Patent application number | Description | Published |
20090080761 | Simultaneous wafer ID reading - The present invention discloses apparatuses and methods for simultaneous viewing and reading top and bottom images from a workpiece. The present ID reader can comprise an enclosure covering a top and bottom section of the workpiece with optical elements to guide the light from the workpiece images to a camera. The optical element can be disposed to receive images from a high angle with respect to the surface of the workpiece. The present ID reader can further comprise a light source assembly to illuminate the image. The light source assembly can utilize a coaxial light path with the images, preferably for bright field illumination. The light source assembly can also utilize a non-coaxial light path, preferably for dark field illumination. In an embodiment, the simultaneous images reaching the camera are separate into two distinct images on two different sections of the camera. In another embodiment, the simultaneous images reaching the camera are superimposed into one image on the camera. | 03-26-2009 |
20090081007 | Transfer mechanism with multiple wafer handling capability - An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly can comprise a multiple end effector for moving a plurality of workpieces, a single end effector for moving a single workpiece, a rotation chuck incorporated on the robot body to provide alignment capability, and an optional identification subsystem for identify the object during transport. The present invention robot assembly can be used in a sorter or stocker equipment, in processing equipment, and a transfer system. | 03-26-2009 |
20090082895 | Integrated wafer transfer mechanism - An integrated high speed robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly typically comprises an end effector for moving the object in and out of a chamber, a rotation chuck incorporated on the robot body to provide centering and theta alignment capability, and an optional identification subsystem for identifying the object during transport. The present invention also discloses a transfer robot system, employing a plurality of integrated robot assemblies; a transfer system where a transfer robot system can service a plurality of connected chambers such as FOUP or FOSB; a front end module (FEM); or a sorter system. Through the use of these incorporated capabilities into the moving robot, single object transfer operations can exceed 500 parts per hour. | 03-26-2009 |
20090255362 | Clean transfer robot - A robot with improved cleanliness for use in a clean environment is disclosed, having a uniform flow through the open interface between the clean environment and the interior of the robot housing, passing the particle generation area to an exhaust port, keeping the particles from the clean environment. The uniform flow reduces or eliminates the back flow, and further allows the scalability of the open interface to prevent particles generated from moving mechanisms within the robot housing to contaminate the clean environment. The uniform flow can be established by designing the flow dynamic, centering the exhaust port, or by restricting the flow along the elongated slot, for example, by uniformly restricting the flow along the elongated slot, or by implementing a restrictor along the elongated slot. | 10-15-2009 |
20130021465 | Simultaneous wafer ID reading - The present invention discloses apparatuses and methods for simultaneous viewing and reading top and bottom images from a workpiece. The present ID reader can comprise an enclosure covering a top and bottom section of the workpiece with optical elements to guide the light from the workpiece images to a camera. The optical element can be disposed to receive images from a high angle with respect to the surface of the workpiece. The present ID reader can further comprise a light source assembly to illuminate the image. The light source assembly can utilize a coaxial light path with the images, preferably for bright field illumination. The light source assembly can also utilize a non-coaxial light path, preferably for dark field illumination. | 01-24-2013 |
20130028691 | Transfer mechanism with multiple wafer handling capability - An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly can comprise a multiple end effector for moving a plurality of workpieces, a single end effector for moving a single workpiece, a rotation chuck incorporated on the robot body to provide alignment capability, and an optional identification subsystem for identify the object during transport. The present invention robot assembly can be used in a sorter or stocker equipment, in processing equipment, and a transfer system. | 01-31-2013 |
20140298946 | Clean Transfer Robot - A robot with improved cleanliness for use in a clean environment is disclosed, having a uniform flow through the open interface between the clean environment and the interior of the robot housing, passing the particle generation area to an exhaust port, keeping the particles from the clean environment. The uniform flow reduces or eliminates the back flow, and further allows the scalability of the open interface to prevent particles generated from moving mechanisms within the robot housing to contaminate the clean environment. The uniform flow can be established by designing the flow dynamic, centering the exhaust port, or by restricting the flow along the elongated slot, for example, by uniformly restricting the flow along the elongated slot, or by implementing a restrictor along the elongated slot. | 10-09-2014 |
Patent application number | Description | Published |
20120219121 | SLIDING COUNTERBALANCED C-ARM POSITIONING DEVICES AND METHODS FOR USING SUCH DEVICES - Systems and methods for making and using sliding counterbalanced C-arm positioning devices are described. In such systems and methods, each C-arm positioning device includes a C-arm X-ray device, a linear bearing rail, a linear bearing block, and a counterbalance mechanism. Generally, the C-arm is connected to the linear bearing block, which, in turn, is slidably coupled to the bearing rail to allow the bearing block and C-arm to slide up and down on the rail. The counterbalance mechanism can apply a force to the bearing block to counterbalance the weight of the C-arm and the bearing block. Thus, the described C-arm positioning device can allow a user to easily raise or lower the C-arm with relatively little effort. While some implementations of the C-arm positioning device are connected to mobile support structure, other implementations of the C-arm positioning device are mounted to a fixed support structure. Other implementations are also described. | 08-30-2012 |
20130044860 | SYSTEMS AND METHODS FOR MAKING AND USING MULTI-BLADE COLLIMATORS - Systems and methods for making and using a multi-blade collimator device are described herein. The collimator device can include a base member, a rotational member, and multiple X-ray-attenuating blades that fit together to define an aperture. The blades are typically disposed between the base member and rotational member. Additionally, the blades can be mechanically connected to or interfaced with the base member and the rotational member so that when the rotational member is rotated with respect to the base member, the blades move and cause the aperture to change in size. The aperture can be any shape, including polygonal, square, or rectangular. While the aperture's size can be increased and decreased, the shape and orientation of the aperture can remain substantially constant. The collimator can contain a single layer of blades or multiple layers of blades. Other embodiments are described. | 02-21-2013 |
20130223598 | Sliding Counterbalanced C-Arm Positioning Devices and Methods for Using Such Devices - Systems and methods for making and using sliding counterbalanced C-arm positioning devices are described. In such systems and methods, each C-arm positioning device includes a C-arm X-ray device, a linear bearing rail, a linear bearing block, and a counterbalance mechanism. Generally, the C-arm is connected to the linear bearing block, which, in turn, is slidably coupled to the bearing rail to allow the bearing block and C-arm to slide up and down on the rail. The counterbalance mechanism can apply a force to the bearing block to counterbalance the weight of the C-arm and the bearing block. Thus, the described C-arm positioning device can allow a user to easily raise or lower the C-arm with relatively little effort. While some implementations of the C-arm positioning device are connected to mobile support structure, other implementations of the C-arm positioning device are mounted to a fixed support structure. Other implementations are also described. | 08-29-2013 |
20130272499 | SYSTEMS AND METHODS FOR CONTROLLING X-RAY IMAGING SYSTEMS - Systems and methods for controlling an X-ray imaging system are described. The systems and methods typically include a support arm with a first end and a second end. The first end of the support arm connects to an articulating arm assembly and the second end of the support arm pivotally attaches to an X-ray imaging arm at a pivot joint so that the pivot joint functions as an axis of orbital rotation for the X-ray imaging arm. One or more controls for the X-ray imaging system are disposed on the support arm for the X-ray imaging arm. The controls can therefore remain stationary while the X-ray imaging arm rotates orbitally. The support arm can include a single member or a double member and one or more controls can be disposed on each member of the support arm. Other embodiments are also described. | 10-17-2013 |