND METHODS OF HANDLING A WAFER CARRIER DURING INTEGRATED CIRCUIT FABRICATION - A wafer carrier purge apparatus, an automated mechanical handling system, and a method of handling a wafer carrier during integrated circuit fabrication are provided. The wafer carrier purge apparatus includes a purge plate adapted for insertion into a carrier storage position. The purge plate includes a gas port and a gas nozzle in fluid communication with the gas port. The gas port receives a gas flow. The gas nozzle is adapted to contact an inlet port of a wafer carrier. The purge plate further includes a vacuum port and a vacuum nozzle in fluid communication with the vacuum port, spaced from the gas nozzle. The vacuum nozzle is adapted to capture gas that escapes from the wafer carrier through an outlet port of the wafer carrier. The purge plate is separate and removable from the carrier storage position. | 12-11-2014 |